期刊文献+
共找到176篇文章
< 1 2 9 >
每页显示 20 50 100
Self-powered horizontally structured n–n heterojunction photodetector based on Si–GaN/β-Ga_(2)O_(3) for UV detection
1
作者 Muzi Li Maolin Zhang +3 位作者 Xueqiang Ji Shan Li Lili Yang Weihua Tang 《Chinese Physics B》 2026年第2期639-646,共8页
With the rapid advancement of optoelectronic technology,high-performance photodetectors are increasingly in demand in fields such as environmental monitoring,optical communication,and defense systems,where ultraviolet... With the rapid advancement of optoelectronic technology,high-performance photodetectors are increasingly in demand in fields such as environmental monitoring,optical communication,and defense systems,where ultraviolet detection is critical.However,conventional semiconductor materials suffer from limited UV-visible detection capabilities owing to their narrow bandgaps and high dark currents.To address these challenges,wide-bandgap semiconductors have emerged as promising alternatives.Here,we fabricated a horizontally structured n–n heterojunction photodetector by growingβ-Ga_(2)O_(3) on Si–GaN via plasma-enhanced chemical vapor deposition.The device exhibits a self-powered photocurrent of 3.5 nA at zero bias,enabled by the photovoltaic effect of the space charge region.Under 254-nm and 365-nm illumination,it exhibits rectification behavior,achieving a responsivity of 0.475 m A/W(0 V,220??W/cm~2 at 254 nm)and 257.6 mA/W(-5 V),respectively.Notably,the photodetector demonstrates a high photocurrent-to-dark current ratio of 10~5 under-5-V bias,highlighting its potential for self-powered and high-performance UV detection applications. 展开更多
关键词 si–GaN/β-Ga_(2)O_(3) horizontally structured n–n heterojunction SELF-POWERED
原文传递
The Effects of Fabrication Prameters and Electroforming Phenomenon on CdTe/Si (p) Heterojunction Photovoltaic Solar Cell
2
作者 Wagah F. Mohammad 《Circuits and Systems》 2012年第1期42-47,共6页
The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical trouble... The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical troubles were encountered. However, the important one was the formation of the SiO2 thin oxide layer on the soft surface of the Si during the formation of the back contact. The silicon wafer was subjected to different chemical treatments in order to remove the thin oxide layer from the silicon wafer surfaces. It was found that the heterojunction with Si (p+) substrate gave relatively high open circuit voltage comparing with that of Si (p) substrate. Also an electroforming phenomenon had been observed in this structure for the first time which may be considered as a memory effect. It was observed that there are two states of conduction, non-conducting state and conducting state. The normal case is the non-conducting state. As the forward applied voltage increased beyond threshold value, it switches into the conducting state and remains in this state even after the voltage drops to zero. 展开更多
关键词 cdte SOLAR CELLS cdte/si heterojunction In-Doped cdte
暂未订购
SiC based Si/SiC heterojunction and its rectifying characteristics 被引量:2
3
作者 朱峰 陈治明 +2 位作者 李连碧 赵顺峰 林涛 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第11期4966-4969,共4页
The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play t... The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play the role of an light absorbing layer. This paper reports on Si films heteroepitaxially grown on the Si face of (0001) n-type 6H-SiC substrates and the use of B2H6 as a dopant for p-Si grown at temperatures in a range of 700-950℃. X-ray diffraction (XRD) analysis and transmission electron microscopy (TEM) tests have demonstrated that the samples prepared at the temperatures ranged from 850℃ to 900℃ are characterized as monocrystalline silicon. The rocking XRD curves show a well symmetry with FWHM of 0.4339° Omega. Twin crystals and stacking faults observed in the epitaxial layers might be responsible for widening of the rocking curves. Dependence of the crystal structure and surface topography on growth temperature is discussed based on the experimental results. The energy band structure and rectifying characteristics of the Si/SiC heterojunctions are also preliminarily tested. 展开更多
关键词 si/6H-siC heterojunction heteroepitaxy siC
原文传递
Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications 被引量:1
4
作者 谷锦华 司嘉乐 +3 位作者 王九秀 冯亚阳 郜小勇 卢景霄 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第11期502-505,共4页
The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivi... The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivity ITO films by direct-current (DC) magnetron sputtering, we studied the impacts of the ITO film deposition conditions, such as the oxygen flow rate, pressure, and sputter power, on the electrical and optical properties of the ITO films. ITO films of resistivity of 4 x 10-4 ~.m and average transmittance of 89% in the wavelength range of 380-780 nm were obtained under the optimized conditions: oxygen flow rate of 0.1 sccm, pressure of 0.8 Pa, and sputtering power of 110 W. These ITO films were used to fabricate the single-side HJ solar cell without an intrinsic a-Si:H layer. However, the best HJ solar cell was fabricated with a lower sputtering power of 95 W, which had an efficiency of 11.47%, an open circuit voltage (Voc) of 0.626 V, a filling factor (FF) of 0.50, and a short circuit current density (Jsc) of 36.4 mA/cm2. The decrease in the performance of the solar cell fabricated with high sputtering power of 110 W is attributed to the ion bombardment to the emitter. The Voc was improved to 0.673 V when a 5 nm thick intrinsic a-Si:H layer was inserted between the (p) a-Si:H and (n) c-Si layer. The higher Voc of 0.673 V for the single-side HJ solar cell implies the excellent c-Si surface passivation by a-Si:H. 展开更多
关键词 ITO films si heterojunction solar cell DC magnetron sputtering
原文传递
Forward and reverse electron transport properties across a CdS/Si multi-interface nanoheterojunction 被引量:2
5
作者 李勇 王伶俐 +4 位作者 王小波 闫玲玲 苏丽霞 田永涛 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第8期502-507,共6页
The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporou... The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporous pillar array, an untraditional, nonplanar, and multi-interface CdS/Si nanoheterojunction is prepared. The current density versus voltage curve is measured and an obvious rectification effect is observed. Based on the fitting results and model analyses on the forward and reverse conduction characteristics, the electron transport mechanism under low forward bias, high forward bias, and reverse bias are attributed to the Ohmic regime, space-charge-limited current regime, and modified Poole-Frenkel regime respectively. The forward and reverse electrical behaviors are found to be highly related to the distribution of inter- facial trap states and the existence of localized electric field respectively. These results might be helpful for optimizing the preparing procedures to realize high-performance silicon-based CdS optoelectronic devices. 展开更多
关键词 heterojunction multi-interface nanoheterojunction electron transport silicon nanoporous pillararray si-NPA) CdS/si-NPA
原文传递
Rectification and electroluminescence of nanostructured GaN/Si heterojunction based on silicon nanoporous pillar array 被引量:1
6
作者 王小波 李勇 +1 位作者 闫玲玲 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第10期432-437,共6页
A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. T... A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. The average size of nc-Ga N is determined to be ~10 nm. The spectral measurements disclose that the photoluminescence(PL) from GaN/SiNPA is composed of an ultraviolet(UV) band and a broad band spanned from UV to red region, with the feature that the latter band is similar to that of electroluminescence(EL). The electron transition from the energy levels of conduction band and, or, shallow donors to that of deep acceptors of Ga N is indicated to be responsible for both the broad-band PL and the EL luminescence. A study of the I-V characteristic shows that at a low forward bias, the current across the heterojunction is contact-limited while at a high forward bias it is bulk-limited, which follows the thermionic emission model and space-charge-limited current(SCLC) model, respectively. The bandgap offset analysis indicates that the carrier transport is dominated by electron injection from n-GaN into the p-Si-NPA, and the EL starts to appear only when holes begin to be injected from Si-NPA into GaN with biases higher than a threshold voltage. 展开更多
关键词 GaN/si-NPA heterojunction RECTIFICATION electroluminescence (EL)
原文传递
Ge/Si heterojunction L-shape tunnel field-effect transistors with hetero-gate-dielectric
7
作者 CongLi Zhi-Rui Yan +2 位作者 Yi-Qi Zhuang Xiao-Long Zhao Jia-Min Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第7期572-579,共8页
A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, ... A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, and the distri- bution of the band-to-band tunneling (BTBT) generation rate of GHL-TFET are analyzed. In addition, the effect of the vertical channel width on the ON-current is studied and the thickness of the gate dielectric is optimized for better suppression of ambipolar current. Moreover, analog/RF figure-of-merits of GHL-TFET are also investigated in terms of the cut-off frequency and gain bandwidth production. Simulation results indicate that the ON-current of GHL-TFET is increased by about three orders of magnitude compared with that of the conventional L-shaped TFET. Besides, the introduction of the hetero-gate-dielectric not only suppresses the ambipolar current effectively but also improves the analog/RF performance drastically. It is demonstrated that the maximum cut-off frequency of GHL-TFET is about 160 GHz, which is 20 times higher than that of the conventional L-shaped TFET. 展开更多
关键词 tunnel field-effect transistors Ge/si heterojunction hetero-gate-dielectric ambipolar effect
原文传递
Temperature-dependent rectifying and photovoltaic characteristics of an oxygen-deficient Bi_2Sr_2Co_2O_y/Si heterojunction
8
作者 闫国英 白子龙 +5 位作者 李慧玲 傅广生 刘富强 于威 王江龙 王淑芳 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第10期500-503,共4页
A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties ar... A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties are studied in a wide temperature range from 20 K to 300 K. The transport mechanism under the forward bias can be attributed to a trap- filled space-charge-limited current conduction mechanism. Under the irradiation of a 532-nm continuous wave laser, a clear photovoltaic effect is observed and the magnitude ofphotovoltage increases as the temperature decreases, The results demonstrate the potential application of a Bi2SrzCo2Oy-based heterojunction in the photoelectronic devices. 展开更多
关键词 Bi2Sr2Co2Oy/si heterojunction rectifying characteristics photovoltaic effect space-charge-limited current
原文传递
Novel Si/SiC heterojunction lateral double-diffused metal-oxide semiconductor field-effect transistor with p-type buried layer breaking silicon limit
9
作者 Baoxing Duan Xin Huang +2 位作者 Haitao Song Yandong Wang Yintang Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第4期605-609,共5页
A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first ti... A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first time.The heterojunction has breakdown point transfer(BPT) characteristics,and the BPT terminal technology is used to increase the breakdown voltage(BV) of Si/SiC LDMOS with the deep drain region.In order to further optimize the surface lateral electric field distribution of Si/SiC LDMOS with the deep drain region,the p-type buried layer is introduced in PBL Si/SiC LDMOS.The vertical electric field is optimized by Si/SiC heterojunction and the surface lateral electric field is optimized by the p-type buried layer,which greatly improves the BV of device and alleviates the relationship between BV and specific on-resistance(R_(on,sp)).Through TCAD simulation,when the drift region length is 20 μm,the BV is significantly improved from 249 V for the conventional Si LDMOS to 440 V for PBL Si/SiC LDMOS,increased by 77%;And the BV is improved from 384 V for Si/SiC LDMOS with the deep drain region to 440 V for the proposed structure,increased by 15%.The figure-of-merit(FOM) of the Si/SiC LDMOS with the deep drain region and PBL Si/SiC LDMOS are 4.26 MW/cm^(2) and 6.37 MW/cm^(2),respectively.For the PBL Si/SiC LDMOS with the drift length of 20 μm,the maximum FOM is 6.86 MW/cm^(2).The PBL Si/SiC LDMOS breaks conventional silicon limit. 展开更多
关键词 si/siC heterojunction LDMOS breakdown voltage specific on-resistance
原文传递
Interfacial photoconductivity effect of type-Ⅰ and type-Ⅱ Sb2Se3/Si heterojunctions for THz wave modulation
10
作者 曹雪芹 黄媛媛 +7 位作者 席亚妍 雷珍 王静 刘昊楠 史明坚 韩涛涛 张蒙恩 徐新龙 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第11期82-86,共5页
An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivi... An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivity and photocarrier density at the heterojunction interface remains elusive. Herein, we have obtained the photoconductivity and photocarrier density of 173 nm Sb2Se3/Si(type-Ⅰ heterojunction) and 90 nm Sb2Se3/Si(type-Ⅱ heterojunction) utilizing terahertz(THz) time-domain spectroscopy(THz-TDS) and a theoretical Drude model. Since type-Ⅰ heterojunctions accelerate carrier recombination and type-Ⅱ heterojunctions accelerate carrier separation, the photoconductivity and photocarrier density of the type-Ⅱ heterojunction(21.8×10^(4)S·m^(-1),1.5 × 10^(15)cm^(-3)) are higher than those of the type-Ⅰ heterojunction(11.8×10^(4)S·m^(-1),0.8×10^(15)cm^(-3)). These results demonstrate that a type-Ⅱ heterojunction is superior to a type-Ⅰ heterojunction for THz wave modulation. This work highlights THz-TDS as an effective tool for studying photoconductivity and photocarrier density at the heterojunction interface. In turn, the intriguing interfacial photoconductivity effect provides a way to improve the THz wave modulation performance. 展开更多
关键词 PHOTOCONDUCTIVITY Sb2 Se3/si heterojunctions THZ-TDS Drude model
原文传递
CdS/Si nanofilm heterojunctions based on amorphous silicon films:Fabrication,structures,and electrical properties
11
作者 Yong Li Peng-Fei Ji +3 位作者 Yue-Li Song Feng-Qun Zhou Hong-Chun Huang Shu-Qing Yuan 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第2期385-389,共5页
Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunc... Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunctions are fabricated by using the radio frequency magnetron sputtering method to deposit the amorphous silicon nanofilms and Cd S nanofilms on the ITO glass in turn.The relation of current density to applied voltage(I-V)shows the obvious rectification effect.From the analysis of the double logarithm I-V curve it follows that below~2.73 V the electron behaviors obey the Ohmic mechanism and above~2.73 V the electron behaviors conform to the space charge limited current(SCLC)mechanism.In the SCLC region part of the traps between the Fermi level and conduction band are occupied,and with the increase of voltage most of the traps are occupied.It is believed that Cd S/Si nanofilm heterojunction is a potential candidate in the field of nano electronic and optoelectronic devices by optimizing its fabricating procedure. 展开更多
关键词 magnetron sputtering CdS/si nanofilm heterojunctions electron behaviors SCLC mechanisms
原文传递
a-Si/c-Si heterojunction solar cells on SiSiC ceramic substrates
12
作者 LI Xudong XU Ying CHE Xiaoqi 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期186-189,共4页
Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollutio... Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollution. In this paper, latest progress on poly-crystalline silicon solar cells on ceramic substrates achieved by our group was reported. Rapid thermal chemical vapor deposition (RTCVD) was used to deposited poly-crystalline silicon thin films, and the grains of as-grown film were enlarged by Zone-melting Recrystallization (ZMR). As a great change in cell′s structure, traditional diffused pn homojunction was replaced by a-Si/c-Si heterojunction, which lead is to distinct improvement in cell′s efficiency. A conversion efficiency of 3.42% has been achieved on 1 cm2 a-Si/c-Si heterojunction solar cell (Isc=16.93 mA, Voc=310.9 mV, FF=0.6493, AM=1.5 G, 24 ℃), while the cell with diffused homojunction only got an efficiency of 0.6%. It indicates that a-Si emitter formed at low temperature might be more suitable for thin film cell on ceramics. 展开更多
关键词 a-si/c-si heterojunction thin film solar cell ceramic substrate
在线阅读 下载PDF
Simulation of a-Si:H/c-Si heterojunction solar cells: From planar junction to local junction
13
作者 Haibin Huang Lang Zhou +1 位作者 Jiren Yuan Zhijue Quan 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第12期370-377,共8页
In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with lo... In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with localized p–n structure(HACL) is designed. A numerical simulation is performed with the ATLAS program. The effect of the a-Si:H layer on the performance of the HIT(heterojunction with intrinsic thin film) solar cell is investigated. The performance improvement mechanism for the HACL cell is explored. The potential performance of the HACL solar cell is compared with those of the HIT and HACD(heterojunction of amorphous silicon and crystalline silicon with diffused junction) solar cells.The simulated results indicate that the a-Si:H layer can bring about much absorption loss. The conversion efficiency and the short-circuit current density of the HACL cell can reach 28.18% and 43.06 m A/cm^2, respectively, and are higher than those of the HIT and HACD solar cells. The great improvement are attributed to(1) decrease of optical absorption loss of a-Si:H and(2) decrease of photocarrier recombination for the HACL cell. The double-side local junction is very suitable for the bifacial solar cells. For an HACL cell with n-type or p-type c-Si base, all n-type or p-type c-Si passivating layers are feasible for convenience of the double-side diffusion process. Moreover, the HACL structure can reduce the consumption of rare materials since the transparent conductive oxide(TCO) can be free in this structure. It is concluded that the HACL solar cell is a promising structure for high efficiency and low cost. 展开更多
关键词 silicon solar cell a-si:H/c-si heterojunction short-circuit current local junction
原文传递
CdTe/Si复合衬底Ex-situ退火研究 被引量:8
14
作者 刘铭 周立庆 +3 位作者 巩锋 常米 王经纬 王丛 《激光与红外》 CAS CSCD 北大核心 2012年第8期917-920,共4页
复合衬底CdTe/ZnTe/Si的晶体质量是导致随后外延的HgCdTe外延膜高位错密度的主要原因之一,因此如何提高复合衬底CdTe/Si晶体质量是确保硅基碲镉汞走上工程化的关键所在。降低复合衬底CdTe/Si位错密度方法一般有:生长超晶格缓冲层、衬底... 复合衬底CdTe/ZnTe/Si的晶体质量是导致随后外延的HgCdTe外延膜高位错密度的主要原因之一,因此如何提高复合衬底CdTe/Si晶体质量是确保硅基碲镉汞走上工程化的关键所在。降低复合衬底CdTe/Si位错密度方法一般有:生长超晶格缓冲层、衬底偏向、In-situ退火和Ex-situ退火等,本文主要研究Ex-situ退火对复合衬底CdTe/Si晶体质量的影响。研究表明复合衬底经过Ex-situ退火后位错密度最好值达4.2×105cm-2,双晶半峰宽最好值达60arcsec。 展开更多
关键词 cdte/si MBE 晶体质量 Ex-situ退火
在线阅读 下载PDF
3英寸CdTe/Si复合衬底外延技术研究 被引量:20
15
作者 周立庆 刘铭 +3 位作者 巩锋 董瑞清 折伟林 常米 《激光与红外》 CAS CSCD 北大核心 2011年第5期537-541,共5页
报道了采用分子束外延法,在3 in硅衬底上通过As钝化、ZnTe缓冲层生长、CdTe生长、周期性退火等工艺进行CdTe/Si复合衬底制备技术研究情况,采用光学显微镜、X射线高分辨衍射仪、原子力显微镜、红外傅里叶光谱仪和湿化学腐蚀等手段对碲化... 报道了采用分子束外延法,在3 in硅衬底上通过As钝化、ZnTe缓冲层生长、CdTe生长、周期性退火等工艺进行CdTe/Si复合衬底制备技术研究情况,采用光学显微镜、X射线高分辨衍射仪、原子力显微镜、红外傅里叶光谱仪和湿化学腐蚀等手段对碲化镉薄膜进行了表征,测试分析结果表明碲化镉薄膜的晶向得到了较好的控制,孪晶得到了抑制,且具有较好晶体结构质量和均匀性。 展开更多
关键词 碲化镉 硅基 分子束外延
在线阅读 下载PDF
在Si(211)衬底上分子束外延CdTe的晶格应变 被引量:3
16
作者 王元樟 陈路 +4 位作者 巫艳 吴俊 于梅芳 方维政 何力 《激光与红外》 CAS CSCD 北大核心 2005年第11期861-863,共3页
文章利用高分辨率X射线衍射技术对分子束外延CdTe(211)B/Si(211)材料的CdTe外延薄膜进行了倒易点二维扫描,并通过获得的对称衍射面和非对称衍射面的倒易空间图,对CdTe外延层的剪切应变和正应变状况进行了分析。研究发现,对于CdTe/Si结构... 文章利用高分辨率X射线衍射技术对分子束外延CdTe(211)B/Si(211)材料的CdTe外延薄膜进行了倒易点二维扫描,并通过获得的对称衍射面和非对称衍射面的倒易空间图,对CdTe外延层的剪切应变和正应变状况进行了分析。研究发现,对于CdTe/Si结构,随着CdTe厚度的增加,[1-1-1]、[01-1]两个方向的剪切角γ[1-1-1]和[γ01-1]都有变小的趋势,且γ[1-1-1]的大小约为[γ01-1]的两倍;对于CdTe/ZnTe/Si,ZnTe缓冲层的引入可以有效地降低CdTe层的剪切应变。CdTe层的正应变表现为张应变,主要来源于CdTe和Si的热膨胀系数存在差异,而在从生长温度280℃降至室温20℃的过程产生的热应变。 展开更多
关键词 cdte/si 倒易点二维扫描图 剪切应变 正应变 分子束外延
在线阅读 下载PDF
分子束外延CdTe(211)B/Si复合衬底材料 被引量:8
17
作者 陈路 王元樟 +4 位作者 巫艳 吴俊 于梅芳 乔怡敏 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2005年第4期245-249,共5页
报道了用MBE的方法,在3英寸Si衬底上制备ZnTe/CdTe(211)B复合衬底材料的初步研究结果,该研究结果将能够直接应用于大面积Si基HgCdTeIRFPA材料的生长.经过Si(211)衬底低温表面处理、ZnTe低温成核、高温退火、高温ZnTe、CdTe层的生长研究,... 报道了用MBE的方法,在3英寸Si衬底上制备ZnTe/CdTe(211)B复合衬底材料的初步研究结果,该研究结果将能够直接应用于大面积Si基HgCdTeIRFPA材料的生长.经过Si(211)衬底低温表面处理、ZnTe低温成核、高温退火、高温ZnTe、CdTe层的生长研究,用MBE方法成功地获得了3英寸Si基ZnTe/CdTe(211)B复合衬底材料.CdTe厚度大于10μm,XRDFWHM平均值为120arcsec,最好达到100arcsec,无(133)孪晶和其他多晶晶向. 展开更多
关键词 分子束外延 碲化镉 硅基
在线阅读 下载PDF
Si/CdTe复合衬底HgCdTe液相外延材料的生长与性能分析 被引量:2
18
作者 徐庆庆 陈新强 +2 位作者 魏彦锋 杨建荣 陈路 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第7期1078-1082,共5页
通过改进推舟液相外延技术,成功地在(211)晶向Si/CdTe复合衬底上进行了HgCdTe液相外延生长,获得了表面光亮的HgCdTe外延薄膜.测试结果表明,(211)Si/CdTe复合衬底液相外延HgCdTe材料组分及厚度的均匀性与常规(111)CdZnTe衬底HgCdT... 通过改进推舟液相外延技术,成功地在(211)晶向Si/CdTe复合衬底上进行了HgCdTe液相外延生长,获得了表面光亮的HgCdTe外延薄膜.测试结果表明,(211)Si/CdTe复合衬底液相外延HgCdTe材料组分及厚度的均匀性与常规(111)CdZnTe衬底HgCdTe外延材料相当;位错腐蚀坑平均密度为(5~8)×10^5cm^-2,比相同衬底上分子束外延材料的平均位错密度要低一个数量级;晶体的双晶半峰宽达到70"左右.研究结果表明,在发展需要低位错密度的大面积长波HgCdTe外延材料制备技术方面,Si/CdTe复合衬底HgCdTe液相外延技术可发挥重要的作用. 展开更多
关键词 si/cdte复合衬底 HGcdte 液相外延
在线阅读 下载PDF
Hg_(1-x)Cd_xTe/CdTe/Si薄膜厚度测试方法的研究 被引量:6
19
作者 折伟林 田璐 +3 位作者 晋舜国 许秀娟 沈宝玉 王文燕 《激光与红外》 CAS CSCD 北大核心 2012年第12期1351-1354,共4页
在分子束外延生长高质量的CdTe/Si复合衬底上,分别通过MBE和LPE技术成功地研制出Hg1-xCdxTe/CdTe/Si红外探测器所需的重要红外半导体材料。利用傅里叶变换红外光谱仪对Hg1-xCdxTe/CdTe/Si红外半导体材料的红外透射光谱进行测试分析且计... 在分子束外延生长高质量的CdTe/Si复合衬底上,分别通过MBE和LPE技术成功地研制出Hg1-xCdxTe/CdTe/Si红外探测器所需的重要红外半导体材料。利用傅里叶变换红外光谱仪对Hg1-xCdxTe/CdTe/Si红外半导体材料的红外透射光谱进行测试分析且计算薄膜厚度,并配合扫描电子显微镜对其厚度计算分析进行校正,最终获得一种无破坏、无污染、快捷方便的多层膜厚度测试方法。 展开更多
关键词 碲镉汞/碲化镉/硅 傅里叶变换红外光谱仪 扫描电子显微镜 分子束外延 液相外延
在线阅读 下载PDF
偏转角(211)Si基CdTe复合衬底研究 被引量:1
20
作者 王丛 高达 +2 位作者 王经纬 强宇 周立庆 《激光与红外》 CAS CSCD 北大核心 2018年第7期876-879,共4页
晶面偏角是提高(211)Si基CdTe复合衬底质量的方法之一。通过对偏转角Si基CdTe复合衬底分子束外延工艺的研究,发现2°和3°偏转角(211)Si基CdTe复合衬底在晶体质量方面优于标准(211)Si基CdTe复合衬底,是未来提高Si基CdTe复合衬... 晶面偏角是提高(211)Si基CdTe复合衬底质量的方法之一。通过对偏转角Si基CdTe复合衬底分子束外延工艺的研究,发现2°和3°偏转角(211)Si基CdTe复合衬底在晶体质量方面优于标准(211)Si基CdTe复合衬底,是未来提高Si基CdTe复合衬底质量的新方向。 展开更多
关键词 碲化镉 偏转角si衬底 分子束外延
在线阅读 下载PDF
上一页 1 2 9 下一页 到第
使用帮助 返回顶部