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生长温度对In_(0.53)Ga_(0.47)As/InP的LPMOCVD生长影响 被引量:3
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作者 缪国庆 金亿鑫 +4 位作者 蒋红 周天明 李树玮 元光 宋航 《发光学报》 EI CAS CSCD 北大核心 2002年第5期465-468,共4页
利用LPMOCVD技术在InP衬底生长了InxGa1-xAs材料 ,获得表面平整、光亮的In0 53 Ga0 47As外延层。研究了生长温度对InxGa1-xAs外延层组分、表面形貌、结晶质量、电学性质的影响。随着生长温度的升高 ,为了保证铟在固相中组分不变 ,必... 利用LPMOCVD技术在InP衬底生长了InxGa1-xAs材料 ,获得表面平整、光亮的In0 53 Ga0 47As外延层。研究了生长温度对InxGa1-xAs外延层组分、表面形貌、结晶质量、电学性质的影响。随着生长温度的升高 ,为了保证铟在固相中组分不变 ,必须增加三甲基铟在气相中的比例。在生长温度较高时 ,外延层表面粗糙。生长温度在 6 30℃与 6 5 0℃之间 ,X射线双晶衍射曲线半高宽最窄 ,高于或低于这个温度区间 ,半高宽变宽。迁移率随着生长温度的升高而增加 ,在 6 30℃为最大值 ,然后随着生长温度的升高反而降低。生长温度降低使载流子浓度增大 ,在生长温度大于 6 展开更多
关键词 IN0.53GA0.47as/inp LPMOCVD 铟镓砷化合物 生长温度 低压金属有机化学气相沉积 半导体材料 磷化铟衬底
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高量子效率InP/In_(0.53)Ga_(0.47)As/InP红外光电阴极模拟 被引量:3
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作者 周振辉 徐向晏 +8 位作者 刘虎林 李岩 卢裕 钱森 韦永林 何凯 赛小锋 田进寿 陈萍 《红外与激光工程》 EI CSCD 北大核心 2019年第2期247-253,共7页
将In_(0.53)Ga_(0.47)As吸收层设计为多个薄层,通过不同浓度掺杂实现吸收层杂质指数分布,建立了InP/In_(0.53)Ga_(0.47)As/InP红外光电阴极模型,在皮秒级响应时间的前提下模拟了吸收层厚度、掺杂浓度和阴极外置偏压对阴极内量子效率的影... 将In_(0.53)Ga_(0.47)As吸收层设计为多个薄层,通过不同浓度掺杂实现吸收层杂质指数分布,建立了InP/In_(0.53)Ga_(0.47)As/InP红外光电阴极模型,在皮秒级响应时间的前提下模拟了吸收层厚度、掺杂浓度和阴极外置偏压对阴极内量子效率的影响,给出了光电子在吸收层和发射层的一维连续性方程和边界条件,计算了光电子克服激活层势垒发射到真空中的几率,进而获得阴极外量子效率随上述三个因素的变化规律,结果表明,吸收层掺杂浓度在10^(15)~10^(18)cm^(-3)范围内变化时,内量子效率变化很小;随着吸收层厚度在0.09~0.81μm内增大,内量子效率随之增大;随着外置偏压升高,内量子效率先增大后趋于平稳。文中给出一组既能获得高量子效率又能有快时间响应的阴极设计参数,理论上1.55μm入射光可以获得8.4%的外量子效率,此时响应时间为49 ps。 展开更多
关键词 量子效率 响应时间 指数掺杂 红外光电阴极 inp/In0.53Ga0.47as/inp
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Low phase noise and quasi-tunable millimeter-wave generator using a passively In As/InP mode-locked quantum dot laser 被引量:1
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作者 LIU Li LIU Yang-guang +2 位作者 ZHANG Xiao-min LIU Bang-quan ZHANG Xiu-pu 《Optoelectronics Letters》 EI 2020年第6期441-445,共5页
A low phase noise millimeter-wave(MMW) signal generator is proposed and experimentally demonstrated with a C-band passively Fabry-Pérot(F-P) quantum dot mode-locked laser. A novel method is proposed to generate l... A low phase noise millimeter-wave(MMW) signal generator is proposed and experimentally demonstrated with a C-band passively Fabry-Pérot(F-P) quantum dot mode-locked laser. A novel method is proposed to generate low phase noise MMW signal, which is simply based on a commercial off-the-shelf dual-driven Li Nb O3 Mach-Zehnder modulator and a passively F-P quantum dot mode-locked laser. MMW signal with the frequency of 30 GHz, 45 GHz and 90 GHz respectively is obtained experimentally. Single-sideband phase noise of the 30 GHz and 45 GHz MMW signal is-112 d Bc/Hz and-106 d Bc/Hz at an offset of 1 k Hz, respectively. The linewidth of the 30 GHz and 45 GHz MMW signal is about from 225 Hz and 239 Hz. This is considered a very simple MMW generator with a quasi-tunable broadband and ultra-low phase noise. 展开更多
关键词 MZM Low phase noise and quasi-tunable millimeter-wave generator using a passively In as/inp mode-locked quantum dot laser inp
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Ga_(0.47)In_(0.53)As/InP双异质结晶片的化学束外延生长
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作者 周华 《液晶与显示》 CAS CSCD 1991年第2期26-27,共2页
垂直腔面发射激光器需要外延层的总厚度达10μm,因此需要较高的生长速率并且不能降低晶体质量。这里介绍的适用于Ⅲ—Ⅴ化合物半导体生长的化学束外延技术综合了 MBE 和 MOCVD 技术的若干优点,这种技术的优点是可实现高生长速率,良好的... 垂直腔面发射激光器需要外延层的总厚度达10μm,因此需要较高的生长速率并且不能降低晶体质量。这里介绍的适用于Ⅲ—Ⅴ化合物半导体生长的化学束外延技术综合了 MBE 和 MOCVD 技术的若干优点,这种技术的优点是可实现高生长速率,良好的表面均匀性和易于实现有利于激光晶片生长所需合金的组分控制。 展开更多
关键词 化学束外延 as/inp GA In 异质结 化合物半导体 MOCVD 外延层 分控制 晶体质量
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Room-Temperature Annealing of 1 MeV Electron Irradiated Lattice Matched In0.53Ga0.47As/InP Multiple Quantum Wells
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作者 王海娇 李豫东 +3 位作者 郭旗 玛丽娅 文林 汪波 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期99-102,共4页
Long-term room-temperature annealing effects of InGaAs/InP quantum wells with different wells (namely triple wells and five wells embedded) and bulk InCaAs are investigated after high energy electron irradiation. It... Long-term room-temperature annealing effects of InGaAs/InP quantum wells with different wells (namely triple wells and five wells embedded) and bulk InCaAs are investigated after high energy electron irradiation. It is observed that the photoluminescence (PL) intensity of bulk InGaAs materials is enhanced after low dose electron irradiation and the PL intensity for all the three samples is degraded dramatically when the electron dose is relatively high. With respect to the room-temperature annealing, we find that the PL intensity for both samples recovers relatively fast at the initial stage. The PL performance of multiple quantum-well samples shows better recovery after irradiation compared with the results of bulk InGaAs materials. Meanwhile, the recovery speed factors of multiple quantum-well samples are relatively faster than those of the bulk InGaAs materials as well. We infer that the recovery difference between the quantum-well materials and bulk materials originates from the fact that the radiation induced defects are confined in the quantum wells as a consequence of the free energy barrier between the In0.53Ga0.47 As wells and InP barrier layers. 展开更多
关键词 InGaAs inp Ga Room-Temperature Annealing of 1 MeV Electron Irradiated Lattice Matched In as/inp Multiple Quantum Wells
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正面入射In_(0.53)Ga_(0.47)As/InP光电PIN管量子效率研究
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作者 张胜琼 张燕斌 施虎 《固体电子学研究与进展》 CAS 1987年第1期50-56,共7页
本文建立正面入射型In_(0.53)Ga_(0.47)As/InP光电PIN二极管量子效率理论分析模型;分析了提高量子效率的途径:减小结深,改善表面状况对提高器件量子效率有显著作用。应用于器件制作,使器件量子效率在无防反射涂层时可达60%左右,有防反... 本文建立正面入射型In_(0.53)Ga_(0.47)As/InP光电PIN二极管量子效率理论分析模型;分析了提高量子效率的途径:减小结深,改善表面状况对提高器件量子效率有显著作用。应用于器件制作,使器件量子效率在无防反射涂层时可达60%左右,有防反射涂层时高达85%。 展开更多
关键词 量子效率 激光效率 防反射涂层 In 结深 入射 扩散长度 PIN as/inp inp 正面 GA
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Multicolor InAs/InP(100) Quantum Dot Laser
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作者 LI Shi-Guo GONG Qian +5 位作者 CAO Chun-Fang WANG Xin-Zhong WANG Rui-Chun YUE Li LIU Qing-Bo WANG Hai-Long 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第11期141-143,共3页
We report on a three-colour InAs/InP(100)quantum dot laser under continuous wave mode at an operation temperature of 20℃.Three lasing peaks are observed simultaneously,the high-energy peak undergoes continuous bluesh... We report on a three-colour InAs/InP(100)quantum dot laser under continuous wave mode at an operation temperature of 20℃.Three lasing peaks are observed simultaneously,the high-energy peak undergoes continuous blueshift,while the splitting energy gap between the low-energy peaks is somewhat fixed as the injection current increases.The maximum output power from one facet without coating is more than 34mW with a slope efficiency of 102mW/A just above the threshold current.Three peaks of differential efficiency of output power are observed,just corresponding to each peak in lasing spectra,respectively.At the same time,the far-field distribution shows only a single transverse mode over the full range of injection current. 展开更多
关键词 as/inp LASING INJECTION
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Optical and Structural Properties of In_(0.52)Al_(0.48)As/InP Structures Grown at Very High Arsenic Overpressures by Molecular Beam Epitaxy
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作者 S.F. Yoon(School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue,Singapore 639798, Rep. of Singapore 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1998年第3期231-235,共5页
Growth of ln0.52Al0.48As epitaxial layers on lnP(100) substrates by molecular beam epitaxy at a wide range of arsenic overpressures (V/III flux ratios from 30 to 300) has been carried out. Analysis performed using low... Growth of ln0.52Al0.48As epitaxial layers on lnP(100) substrates by molecular beam epitaxy at a wide range of arsenic overpressures (V/III flux ratios from 30 to 300) has been carried out. Analysis performed using low-temperature photoluminescence (PL) and double-axis X-ray diffraction (XRD) shows a strong and prominent dependence of the PL and XRD linewidths on the V/III flux ratio. Under our growth conditions, both the PL and XRD linewidths exhibit a minimum point at a V/III flux ratio of 150 which corresponds to a maximum in the PL intensity and XRD intensity ratio. Flux ratios exceeding 150 result in an increase in both the PL and XRD linewidths corresponding to a reduction in their associated intensities. Room temperature Raman scattering measurements show a narrowing in the lnAs-like and AlAs-like longitudinal-optic (LO)phonon linewidths which broaden at high flux ratios, while the LO phonon frequencies exhibit a gradual reduction as the flux ratio is increased. PL spectra taken at increasing temperatures show a quenching of the main emission peak followed by the evolution of a broad lower energy emission which is possibly associated with deep lying centres. This effect is more prominent in samples grown at lower V/III flux ratios. Hall effect measurements show a gradual reduction in the mobility in correspondence to an increase in the electron concentration as the flux ratio is increased. 展开更多
关键词 as/inp Structures Grown at Very High Arsenic Overpressures by Molecular Beam Epitaxy inp Optical and Structural Properties of In Al
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Determination of breakdown voltage of In_(0.53)Ga_(0.47)As/InP single photon avalanche diodes 被引量:2
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作者 周鹏 廖常俊 +2 位作者 魏政军 李淳飞 袁书琼 《Chinese Optics Letters》 SCIE EI CAS CSCD 2011年第1期21-23,共3页
We examine the saturation of relative current gain of Ino.53Gao.47As/InP single photon avalanche diodes (SPADs) operated in Geiger mode. The punch-through voltage and breakdown voltage of the SPADs can be measured u... We examine the saturation of relative current gain of Ino.53Gao.47As/InP single photon avalanche diodes (SPADs) operated in Geiger mode. The punch-through voltage and breakdown voltage of the SPADs can be measured using a simple and accurate method. The analysis method is temperature-independent and can be applied to most SPADs. 展开更多
关键词 DOWN Determination of breakdown voltage of In as/inp single photon avalanche diodes inp GA
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InGaAs焦平面探测器电串音性能的研究(英文)
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作者 李冬雪 王天盟 +3 位作者 沈文忠 张月蘅 李雪 李淘 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2015年第6期641-646,共6页
串音与焦平面阵列(FPA)的灵敏度和分辨率密切相关.用模拟的方法定量地计算了In_(0.53) Ga_(0.47)As/InP探测器焦平面阵列的电串音随光波波长、入射方向和台面的刻蚀深度的变化情况.结果显示台面结构的器件的串音抑制性能比平面结构的要... 串音与焦平面阵列(FPA)的灵敏度和分辨率密切相关.用模拟的方法定量地计算了In_(0.53) Ga_(0.47)As/InP探测器焦平面阵列的电串音随光波波长、入射方向和台面的刻蚀深度的变化情况.结果显示台面结构的器件的串音抑制性能比平面结构的要好.明显地发现短波长的光串音较小,正照射的串音比背照射要小,这是由材料吸收深度和异质结耗尽层宽度的影响造成的.另外,当台面的刻蚀深度穿透吸收层厚度时,其电串扰几乎完全被抑制.研究结果提出了相应的InGaAs FPA的低串音设计. 展开更多
关键词 In0.53Ga0.47as/inp焦平面阵列 电串音 平面结构 台面结构
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