Design and operation of a practical, accurate alignment diagnostic system is important for the grating tiling technology, which is supposed to be applied in a chirped-pulse amplification system to increase the output ...Design and operation of a practical, accurate alignment diagnostic system is important for the grating tiling technology, which is supposed to be applied in a chirped-pulse amplification system to increase the output power. A diagnostic method is proposed and demonstrated for grating tiling. Provided that the wavelength and incident angle of the diagnostic beam are properly set, the far-field of the main laser beam and that of the diagnostic beam can vary in the same way with the tiling errors between the sub-aperture gratings. Therefore, rotational and translational errors can be controlled and compensated according to the far-field of the diagnostic beam. The real-time monitoring and alignment can be achieved without disturbing the main beam.展开更多
Large-aperture gratings have significant applications in inertial confinement fusion, immersion lithography manufacturing and astronomical observation. Currently, it is challenging and expensive to manufacture sizable...Large-aperture gratings have significant applications in inertial confinement fusion, immersion lithography manufacturing and astronomical observation. Currently, it is challenging and expensive to manufacture sizable monolithic gratings.Therefore, tiled multiple small-aperture gratings are preferred. In this study, the impact of seam phase discontinuity on the modulation of the laser beam field was explored based on the measurement results of the Shenguang-II laser large-aperture multi-exposure-tiled grating. An innovative method for accurately calculating the phase jump of multiexposure-tiled grating seams was proposed. An intensive electromagnetic field analysis was performed by applying rigorous coupled-wave analysis to a reasonably constructed micrometer-level periodic grating seam structure, and the phase jump appearing in millimeter-scale seams of large-aperture tiled gratings was obtained accurately.展开更多
基金the National High Tehnoloy Development Program of China(NO.2005AA845050)the Key Lab Foun-dation of China(No.9140C6803010702)As for the method presented above,a patent has been applied(No.200610022005.X)
文摘Design and operation of a practical, accurate alignment diagnostic system is important for the grating tiling technology, which is supposed to be applied in a chirped-pulse amplification system to increase the output power. A diagnostic method is proposed and demonstrated for grating tiling. Provided that the wavelength and incident angle of the diagnostic beam are properly set, the far-field of the main laser beam and that of the diagnostic beam can vary in the same way with the tiling errors between the sub-aperture gratings. Therefore, rotational and translational errors can be controlled and compensated according to the far-field of the diagnostic beam. The real-time monitoring and alignment can be achieved without disturbing the main beam.
基金supported by the Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDA25020104)
文摘Large-aperture gratings have significant applications in inertial confinement fusion, immersion lithography manufacturing and astronomical observation. Currently, it is challenging and expensive to manufacture sizable monolithic gratings.Therefore, tiled multiple small-aperture gratings are preferred. In this study, the impact of seam phase discontinuity on the modulation of the laser beam field was explored based on the measurement results of the Shenguang-II laser large-aperture multi-exposure-tiled grating. An innovative method for accurately calculating the phase jump of multiexposure-tiled grating seams was proposed. An intensive electromagnetic field analysis was performed by applying rigorous coupled-wave analysis to a reasonably constructed micrometer-level periodic grating seam structure, and the phase jump appearing in millimeter-scale seams of large-aperture tiled gratings was obtained accurately.
