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Optimization of Spectral and Angular Selectivity in Obliquely Deposited TiO2/Ag/TiO2 Thin Films Prepared by Thermal Evaporation and Sputtering Methods
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作者 Haji Faki Haji Nuru Ramadhani Mlyuka 《材料科学与工程(中英文B版)》 2015年第5期206-221,共16页
关键词 ag/tio2薄膜 溅射沉积 热蒸发 双光束紫外可见分光光度计 优化 制备 光谱透射率 薄膜性能
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Influences of working pressure on properties for TiO_2 films deposited by DC pulse magnetron sputtering 被引量:11
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作者 ZHANG Can DING Wanyu +2 位作者 WANG Hualin CHAI Weiping JU Dongying 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2009年第6期741-744,共4页
TiO2 films were deposited at room temperature by DC pulse magnetron sputtering system.The crystalline structures,morphological features and photocatalytic activity of TiO2 films were systematically investigated by X-r... TiO2 films were deposited at room temperature by DC pulse magnetron sputtering system.The crystalline structures,morphological features and photocatalytic activity of TiO2 films were systematically investigated by X-ray diffraction(XRD),atomic force microscopy(AFM) and ultraviolet spectrophotometer,respectively.The results indicated that working pressure was the key deposition parameter in?uencing the TiO2 film phase composition at room temperature,which directly affected its photocatalytic activity.With increasing working pressure,the target self-bias decreases monotonously.Therefore,low temperature TiO2 phase(anatase) could be deposited with high working pressure.The anatase TiO2 films deposited with 1.4 Pa working pressure displayed the highest photocatalytic activity by the decomposition of Methyl Orange solution,which the degradation rate reached the maximum(35%) after irradiation by ultraviolet light for 1 h. 展开更多
关键词 tio2 film ANATASE UV induced photocatalysis DC pulse magnetron sputtering
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Properties of TiO_2 Thin Films Prepared by Magnetron Sputtering 被引量:7
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作者 WenjieZHANG YingLI 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第2期101-107,共7页
With rapid progressive application of TiO2 thin films, magnetron sputtering becomes a very interesting method to prepare such multi-functional thin films. This paper focuses on influences of various deposition process... With rapid progressive application of TiO2 thin films, magnetron sputtering becomes a very interesting method to prepare such multi-functional thin films. This paper focuses on influences of various deposition processes and deposition rate on the structures and properties of TiO2 thin films. Anatase, rutile or amorphous TiO2 films with various crystalline structures and different photocatalytic, optical and electrical properties can be produced by varying sputtering gases, substrate temperature, annealing process, deposition rate and the characteristics of magnetron sputtering. This may in turn affect the functions of TiO2 films in many applications. Furthermore, TiO2-based composites films can overcome many limitations and improve the properties of TiO2 films. 展开更多
关键词 tio2 thin film magnetron sputtering deposition process composite film.
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High photocatalytic activity of Cu2O/TiO2/Pt composite films prepared by magnetron sputtering 被引量:4
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作者 Guang-Xiao Ren Bin Yu +3 位作者 Yi-Ming Liu Hong-Xia Wang Wang-Gang Zhang Wei Liang 《Rare Metals》 SCIE EI CAS CSCD 2017年第10期821-827,共7页
Cu2O/TiOa/Pt three-layer films were deposited on glass substrates using magnetron sputtering method. The surface morphology and the optical properties of the composite film were characterized by X-ray diffraction (XR... Cu2O/TiOa/Pt three-layer films were deposited on glass substrates using magnetron sputtering method. The surface morphology and the optical properties of the composite film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), ultraviolet- visible spectroscopy (UV-Vis) and photoluminescence spectroscopy (PL). The photocatalytic activity of the samples was evaluated by the photocatalytic degradation of methyl orange (MO) aqueous solution under visible light irradiation. The results indicate that the Cu2O/TiO2/Pt composite films are made up of three layers which are Pt layer, anatase-TiO2 layer and Cu2O layer from bottom to top. The surface of the films is even and composed of regular-shaped spherical particles. The photocatalytic activity of the Cu2O/TiO2/Pt three-layer film is much higher than that of the Cu2O/TiO2 double-layer film. Such enhancement is ascribed to the presence of Pt layer, which further inhibits the photogenerated electron-hole recombination, prolongs the lifetime of the photogenerated carriers, increases the quantum efficiency and hence improves the photocatalytic activity of the film effectively. 展开更多
关键词 Cu2O/tio2/Pt Composite films Visible light Photocatalytic activity
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Preparation and Properties of Ag-TiO_2 Thin Films on Glass Substrates 被引量:1
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作者 魏建红 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2002年第3期21-23,共3页
Ag TiO 2 thin films were prepared on glasses.The morphology and structure of Ag TiO 2 films were investigated by XRD, SEM and FT IR.The photocatalytic and hydrophilic properties of Ag TiO 2 thin films were also... Ag TiO 2 thin films were prepared on glasses.The morphology and structure of Ag TiO 2 films were investigated by XRD, SEM and FT IR.The photocatalytic and hydrophilic properties of Ag TiO 2 thin films were also evaluated by examining photocatalytic degradation dichlorophos under sunlight illumination and the change of contact angle respectively.The research results show that the Ag TiO 2 thin film is mainly composed of 20-100nm Ag and TiO 2 particles.The Ag TiO 2 thin films possess a super hydrophilic ability and higher photocatalytic activity than that of pure TiO 2 thin film. 展开更多
关键词 ag tio 2 thin film MICROSCOPE PHOTOCATALYTIC HYDROPHILIC
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Enhanced visible light photoactivity of TiO_(2)/SnO_(2)films by tridoping with Y/F/Ag ions 被引量:2
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作者 Lizhu Zhao Guobao Li +1 位作者 Fang Li Mingming Yao 《Journal of Rare Earths》 SCIE EI CAS CSCD 2022年第4期616-625,I0004,共11页
The Y,F,and Ag tridoped TiO_(2)/SnO_(2)composite nanocrystalline film(YFAg–TS)with prominent photocatalytic performance was prepared by the modified sol–gel method and was characterized by utilizing X-ray diffractio... The Y,F,and Ag tridoped TiO_(2)/SnO_(2)composite nanocrystalline film(YFAg–TS)with prominent photocatalytic performance was prepared by the modified sol–gel method and was characterized by utilizing X-ray diffraction(XRD),differential thermal and thermogravimetric(DTA–TG)analysis,scanning electron microscopy(SEM),transmission electron microscopy(TEM),X-ray photoelectron spectroscopy(XPS),Brunauer–Emmett–Teller(BET)method,ultraviolet–visible diffuse reflectance spectroscopy(UV–vis DRS),and photoluminescence(PL).The XRD and DTA–TG results expose that the YFAg–TS catalyst is a mixed phase consisting of anatase,rutile,and chlorargyrite,which is beneficial to improving the photocatalytic performance of TiO_(2).The SEM,TEM,and BET results disclose that the YFAg–TS film has smaller nanoparticles,higher specific surface area,and narrower pore size compared with pure TiO_(2)film.The XRD and TEM results exhibit that a part of yttrium can enter the TiO_(2)lattice to induce lattice distortion.The XPS results confirm the presence of Y^(3+)state in the YFAg–TS sample,and Y^(3+)ions can act as the trapping site of electrons to expedite the separation of electrons and holes.The UV–vis DRS results reveal that the YFAg–TS film has an obvious absorption edge shift and a narrower bandgap(2.70 eV)compared with pure TiO_(2)film.The PL results show that the YFAg–TS film has the highest photogenerated electrons and holes separation efficiency and charges transfer efficiency among all samples.The photocatalytic activity of the YFAg–TS was assessed by monitoring the degradation of methyl green and formaldehyde solution.The results manifest that the YFAg–TS film has high stability and excellent photocatalytic performance.The possible synergistic photocatalytic mechanism of YFAg–TS films has been discussed in this paper. 展开更多
关键词 tio_(2)film Y/F/ag tridoping SnO_(2)coupling PHOTOACTIVITY Rare earths
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Photocatalytic Property of TiO2 Films Deposited by Pulsed DC Magnetron Sputtering 被引量:1
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作者 Wenjie ZHANG, Shenglong ZHU, Ying LI and Fuhui WANGState Key Laboratory for Corrosion and Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第1期31-34,共4页
TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the <220> directio... TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the <220> direction, but the films deposited for 2 and 3 h were amorphous. The transmittance and photocatalytic activity of the TiO2 films increased constantly with increasing film thickness. When the annealing temperature was lower than 700℃, only anatase grew in the TiO2 film. TiO2 phase changed from anatase to rutile when the annealing temperature was above 800℃. The photocatalytic activity decreased with increasing annealing temperature. 展开更多
关键词 tio2 film Photocatalytic activity DC magnetron sputtering film characteristic
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Substrate temperature dependence of chemical state and magnetoresistance characteristics of Co–TiO2 nanocomposite films 被引量:1
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作者 Hao-yu CHEN Yi-wen ZHANG +3 位作者 Zhong WU Zhen-bo QIN Shan-shan WU Wen-bin HU 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2020年第9期2502-2509,共8页
Co−TiO2 nanocomposite films were prepared via magnetron sputtering at various substrate temperatures.The films comprise Co particles dispersed in an amorphous TiO2 matrix and exhibit coexisting ferromagnetic and super... Co−TiO2 nanocomposite films were prepared via magnetron sputtering at various substrate temperatures.The films comprise Co particles dispersed in an amorphous TiO2 matrix and exhibit coexisting ferromagnetic and superparamagnetic properties.When the substrate temperature increases from room temperature to 400℃,Co particles gradually grow,and the degree of Co oxidation significantly decreases.Consequently,the saturation magnetization increases from 0.13 to 0.43 T at the same Co content by increasing the substrate temperature from room temperature to 400℃.At a high substrate temperature,conductive pathways form among some of the clustered Co particles.Thus,resistivity rapidly declines from 1600 to 76μΩ·m.The magnetoresistive characteristic of Co−TiO2 films is achieved even at resistivity of as low as 76μΩ·m.These results reveal that the obtained nanocomposite films have low Co oxidation,high magnetization and magnetoresistance at room temperature. 展开更多
关键词 CO tio2 nanocomposite films ferromagnetic property superparamagnetic property MagNETORESISTANCE
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Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO_2-CeO_2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering 被引量:1
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作者 赵青南 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2005年第4期7-9,共3页
TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar:O2=95:5 atmosphere.The structure,surf... TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar:O2=95:5 atmosphere.The structure,surface composition,UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy,respectively.The experimental results show that the films are amorphous,there are only Ti^4+ and Ce^4+ on the surface of the films,the obtained TiO2-CeO2 films shou a good uniformity and high densification,and the films deposited on the glass can shield ultraviolet light without significant absorpition of visible light,the films deposited on substrates at room temperature and 220℃ absorb UV effectively. 展开更多
关键词 rf sputtering tio2-CeO2 films ultraviolet-shielding coating glass substrate temperatures
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Preparation,structure and ferromagnetic properties of the nanocrystalline Ti_(1-x)Mn_xO_2 thin films grown by radio frequency magnetron co-sputtering 被引量:1
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作者 丁芃 刘发民 +1 位作者 杨新安 李建奇 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第2期721-725,共5页
This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron cosputtering. X-ray diffraction measurements indicate that the samples are easy to form the futile structure, and the ... This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron cosputtering. X-ray diffraction measurements indicate that the samples are easy to form the futile structure, and the sizes of the crystal grains grow big and big as the Mn concentration increases. X-ray photoemlssion spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO2 crystal when the Mn concentration is lower than 21%. The magnetic property measurements show that the Ti1-xMnxO2 (x = 0.21) films are ferromagnetic at room temperature, and the saturation magnetization, coercivity, and saturation field are 16.0 emu/cm^3, 167.5 × 80 A/m and 3740 × 80 A/m at room temperature, respectively. The room-temperature ferromagnetism of the films can be attributed to the new futile Ti1-xMnxO2 structure formed by the substitution of Mn^4+ for Ti^4+ into the TiO2 crystal .lattice, and could be explained by O vacancy (Vo)-enhanced ferromagnetism model. 展开更多
关键词 RF magnetron sputtering Mn-doped tio2 films room-temperature ferromagnetic properties
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One-dimensional Ag2S/ZnS/ZnO nanorod array films for photocathodic protection for 304 stainless steel 被引量:1
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作者 Na Wei Yuan Lin +4 位作者 Zhenkui Li Wenxia Sun Guosong Zhang Mingliang Wang Hongzhi Cui 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2020年第7期156-162,共7页
Highly ordered Ag2 S/ZnS/ZnO nanorod array film photoanodes were prepared on a Ti substrate for photocathodic cathodic protection.The results indicated that the photoresponse range of the Ag2S/ZnS/ZnO composite film w... Highly ordered Ag2 S/ZnS/ZnO nanorod array film photoanodes were prepared on a Ti substrate for photocathodic cathodic protection.The results indicated that the photoresponse range of the Ag2S/ZnS/ZnO composite film was extended compared to those of the ZnO and ZnS/ZnO films,indicating its higher light absorption capacity.When the Ag2S/ZnS/ZnO composite film served as a photoanode,the film can provide the best effective photocathodic protection for 304 stainless steel in a 3.5 wt%NaCl solution under white light illumination compared to the ZnO and ZnS/ZnO films.Additionally,in comparison to pure ZnO film,the photocurrent for the ZnS/ZnO film remained the same without noticeable fluctuation after illumination for 1 h,indicating that the ZnS functionalization improved the stability by overcoming the photocorrosion effect of the ZnO photoanode under light irradiation. 展开更多
关键词 ag2S/ZnS/ZnO Nanorod array films Stainless steel Photocathodic protection
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Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped TiO_2 Films Deposited by Radio-Frequency Magnetron Sputtering 被引量:1
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作者 刘洋 彭茜 +1 位作者 周仲品 杨光 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第4期113-117,共5页
Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures. After post-annealing at 550℃ in a vacuum, all the films are cr... Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures. After post-annealing at 550℃ in a vacuum, all the films are crystallized into the polycrystalline anatase TiO2 structure. The effects of substrate temperature from room temperature up to 350℃ on the structure, morphology, and photoelectric properties of Ta-doped titanium dioxide films are analyzed. The average transmittance in the visible region(400-800 nm) of all films is more than 73%.The resistivity decreases firstly and then increases moderately with the increasing substrate temperature. The polycrystalline film deposited at 150℃ exhibits a lowest resistivity of 7.7 × 10^-4Ω·cm with the highest carrier density of 1.1×10^21 cm^-3 and the Hall mobility of 7.4 cm^2·V^-1s^-1. 展开更多
关键词 TA Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped tio2 films Deposited by Radio-Frequency Magnetron Sputtering tio
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Enhanced Photoelectric Property of Mo-C Codoped TiO2 Films Deposited by RF Magnetron Cosputtering 被引量:2
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作者 罗胜耘 YAN Bingxi 沈杰 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第2期223-228,共6页
Mo-C codoped TiO2 films were prepared by RF magnetron cosputtering. Ultraviolet-visible spectroscopy, atomic force microscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray Analysis and X-Ray Diffraction w... Mo-C codoped TiO2 films were prepared by RF magnetron cosputtering. Ultraviolet-visible spectroscopy, atomic force microscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray Analysis and X-Ray Diffraction were used to study the influences of codoping on energy gap, surface morphology, valence states of elements, ions content and crystal structure, respectively. The concentration of photogenerated carriers was measured by studying photocurrent density, while catalytic property was evaluated by observing degradation rate of methylene blue under visible light. A Mo-doped TiO2 film, whose content of Mo had been optimized in advance, was prepared and later used for subsequent comparisons with codoped samples. The result indicates that Mo-C codoping could curtail the energy gap and shift the absorption edge toward visible range. Under the illumination of visible light, codoped TiO2 films give rise to stronger photocurrent due to smaller band gaps. It is also found that Mo, C codoping results in a porous surface, whose area declines gradually with increasing carbon content. Carbon and Molybdenum doses were delicately optimized. Under the illumination of visible light, sample doped with 9.78at% carbon and 0.36at% Mo presents the strongest photocurrent which is about 8 times larger than undoped TiO2 films, and about 6 times larger than samples doped with Mo only. 展开更多
关键词 Mo-C codoping tio2 film magnetron sputtering photoelectric photocatalytic property
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磁控溅射TiO_(2)/Ag光催化薄膜的微结构及性能
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作者 陆昆 江耀红 +1 位作者 赵立军 许俊华 《材料热处理学报》 北大核心 2025年第7期250-258,共9页
光催化技术作为一种高效、安全的环境友好型净化技术,深受人们的重视和关注。传统的TiO_(2)光催化材料在应用过程中仍存在着局限性,难以广泛应用。本研究通过磁控溅射多靶共沉积技术制备了不同Ag含量的TiO_(2)/Ag薄膜,Ag的引入能够极大... 光催化技术作为一种高效、安全的环境友好型净化技术,深受人们的重视和关注。传统的TiO_(2)光催化材料在应用过程中仍存在着局限性,难以广泛应用。本研究通过磁控溅射多靶共沉积技术制备了不同Ag含量的TiO_(2)/Ag薄膜,Ag的引入能够极大地提升薄膜的抗菌性能和可见光响应性能。利用X射线衍射仪(X-ray diffractometer, XRD)、X射线光电子能谱仪(X-ray photoelectron spectrometer, XPS)、高分辨透射电镜(Transmission electron microscopy, TEM)、场发射扫描电镜(Scanning electron microscopy, SEM)、紫外-可见分光光度计(Ultraviolet-visible, UV-Vis)和接触角测量仪等研究了不同Ag含量对薄膜微观结构、润湿性能、抗菌性能和可见光响应性能的影响。结果表明:制备的TiO_(2)/Ag薄膜主要由金红石型TiO_(2)相和Ag相组成;随着Ag含量的增加,薄膜的水滴接触角逐渐增大,在Ag靶功率为45 W时,薄膜具有最佳的疏水性能,接触角为142.27°;Ag元素的掺杂对薄膜的抗菌性能的提升有着显著作用,在Ag靶溅射功率为25 W时,薄膜对大肠杆菌的抑制作用最好,0.25麦氏标准大肠杆菌的抑菌圈直径最大,达到了4.5 mm;TiO_(2)/Ag薄膜吸收带边红移,禁带宽度显著变窄,达到了2.79 eV,薄膜的光响应范围拓宽至可见光区。 展开更多
关键词 磁控溅射 tio_(2)/ag薄膜 微观结构 光催化 抗菌性能
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Photocatalytic Activities of Amorphous TiO_2-Cr Thin Films Prepared by Magnetron Sputtering
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作者 黄佳木 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第5期610-616,共7页
Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray ... Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray photoelectron spectroscopy, UV-Vis spectrophotometer, the photoluminescence (PL) and ellipse polarization apparatus. The results indicate that TiO2-Cr film exists in the form of amorphous. The prepared films possess a band gap of less than 3.20 eV, and a new absorption peak. The films, irradiated for 5 h under UV light, exhibit excellent photocatalytic activities with the optimum decomposition rate at 98.5% for methylene blue. Consequently, the thickness threshold on these films is 114 nm, at which the rate of photodegradation is 95% in 5 h. When the thickness is over 114 nm, the rate of photodegradation becomes stable. This result is completely different from that of crystalloid TiO2 thin film. 展开更多
关键词 amorphous tio2 magnetron sputtering tio2-Cr thin films photocatalysis threshold
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Influence of Annealing Temperature on Structure and Photocatalytic Activity of TiO_2 Thin Films Prepared by DC Reactive Magnetron Sputtering Method
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作者 MEI Fei YANG Zhijie +2 位作者 WU Linzhang ZHOU Yuanming ZHANG Danming 《Wuhan University Journal of Natural Sciences》 CAS 2012年第4期309-314,共6页
Transparent TiO2 thin films were successfully prepared on high purity silica substrates by DC reactive magnetron sputtering method and annealed at different temperatures. The effects of the annealing temperature (300... Transparent TiO2 thin films were successfully prepared on high purity silica substrates by DC reactive magnetron sputtering method and annealed at different temperatures. The effects of the annealing temperature (300-600 ℃) on crystalline structure, morphology, and photocatalytic activity of the TiO2 thin films were discussed. The photocatalytic activity of the films was evaluated by photodegradation of methylene blue solution. With increasing annealing temperature, the photocatalytic activity of the TiO2 thin films gradually increased because of the improvement of crystallization of anatase TiO2 thin films. At 500 ℃, the TiO2 thin film shows the highest photocatalytic activity due to the improvement of crystallization of anatase TiO2 thin films. When the annealing temperature increases to 600 ℃, the photocatalytic activity of thin film decreases owing to the formation of rutile phase and the decrease of surface area. 展开更多
关键词 tio2 thin film photocatalytic activity magnetron sputtering ANNEALING
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Magnetic and Optical Properties of the TiO_2-Co-TiO_2 Composite Films Grown by Magnetron Sputtering
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作者 LIU Fa-min DING Peng SHI Wei-mei WANG Tian-min 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2007年第2期162-167,共6页
The TiO2-Co-TiO2 sandwich films were successfully grown on glass and silicon substrata making alternate use of radio frequency reactive magnetron sputtering and direct current magnetron sputtering. The structures and ... The TiO2-Co-TiO2 sandwich films were successfully grown on glass and silicon substrata making alternate use of radio frequency reactive magnetron sputtering and direct current magnetron sputtering. The structures and properties of these films were identified with X-ray diffraction (XRD), Raman spectra and X-ray photoemission spectra (XPS). It is shown that the sandwich film consists of two anatase TiO2 films with an embedded Co nano-film. The fact that, when the Co nano-film thickens, varied red shifts appear in optical absorption spectra may well be explained by the quantum confinement and tunnel effects. As for magnetic properties, the saturation magnetization, remnant magnetic induction and coercivity vary with the thickness of the Co nano-films. Moreover, the Co nano-film has a critical thickness of about 8.6 mn, which makes the coercivity of the composite film reach the maximum of about 1413 Oe. 展开更多
关键词 tio2-Co-tio2 sandwich films surface structure and properties optical and magnetic properties
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Effect of Zn and Ti mole ratio on microstructure and photocatalytic properties of magnetron sputtered TiO_2-ZnO heterogeneous composite film 被引量:2
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作者 白力静 寇钢 +1 位作者 龚振瑶 赵志明 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第12期3643-3649,共7页
Series of TiO 2-ZnO heterojunction composite films with different n(Zn)/n(Ti) ratios were prepared by UDP450 magnetron sputter ion plating equipment, and the mole ratio of Zn to Ti was controlled by adjusting the ... Series of TiO 2-ZnO heterojunction composite films with different n(Zn)/n(Ti) ratios were prepared by UDP450 magnetron sputter ion plating equipment, and the mole ratio of Zn to Ti was controlled by adjusting the current values of sputtering target. The effects of n(Zn)/n(Ti) on the microstructures of TiO2-ZnO films were investigated by SEM, AFM, Raman and XPS, and their photocatalytic decomposition of methyl orange solutions was evaluated. The results show that an increase in n(Zn)/n(Ti) typically results in a decrease in the grain size of composite films firstly and then an increase of grain size, while an increase in n(Zn)/n(Ti) leads to an increase in film roughness firstly and then a decrease in film roughness. Both grain size and roughness of TiO2-ZnO films reach the maximum and minimum at n(Zn)/n(Ti) of 1/9.3, respectively. The n(Zn)/n(Ti) shows little effect on the valences of Zn and Ti elements, which mainly exist in the form of TiO2 and ZnO phases. The n(Zn)/n(Ti) has influence on the amount of anatase/rutile TiO2 heterojunction in the film. With increase of the n(Zn)/n(Ti), the absorption intensity of the composite film increases and the absorption region extends to 450 nm, which is redshifted as much as 150 nm in comparison with the pure TiO2 films. However, the photocatalytic abilities of heterogeneous composite films do not depend on the n(Zn)/n(Ti) but rather on the microstructures of the TiO2-ZnO composite films. Degradation rate of the film reaches the maximum and the photocatalytic decomposition of pollutants works best when n(Zn)/n(Ti)=1:9.3. 展开更多
关键词 magnetron sputtering tio2-ZnO thin films Zn to Ti mole ratio MICROSTRUCTURE PHOTOCATALYTIC
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Effects of HfO_2 buffer layers on the dielectric property and leakage current of Ba_(0.6)Sr_(0.4)TiO_3 thin films by pulsed laser deposition
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作者 耿彦 程晋荣 +1 位作者 俞圣雯 吴文彪 《Journal of Shanghai University(English Edition)》 CAS 2010年第6期456-459,共4页
Ba0.6Sr0.4TiO3 (BST) thin films with and without HfO 2 buffer layer were fabricated on Pt/Ti/SiO2/Si substrates by pulsed laser deposition. Dependences of HfO 2 thickness on the dielectric property and leakage curre... Ba0.6Sr0.4TiO3 (BST) thin films with and without HfO 2 buffer layer were fabricated on Pt/Ti/SiO2/Si substrates by pulsed laser deposition. Dependences of HfO 2 thickness on the dielectric property and leakage current of BST thin films were focused. The dielectric constant of BST thin films increased and then decreased with the increase of HfO 2 thickness, while the dielectric relaxation was gradually improved. The loss tangent and leakage current under positive bias decreased with the HfO 2 thickness increasing. The leakage current analysis based on the Schottky emission indicated an improvement of the BST/Pt interface with HfO 2 buffer layer. The loss tangent, tunability and figure of merit of optimized HfO 2 buffered BST thin film achieved 0.009 8, 21.91% (E max = 200 kV/cm), 22.40 at 10 6 Hz, respectively. 展开更多
关键词 Ba0.6Sr0.4tio3 (BST) thin film HfO 2 buffer layer dielectric property leakage current Schottky emission
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SiO_(2)/Ag/TiO_(2)汽车玻璃隔热膜的制备及研究
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作者 李晨 时方晓 《广州化工》 2025年第23期49-53,共5页
阐述了一种汽车玻璃隔热膜的制备方法,利用磁控溅射技术在玻璃基底上镀制三层膜,分别是表层(SiO_(2))膜、功能层(Ag)膜、介质层(TiO_(2))膜。在实验过程中利用磁控溅射沉积系统,采用单因素变量法研究溅射功率、溅射流量、溅射时间3种因... 阐述了一种汽车玻璃隔热膜的制备方法,利用磁控溅射技术在玻璃基底上镀制三层膜,分别是表层(SiO_(2))膜、功能层(Ag)膜、介质层(TiO_(2))膜。在实验过程中利用磁控溅射沉积系统,采用单因素变量法研究溅射功率、溅射流量、溅射时间3种因素对于制备过程中汽车玻璃隔热膜的影响,并且进行透过率、表面形态、保温隔热等性能表征。制备出的汽车玻璃隔热膜能够很好地实现相关性能。制备性能优异的汽车玻璃隔热膜符合当代汽车发展要求,探讨如何以较低的成本来制备性能优异的隔热膜具有强烈的现实紧迫性,为目前汽车玻璃隔热膜的发展提供了新的方法。 展开更多
关键词 SiO_(2)/ag/tio_(2)膜 汽车玻璃 隔热 透光率
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