源在外延片直径方向上的耗尽导致了外延片上局部各点的生长速率及掺杂浓度是个随位置变化的量,因此造成了外延片厚度及浓度的不均匀性。通过引入基座气浮旋转可以有效降低这种不均匀性,在典型工艺条件下,采用基座旋转,76.2 mm 4H-SiC外...源在外延片直径方向上的耗尽导致了外延片上局部各点的生长速率及掺杂浓度是个随位置变化的量,因此造成了外延片厚度及浓度的不均匀性。通过引入基座气浮旋转可以有效降低这种不均匀性,在典型工艺条件下,采用基座旋转,76.2 mm 4H-SiC外延片厚度不均匀性、p型掺杂浓度不均匀性和n型掺杂不均匀性分别为0.21%、1.13%和6.96%。基座旋转并不能完全消除外延片n型掺杂浓度不均匀性。优化主氢流量及C/Si比能够改变掺杂源的耗尽曲线,将76.2 mm SiC外延片n型掺浓度不均匀性优化至2.096%(σ/mean)。展开更多
Fiber-reinforced composites possess anisotropic mechanical and heat transfer properties due to their anisotropic fibers and structure distribution.In C/Si C composites,the out-of-plane thermal conductivity has mainly ...Fiber-reinforced composites possess anisotropic mechanical and heat transfer properties due to their anisotropic fibers and structure distribution.In C/Si C composites,the out-of-plane thermal conductivity has mainly been studied,whereas the in-plane thermal conductivity has received less attention due to their limited thickness.展开更多
文摘源在外延片直径方向上的耗尽导致了外延片上局部各点的生长速率及掺杂浓度是个随位置变化的量,因此造成了外延片厚度及浓度的不均匀性。通过引入基座气浮旋转可以有效降低这种不均匀性,在典型工艺条件下,采用基座旋转,76.2 mm 4H-SiC外延片厚度不均匀性、p型掺杂浓度不均匀性和n型掺杂不均匀性分别为0.21%、1.13%和6.96%。基座旋转并不能完全消除外延片n型掺杂浓度不均匀性。优化主氢流量及C/Si比能够改变掺杂源的耗尽曲线,将76.2 mm SiC外延片n型掺浓度不均匀性优化至2.096%(σ/mean)。
基金supported by the National Natural Science Foundation of China(Grant Nos.52276086 and 52130604)the Basic Research Program of China(Grant No.514010303-102)the K.C.Wong Education Foundation。
文摘Fiber-reinforced composites possess anisotropic mechanical and heat transfer properties due to their anisotropic fibers and structure distribution.In C/Si C composites,the out-of-plane thermal conductivity has mainly been studied,whereas the in-plane thermal conductivity has received less attention due to their limited thickness.
