We investigate the effect of AlN/AlGaN superlattices（SLs） on crystal and optical properties of AlGN epitaxial layers. The result indicates that the crystal quality of AlGaN layers is consistent within a wide range o...We investigate the effect of AlN/AlGaN superlattices（SLs） on crystal and optical properties of AlGN epitaxial layers. The result indicates that the crystal quality of AlGaN layers is consistent within a wide range of SLs thicknesses, while the optical properties are opposite. With SLs thickness decreasing from 20/44 to 17/36 and 15/29 nm, the full-width at half maximum of X-ray rocking curves for （0002）- and（1012）-plane of n-AlGaN layers grown on SLs are consistent of around 250 arcsec and 700 arcsec, respectively. Meanwhile, the center of the low optical transmittance band decreases from 326 to 279 nm and less than 266 nm as the SLs thickness decreases.280 nm deep ultraviolet light-emitting diodes（DUV-LEDs） structures are further regrown on the n-AlGaN layers.The electroluminescent intensities of samples are 30% higher than that of the sample whose low optical transmittance band appears around 279 nm. Optical simulations reveal that the SLs acts as distributed Bragg reflectors, thus less photons of the corresponding wavelength escape from the sapphire backside.展开更多
基金Project supported in part by the National High Technology Program of China(No.2014AA032608)the National Key R&D Program of China(Nos.2016YFB0400800,2016YFB0400083,2016YFB0400082)+3 种基金in part by the National Natural Sciences Foundation of China(Nos.6136047,61206090,61527814,61674147,61204053)the Beijing Municipal Science and Technology Project(No.D161100002516002)the National 1000 Young Talents Programthe Youth Innovation Promotion Association,CAS
文摘We investigate the effect of AlN/AlGaN superlattices（SLs） on crystal and optical properties of AlGN epitaxial layers. The result indicates that the crystal quality of AlGaN layers is consistent within a wide range of SLs thicknesses, while the optical properties are opposite. With SLs thickness decreasing from 20/44 to 17/36 and 15/29 nm, the full-width at half maximum of X-ray rocking curves for （0002）- and（1012）-plane of n-AlGaN layers grown on SLs are consistent of around 250 arcsec and 700 arcsec, respectively. Meanwhile, the center of the low optical transmittance band decreases from 326 to 279 nm and less than 266 nm as the SLs thickness decreases.280 nm deep ultraviolet light-emitting diodes（DUV-LEDs） structures are further regrown on the n-AlGaN layers.The electroluminescent intensities of samples are 30% higher than that of the sample whose low optical transmittance band appears around 279 nm. Optical simulations reveal that the SLs acts as distributed Bragg reflectors, thus less photons of the corresponding wavelength escape from the sapphire backside.
