Deep ultraviolet coherent light,particularly at the wavelength of 193 nm,has become indispensable for semiconductor lithography.We present a compact solid-state nanosecond pulsed laser system capable of generating 193...Deep ultraviolet coherent light,particularly at the wavelength of 193 nm,has become indispensable for semiconductor lithography.We present a compact solid-state nanosecond pulsed laser system capable of generating 193-nm coherent light at the repetition rate of 6 kHz.One part of the 1030-nm laser from the homemade Yb:YAG crystal amplifier is divided to generate 258 nm laser(1.2 W)by fourth-harmonic generation,and the rest is used to pump an optical parametric amplifier producing 1553 nm laser(700 mW).Frequency mixing of these beams in cascaded LiB_(3)O_(5) crystals yields a 193-nm laser with 70-mW average power and a linewidth of less than 880 MHz.By introducing a spiral phase plate to the 1553-nm beam before frequency mixing,we generate a vortex beam carrying orbital angular momentum.This is,to our knowledge,the first demonstration of a 193-nm vortex beam generated from a solid-state laser.Such a beam could be valuable for seeding hybrid ArF excimer lasers and has potential applications in wafer processing and defect inspection.展开更多
基金supported by the Research Project of the Aerospace Information Research Institute,the Chinese Academy of Sciences(Grant Nos.E1Z1D101 and E2Z2D101)the Chinese Academy of Sciences(Grant No.E33310030D)the Guangzhou Basic and Applied Basic Research Foundation(Grant Nos.2023A04J0336 and 2023A04J0024).
文摘Deep ultraviolet coherent light,particularly at the wavelength of 193 nm,has become indispensable for semiconductor lithography.We present a compact solid-state nanosecond pulsed laser system capable of generating 193-nm coherent light at the repetition rate of 6 kHz.One part of the 1030-nm laser from the homemade Yb:YAG crystal amplifier is divided to generate 258 nm laser(1.2 W)by fourth-harmonic generation,and the rest is used to pump an optical parametric amplifier producing 1553 nm laser(700 mW).Frequency mixing of these beams in cascaded LiB_(3)O_(5) crystals yields a 193-nm laser with 70-mW average power and a linewidth of less than 880 MHz.By introducing a spiral phase plate to the 1553-nm beam before frequency mixing,we generate a vortex beam carrying orbital angular momentum.This is,to our knowledge,the first demonstration of a 193-nm vortex beam generated from a solid-state laser.Such a beam could be valuable for seeding hybrid ArF excimer lasers and has potential applications in wafer processing and defect inspection.
