Metal–insulator–semiconductor(MOS) capacitor is a key structure for high performance MOS field transistors(MOSFETs), requiring low leakage current, high breakdown voltage, and low interface states. In this paper, β...Metal–insulator–semiconductor(MOS) capacitor is a key structure for high performance MOS field transistors(MOSFETs), requiring low leakage current, high breakdown voltage, and low interface states. In this paper, β-Ga_(2)O_(3) MOS capacitors were fabricated with ALD deposited Al_(2)O_(3) using H_(2)O or ozone(O_(3)) as precursors. Compared with the Al_(2)O_(3) gate dielectric with H_(2)O as ALD precursor, the leakage current for the O_(3) precursor case is decreased by two orders of magnitude, while it keeps the same level at the fixed charges, interface state density, and border traps. The SIMS tests show that Al_(2)O_(3) with O_(3) as precursor contains more carbon impurities. The current transport mechanism analysis suggests that the C–H complex in Al_(2)O_(3) with O_(3) precursor serves as deep energy trap to reduce the leakage current. These results indicate that the Al_(2)O_(3)/β-Ga_(2)O_(3)MOS capacitor using the O_(3) precursor has a low leakage current and holds potential for application in β-Ga_(2)O_(3) MOSFETs.展开更多
目的:研究龙蛇九味汤联合坎地沙坦酯片治疗高血压的疗效及其对患者肾素(Renin)、血管紧张素Ⅱ(angiotensinⅡ,AngⅡ)及醛固酮(aldosterone,ALD)水平的影响。方法:将高血压患者99例按照随机数字表法分为观察组(50例,予龙蛇九味汤联合坎...目的:研究龙蛇九味汤联合坎地沙坦酯片治疗高血压的疗效及其对患者肾素(Renin)、血管紧张素Ⅱ(angiotensinⅡ,AngⅡ)及醛固酮(aldosterone,ALD)水平的影响。方法:将高血压患者99例按照随机数字表法分为观察组(50例,予龙蛇九味汤联合坎地沙坦酯片治疗)和对照组(49例,予坎地沙坦酯片治疗)。比较两组治疗效果,观察两组患者治疗前后甘油三酯(triglyceride,TG)、总胆固醇(total cholesterol,TC)、高密度脂蛋白胆固醇(high density lipoprotein cholesterol,HDL-C)及低密度脂蛋白胆固醇(low density lipoprotein cholesterol,LDL-C)水平。检测两组患者治疗前后血浆Renin、AngⅡ及ALD水平。结果:观察组疗效优于对照组(P<0.05);治疗后观察组TG、TC、LDL-C及血压晨峰值、收缩压、舒张压以及血浆Renin、AngⅡ、ALD均低于对照组(P<0.05),HDL-C高于对照组(P<0.05)。结论:龙蛇九味汤联合坎地沙坦酯有助于纠正高血压患者血脂紊乱情况,提高治疗效果,可能与其降低Renin、AngⅡ及ALD水平,调节肾素-血管紧张素-醛固酮系统有关。展开更多
基金Project supported in part by the Science and Technology Development Plan Project of Jilin Province, China (Grant No. YDZJ202303CGZH022)the National Key Research and Development Program of China (Grant No. 2024YFE0205300)+1 种基金the National Natural Science Foundation of China (Grant No. 62471504)the Open Fund of the State Key Laboratory of Optoelectronic Materials and Technologies (Sun Yat-Sen University) (Grant No. OEMT-2023KF-05)。
文摘Metal–insulator–semiconductor(MOS) capacitor is a key structure for high performance MOS field transistors(MOSFETs), requiring low leakage current, high breakdown voltage, and low interface states. In this paper, β-Ga_(2)O_(3) MOS capacitors were fabricated with ALD deposited Al_(2)O_(3) using H_(2)O or ozone(O_(3)) as precursors. Compared with the Al_(2)O_(3) gate dielectric with H_(2)O as ALD precursor, the leakage current for the O_(3) precursor case is decreased by two orders of magnitude, while it keeps the same level at the fixed charges, interface state density, and border traps. The SIMS tests show that Al_(2)O_(3) with O_(3) as precursor contains more carbon impurities. The current transport mechanism analysis suggests that the C–H complex in Al_(2)O_(3) with O_(3) precursor serves as deep energy trap to reduce the leakage current. These results indicate that the Al_(2)O_(3)/β-Ga_(2)O_(3)MOS capacitor using the O_(3) precursor has a low leakage current and holds potential for application in β-Ga_(2)O_(3) MOSFETs.
基金National Ministry of Science and Technology“13thFive-Year”Key Research and Development Program Sub Project for High Performance Computing(2016YFB0200205)2018 Shanghai Public R&D Service Center Construction Project(18DZ2295400)
文摘目的:研究龙蛇九味汤联合坎地沙坦酯片治疗高血压的疗效及其对患者肾素(Renin)、血管紧张素Ⅱ(angiotensinⅡ,AngⅡ)及醛固酮(aldosterone,ALD)水平的影响。方法:将高血压患者99例按照随机数字表法分为观察组(50例,予龙蛇九味汤联合坎地沙坦酯片治疗)和对照组(49例,予坎地沙坦酯片治疗)。比较两组治疗效果,观察两组患者治疗前后甘油三酯(triglyceride,TG)、总胆固醇(total cholesterol,TC)、高密度脂蛋白胆固醇(high density lipoprotein cholesterol,HDL-C)及低密度脂蛋白胆固醇(low density lipoprotein cholesterol,LDL-C)水平。检测两组患者治疗前后血浆Renin、AngⅡ及ALD水平。结果:观察组疗效优于对照组(P<0.05);治疗后观察组TG、TC、LDL-C及血压晨峰值、收缩压、舒张压以及血浆Renin、AngⅡ、ALD均低于对照组(P<0.05),HDL-C高于对照组(P<0.05)。结论:龙蛇九味汤联合坎地沙坦酯有助于纠正高血压患者血脂紊乱情况,提高治疗效果,可能与其降低Renin、AngⅡ及ALD水平,调节肾素-血管紧张素-醛固酮系统有关。
