Cluster tools have advantages of shorter cycle times,faster process development,and better yield for less contamination.The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor pr...Cluster tools have advantages of shorter cycle times,faster process development,and better yield for less contamination.The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor production.Efficient use of cluster tools is naturally very significant to competitive fab operations.Generating an optimized sequence in a computationally efficient manner and assessing the quality of the requirements to improve the fab production are the key factors for semiconductor manufacturing productivity.The Petri net modeling is introduced to minimize the makespan of the process for the three different logical modes and select a better mode after comparing the makespan among the three logical modes.The tool sequence optimization problem is formulated as optimization firing transition sequences based on the Petri net and then the formulation is converted to be linearly solved by the branch-and-cut method in the standard commercial solver CPLEX.Special methods for the linear conversion are highlighted.Due to the limited calculation time requirement for the real production and the large scale of the problem,special methods for the efficiency tuning are applied according to the characteristics of the problem.Numerical testing is supported by one of the most advanced semiconductor enterprises and the computational results show significant improvement compared with the traditional manual sequence results.展开更多
针对冷热电联供(combined cooling,heating and power,CCHP)"以热定电"导致的弃风问题,提出一种考虑风电消纳的区域综合能源系统源荷协调优化调度方法。首先,在源侧引入地源热泵利用风电供热,解耦CCHP"以热定电"运...针对冷热电联供(combined cooling,heating and power,CCHP)"以热定电"导致的弃风问题,提出一种考虑风电消纳的区域综合能源系统源荷协调优化调度方法。首先,在源侧引入地源热泵利用风电供热,解耦CCHP"以热定电"运行约束;其次,在荷侧分析电、热需求资源可调度价值,采用电价和激励两类需求响应(demand response,DR)共同协助风电并网消纳;最后,考虑源荷协调建立区域综合能源系统双层优化调度模型,上层采用电价需求响应引导用户响应风电出力变化,下层计及供热舒适度模糊性与地源热泵作用,以调度周期内系统总成本最小为目标决策各机组最优出力,采用商业优化软件CPLEX对双层模型求解。仿真算例表明:该方法有效提高了系统风电消纳能力,降低了系统运行成本,具有良好的社会经济效益。展开更多
基金the National Natural Science Foundation of China(No.60534010)the 111 Project (No.B08015)the Project of Ministry of Education (No.NCET-05-0294)
文摘Cluster tools have advantages of shorter cycle times,faster process development,and better yield for less contamination.The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor production.Efficient use of cluster tools is naturally very significant to competitive fab operations.Generating an optimized sequence in a computationally efficient manner and assessing the quality of the requirements to improve the fab production are the key factors for semiconductor manufacturing productivity.The Petri net modeling is introduced to minimize the makespan of the process for the three different logical modes and select a better mode after comparing the makespan among the three logical modes.The tool sequence optimization problem is formulated as optimization firing transition sequences based on the Petri net and then the formulation is converted to be linearly solved by the branch-and-cut method in the standard commercial solver CPLEX.Special methods for the linear conversion are highlighted.Due to the limited calculation time requirement for the real production and the large scale of the problem,special methods for the efficiency tuning are applied according to the characteristics of the problem.Numerical testing is supported by one of the most advanced semiconductor enterprises and the computational results show significant improvement compared with the traditional manual sequence results.
文摘针对冷热电联供(combined cooling,heating and power,CCHP)"以热定电"导致的弃风问题,提出一种考虑风电消纳的区域综合能源系统源荷协调优化调度方法。首先,在源侧引入地源热泵利用风电供热,解耦CCHP"以热定电"运行约束;其次,在荷侧分析电、热需求资源可调度价值,采用电价和激励两类需求响应(demand response,DR)共同协助风电并网消纳;最后,考虑源荷协调建立区域综合能源系统双层优化调度模型,上层采用电价需求响应引导用户响应风电出力变化,下层计及供热舒适度模糊性与地源热泵作用,以调度周期内系统总成本最小为目标决策各机组最优出力,采用商业优化软件CPLEX对双层模型求解。仿真算例表明:该方法有效提高了系统风电消纳能力,降低了系统运行成本,具有良好的社会经济效益。
