自动物料搬运系统(Automatic Material Handling System,AMHS)是半导体制造厂的“物流大动脉”,因其自动化、高效率、高稳定性、智能化优势,逐渐成为半导体制造过程中不可或缺一部分。随着半导体技术的不断进步,AMHS系统的作用越来越大...自动物料搬运系统(Automatic Material Handling System,AMHS)是半导体制造厂的“物流大动脉”,因其自动化、高效率、高稳定性、智能化优势,逐渐成为半导体制造过程中不可或缺一部分。随着半导体技术的不断进步,AMHS系统的作用越来越大,将助力半导体提质增效。本文介绍了AMHS系统在半导体领域的应用及全球市场的主要情况,分析了半导体领域AMHS应用的未来行业趋势。展开更多
集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其...集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其是半导体制造实现自动化的重要一环。本文结合某300mm晶圆制造厂的实际情况,基于仿真模型理论,对工厂的AMHS系统进行了建模,并搭建三维仿真模型,分析研究其工程设计、轨道布局设计,提出了符合实际工程情况的评价模型的指标,提高了实际工程问题中AMHS的搬运效率。展开更多
To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presente...To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.展开更多
ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile A...ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile Automation具有并行加载和卸载几项工具的功能，同时大幅度减少对搭载置顶输送工具（Overhead Transport Vehicles，OHV）的依赖。展开更多
Background: The use of assisted reproductive technique (ART) is becoming more common in infertility. During ART most patients undergo ovarian stimulation. In this study we study the correlation between ovarian reserve...Background: The use of assisted reproductive technique (ART) is becoming more common in infertility. During ART most patients undergo ovarian stimulation. In this study we study the correlation between ovarian reserve markers: Anti-Mullerian hormone (AMH) and antral follicle count (AFC), and the response to ovarian stimulation at in vitro fertilization (IVF) centres in Douala Cameroon. Methods: This was a hospital based cross-sectional sectional analytic study carried out over a period of 3 years, 4 months at Clinique de l’Aéroport, Clinique Odyssée and Clinique Urogyn. Inclusion criteria were: Female partners of infertile couples undergoing ovarian stimulation for an in vitro fertilization cycle, patients who had both ovaries and had done either AMH, AFC or both before ovarian stimulation. Patients were divided into three groups based on the number of oocytes retrieved: low ovarian response for ≤3 oocytes, normal ovarian response for 4 - 15 oocytes and high ovarian response for >15 oocytes. Data obtained was analyzed by SPSS version 25.0. Results: The ages of participants ranged from 20 - 4 7 years, with a mean age of 34.11 ± 5.11 years. Most of them had secondary infertility (57.9%). The GnRH antagonist protocol was mainly used, and ovulation was triggered using HCG predominantly. On Multivariate analysis, age and history of PCOS were significantly associated with ovarian response in the low and high ovarian response groups, respectively. Conclusion: AMH has a better predictive value than AFC, however, it is less sensitive but more specific than AFC.展开更多
Objective:To investigate the quantitative influence of engineering parameters(diameter,bending angle)of minimally invasive surgical instruments and single-port laparoscopic surgery on biomarkers of ovarian reserve fun...Objective:To investigate the quantitative influence of engineering parameters(diameter,bending angle)of minimally invasive surgical instruments and single-port laparoscopic surgery on biomarkers of ovarian reserve function,and establish a multi-parameter coupled mathematical prediction model,providing a theoretical basis for precision instrument design and operation optimization.Methods:A total of 45 reproductive-age patients undergoing single-port laparoscopic ovarian cystectomy were selected.Through orthogonal experimental design,the instrument diameter(3/5/8 mm)and bending angle(30°/60°/90°)were divided into 9 groups,with5 cases in each group.Changes in serum AMH(anti-müllerian hormone),FSH(follicle-stimulating hormone),INHB(inhibin B)and ultrasonic AFC(antral follicle count)indexes were measured before surgery and on the 2nd to 3rd day of the first menstrual period after surgery.Enhanced CT images and laparoscopic images of ovarian force distribution were obtained.Finite element analysis(FEA)of the single-port instrument-ovarian tissue model was performed using ABAQUS software to calculate stress distribution in the ovarian cortex.Oscillatory shear experiments were used to determine the characteristics of viscoelastic property changes in the linear viscoelastic range of ovarian tissue.Results:The rate of decrease in AMH was lower in the 3 mm diameter-30°angle group(P<0.05);the peak Von Mises stress in the D3-θ30 group was lower than that in the other groups(P<0.05);the optimal parameter combination was a diameter of 3.13 mm and an angle of 21.72°,with the model calculating an AMH attenuation of 20%.Ovarian tissue changed with the frequency of the oscillatory shear test.In the low-frequency region(<1 Hz):G'>G''(elasticity-dominated);in the high-frequency region(>5 Hz):G''>G'(viscosity-dominated);the crossover point was at 5 Hz,where G'=G''=5 kPa.Before ovarian dissection:G'was relatively high and G''was relatively low,with elasticity dominating.During dissection:G'decreased and G''increased,with instrument stress causing damage.After dissection:G'further decreased and G''continued to rise,resulting in irreversible damage to the ovarian stroma.Conclusion:The engineering parameters of minimally invasive instruments significantly affect the ovarian reserve function index AMH and the peak Von Mises stress of the ovary through mechanical stress transmission.Using an instrument with a diameter of 3.13 mm and a bending angle of 21.72°can more effectively reduce the impact of single-port laparoscopic surgery on AMH decline.展开更多
文摘自动物料搬运系统(Automatic Material Handling System,AMHS)是半导体制造厂的“物流大动脉”,因其自动化、高效率、高稳定性、智能化优势,逐渐成为半导体制造过程中不可或缺一部分。随着半导体技术的不断进步,AMHS系统的作用越来越大,将助力半导体提质增效。本文介绍了AMHS系统在半导体领域的应用及全球市场的主要情况,分析了半导体领域AMHS应用的未来行业趋势。
文摘集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其是半导体制造实现自动化的重要一环。本文结合某300mm晶圆制造厂的实际情况,基于仿真模型理论,对工厂的AMHS系统进行了建模,并搭建三维仿真模型,分析研究其工程设计、轨道布局设计,提出了符合实际工程情况的评价模型的指标,提高了实际工程问题中AMHS的搬运效率。
基金National Natural Science Foundations of China(No.61273035,No.71071115)National High-Tech R&D Program for CIMS,China(No.2009AA043000)
文摘To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.
文摘ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile Automation具有并行加载和卸载几项工具的功能，同时大幅度减少对搭载置顶输送工具（Overhead Transport Vehicles，OHV）的依赖。
文摘Background: The use of assisted reproductive technique (ART) is becoming more common in infertility. During ART most patients undergo ovarian stimulation. In this study we study the correlation between ovarian reserve markers: Anti-Mullerian hormone (AMH) and antral follicle count (AFC), and the response to ovarian stimulation at in vitro fertilization (IVF) centres in Douala Cameroon. Methods: This was a hospital based cross-sectional sectional analytic study carried out over a period of 3 years, 4 months at Clinique de l’Aéroport, Clinique Odyssée and Clinique Urogyn. Inclusion criteria were: Female partners of infertile couples undergoing ovarian stimulation for an in vitro fertilization cycle, patients who had both ovaries and had done either AMH, AFC or both before ovarian stimulation. Patients were divided into three groups based on the number of oocytes retrieved: low ovarian response for ≤3 oocytes, normal ovarian response for 4 - 15 oocytes and high ovarian response for >15 oocytes. Data obtained was analyzed by SPSS version 25.0. Results: The ages of participants ranged from 20 - 4 7 years, with a mean age of 34.11 ± 5.11 years. Most of them had secondary infertility (57.9%). The GnRH antagonist protocol was mainly used, and ovulation was triggered using HCG predominantly. On Multivariate analysis, age and history of PCOS were significantly associated with ovarian response in the low and high ovarian response groups, respectively. Conclusion: AMH has a better predictive value than AFC, however, it is less sensitive but more specific than AFC.
文摘Objective:To investigate the quantitative influence of engineering parameters(diameter,bending angle)of minimally invasive surgical instruments and single-port laparoscopic surgery on biomarkers of ovarian reserve function,and establish a multi-parameter coupled mathematical prediction model,providing a theoretical basis for precision instrument design and operation optimization.Methods:A total of 45 reproductive-age patients undergoing single-port laparoscopic ovarian cystectomy were selected.Through orthogonal experimental design,the instrument diameter(3/5/8 mm)and bending angle(30°/60°/90°)were divided into 9 groups,with5 cases in each group.Changes in serum AMH(anti-müllerian hormone),FSH(follicle-stimulating hormone),INHB(inhibin B)and ultrasonic AFC(antral follicle count)indexes were measured before surgery and on the 2nd to 3rd day of the first menstrual period after surgery.Enhanced CT images and laparoscopic images of ovarian force distribution were obtained.Finite element analysis(FEA)of the single-port instrument-ovarian tissue model was performed using ABAQUS software to calculate stress distribution in the ovarian cortex.Oscillatory shear experiments were used to determine the characteristics of viscoelastic property changes in the linear viscoelastic range of ovarian tissue.Results:The rate of decrease in AMH was lower in the 3 mm diameter-30°angle group(P<0.05);the peak Von Mises stress in the D3-θ30 group was lower than that in the other groups(P<0.05);the optimal parameter combination was a diameter of 3.13 mm and an angle of 21.72°,with the model calculating an AMH attenuation of 20%.Ovarian tissue changed with the frequency of the oscillatory shear test.In the low-frequency region(<1 Hz):G'>G''(elasticity-dominated);in the high-frequency region(>5 Hz):G''>G'(viscosity-dominated);the crossover point was at 5 Hz,where G'=G''=5 kPa.Before ovarian dissection:G'was relatively high and G''was relatively low,with elasticity dominating.During dissection:G'decreased and G''increased,with instrument stress causing damage.After dissection:G'further decreased and G''continued to rise,resulting in irreversible damage to the ovarian stroma.Conclusion:The engineering parameters of minimally invasive instruments significantly affect the ovarian reserve function index AMH and the peak Von Mises stress of the ovary through mechanical stress transmission.Using an instrument with a diameter of 3.13 mm and a bending angle of 21.72°can more effectively reduce the impact of single-port laparoscopic surgery on AMH decline.
