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Study on Temperature Modulation Techniques for Micro Gas Sensors 被引量:1
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作者 Guangfen Wei Zhenan Tang +2 位作者 Hongquan Zhang Yanbing Xue Jun Yu 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期349-352,共4页
The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the ... The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the selectivity of gas sensors.With a newly developed alumina based micro gas sensor,the sensitivity to CO and CH_4 at different operating temperatures was investigated.By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes,the dynamic responses of the sensor were measured and processed.Results show that the modulating waveshape plays an important role in the improvement of selectivity,while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz~200 mHz. 展开更多
关键词 micro gas sensor SELECTIVITY temperature modulation techniques
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