A micro direct methanol fuel cell （μDMFC） using MEMS technology is reported. The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography. The optimiza...A micro direct methanol fuel cell （μDMFC） using MEMS technology is reported. The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography. The optimization of the MEMS fabrication process is analyzed. The experimental results show the prototype generates a maximum power density of 2.52mW/cm^2 at room temperature. This performance is better than the published resuits of other silicon-based passive μDMFCs. Moreover,it is comparable with that of our previous active μDMFCs which require an external pump, certificating the feasibility of this new configuration.展开更多
文摘A micro direct methanol fuel cell （μDMFC） using MEMS technology is reported. The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography. The optimization of the MEMS fabrication process is analyzed. The experimental results show the prototype generates a maximum power density of 2.52mW/cm^2 at room temperature. This performance is better than the published resuits of other silicon-based passive μDMFCs. Moreover,it is comparable with that of our previous active μDMFCs which require an external pump, certificating the feasibility of this new configuration.
