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The Effects of Fabrication Prameters and Electroforming Phenomenon on CdTe/Si (p) Heterojunction Photovoltaic Solar Cell
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作者 Wagah F. Mohammad 《Circuits and Systems》 2012年第1期42-47,共6页
The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical trouble... The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical troubles were encountered. However, the important one was the formation of the SiO2 thin oxide layer on the soft surface of the Si during the formation of the back contact. The silicon wafer was subjected to different chemical treatments in order to remove the thin oxide layer from the silicon wafer surfaces. It was found that the heterojunction with Si (p+) substrate gave relatively high open circuit voltage comparing with that of Si (p) substrate. Also an electroforming phenomenon had been observed in this structure for the first time which may be considered as a memory effect. It was observed that there are two states of conduction, non-conducting state and conducting state. The normal case is the non-conducting state. As the forward applied voltage increased beyond threshold value, it switches into the conducting state and remains in this state even after the voltage drops to zero. 展开更多
关键词 cdte SOLAR CELLS cdte/si heterojunction In-Doped cdte
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SiC based Si/SiC heterojunction and its rectifying characteristics 被引量:2
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作者 朱峰 陈治明 +2 位作者 李连碧 赵顺峰 林涛 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第11期4966-4969,共4页
The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play t... The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play the role of an light absorbing layer. This paper reports on Si films heteroepitaxially grown on the Si face of (0001) n-type 6H-SiC substrates and the use of B2H6 as a dopant for p-Si grown at temperatures in a range of 700-950℃. X-ray diffraction (XRD) analysis and transmission electron microscopy (TEM) tests have demonstrated that the samples prepared at the temperatures ranged from 850℃ to 900℃ are characterized as monocrystalline silicon. The rocking XRD curves show a well symmetry with FWHM of 0.4339° Omega. Twin crystals and stacking faults observed in the epitaxial layers might be responsible for widening of the rocking curves. Dependence of the crystal structure and surface topography on growth temperature is discussed based on the experimental results. The energy band structure and rectifying characteristics of the Si/SiC heterojunctions are also preliminarily tested. 展开更多
关键词 si/6H-siC heterojunction heteroepitaxy siC
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Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications 被引量:1
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作者 谷锦华 司嘉乐 +3 位作者 王九秀 冯亚阳 郜小勇 卢景霄 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第11期502-505,共4页
The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivi... The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivity ITO films by direct-current (DC) magnetron sputtering, we studied the impacts of the ITO film deposition conditions, such as the oxygen flow rate, pressure, and sputter power, on the electrical and optical properties of the ITO films. ITO films of resistivity of 4 x 10-4 ~.m and average transmittance of 89% in the wavelength range of 380-780 nm were obtained under the optimized conditions: oxygen flow rate of 0.1 sccm, pressure of 0.8 Pa, and sputtering power of 110 W. These ITO films were used to fabricate the single-side HJ solar cell without an intrinsic a-Si:H layer. However, the best HJ solar cell was fabricated with a lower sputtering power of 95 W, which had an efficiency of 11.47%, an open circuit voltage (Voc) of 0.626 V, a filling factor (FF) of 0.50, and a short circuit current density (Jsc) of 36.4 mA/cm2. The decrease in the performance of the solar cell fabricated with high sputtering power of 110 W is attributed to the ion bombardment to the emitter. The Voc was improved to 0.673 V when a 5 nm thick intrinsic a-Si:H layer was inserted between the (p) a-Si:H and (n) c-Si layer. The higher Voc of 0.673 V for the single-side HJ solar cell implies the excellent c-Si surface passivation by a-Si:H. 展开更多
关键词 ITO films si heterojunction solar cell DC magnetron sputtering
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Forward and reverse electron transport properties across a CdS/Si multi-interface nanoheterojunction 被引量:2
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作者 李勇 王伶俐 +4 位作者 王小波 闫玲玲 苏丽霞 田永涛 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第8期502-507,共6页
The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporou... The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporous pillar array, an untraditional, nonplanar, and multi-interface CdS/Si nanoheterojunction is prepared. The current density versus voltage curve is measured and an obvious rectification effect is observed. Based on the fitting results and model analyses on the forward and reverse conduction characteristics, the electron transport mechanism under low forward bias, high forward bias, and reverse bias are attributed to the Ohmic regime, space-charge-limited current regime, and modified Poole-Frenkel regime respectively. The forward and reverse electrical behaviors are found to be highly related to the distribution of inter- facial trap states and the existence of localized electric field respectively. These results might be helpful for optimizing the preparing procedures to realize high-performance silicon-based CdS optoelectronic devices. 展开更多
关键词 heterojunction multi-interface nanoheterojunction electron transport silicon nanoporous pillararray si-NPA) CdS/si-NPA
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Rectification and electroluminescence of nanostructured GaN/Si heterojunction based on silicon nanoporous pillar array 被引量:1
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作者 王小波 李勇 +1 位作者 闫玲玲 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第10期432-437,共6页
A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. T... A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. The average size of nc-Ga N is determined to be ~10 nm. The spectral measurements disclose that the photoluminescence(PL) from GaN/SiNPA is composed of an ultraviolet(UV) band and a broad band spanned from UV to red region, with the feature that the latter band is similar to that of electroluminescence(EL). The electron transition from the energy levels of conduction band and, or, shallow donors to that of deep acceptors of Ga N is indicated to be responsible for both the broad-band PL and the EL luminescence. A study of the I-V characteristic shows that at a low forward bias, the current across the heterojunction is contact-limited while at a high forward bias it is bulk-limited, which follows the thermionic emission model and space-charge-limited current(SCLC) model, respectively. The bandgap offset analysis indicates that the carrier transport is dominated by electron injection from n-GaN into the p-Si-NPA, and the EL starts to appear only when holes begin to be injected from Si-NPA into GaN with biases higher than a threshold voltage. 展开更多
关键词 GaN/si-NPA heterojunction RECTIFICATION electroluminescence (EL)
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具有n^(+)埋层和L型场板的Si/SiC异质结沟槽LDMOS器件
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作者 康怡 刘东 +2 位作者 卢山 鲁啸龙 胡夏融 《半导体技术》 北大核心 2025年第2期134-140,共7页
Si/4H-SiC异质结构能够同时结合Si材料的成熟工艺和SiC材料的宽禁带特性,在功率器件设计中具有巨大潜力。提出了一种具有n+埋层和L型场板的Si/SiC异质结沟槽横向双扩散金属氧化物半导体(LDMOS)器件。位于Si/SiC异质结界面SiC侧的重掺杂n... Si/4H-SiC异质结构能够同时结合Si材料的成熟工艺和SiC材料的宽禁带特性,在功率器件设计中具有巨大潜力。提出了一种具有n+埋层和L型场板的Si/SiC异质结沟槽横向双扩散金属氧化物半导体(LDMOS)器件。位于Si/SiC异质结界面SiC侧的重掺杂n+埋层能够有效降低界面势垒宽度,增强电子隧穿效应,降低界面电阻,进一步降低比导通电阻。位于厚氧化层角落并与漏极相连的L型场板通过在SiC漂移区和厚氧化层之间产生高电场,重塑器件横向和纵向电场强度分布,将击穿点从表面转移至体内,提高击穿电压。仿真结果表明,与传统SiC LDMOS器件相比,该器件的品质因数从109.29 MW/cm^(2)提升至159.92 MW/cm^(2),提高了46.36%,进一步改善了LDMOS器件导通电阻和击穿电压之间的折中关系,器件性能得到优化。 展开更多
关键词 横向双扩散金属氧化物半导体(LDMOS) si/4H-siC异质结 n^(+)埋层 L型场板 功率品质因数
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Ge/Si heterojunction L-shape tunnel field-effect transistors with hetero-gate-dielectric
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作者 CongLi Zhi-Rui Yan +2 位作者 Yi-Qi Zhuang Xiao-Long Zhao Jia-Min Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第7期572-579,共8页
A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, ... A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, and the distri- bution of the band-to-band tunneling (BTBT) generation rate of GHL-TFET are analyzed. In addition, the effect of the vertical channel width on the ON-current is studied and the thickness of the gate dielectric is optimized for better suppression of ambipolar current. Moreover, analog/RF figure-of-merits of GHL-TFET are also investigated in terms of the cut-off frequency and gain bandwidth production. Simulation results indicate that the ON-current of GHL-TFET is increased by about three orders of magnitude compared with that of the conventional L-shaped TFET. Besides, the introduction of the hetero-gate-dielectric not only suppresses the ambipolar current effectively but also improves the analog/RF performance drastically. It is demonstrated that the maximum cut-off frequency of GHL-TFET is about 160 GHz, which is 20 times higher than that of the conventional L-shaped TFET. 展开更多
关键词 tunnel field-effect transistors Ge/si heterojunction hetero-gate-dielectric ambipolar effect
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Temperature-dependent rectifying and photovoltaic characteristics of an oxygen-deficient Bi_2Sr_2Co_2O_y/Si heterojunction
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作者 闫国英 白子龙 +5 位作者 李慧玲 傅广生 刘富强 于威 王江龙 王淑芳 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第10期500-503,共4页
A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties ar... A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties are studied in a wide temperature range from 20 K to 300 K. The transport mechanism under the forward bias can be attributed to a trap- filled space-charge-limited current conduction mechanism. Under the irradiation of a 532-nm continuous wave laser, a clear photovoltaic effect is observed and the magnitude ofphotovoltage increases as the temperature decreases, The results demonstrate the potential application of a Bi2SrzCo2Oy-based heterojunction in the photoelectronic devices. 展开更多
关键词 Bi2Sr2Co2Oy/si heterojunction rectifying characteristics photovoltaic effect space-charge-limited current
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Novel Si/SiC heterojunction lateral double-diffused metal-oxide semiconductor field-effect transistor with p-type buried layer breaking silicon limit
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作者 Baoxing Duan Xin Huang +2 位作者 Haitao Song Yandong Wang Yintang Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第4期605-609,共5页
A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first ti... A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first time.The heterojunction has breakdown point transfer(BPT) characteristics,and the BPT terminal technology is used to increase the breakdown voltage(BV) of Si/SiC LDMOS with the deep drain region.In order to further optimize the surface lateral electric field distribution of Si/SiC LDMOS with the deep drain region,the p-type buried layer is introduced in PBL Si/SiC LDMOS.The vertical electric field is optimized by Si/SiC heterojunction and the surface lateral electric field is optimized by the p-type buried layer,which greatly improves the BV of device and alleviates the relationship between BV and specific on-resistance(R_(on,sp)).Through TCAD simulation,when the drift region length is 20 μm,the BV is significantly improved from 249 V for the conventional Si LDMOS to 440 V for PBL Si/SiC LDMOS,increased by 77%;And the BV is improved from 384 V for Si/SiC LDMOS with the deep drain region to 440 V for the proposed structure,increased by 15%.The figure-of-merit(FOM) of the Si/SiC LDMOS with the deep drain region and PBL Si/SiC LDMOS are 4.26 MW/cm^(2) and 6.37 MW/cm^(2),respectively.For the PBL Si/SiC LDMOS with the drift length of 20 μm,the maximum FOM is 6.86 MW/cm^(2).The PBL Si/SiC LDMOS breaks conventional silicon limit. 展开更多
关键词 si/siC heterojunction LDMOS breakdown voltage specific on-resistance
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Interfacial photoconductivity effect of type-Ⅰ and type-Ⅱ Sb2Se3/Si heterojunctions for THz wave modulation
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作者 曹雪芹 黄媛媛 +7 位作者 席亚妍 雷珍 王静 刘昊楠 史明坚 韩涛涛 张蒙恩 徐新龙 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第11期82-86,共5页
An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivi... An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivity and photocarrier density at the heterojunction interface remains elusive. Herein, we have obtained the photoconductivity and photocarrier density of 173 nm Sb2Se3/Si(type-Ⅰ heterojunction) and 90 nm Sb2Se3/Si(type-Ⅱ heterojunction) utilizing terahertz(THz) time-domain spectroscopy(THz-TDS) and a theoretical Drude model. Since type-Ⅰ heterojunctions accelerate carrier recombination and type-Ⅱ heterojunctions accelerate carrier separation, the photoconductivity and photocarrier density of the type-Ⅱ heterojunction(21.8×10^(4)S·m^(-1),1.5 × 10^(15)cm^(-3)) are higher than those of the type-Ⅰ heterojunction(11.8×10^(4)S·m^(-1),0.8×10^(15)cm^(-3)). These results demonstrate that a type-Ⅱ heterojunction is superior to a type-Ⅰ heterojunction for THz wave modulation. This work highlights THz-TDS as an effective tool for studying photoconductivity and photocarrier density at the heterojunction interface. In turn, the intriguing interfacial photoconductivity effect provides a way to improve the THz wave modulation performance. 展开更多
关键词 PHOTOCONDUCTIVITY Sb2 Se3/si heterojunctions THZ-TDS Drude model
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CdS/Si nanofilm heterojunctions based on amorphous silicon films:Fabrication,structures,and electrical properties
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作者 Yong Li Peng-Fei Ji +3 位作者 Yue-Li Song Feng-Qun Zhou Hong-Chun Huang Shu-Qing Yuan 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第2期385-389,共5页
Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunc... Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunctions are fabricated by using the radio frequency magnetron sputtering method to deposit the amorphous silicon nanofilms and Cd S nanofilms on the ITO glass in turn.The relation of current density to applied voltage(I-V)shows the obvious rectification effect.From the analysis of the double logarithm I-V curve it follows that below~2.73 V the electron behaviors obey the Ohmic mechanism and above~2.73 V the electron behaviors conform to the space charge limited current(SCLC)mechanism.In the SCLC region part of the traps between the Fermi level and conduction band are occupied,and with the increase of voltage most of the traps are occupied.It is believed that Cd S/Si nanofilm heterojunction is a potential candidate in the field of nano electronic and optoelectronic devices by optimizing its fabricating procedure. 展开更多
关键词 magnetron sputtering CdS/si nanofilm heterojunctions electron behaviors SCLC mechanisms
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a-Si/c-Si heterojunction solar cells on SiSiC ceramic substrates
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作者 LI Xudong XU Ying CHE Xiaoqi 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期186-189,共4页
Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollutio... Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollution. In this paper, latest progress on poly-crystalline silicon solar cells on ceramic substrates achieved by our group was reported. Rapid thermal chemical vapor deposition (RTCVD) was used to deposited poly-crystalline silicon thin films, and the grains of as-grown film were enlarged by Zone-melting Recrystallization (ZMR). As a great change in cell′s structure, traditional diffused pn homojunction was replaced by a-Si/c-Si heterojunction, which lead is to distinct improvement in cell′s efficiency. A conversion efficiency of 3.42% has been achieved on 1 cm2 a-Si/c-Si heterojunction solar cell (Isc=16.93 mA, Voc=310.9 mV, FF=0.6493, AM=1.5 G, 24 ℃), while the cell with diffused homojunction only got an efficiency of 0.6%. It indicates that a-Si emitter formed at low temperature might be more suitable for thin film cell on ceramics. 展开更多
关键词 a-si/c-si heterojunction thin film solar cell ceramic substrate
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Simulation of a-Si:H/c-Si heterojunction solar cells: From planar junction to local junction
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作者 Haibin Huang Lang Zhou +1 位作者 Jiren Yuan Zhijue Quan 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第12期370-377,共8页
In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with lo... In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with localized p–n structure(HACL) is designed. A numerical simulation is performed with the ATLAS program. The effect of the a-Si:H layer on the performance of the HIT(heterojunction with intrinsic thin film) solar cell is investigated. The performance improvement mechanism for the HACL cell is explored. The potential performance of the HACL solar cell is compared with those of the HIT and HACD(heterojunction of amorphous silicon and crystalline silicon with diffused junction) solar cells.The simulated results indicate that the a-Si:H layer can bring about much absorption loss. The conversion efficiency and the short-circuit current density of the HACL cell can reach 28.18% and 43.06 m A/cm^2, respectively, and are higher than those of the HIT and HACD solar cells. The great improvement are attributed to(1) decrease of optical absorption loss of a-Si:H and(2) decrease of photocarrier recombination for the HACL cell. The double-side local junction is very suitable for the bifacial solar cells. For an HACL cell with n-type or p-type c-Si base, all n-type or p-type c-Si passivating layers are feasible for convenience of the double-side diffusion process. Moreover, the HACL structure can reduce the consumption of rare materials since the transparent conductive oxide(TCO) can be free in this structure. It is concluded that the HACL solar cell is a promising structure for high efficiency and low cost. 展开更多
关键词 silicon solar cell a-si:H/c-si heterojunction short-circuit current local junction
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Ga_(2)O_(3)∶Si薄膜制备及其日盲紫外光电探测器性能研究
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作者 张献 岳志昂 +6 位作者 赵恩钦 魏帅康 叶文轩 黄敏怡 辛美波 赵洋 王辉 《人工晶体学报》 北大核心 2025年第3期462-469,共8页
日盲紫外光电探测器(SBPDs)在军事、民用、医疗等领域存在巨大的应用潜力。本文采用射频磁控溅射技术制备Si掺杂氧化镓(Ga_(2)O_(3))薄膜,研究了氩氧流量比对其物理特性的影响。晶体结构、光学性质和表面形貌分析结果表明,当氩氧流量比... 日盲紫外光电探测器(SBPDs)在军事、民用、医疗等领域存在巨大的应用潜力。本文采用射频磁控溅射技术制备Si掺杂氧化镓(Ga_(2)O_(3))薄膜,研究了氩氧流量比对其物理特性的影响。晶体结构、光学性质和表面形貌分析结果表明,当氩氧流量比为30∶20时,薄膜的结晶质量最好。Ga_(2)O_(3)∶Si薄膜沿(402)晶面择优生长,表面平整光滑,无微孔洞,400~800 nm波段的平均透过率为90%。基于优化的Ga_(2)O_(3)∶Si薄膜制备条件,本文制备了p-GaN/n-Ga_(2)O_(3)∶Si自供电SBPDs,其在0 V偏压254 nm光照下的上升时间和衰减时间分别为0.450和0.509 s,光暗电流比(PDCR)、响应度(R)和比探测率(D*)分别为23、0.24 mA/W和1.67×10^(8)Jones。研究了器件在0~-6 V偏压下的周期性时间响应特性,在0 V偏压下,器件在254 nm辐照瞬间出现尖峰,当施加反向偏压时,尖峰消失。最后分析了p-GaN/Ga_(2)O_(3)∶Si异质结在接触前、后及反向偏压下的能带图。 展开更多
关键词 Ga_(2)O_(3)∶si薄膜 氩氧流量比 磁控溅射 异质结 日盲紫外光电探测器
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SnSeS/n-Si异质结纵向光伏特性的实验研究
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作者 任常愚 梁莉青 李尤 《黑龙江科技大学学报》 2025年第3期507-512,共6页
为获得SnSeS/n-Si异质结的纵向光伏特性,利用脉冲激光沉积技术在n型Si衬底上生长出SnSeS薄膜,通过测试其XRD确定制备薄膜的结构性质,根据测试透射光谱计算出SnSeS薄膜的带隙,研究纵向光伏电压与激光波长及功率之间的关系。结果表明:照... 为获得SnSeS/n-Si异质结的纵向光伏特性,利用脉冲激光沉积技术在n型Si衬底上生长出SnSeS薄膜,通过测试其XRD确定制备薄膜的结构性质,根据测试透射光谱计算出SnSeS薄膜的带隙,研究纵向光伏电压与激光波长及功率之间的关系。结果表明:照射光波长对于SnSeS/n-Si异质结电流-电压的影响并非是随着波长的增加而增大的,在780 nm激光照射下I-V影响最明显;其纵向光伏电压会随着激光功率的增加而达到饱和,SnSeS/n-Si异质结的纵向光伏电压在并联0.56 kΩ时响应时间约为3.7 ns,具有良好的响应速度。SnSeS/n-Si异质结纵向光伏效应显著,对于研究同类硫属化物-半导体的纵向光伏效应具有一定的借鉴意义。 展开更多
关键词 纵向光伏 SnSeS/n-si异质结 脉冲激光沉积 半导体
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CdTe/Si复合衬底Ex-situ退火研究 被引量:8
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作者 刘铭 周立庆 +3 位作者 巩锋 常米 王经纬 王丛 《激光与红外》 CAS CSCD 北大核心 2012年第8期917-920,共4页
复合衬底CdTe/ZnTe/Si的晶体质量是导致随后外延的HgCdTe外延膜高位错密度的主要原因之一,因此如何提高复合衬底CdTe/Si晶体质量是确保硅基碲镉汞走上工程化的关键所在。降低复合衬底CdTe/Si位错密度方法一般有:生长超晶格缓冲层、衬底... 复合衬底CdTe/ZnTe/Si的晶体质量是导致随后外延的HgCdTe外延膜高位错密度的主要原因之一,因此如何提高复合衬底CdTe/Si晶体质量是确保硅基碲镉汞走上工程化的关键所在。降低复合衬底CdTe/Si位错密度方法一般有:生长超晶格缓冲层、衬底偏向、In-situ退火和Ex-situ退火等,本文主要研究Ex-situ退火对复合衬底CdTe/Si晶体质量的影响。研究表明复合衬底经过Ex-situ退火后位错密度最好值达4.2×105cm-2,双晶半峰宽最好值达60arcsec。 展开更多
关键词 cdte/si MBE 晶体质量 Ex-situ退火
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3英寸CdTe/Si复合衬底外延技术研究 被引量:20
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作者 周立庆 刘铭 +3 位作者 巩锋 董瑞清 折伟林 常米 《激光与红外》 CAS CSCD 北大核心 2011年第5期537-541,共5页
报道了采用分子束外延法,在3 in硅衬底上通过As钝化、ZnTe缓冲层生长、CdTe生长、周期性退火等工艺进行CdTe/Si复合衬底制备技术研究情况,采用光学显微镜、X射线高分辨衍射仪、原子力显微镜、红外傅里叶光谱仪和湿化学腐蚀等手段对碲化... 报道了采用分子束外延法,在3 in硅衬底上通过As钝化、ZnTe缓冲层生长、CdTe生长、周期性退火等工艺进行CdTe/Si复合衬底制备技术研究情况,采用光学显微镜、X射线高分辨衍射仪、原子力显微镜、红外傅里叶光谱仪和湿化学腐蚀等手段对碲化镉薄膜进行了表征,测试分析结果表明碲化镉薄膜的晶向得到了较好的控制,孪晶得到了抑制,且具有较好晶体结构质量和均匀性。 展开更多
关键词 碲化镉 硅基 分子束外延
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在Si(211)衬底上分子束外延CdTe的晶格应变 被引量:3
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作者 王元樟 陈路 +4 位作者 巫艳 吴俊 于梅芳 方维政 何力 《激光与红外》 CAS CSCD 北大核心 2005年第11期861-863,共3页
文章利用高分辨率X射线衍射技术对分子束外延CdTe(211)B/Si(211)材料的CdTe外延薄膜进行了倒易点二维扫描,并通过获得的对称衍射面和非对称衍射面的倒易空间图,对CdTe外延层的剪切应变和正应变状况进行了分析。研究发现,对于CdTe/Si结构... 文章利用高分辨率X射线衍射技术对分子束外延CdTe(211)B/Si(211)材料的CdTe外延薄膜进行了倒易点二维扫描,并通过获得的对称衍射面和非对称衍射面的倒易空间图,对CdTe外延层的剪切应变和正应变状况进行了分析。研究发现,对于CdTe/Si结构,随着CdTe厚度的增加,[1-1-1]、[01-1]两个方向的剪切角γ[1-1-1]和[γ01-1]都有变小的趋势,且γ[1-1-1]的大小约为[γ01-1]的两倍;对于CdTe/ZnTe/Si,ZnTe缓冲层的引入可以有效地降低CdTe层的剪切应变。CdTe层的正应变表现为张应变,主要来源于CdTe和Si的热膨胀系数存在差异,而在从生长温度280℃降至室温20℃的过程产生的热应变。 展开更多
关键词 cdte/si 倒易点二维扫描图 剪切应变 正应变 分子束外延
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分子束外延CdTe(211)B/Si复合衬底材料 被引量:7
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作者 陈路 王元樟 +4 位作者 巫艳 吴俊 于梅芳 乔怡敏 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2005年第4期245-249,共5页
报道了用MBE的方法,在3英寸Si衬底上制备ZnTe/CdTe(211)B复合衬底材料的初步研究结果,该研究结果将能够直接应用于大面积Si基HgCdTeIRFPA材料的生长.经过Si(211)衬底低温表面处理、ZnTe低温成核、高温退火、高温ZnTe、CdTe层的生长研究,... 报道了用MBE的方法,在3英寸Si衬底上制备ZnTe/CdTe(211)B复合衬底材料的初步研究结果,该研究结果将能够直接应用于大面积Si基HgCdTeIRFPA材料的生长.经过Si(211)衬底低温表面处理、ZnTe低温成核、高温退火、高温ZnTe、CdTe层的生长研究,用MBE方法成功地获得了3英寸Si基ZnTe/CdTe(211)B复合衬底材料.CdTe厚度大于10μm,XRDFWHM平均值为120arcsec,最好达到100arcsec,无(133)孪晶和其他多晶晶向. 展开更多
关键词 分子束外延 碲化镉 硅基
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Si/CdTe复合衬底HgCdTe液相外延材料的生长与性能分析 被引量:2
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作者 徐庆庆 陈新强 +2 位作者 魏彦锋 杨建荣 陈路 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第7期1078-1082,共5页
通过改进推舟液相外延技术,成功地在(211)晶向Si/CdTe复合衬底上进行了HgCdTe液相外延生长,获得了表面光亮的HgCdTe外延薄膜.测试结果表明,(211)Si/CdTe复合衬底液相外延HgCdTe材料组分及厚度的均匀性与常规(111)CdZnTe衬底HgCdT... 通过改进推舟液相外延技术,成功地在(211)晶向Si/CdTe复合衬底上进行了HgCdTe液相外延生长,获得了表面光亮的HgCdTe外延薄膜.测试结果表明,(211)Si/CdTe复合衬底液相外延HgCdTe材料组分及厚度的均匀性与常规(111)CdZnTe衬底HgCdTe外延材料相当;位错腐蚀坑平均密度为(5~8)×10^5cm^-2,比相同衬底上分子束外延材料的平均位错密度要低一个数量级;晶体的双晶半峰宽达到70"左右.研究结果表明,在发展需要低位错密度的大面积长波HgCdTe外延材料制备技术方面,Si/CdTe复合衬底HgCdTe液相外延技术可发挥重要的作用. 展开更多
关键词 si/cdte复合衬底 HGcdte 液相外延
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