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Analysis of displacement damage effects on the charge-coupled device induced by neutrons at Back-n in the China Spallation Neutron Source 被引量:2
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作者 薛院院 王祖军 +9 位作者 陈伟 郭晓强 姚志斌 何宝平 聂栩 赖善坤 黄港 盛江坤 马武英 缑石龙 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第7期435-442,共8页
Displacement damage effects on the charge-coupled device(CCD)induced by neutrons at the back-streaming white neutron source(Back-n)in the China Spallation Neutron Source(CSNS)are analyzed according to an online irradi... Displacement damage effects on the charge-coupled device(CCD)induced by neutrons at the back-streaming white neutron source(Back-n)in the China Spallation Neutron Source(CSNS)are analyzed according to an online irradiation experiment.The hot pixels,random telegraph signal(RTS),mean dark signal,dark current and dark signal non-uniformity(DSNU)induced by Back-n are presented.The dark current is calculated according to the mean dark signal at various integration times.The single-particle displacement damage and transient response are also observed based on the online measurement data.The trends of hot pixels,mean dark signal,DSNU and RTS degradation are related to the integration time and irradiation fluence.The mean dark signal,dark current and DSNU2 are nearly linear with neutron irradiation fluence when nearly all the pixels do not reach saturation.In addition,the mechanisms of the displacement damage effects on the CCD are demonstrated by combining the experimental results and technology computer-aided design(TCAD)simulation.Radiation-induced traps in the space charge region of the CCD will act as generation/recombination centers of electron-hole pairs,leading to an increase in the dark signal. 展开更多
关键词 displacement damage effects charge-coupled device(CCD) China Spallation Neutron Source(CSNS) MECHANISMS technology computer-aided design(TCAD)
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Investigating the Thermal Stress of Millisecond Pulsed Laser Irradiation on Charge-Coupled Devices 被引量:1
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作者 Chunxu Jiang Yong Tan +3 位作者 Bo Peng Guangyong Jin Hongxing Cai Zhong Lv 《Journal of Applied Mathematics and Physics》 2020年第11期2557-2568,共12页
<div style="text-align:justify;"> In this study, a two-dimensional model describing thermal stress on a charge-coupled device (CCD) induced by ms laser pulses was examined. Considering the nonlinearity... <div style="text-align:justify;"> In this study, a two-dimensional model describing thermal stress on a charge-coupled device (CCD) induced by ms laser pulses was examined. Considering the nonlinearity of the CCD’s material parameters and the melting phase transition process of aluminum electrode materials was considered by using equivalent specific heat capacity method, the physical process where a laser pulse irradiating a CCD pixel array was simulated using COMSOL Multiphysics software. The temperature field and thermal stress field were calculated and analyzed. In order to clarify the mechanism producing damage on the CCD detector, Raman spectra from silicon were measured with a micro-Raman spectrometer to determine stress change in the CCD chip. The procedure presented herein illustrates a method for evaluating strain in a CCD after laser irradiation. </div> 展开更多
关键词 Millisecond Pulsed Laser charge-coupled Device Thermal Stress Raman Spectroscopy
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Detailed characterization of polycapillary focusing x-ray lenses by a charge-coupled device detector and a pinhole
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作者 Xue-Peng Sun Shang-Kun Shao +2 位作者 Hui-Quan Li Tian-Yu Yuan Tian-Xi Sun 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第12期137-144,共8页
A method to measure the detailed performance of polycapillary x-ray optics by a pinhole and charge coupled device(CCD)detector was proposed in this study.The pinhole was located between the x-ray source and the polyca... A method to measure the detailed performance of polycapillary x-ray optics by a pinhole and charge coupled device(CCD)detector was proposed in this study.The pinhole was located between the x-ray source and the polycapillary x-ray optics to determine the illuminating region of the incident x-ray beam on the input side of the optics.The CCD detector placed downstream of the polycapillary x-ray optics ensured that the incident x-ray beam controlled by the pinhole irradiated a specific region of the input surface of the optics.The intensity of the output beam of the polycapillary x-ray optics was obtained from the far-field image of the output beam of the optics captured by CCD detector.As an application example,the focal spot size,gain in power density,transmission efficiency,and beam divergence of different parts of a polycapillary focusing x-ray lenses(PFXRL)were measured by a pinhole and CCD detector.Three pinholes with diameters of 500,1000,and 2000μm were used to adjust the diameter of the incident x-ray beam illuminating the PFXRL from 500μm to the entire surface of the input side of the PFXRL.The focal spot size of the PFXRL,gain in power density,transmission efficiency,and beam divergence ranged from 27.1μm to 34.6μm,400 to 3460,26.70%to 5.38%,and 16.8 mrad to 84.86 mrad,respectively. 展开更多
关键词 polycapillary x-ray lenses charge-coupled device detector PINHOLE performance characterization
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Origin of peculiar inerratic diffraction patterns recorded by charge-coupled device cameras
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作者 Kuanhong XU Xiaonong ZHU +2 位作者 Peng HUANG Zhiqiang Yu Nan ZHANG 《Frontiers of Optoelectronics》 EI CSCD 2019年第2期174-179,共6页
A peculiar and regular diffraction pattern is recorded while using either a color or a monochrome charge-coupled device (CCD) camera to capture the image of the micro air plasma produced by femtosecond laser pulses. T... A peculiar and regular diffraction pattern is recorded while using either a color or a monochrome charge-coupled device (CCD) camera to capture the image of the micro air plasma produced by femtosecond laser pulses. The diffraction pattern strongly disturbs the observation of the air plasma, so the origin and eliminating method of these diffraction patterns must be investigated. It is found that the Fourier transform of the periodic surface structure of either the mask mosaic of the color CCD or the pixel array of the monochrome CCD is responsible for the formation of the observed pattern. The residual surface reflection from the protection window of a CCD camera plays the essential role in forming the interesting two- dimensional diffraction spots on the same CCD sensor. Both experimental data and theoretical analyses confirm our understanding of this phenomenon. Therefore remov-ing the protection window of the CCD camera can eliminate these diffraction patterns. 展开更多
关键词 charge-coupled device (CCD) scattering GHOST REFLECTION
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CCD摄像机镜头薄棱镜畸变的研究 被引量:4
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作者 田原嫄 杨浩 刘思阳 《东北电力大学学报》 2010年第6期64-68,共5页
本文以CCD摄像机小孔成像模型为基础建立了薄棱镜畸变的非线性几何畸变模型,通过对影响畸变参数测量精度的各种因素的分析,使用最小二乘法解线性方程组得到摄像机系统畸变模型的畸变系数。通过与径向畸变相对比得出薄棱镜畸变对摄像机... 本文以CCD摄像机小孔成像模型为基础建立了薄棱镜畸变的非线性几何畸变模型,通过对影响畸变参数测量精度的各种因素的分析,使用最小二乘法解线性方程组得到摄像机系统畸变模型的畸变系数。通过与径向畸变相对比得出薄棱镜畸变对摄像机标定的影响相对较小,在此基础上提出了提高标定精度的有效方案。 展开更多
关键词 CCD(charge-coupled Device)摄像机 畸变 薄棱镜 最小二乘法
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针-板电极空气隙直流放电光信息采集 被引量:1
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作者 郑殿春 赵大伟 +2 位作者 杨嘉祥 王倩 杨仁旭 《哈尔滨理工大学学报》 CAS 2014年第3期95-99,共5页
为研究气体击穿的放电机理,采集直流电压下针-板电极空气隙流注放电击穿瞬间的光信号,实验设计了气体放电光学采集装置.利用光纤,光谱仪和ICCD组成光信号检测系统,其中ICCD单独使用可以捕捉光现象,配合光谱仪可采集光谱.实验中采用具有... 为研究气体击穿的放电机理,采集直流电压下针-板电极空气隙流注放电击穿瞬间的光信号,实验设计了气体放电光学采集装置.利用光纤,光谱仪和ICCD组成光信号检测系统,其中ICCD单独使用可以捕捉光现象,配合光谱仪可采集光谱.实验中采用具有高速触发脉冲的外部触发方式操作控制器,进行图像及光谱的采集,并对采集到的结果进行分析和讨论. 展开更多
关键词 直流针-板空气放电 光信号采集 Intensified charge-coupled DEVICE 数字信号处理
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空间CCD图像传感器辐射损伤评估方法 被引量:1
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作者 高欣 杨生胜 +1 位作者 冯展祖 张雷 《航天器环境工程》 2013年第6期596-601,共6页
CCD图像传感器作为高灵敏度光电集成部件,易受空间辐射的影响而发生性能退化和工作异常。开展其辐射效应评价研究并制定相应的防护对策,是保证其在空间可靠应用的前提。文章通过地面模拟试验和辐射屏蔽计算,对空间用CCD图像传感器电离... CCD图像传感器作为高灵敏度光电集成部件,易受空间辐射的影响而发生性能退化和工作异常。开展其辐射效应评价研究并制定相应的防护对策,是保证其在空间可靠应用的前提。文章通过地面模拟试验和辐射屏蔽计算,对空间用CCD图像传感器电离辐射损伤与位移损伤效应开展评估方法研究,为CCD抗辐射加固设计与地面评估试验提供参考。该方法也可用于其他光电器件和材料辐射效应评价。 展开更多
关键词 电荷耦合器件(CCD) 空间辐射环境 辐射效应 电离总剂量 位移损伤剂量 辐射屏蔽 CCD(charge-coupled device)
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ONLINE GRINDING WHEEL WEAR COMPENSATION BY IMAGE BASED MEASURING TECHNIQUES 被引量:10
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作者 WAN Daping HU Dejin +1 位作者 WU Qi ZHANG Yonghong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第4期509-513,共5页
Automatic compensation of grinding wheel wear in dry grinding is accomplished by an image based online measurement method. A kind of PC-based charge-coupled device image recognition system is schemed out, which detect... Automatic compensation of grinding wheel wear in dry grinding is accomplished by an image based online measurement method. A kind of PC-based charge-coupled device image recognition system is schemed out, which detects the topography changes of the grinding wheel surface. Profile data, which corresponds to the wear and the topography, is measured by using a digital image processing method. The grinding wheel wear is evalualed by analyzing the position deviation of the grinding wheel edge. The online wear compensation is achieved according to the measure results. The precise detection and automatic compensation system is integrated into an open structure CNC curve grinding machine. A practical application is carried out to fulfil the precision curve grinding. The experimental results confirm the benefits of the proposed techniques, and the online detection accuracy is less than 5 um. The grinding machine provides higher precision according to the in-process grinding wheel error compensation. 展开更多
关键词 Grinding wheel Wear Compensation Online measurement charge-coupled device (CCD)
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Fabrication and characterization of annealed proton exchanged long period waveguide grating in x-cut LiNbO3 被引量:1
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作者 ZHANG Ai-ling GENG Bo +1 位作者 HAO Li-yue LI Dan 《Optoelectronics Letters》 EI 2019年第4期260-263,共4页
In this paper, a long-period waveguide grating was fabricated in x-cut lithium niobate substrate by patterned annealed proton exchange waveguide fabrication process. The waveguide mode characteristic was evaluated usi... In this paper, a long-period waveguide grating was fabricated in x-cut lithium niobate substrate by patterned annealed proton exchange waveguide fabrication process. The waveguide mode characteristic was evaluated using a charge-coupled device(CCD) camera. It shows that the waveguide is single mode transmission at a wavelength of1 550 nm. The transmission spectra of the long period waveguide gratings were measured by optical spectrum analyzer(OSA) and show an extinction ratio of ~17 dB and a 3 dB bandwidth of ~10 nm at the resonant wavelength. The resonant wavelength moves toward to the long wavelength direction as the waveguide width-difference increases in the same period, and also shifts toward to the long wavelength direction with the increase of the period in the case of the same waveguide width-difference. The method of fabricating a long period waveguide grating based on a patterned annealed proton exchange technique simplifies the fabrication process, and at the same time, reduces the fabrication cost. 展开更多
关键词 optical spectrum analyzer(OSA) charge-coupled device(CCD) x-cut LINBO3
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Simulation study on reconstruction model of three-dimensional temperature distribution within visible range in furnace 被引量:1
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作者 刘冬 王飞 +3 位作者 黄群星 严建华 池涌 岑可法 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第4期1312-1317,共6页
This paper presents a reconstruction model of three-dimensional temperature distribution in furnace based on radiative energy images captured by charge-coupled device (CCD) cameras within the visible wavelength rang... This paper presents a reconstruction model of three-dimensional temperature distribution in furnace based on radiative energy images captured by charge-coupled device (CCD) cameras within the visible wavelength range. Numerical simulation case was used in this study and a zigzag eccentric temperature distribution was assumed to verify the model. Least square QR-factorization (LSQR) method was introduced to deal with reconstruction equation. It is found that the reconstructed temperature distributions in low-temperature areas had some fluctuations and high-temperature areas were reconstructed well. The whole reconstruction relative error was mainly due to errors in low-temperature areas and the relative error for highest-temperature reconstruction was quite small. 展开更多
关键词 three-dimensional temperature distribution radiative energy images visible range charge-coupled device
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CCD signal acquisition and optimal digital denoise technology 被引量:1
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作者 Li Wencan Wen Yan +1 位作者 Wang Dong Yao Dalei 《High Technology Letters》 EI CAS 2021年第4期422-429,共8页
To reduce the charge-coupled device(CCD)readout noise and improve the detection ability under low illumination and dim targets,a new low-noise CCD signal processing technology-CCD digital denoiseis gradually being emp... To reduce the charge-coupled device(CCD)readout noise and improve the detection ability under low illumination and dim targets,a new low-noise CCD signal processing technology-CCD digital denoiseis gradually being employed in aerospace detection and other fields.In this study,the main readout noise of CCD detectors and its characteristics are analyzed.A CCD digital denoise system and an experimental platform are designed as well as established by using a PCIe data acquisition card.According to the characteristics of readout noise,some digital filters are analyzed and designed based on distributed kernel coefficient,and the optimal kernel coefficients are obtained through iteration.Then,CCD signal and filter model are established,and the optimal filter is designed to apply to the digital denoise system.Finally,according to the image data obtained from the system,the performance of the digital denoise system and digital filtering algorithm is evaluated and compared.At 500 kHz and 1 MHz CCD readout rates,the denoising performance of the optimal filter designed in the experiment is 16%-32%higher than that of the digital filter with kernel distribution coefficient,and 50%-60%higher than that of the traditional correlated double sampling technology. 展开更多
关键词 charge-coupled device(CCD) low noise reset noise digital correlated double sampling optimal filter
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物证检验照相中噪点的产生原因及解决方案 被引量:1
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作者 韦航 卢必松 陆斌 《职业圈》 2007年第01X期144-145,共2页
数码相机的噪点影响了照片成像质量,给数码相片进行物证检验、作为诉讼证据使用、进行网络传输等都带来了不利因素,文章分析了噪点产生的原因,并提出了解决方案.
关键词 噪点(noise) CCD(charge-coupled device) 光电转换 降噪
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A Novel Multi-Points Laser Monitoring of Building Settlement and Its Risk Evaluation
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作者 CHAI Caiping WU Zejian +5 位作者 WANG Huifeng GUAN Limin HUANG He MU Kenan CUI Wenfen HAO Ting 《Wuhan University Journal of Natural Sciences》 CAS CSCD 2019年第5期442-454,共13页
Aiming at the defects of routine settlement measurement methods, such as complicated procedures, time-consuming and labor-intensive, high cost and low measurement accuracy, based on the analysis of existing engineerin... Aiming at the defects of routine settlement measurement methods, such as complicated procedures, time-consuming and labor-intensive, high cost and low measurement accuracy, based on the analysis of existing engineering measurement technical requirements and specifications, a multi-point high precision and high efficiency based on laser reference is proposed. The automatic building settlement real-time monitoring system program gives the principle and system model of single-point settlement observation. The model of multi-point scanning settlement monitoring system and the model of multi-point network settlement monitoring system are designed, and their advantages and disadvantages are analyzed. We focus on the networked multi-point settlement monitoring system for network cumulative error analysis, and propose related evaluation and correction methods. The hardware schematic and software block diagram of the laser reference measurement and measurement system of the single point settlement acquisition system are given. Finally, the risk of subsidence state is quantitatively evaluated based on multi-point settlement monitoring data. The measurement error of this method is less than 300 μm, which can realize the monitoring and evaluation of the overall settlement. 展开更多
关键词 measurement technology LASER REFERENCE SETTLEMENT CHAIN linear array charge-coupled Device(CCD)
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Simulation study on radiative imaging of combustion flame in furnace
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作者 LIU Dong WANG Fei +3 位作者 HUANG Qun-xing YAN Jian-hua CHI Yong CEN Ke-fa 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2007年第11期1853-1857,共5页
Radiative imaging of combustion flame in furnace of power plant plays an increasingly important role in combustion diagnosis. This paper presents a new method for calculating the radiative imaging of three-dimensional... Radiative imaging of combustion flame in furnace of power plant plays an increasingly important role in combustion diagnosis. This paper presents a new method for calculating the radiative imaging of three-dimensional (3D) combustion flame based on Monte Carlo method and optical lens imaging. Numerical simulation case was used in this study. Radiative images were calculated and images obtained can not only present the energy distribution on the charge-coupled device (CCD) camera target plane but also reflect the energy distribution condition in the simulation furnace. Finally the relationships between volume ele- ments and energy shares were also discussed. 展开更多
关键词 Combustion flame Radiative imaging charge-coupled device (CCD) cameras Energy share FURNACE
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Research on the slagging characteristics of blended coals in a pilot-scale furnace
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作者 Hao ZHOU Le-tian LI Hai-long ZHANG Bin ZHOU 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2015年第3期204-216,共13页
This paper applies digital image techniques to observe the slagging characteristics of blended coals in a pilot-scale furnace. Collected deposit samples were analyzed by scanning electron microscopy linked with energy... This paper applies digital image techniques to observe the slagging characteristics of blended coals in a pilot-scale furnace. Collected deposit samples were analyzed by scanning electron microscopy linked with energy-dispersive X-ray analysis (SEM-EDX), X-ray diffraction (XRD), and X-ray Fluorescence (XRF) to acquire the microstructure, chemical composition, and mineralogy. The deposit thickness of three blends was analyzed between their parent coal A (Datong) and coal B (Shan), and we noted that the time to reach a stable stage decreased with the ratio of coal B. The addition of coal A into coal B could remarkably restrained the growth and thickness of ash deposits. The results of XRD analysis indicated the initial layer was predominantly comprised of the crystalline minerals quartz, anorthite, or albite except for coal B. All of the blends and coals contained quartz and Ca- to Al-silicates (Ca0.68Na0.32)(All.68Si0.32)Si2O8 in the slag layer where iron-bearing minerals (e.g., ilvaite) were altered into an amorphous phase. The result of SEM-EDX suggested that there was an elemental disparity between the coal ash and deposit. 展开更多
关键词 Blended coal Ash deposit SLAGGING charge-coupled device (CCD) camera MINERALOGY
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Preliminary Study of CAS-LIBB Single-Particle MicrobeamⅡEndstation:Ⅱ.Considerations for Choosing the Right CCD Camera
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作者 胡智文 许永建 余增亮 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第4期497-501,共5页
The proposed multi-dimensional quantitative fluorescence microscopy for the CASLIBB single-particle microbeam II endstation is a CCD-based imaging system. We systematically analyse the theoretical and the practical co... The proposed multi-dimensional quantitative fluorescence microscopy for the CASLIBB single-particle microbeam II endstation is a CCD-based imaging system. We systematically analyse the theoretical and the practical considerations pertinent to choosing the right CCD camera and unveiling the principles underlying multifarious parameters. Therefore, this analysis can be a valuable tool in scrutinizing each parameter and clarifying proper usage of a scientific CCD camera. 展开更多
关键词 single-particle microbeam quantitative fluorescence microscopy charge-coupled Device (CCD) camera signal-to-noise ratio
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Measuring method of water surface wave relaxation rate based on linear array CCD
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作者 CHEN Peng-zhen CHONG Jin-song 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2017年第3期215-222,共8页
Relaxation rate is a very crucial parameter in physics.For the water surface wave,its relaxation rate is directly relevantto the response time of disturbed spectrum returning back to its quasi-steady state.It is diffi... Relaxation rate is a very crucial parameter in physics.For the water surface wave,its relaxation rate is directly relevantto the response time of disturbed spectrum returning back to its quasi-steady state.It is difficult to be calculated directly asa function of different oceanographic and meteorological parameters.Previous researches were mainly based on experimentalmeasurements or parameterization.In this paper,a method based on the liner array charge-coupled device(CCD)is proposed tomeasure the relaxation rate of the water surface wave.Compared with the traditional methods?it can obtain the information ofsurface wave and current synchronously,and works well under a multi wind-wave environment.Wind wav^tank experimentswere carried out based on this method.The good consistency between the results calculated by this method and the traditionalrelaxation rate models shows the validity of the proposed method.This method can be further used to study the modulation theoryof surface waves by currents. 展开更多
关键词 linear array charge-coupled device water surface waves relaxation rate
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Modified BB84 Protocol Using CCD Technology
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作者 Subhashree Basu Supriyo Sengupta 《Journal of Quantum Information Science》 2016年第1期31-38,共8页
Quantum cryptography and especially quantum key distribution (QKD) is a technique that allocates secure keys only for a short distance. QKD protocols establish secure key by consent of both the sender and receiver. Ho... Quantum cryptography and especially quantum key distribution (QKD) is a technique that allocates secure keys only for a short distance. QKD protocols establish secure key by consent of both the sender and receiver. However, communication has to take place via an authenticate channel. Without this channel, QKD is vulnerable to man-in-the-middle attack. While not completely secure, it offers huge advantages over traditional methods by the use of entanglement swapping and quantum teleportation. In our research, we adopt the principle of charge-coupled device (CCD) to transfer the qubit from the sender to the receiver via a quantum channel. This technology has an added advantage over polarizer as only the circuit for transmitting the qubit is sufficient. No extra circuitry to implement the polarizer is required. 展开更多
关键词 Quantum Cryptography Quantum Key Distribution (QKD) ENTANGLEMENT TELEPORTATION charge-coupled Device (CCD)
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Characterizing the spatial potential of an ion trap chip
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作者 Qingqing Qin Ting Chen +6 位作者 Xinfang Zhang Baoquan Ou Jie Zhang Chunwang Wu Yi Xie Wei Wu Pingxing Chen 《Chip》 2025年第1期62-71,共10页
The accurate characterization of the spatial electric field generated by electrodes in a surface electrode trap is of paramount importance.In this pursuit,we have identified a simple yet highly precise parametric expr... The accurate characterization of the spatial electric field generated by electrodes in a surface electrode trap is of paramount importance.In this pursuit,we have identified a simple yet highly precise parametric expression to describe the spatial field of a rectangularshaped electrode.Leveraging this expression,we introduced an optimization method designed to accurately characterize the axial electric field intensity produced by the powered electrode and the stray field.Distinct from the existing methods,our approach integrates a diverse array of experimental data,including the equilibrium positions of ions in a linear string,the equilibrium positions of single trapped ions,and trap frequencies,to effectively reduce the systematic errors.This approach provides considerable flexibility in voltage settings for data acquisition,making it especially advantageous for surface electrode traps where the trapping height of ion probes may vary with casual voltage settings.In our experimental demonstration,we successfully minimized the discrepancy between observations and model predictions to a remarkable degree.The relative errors of secular frequencies were contained within±0.5%,and the positional error of ions was constrained to less than 1.2μm,which surpasses the performance of current methodologies. 展开更多
关键词 Surface electrode trap Potential characterization Ion shuttling Quantum charge-coupled device
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Development of a rapid measurement system for coarse aggregate morphological parameters 被引量:2
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作者 Hejun Zhu Huaiying Fang +1 位作者 Yuanyuan Cai Ning Lv 《Particuology》 SCIE EI CAS CSCD 2020年第3期181-188,共8页
Morphological parameters of coarse aggregates,including the angularity index (Al),flat and elongated ratio,flatness ratio,and sphericity,strongly affect the performance of asphalt concrete.A device must be developed t... Morphological parameters of coarse aggregates,including the angularity index (Al),flat and elongated ratio,flatness ratio,and sphericity,strongly affect the performance of asphalt concrete.A device must be developed to efficiently and accurately measure these parameters.Herein,a charge-coupled device camera and a linear profile scanner are combined to evaluate the parameters.The Al is calculated using three methods.The results show that the fitted-ellipse method provides superior results among the three Al measurement methods.Moreover,the use of a linear profile scanner improves the Al measurement accuracy.Therefore,the proposed combination has high measurement efficiency and is suitable for batch inspections. 展开更多
关键词 charge-coupled device camera Linear profile scanner ANGULARITY Flatness ratio SPHERICITY
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