A two-bit phase shifter with distributed microelectromechanical system (MEMS) transmission line (DMTL) is developed,and a novel structure which be actuated by coplanar waveguide transmission line (CPW-actuation struct...A two-bit phase shifter with distributed microelectromechanical system (MEMS) transmission line (DMTL) is developed,and a novel structure which be actuated by coplanar waveguide transmission line (CPW-actuation structure) is proposed,which can reduce the actuation voltage significantly.The measured result,with actuation voltage less than 20V,0°/20.1°/41.9°/68.2° phase shift and -1.2dB insert loss at 20GHz,is demonstrated,and insertion loss/return loss is better than -1.8dB/-11dB from DC to 32GHz.The experimental results highlight the potential of a low-loss and broadband digital MEMS phase shifter on a high-permittivity substrate.展开更多
文摘A two-bit phase shifter with distributed microelectromechanical system (MEMS) transmission line (DMTL) is developed,and a novel structure which be actuated by coplanar waveguide transmission line (CPW-actuation structure) is proposed,which can reduce the actuation voltage significantly.The measured result,with actuation voltage less than 20V,0°/20.1°/41.9°/68.2° phase shift and -1.2dB insert loss at 20GHz,is demonstrated,and insertion loss/return loss is better than -1.8dB/-11dB from DC to 32GHz.The experimental results highlight the potential of a low-loss and broadband digital MEMS phase shifter on a high-permittivity substrate.
