Bi3.15Nd0.85Ti3O12 (BNdT) films were deposited on Pt/Ti/SiO2/Si(100) substrates by a metal organic decomposition (MOD)method, and annealed by a rapid thermal annealing process in oxygen atmosphere and in air, respecti...Bi3.15Nd0.85Ti3O12 (BNdT) films were deposited on Pt/Ti/SiO2/Si(100) substrates by a metal organic decomposition (MOD)method, and annealed by a rapid thermal annealing process in oxygen atmosphere and in air, respectively. The crystalline structuresand morphologies of BNdT films were characterized by X-ray diffraction and field-emission scanning electron microscopy, and thegas sensing properties were measured by monitoring its resistance at different gas concentrations. The results indicate that the BNdTfilms annealed in air are of porous microstructure and rough surface, and the annealing atmosphere has great influence on gas sensingproperties. At an operating temperature of 100 °C, the BNdT films annealed in air are of high response value to 1×10?6 gaseousethanol, and the detecting limit is as low as 0.1×10?6. The corresponding response and recovery time is about 10 and 6 s, respectively.The results can offer useful guidelines for fabricating high performance ethanol sensors.展开更多
基金Project(51402250)supported by the National Natural Science Foundation of ChinaProject(2015JJ4046)supported by the Hunan Provincial Natural Science Foundation of ChinaProject(14B168)supported by the Scientific Research Fund of Hunan Provincial Education Department,China
文摘Bi3.15Nd0.85Ti3O12 (BNdT) films were deposited on Pt/Ti/SiO2/Si(100) substrates by a metal organic decomposition (MOD)method, and annealed by a rapid thermal annealing process in oxygen atmosphere and in air, respectively. The crystalline structuresand morphologies of BNdT films were characterized by X-ray diffraction and field-emission scanning electron microscopy, and thegas sensing properties were measured by monitoring its resistance at different gas concentrations. The results indicate that the BNdTfilms annealed in air are of porous microstructure and rough surface, and the annealing atmosphere has great influence on gas sensingproperties. At an operating temperature of 100 °C, the BNdT films annealed in air are of high response value to 1×10?6 gaseousethanol, and the detecting limit is as low as 0.1×10?6. The corresponding response and recovery time is about 10 and 6 s, respectively.The results can offer useful guidelines for fabricating high performance ethanol sensors.
