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AlGaN/GaN-based SBDs grown on silicon substrates with trenched n^(+)-GaN cap layer and local passivation layer to improve BFOM and dynamic properties
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作者 Zhizhong Wang Jingting He +9 位作者 Fuping Huang Xuchen Gao Kangkai Tian Chunshuang Chu Yonghui Zhang Shuting Cai Xiaojuan Sun Dabing Li Xiao Wei Sun Zi-Hui Zhang 《Journal of Semiconductors》 2025年第9期51-61,共11页
In this work,we design and fabricate AlGaN/GaN-based Schottky barrier diodes(SBDs)on a silicon substrate with a trenched n^(+)-GaN cap layer.With the developed physical models,we find that the n^(+)-GaN cap layer prov... In this work,we design and fabricate AlGaN/GaN-based Schottky barrier diodes(SBDs)on a silicon substrate with a trenched n^(+)-GaN cap layer.With the developed physical models,we find that the n^(+)-GaN cap layer provides more electrons into the AlGaN/GaN channel,which is further confirmed experimentally.When compared with the reference device,this increases the two-dimensional electron gas(2DEG)density by two times and leads to a reduced specific ON-resistance(Ron,sp)of~2.4 mΩ·cm^(2).We also adopt the trenched n^(+)-GaN structure such that partial of the n^(+)-GaN is removed by using dry etching process to eliminate the surface electrical conduction when the device is set in the off-state.To suppress the surface defects that are caused by the dry etching process,we also deposit Si_(3)N_(4)layer prior to the deposition of field plate(FP),and we obtain a reduced leakage current of~8×10^(−5)A·cm^(−2)and breakdown voltage(BV)of 876 V.The Baliga’s figure of merit(BFOM)for the proposed structure is increased to~319 MW·cm^(−2).Our investigations also find that the pre-deposited Si_(3)N_(4)layer helps suppress the electron capture and transport processes,which enables the reduced dynamic R_(on,sp). 展开更多
关键词 algan/gan-based Schottky barrier diodes(SBDs) n^(+)-GaN cap layer Si_(3)N_(4)protective layer
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Numerical simulations on the photoelectric performance of AlGaN-based ultraviolet VCSELs with a slope-shaped p-type layer
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作者 WEN Xin-xin JIA Wei +4 位作者 ZHAI Guang-mei DONG Hai-liang ZHAO Chao LI Tian-bao XU Bing-she 《中国光学(中英文)》 北大核心 2025年第3期499-509,共11页
Owing to the low p-type doping efficiency in the hole injection layers(HILs)of GaN-based ultra-violet(UV)vertical-cavity surface-emitting laser(VCSEL),effective hole injection in multi-quantum wells(MQW)is not achieve... Owing to the low p-type doping efficiency in the hole injection layers(HILs)of GaN-based ultra-violet(UV)vertical-cavity surface-emitting laser(VCSEL),effective hole injection in multi-quantum wells(MQW)is not achieved,significantly limiting the photoelectric performance of UV VCSELs.We developed a slope-shaped HIL and an EBL structure in AlGaN-based UV VCSELs.In this study,by improving hole in-jection efficiency,the hole concentration in the HIL is increased,and the hole barrier at the electron barrier layer(EBL)/HIL interface is decreased.This minimises the hindering effect of hole injection.A mathematic-al model of this structure was established using a commercial software,photonic integrated circuit simulator in three-dimension(PICS3D).We conducted simulations and theoretical analyses of the band structure and carrier concentration.Introducing polarisation doping through the Al composition gradient in the HIL en-hanced the hole concentration,thereby improving the hole injection efficiency.Furthermore,modifying the EBL eliminated the abrupt potential barrier for holes at the HIL/EBL interface,smoothing the valence band.This improved the stimulated radiative recombination rate in the MQW,increasing the laser power.There-fore,the sloped p-type layer can enhance the optoelectronic performance of UV VCSELs. 展开更多
关键词 UV VCSEL algan polarisation doping electron barrier layer(EBL) hole injection efficiency
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Characterization of high-performance AlGaN-based solar-blind UV photodetectors
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作者 FU Yuting LIU Bing +2 位作者 ZHAN Jie ZHENG Fu SUN Zhaolan 《Optoelectronics Letters》 2025年第7期402-406,共5页
This study begins with the fabrication and simulation of high-performance back-illuminated AlGaN-based solar-blind ultraviolet(UV)photodetectors.Based on the photodetectors,a low-noise,high-gain UV detection system ci... This study begins with the fabrication and simulation of high-performance back-illuminated AlGaN-based solar-blind ultraviolet(UV)photodetectors.Based on the photodetectors,a low-noise,high-gain UV detection system circuit is designed and fabricated,enabling the detection,acquisition,and calibration of weak solar-blind UV signals.Experimental results demonstrate that under zero bias conditions,with a UV light power density of 3.45μW/cm^(2) at 260 nm,the sample achieves a peak responsivity(R)of 0.085 A·W^(−1),an external quantum efficiency(EQE)of 40.7%,and a detectivity(D^(*))of 7.46×10^(12) cm·Hz^(1/2)·W^(−1).The system exhibits a bandpass characteristic within the 240–280 nm wavelength range,coupled with a high signal-to-noise ratio(SNR)of 39.74 dB. 展开更多
关键词 high performance PHOTODETECTORS UV low noise solar blind ultraviolet high gain algan based
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240 nm AlGaN-based deep ultraviolet micro-LEDs:size effect versus edge effect 被引量:4
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作者 Shunpeng Lu Jiangxiao Bai +6 位作者 Hongbo Li Ke Jiang Jianwei Ben Shanli Zhang Zi-Hui Zhang Xiaojuan Sun Dabing Li 《Journal of Semiconductors》 EI CAS CSCD 2024年第1期55-62,共8页
240 nm AlGaN-based micro-LEDs with different sizes are designed and fabricated.Then,the external quantum efficiency(EQE)and light extraction efficiency(LEE)are systematically investigated by comparing size and edge ef... 240 nm AlGaN-based micro-LEDs with different sizes are designed and fabricated.Then,the external quantum efficiency(EQE)and light extraction efficiency(LEE)are systematically investigated by comparing size and edge effects.Here,it is revealed that the peak optical output power increases by 81.83%with the size shrinking from 50.0 to 25.0μm.Thereinto,the LEE increases by 26.21%and the LEE enhancement mainly comes from the sidewall light extraction.Most notably,transversemagnetic(TM)mode light intensifies faster as the size shrinks due to the tilted mesa side-wall and Al reflector design.However,when it turns to 12.5μm sized micro-LEDs,the output power is lower than 25.0μm sized ones.The underlying mechanism is that even though protected by SiO2 passivation,the edge effect which leads to current leakage and Shockley-Read-Hall(SRH)recombination deteriorates rapidly with the size further shrinking.Moreover,the ratio of the p-contact area to mesa area is much lower,which deteriorates the p-type current spreading at the mesa edge.These findings show a role of thumb for the design of high efficiency micro-LEDs with wavelength below 250 nm,which will pave the way for wide applications of deep ultraviolet(DUV)micro-LEDs. 展开更多
关键词 algan deep ultraviolet micro-LEDs light extraction efficiency size effect edge effect
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Manufacture and applications of GaN-based piezotronic and piezo-phototronic devices
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作者 Jianan Niu Jiangwen Wang +3 位作者 Wei Sha Yong Long Bei Ma Weiguo Hu 《International Journal of Extreme Manufacturing》 2025年第1期130-149,共20页
Driven by the urgent demands for information technology,energy,and intelligent industry,third-generation semiconductor GaN has emerged as a pivotal component in electronic and optoelectronic devices.Fundamentally,piez... Driven by the urgent demands for information technology,energy,and intelligent industry,third-generation semiconductor GaN has emerged as a pivotal component in electronic and optoelectronic devices.Fundamentally,piezoelectric polarization is the most essential feature of GaN materials.Incorporating piezotronics and piezo-phototronics,GaN materials synergize mechanical signals with electrical and optical signals,thereby achieving multi-field coupling that enhances device performance.Piezotronics regulates the carrier transport process in micro-nano devices,which has been proven to significantly improve the performance of devices(such as high electron mobility transistors and microLEDs)and brings many novel applications.This review examines GaN material properties and the theoretical foundations of piezotronics and phototronics.Furthermore,it delves into the fabrication and integration processes of GaN devices to achieve state-of-the-art performance.Additionally,this review analyzes the impact of introducing three-dimensional stress and regulatory forces on the electrical and optical output performance of devices.Moreover,it discusses the burgeoning applications of GaN devices in neural sensing,optoelectronic output,and energy harvesting.The potential of piezotroniccontrolled GaN devices provides valuable insights for future research and the development of multi-functional,diversified electronic devices. 展开更多
关键词 piezotronics piezo-phototronics gan-based device MANUFACTURE
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Wafer-level GaN-based nanowires photocatalyst for water splitting
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作者 Kun Wang Jiaxuan Qiu +8 位作者 Zefei Wu Yang Liu Yongqi Liu Xiangpeng Chen Bao Zang Jianmei Chen Yunchao Lei Longlu Wang Qiang Zhao 《Chinese Chemical Letters》 2025年第3期27-36,共10页
In recent years,the development of wafer-level GaN nanowires photocatalyst loaded onto silicon substrates has progressed rapidly depending on its simplicity of instrumentation,collection and separation from the water.... In recent years,the development of wafer-level GaN nanowires photocatalyst loaded onto silicon substrates has progressed rapidly depending on its simplicity of instrumentation,collection and separation from the water.Accordingly,the wafer-level GaN-based nanowires(GaN NWs)photocatalyst can be a fabulous candidate for the application in the field of photocatalytic hydrogen evolution reaction(PHER)and provides a novel route to address the environmental and energy crisis.Herein,a range of innovative strategies to improve the performance of GaN NWs photocatalyst are systematically summarized.Then,the solar-to-hydrogen conversion efficiency,the characteristics of GaN NWs system,the cost of the origin material required,as well as the stability,activity and the corrosion resistance to seawater are discussed in detail as some of the essential conditions for advancing its large-scale industry-friendly application.Last but not least,we provide the potential application of this system for splitting seawater to produce hydrogen and point out the direction for overcoming the barriers to future industrial-scale implementation. 展开更多
关键词 Wafer-level gan-based nanowires PHOTOCATALYST Photocatalytic hydrogen evolution reaction Solar-to-hydrogen conversion efficiency Large-scale industry-friendly application Seawater splitting
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关于《AlGaN基远紫外LED研究进展》的编者按
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作者 闫建昌 《照明工程学报》 2025年第5期I0001-I0001,共1页
AlGaN基半导体紫外发光二极管(LED)具有无汞环保、工作电压低、开关迅速、波长精确可调、轻便灵活、易于集成等优势,在疫情防控、水净化、光固化、无创光疗、非视距通讯等领域有着广阔的应用,代表着新一代紫外光源的发展趋势。其中,260~... AlGaN基半导体紫外发光二极管(LED)具有无汞环保、工作电压低、开关迅速、波长精确可调、轻便灵活、易于集成等优势,在疫情防控、水净化、光固化、无创光疗、非视距通讯等领域有着广阔的应用,代表着新一代紫外光源的发展趋势。其中,260~280nm波段的深紫外LED因能强效破坏核酸碱基和超快速灭活,在抗击Covid-2019疫情中倍受关注。该波段紫外光会穿透人体皮肤等组织,对人类细胞有一定损害风险。 展开更多
关键词 水净化 algan基半导体 光固化 疫情防控
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AlGaN/GaN HEMT器件有效栅长和栅宽提取
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作者 吴淇暄 张贺秋 +4 位作者 朱江 宁思源 代晓 王子坤 梁红伟 《大连理工大学学报》 CAS 北大核心 2025年第1期105-110,共6页
有效栅长、有效栅宽和沟道电阻等AlGaN/GaN高电子迁移率晶体管(HEMT)参数对于工艺控制和器件设计非常重要.基于AlGaN/GaN HEMT器件源漏之间的总电阻与栅长及栅宽的倒数之间的线性关系,提出了一种简单方法提取有效栅长和有效栅宽.制作了... 有效栅长、有效栅宽和沟道电阻等AlGaN/GaN高电子迁移率晶体管(HEMT)参数对于工艺控制和器件设计非常重要.基于AlGaN/GaN HEMT器件源漏之间的总电阻与栅长及栅宽的倒数之间的线性关系,提出了一种简单方法提取有效栅长和有效栅宽.制作了两组AlGaN/GaN HEMT器件,这两组器件的源漏间距为80μm,栅源间距为10μm.其中一组器件固定栅宽为400μm,栅长分别为10、20、30、40、50、60μm;另一组器件固定栅长为40μm,栅宽分别为200、300、400、500、600、800μm.通过研究源漏之间的总电阻随栅长和栅宽变化规律,获得栅长与有效栅长的差值为0.48989μm,栅宽与有效栅宽的差值为-11.12191μm. 展开更多
关键词 algan/GAN高电子迁移率晶体管 器件参数 有效栅长 有效栅宽
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PEI功能化AlGaN/GaNHEMT的CO_(2)传感特性研究
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作者 徐林欣 张贺秋 +6 位作者 夏晓川 吴一航 谷海燕 朱江 郭文平 黄慧诗 梁红伟 《大连理工大学学报》 北大核心 2025年第6期631-637,共7页
AlGaN/GaN高电子迁移率晶体管(HEMT)已被广泛应用于氢气、氨气和硫化氢等气体传感器的开发,但针对二氧化碳(CO_(2))气体的AlGaN/GaNHEMT传感器研究仍相对较少.采用物理涂覆法将聚乙烯亚胺(PEI)功能化AlGaN/GaNHEMT的栅极表面,构建了PEI-... AlGaN/GaN高电子迁移率晶体管(HEMT)已被广泛应用于氢气、氨气和硫化氢等气体传感器的开发,但针对二氧化碳(CO_(2))气体的AlGaN/GaNHEMT传感器研究仍相对较少.采用物理涂覆法将聚乙烯亚胺(PEI)功能化AlGaN/GaNHEMT的栅极表面,构建了PEI-HEMT传感器用于CO_(2)检测.在室温条件下,该传感器可实现2%~15%浓度CO_(2)的检测.随着环境湿度升高,其对CO_(2)的响应灵敏度增强,基线漂移减小,但响应速度有所下降.由于物理涂覆的PEI层易发生脱落,PEI-HEMT传感器的长期稳定性较差.为此,进一步采用烷基偶联法通过戊二醛(GA)将PEI化学桥接于栅极,制备出PEI-GA-HEMT传感器.该结构表现出较PEI-HEMT更慢的CO_(2)响应速度,但具有良好的重复性与长期稳定性,检测范围也更宽,最低可检测至0.05%浓度的CO_(2). 展开更多
关键词 algan/GaN高电子迁移率晶体管(HEMT) 聚乙烯亚胺(PEI) CO_(2)传感器
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不同温度下AlGaN/GaN HEMT直流特性研究
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作者 谷海燕 张贺秋 +3 位作者 朱江 徐林欣 吴一航 梁晓华 《大连理工大学学报》 北大核心 2025年第6期638-645,共8页
GaN材料具有宽禁带和耐高压特性,因此AlGaN/GaN高电子迁移率晶体管(HEMT)能够在较高温度下正常工作.然而,随着温度升高,AlGaN/GaN HEMT性能会出现退化.研究其性能随温度的变化特性有助于优化宽温度范围内的器件特性.通过采用TCAD软件并... GaN材料具有宽禁带和耐高压特性,因此AlGaN/GaN高电子迁移率晶体管(HEMT)能够在较高温度下正常工作.然而,随着温度升高,AlGaN/GaN HEMT性能会出现退化.研究其性能随温度的变化特性有助于优化宽温度范围内的器件特性.通过采用TCAD软件并引入热力学相关物理模型,对不同温度下的器件特性进行仿真.在仿真中考虑了高场速度饱和模型中电子饱和速度对晶格温度的依赖性,在300至573 K温度范围内将仿真结果与实验结果进行拟合,获得了电子饱和速度与温度之间的经验模型方程.此外,还分析了HEMT在高温下直流特性变化的物理机理. 展开更多
关键词 algan/GaN HEMT 高温特性 自热效应 TCAD 电子饱和速度
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侧壁修复提升237 nm AlGaN基Micro-LED光功率密度研究
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作者 郝家龙 李宏博 +9 位作者 吕顺鹏 朱立财 孙文超 张若甲 刘钟旭 蒋科 贲建伟 张山丽 孙晓娟 黎大兵 《人工晶体学报》 北大核心 2025年第6期970-978,共9页
AlGaN基深紫外Micro-LED在无掩膜光刻、日盲紫外保密通信等领域具有重要应用前景。然而,侧壁效应和电流拥挤效应严重制约高电流密度下的光功率密度。本研究制备了发光波长237 nm,台面半径分别为12.5、25.0、50.0μm的深紫外Micro-LED,... AlGaN基深紫外Micro-LED在无掩膜光刻、日盲紫外保密通信等领域具有重要应用前景。然而,侧壁效应和电流拥挤效应严重制约高电流密度下的光功率密度。本研究制备了发光波长237 nm,台面半径分别为12.5、25.0、50.0μm的深紫外Micro-LED,并系统探究了侧壁修复对不同尺寸和不同阵列化Micro-LED的影响规律。研究发现,使用KOH修复侧壁可有效降低AlGaN基深紫外Micro-LED侧壁缺陷密度,减小反向漏电流密度,同时降低由侧壁缺陷导致的肖特基-里德-霍尔(SRH)非辐射复合。对于单台面器件,器件尺寸越小,最大光功率密度越高,但侧壁效应严重制约着小尺寸器件的光功率密度,导致小尺寸器件在低电流密度下光功率密度最低,侧壁修复后,半径12.5μm的器件峰值光功率密度提升最多,提升了186%,且在不同电流密度下光功率密度均最高;对于相同发光面积的阵列化器件,侧壁修复后,阵列化程度越高,光功率密度越高,4×4阵列12.5μm的Micro-LED比半径50.0μm的器件峰值光功率密度提高了116%,其原因是在保持较低侧壁缺陷的情况下,阵列化可以提高电流密度分布均匀性,进而提高光效。该研究有助于提高Micro-LED的光功率密度,并将推动短波深紫外Micro-LED走向实际应用。 展开更多
关键词 侧壁效应 电流拥挤效应 algan micro-LED 侧壁修复 阵列化工程
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Reduction of Electron Leakage of AlGaN-Based Deep Ultraviolet Laser Diodes Using an Inverse-Trapezoidal Electron Blocking Layer 被引量:14
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作者 Zhong-Qiu Xing Yong-Jie Zhou +1 位作者 Yu-Huai Liu Fang Wang 《Chinese Physics Letters》 SCIE CAS CSCD 2020年第2期55-59,共5页
To improve the optical and electrical properties of AlGaN-based deep ultraviolet lasers,an inverse-trapezoidal electron blocking layer is designed.Lasers with three different structural electron blocking layers of rec... To improve the optical and electrical properties of AlGaN-based deep ultraviolet lasers,an inverse-trapezoidal electron blocking layer is designed.Lasers with three different structural electron blocking layers of rectangular,trapezoidal and inverse-trapezoidal structures are established.The energy band,electron concentration,electron current density,P-I and V-I characteristics,and the photoelectric conversion efficiency of different structural devices are investigated by simulation.The results show that the optical and electrical properties of the inversetrapezoidal electron blocking layer laser are better than those of rectangular and trapezoidal structures,owing to the effectively suppressed electron leakage. 展开更多
关键词 algan ELECTRON INVERSE
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漏场板提升增强型AlGaN/GaN/AlGaN HEMT击穿电压的研究 被引量:1
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作者 周世刚 于永强 +2 位作者 夏元治 钱君涵 吴春艳 《合肥工业大学学报(自然科学版)》 北大核心 2025年第5期622-627,共6页
p-GaN帽层增强型AlGaN/GaN/AlGaN HEMT存在背势垒,因此可显著降低GaN缓冲层泄漏电流,提升器件击穿电压,但会面临漏极下方电场强度峰值集中的问题,导致击穿电压偏离。文章通过Silvaco ATLAS仿真,探讨漏场板结构和漏场板下钝化层厚度对p-... p-GaN帽层增强型AlGaN/GaN/AlGaN HEMT存在背势垒,因此可显著降低GaN缓冲层泄漏电流,提升器件击穿电压,但会面临漏极下方电场强度峰值集中的问题,导致击穿电压偏离。文章通过Silvaco ATLAS仿真,探讨漏场板结构和漏场板下钝化层厚度对p-GaN帽层增强型AlGaN/GaN/AlGaN HEMT器件击穿电压的调制,优化漏极下方电场强度峰值分布。结果表明:漏场板的引入可显著提升器件的击穿电压,漏场板厚度在0.10~1.10μm范围时,器件的击穿电压随着漏场板厚度增大而增大;随着漏场板下方钝化层厚度的增大,漏场板边缘下方的沟道电场强度峰值减小,漏极下方的沟道电场强度峰值增大,当漏场板下方钝化层厚度增厚至0.25μm时,沟道电场强度峰值最小,器件的击穿电压提升至1370 V,增幅达53.6%。研究发现,击穿电压的提升主要是由于漏场板的电场调制效应降低了电场强度峰值。 展开更多
关键词 p-GaN帽层增强型algan/GaN/algan HEMT 漏场板 钝化层 击穿电压 电场强度
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Output light power of InGaN-based violet laser diodes improved by using a u-InGaN/GaN/AlGaN multiple upper waveguide 被引量:3
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作者 梁锋 赵德刚 +12 位作者 江德生 刘宗顺 朱建军 陈平 杨静 刘炜 刘双韬 邢瑶 张立群 王文杰 李沫 张源涛 杜国同 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第12期302-306,共5页
The upper waveguide (UWG) has direct influences on the optical and electrical characteristics of the violet laser diode (LD) by changing the optical field distribution or barrier of the electron blocking layer (... The upper waveguide (UWG) has direct influences on the optical and electrical characteristics of the violet laser diode (LD) by changing the optical field distribution or barrier of the electron blocking layer (EBL). In this study, a series of InGaN-based violet LDs with different UWGs are investigated systematically with LASTIP software. It is found that the output light power (OLP) under an injecting current of 120 mA or the threshold current (Ith) is deteriorated when the UWG is u-In0.02Ga0.98N/GaN or u-In0.02Ga0.98N/AlxGa1-xN (0 ≤ x ≤ 0.1), which should be attributed to small optical confinement factor (OCF) or severe electron leakage. Therefore, a new violet LD structure with u-In0.02Ga0.98N/GaN/Al0.05Ga0.95N multiple layer UWG is proposed to reduce the optical loss and increase the barrier of EBL. Finally, the output light power under an injecting current of 120 mA is improved to 176.4 mW. 展开更多
关键词 Ingan-based violet LDs u-InGaN/GaN/algan multiple upper waveguide
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Efficiency improvement of AlGaN-based deep ultraviolet LEDs with gradual Al-composition AlGaN conduction layer 被引量:6
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作者 HUANG Ping-yang XIAO Long-fei +4 位作者 CHEN Xiu-fang WANG Qing-pu XU Ming-sheng XU Xian-gang HUANG Jing 《Optoelectronics Letters》 EI 2020年第4期279-283,共5页
The low internal quantum efficiency(IQE)of AlGaN-based deep ultraviolet light emitting diode(DUV-LED)limits its wider application.The main reasons for low IQE include low carrier concentration,poor carrier location an... The low internal quantum efficiency(IQE)of AlGaN-based deep ultraviolet light emitting diode(DUV-LED)limits its wider application.The main reasons for low IQE include low carrier concentration,poor carrier location and large defects.The bending of energy band between AlGaN electron blocking layer and conduction layer obstructs transport of holes to multiple quantum wells.In this paper,we propose a gradual Al-composition p-type AlGaN(p-AlGaN)conduction layer to improve the light emitting properties of AlGaN-based DUV-LED.Increased carrier concentration in the active region enhances the effective radiative recombination rate of the LED.Consequently,the IQE of our optimazited DUV-LED is increased by 162%in comparison with conventional DUV-LEDs. 展开更多
关键词 algan Efficiency conduction
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Effect of AlGaN interlayer on luminous efficiency and reliability of GaN-based green LEDs on silicon substrate 被引量:3
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作者 Jiao-Xin Guo Jie Ding +3 位作者 Chun-Lan Mo Chang-Da Zheng Shuan Pan Feng-Yi Jiang 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第4期439-444,共6页
The effect of AlGaN interlayer in quantum barrier on the electroluminescence characteristics of GaN-based green light emitting diodes(LEDs)grown on silicon substrate was investigated.The results show that AlGaN interl... The effect of AlGaN interlayer in quantum barrier on the electroluminescence characteristics of GaN-based green light emitting diodes(LEDs)grown on silicon substrate was investigated.The results show that AlGaN interlayer is beneficial to improve the luminous efficiency of LED devices and restrain the phase separation of In GaN.The former is ascribed to the inserted AlGaN layers can play a key role in determining the carrier distribution and screening dislocations in the active region,and the latter is attributed to the increased compressive stress in the quantum well.However,when the electrical stress aging tests were performed at a current density of 100 A/cm^2,LED devices with AlGaN interlayers are more likely to induce the generation/proliferation of defects in the active region under the effect of electrical stress,resulting in the reduced light output power at low current density. 展开更多
关键词 green LED algan INTERLAYER EXTERNAL QUANTUM efficiency RELIABILITY
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High Quantum Efficiency Back-Illuminated AlGaN-Based Solar-Blind Ultraviolet p-i-n Photodetectors 被引量:2
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作者 WANG Guo-Sheng LU Hai +4 位作者 XIE Feng CHEN Dun-Jun REN Fang-Fang ZHANG Rong ZHENG You-Dou 《Chinese Physics Letters》 SCIE CAS CSCD 2012年第9期166-169,共4页
AlGaN-based back-illuminated solar-blind ultraviolet(UV)p–i–n photodetectors(PDs)with high quantum efficiency are fabricated on sapphire substrates.To improve the overall performance of the PD,a series of structural... AlGaN-based back-illuminated solar-blind ultraviolet(UV)p–i–n photodetectors(PDs)with high quantum efficiency are fabricated on sapphire substrates.To improve the overall performance of the PD,a series of structural design considerations and growth procedures are implemented in the epitaxy process.A distinct wavelength-selective photo-response peak of the PD is obtained in the solar-blind region.When operating in photovoltaic mode,the PD exhibits a solar-blind/UV rejection ratio of up to 4 orders of magnitude and a peak responsivity of~113.5 mA/W at 270 nm,which corresponds to an external quantum efficiency of~52%.Under a reverse bias of-5 V,the PD shows a low dark current of~1.8 pA and an enhanced peak quantum efficiency of~64%.The thermal noise limited detectivity is estimated to be~3.3×10^(13) cm·Hz^(1/2)W^(-1). 展开更多
关键词 algan Efficiency SAPPHIRE
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日盲紫外AlGaN光电阴极性能提升研究 被引量:1
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作者 陈冠宇 罗伟科 +3 位作者 梁帅 陈鑫龙 王艳 程奎 《光电子技术》 2025年第2期105-111,共7页
通过调节Al组分,可使AlGaN光电阴极在获得更高灵敏度的同时,更好地兼顾光电倍增管的日盲特性。通过优化高Al组分AlGaN材料生长工艺,实现了AlGaN型紫外光电倍增管阴极灵敏度和日盲特性的提升。优化了气流调制生长法的生长温度,抑制了晶... 通过调节Al组分,可使AlGaN光电阴极在获得更高灵敏度的同时,更好地兼顾光电倍增管的日盲特性。通过优化高Al组分AlGaN材料生长工艺,实现了AlGaN型紫外光电倍增管阴极灵敏度和日盲特性的提升。优化了气流调制生长法的生长温度,抑制了晶体生长过程中预反应的发生,减少了AlGaN晶体中的缺陷。采用Mg‑In共掺的方法,提高了Mg的掺杂效率。制备了基于AlGaN光电阴极的日盲紫外光电倍增管,进行了AlGaN光电阴极灵敏度和光谱响应曲线的测试。实验结果表明:通过AlGaN外延材料生长工艺及光电阴极制备工艺的优化,AlGaN光电阴极日盲性能和灵敏度取得显著提升,最终制备出产品的灵敏度达到45 mA/W@270 nm,且截止波长(峰值响应的50%)小于280 nm。 展开更多
关键词 光电阴极 日盲紫外 灵敏度 光谱
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Vacuum Violet Photo-Response of AlGaN-Based Metal-Semiconductor-Metal Photodetectors 被引量:1
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作者 ZHOU Dong LU Hai +4 位作者 CHEN Dun-Jun REN Fang-Fang ZHANG Rong ZHENG You-Dou LI Liang 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第11期164-166,共3页
Al_(0.5)Ga_(0.5)N-based metal-semiconductor-metal photodetectors(PDs)with a large device area of 5×5 mm^(2) are fabricated on a sapphire substrate,which are tested for vacuum ultraviolet light detection by using ... Al_(0.5)Ga_(0.5)N-based metal-semiconductor-metal photodetectors(PDs)with a large device area of 5×5 mm^(2) are fabricated on a sapphire substrate,which are tested for vacuum ultraviolet light detection by using a synchrotron radiation source.The PD exhibits low dark current of less than 1 pA under 30 V bias and a spectral cutoff around 260 nm,corresponding to the energy bandgap of Al_(0.5)Ga_(0.5)N.A peak photo-responsivity of 14.68 mA/W at 250 nm with a rejection ratio(250/360 nm)of more than four orders of magnitude is obtained under 30 V bias.For wavelength less than 170 nm,the photoresponsivity of the PD is found to increase as wavelength decreases,which is likely caused by the enhanced photoemission effect. 展开更多
关键词 SAPPHIRE algan effect
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Kink effect in current–voltage characteristics of a GaN-based high electron mobility transistor with an AlGaN back barrier 被引量:1
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作者 马晓华 吕敏 +4 位作者 庞磊 姜元祺 杨靖治 陈伟伟 刘新宇 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第2期452-456,共5页
The kink effect in current-voltage (IV) characteristic s seriously deteriorates the performance of a GaN-based HEMT. Based on a series of direct current (DC) IV measurements in a GaN-based HEMT with an AlGaN back ... The kink effect in current-voltage (IV) characteristic s seriously deteriorates the performance of a GaN-based HEMT. Based on a series of direct current (DC) IV measurements in a GaN-based HEMT with an AlGaN back barrier, a possible mechanism with electron-trapping and detrapping processes is proposed. Kink-related deep levels are activated by a high drain source voltage (Vds) and located in a GaN channel layer. Both electron trapping and detrapping processes are accomplished with the help of hot electrons from the channel by impact ionization. Moreover, the mechanism is verified by two other DC IV measurements and a model with an expression of the kink current. 展开更多
关键词 kink effect deep levels hot electrons gan-based HEMT
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