A systematic investigation of the microstructure of CrA1CxN1-x coatings as a function of carbon contents was conducted. Quaternary CrA1CxN1-x coatings were deposited on Si wafers by a hybrid coating system combining a...A systematic investigation of the microstructure of CrA1CxN1-x coatings as a function of carbon contents was conducted. Quaternary CrA1CxN1-x coatings were deposited on Si wafers by a hybrid coating system combining an arc-ion plating technique and a DC reactive magnetron sputtering technique using Cr and AI targets in the Ar/N2/CH4 gaseous mixture. The effect of carbon content on microstructure of CrA1C^N~ x coatings was investigated with instrumental analyses of X-ray diffraction, X-ray photoelectron, and high-resolution transmission electron microscopy. The results show that the carbon content of CrA1CxN1-x coatings linearly increases with increasing CH4/（CH4/N2） gas flow rate ratio. The surface roughness of the CrA1CxN1-x coating layer decreases with the increase of carbon content.展开更多
基金Project supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, KoreaProject (2010-0001-226) supported by NCRC(National Core Research Center) Program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology
文摘A systematic investigation of the microstructure of CrA1CxN1-x coatings as a function of carbon contents was conducted. Quaternary CrA1CxN1-x coatings were deposited on Si wafers by a hybrid coating system combining an arc-ion plating technique and a DC reactive magnetron sputtering technique using Cr and AI targets in the Ar/N2/CH4 gaseous mixture. The effect of carbon content on microstructure of CrA1C^N~ x coatings was investigated with instrumental analyses of X-ray diffraction, X-ray photoelectron, and high-resolution transmission electron microscopy. The results show that the carbon content of CrA1CxN1-x coatings linearly increases with increasing CH4/（CH4/N2） gas flow rate ratio. The surface roughness of the CrA1CxN1-x coating layer decreases with the increase of carbon content.
