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Fabrication and study of supercapacitor electrodes based on oxygen plasma functionalized carbon nanotube fibers 被引量:6
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作者 Paa Kwasi Adusei Seyram Gbordzoe +6 位作者 Sathya Narayan Kanakaraj Yu-Yun Hsieh Noe T.Alvarez Yanbo Fang Kevin Johnson Colin McConnell Vesselin Shanov 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2020年第1期120-131,I0005,共13页
Dry-spun Carbon Nanotube(CNT)fibers were surface-modified by atmospheric pressure oxygen plasma functionalization using a well controlled and continuous process.The fibers were characterized by scanning electron micro... Dry-spun Carbon Nanotube(CNT)fibers were surface-modified by atmospheric pressure oxygen plasma functionalization using a well controlled and continuous process.The fibers were characterized by scanning electron microscopy(SEM),Raman spectroscopy,and X-ray Photoelectron Spectroscopy(XPS).It was found from the conducted electrochemical measurements that the functionalized fibers showed a 132.8% increase in specific capacitance compared to non-functionalized fibers.Dye-adsorption test and the obtained Randles-Sevcik plot demonstrated that the oxygen plasma functionalized fibers exhibited increased surface area.It was further established by Brunauer-Emmett-Teller(BET)measurements that the surface area of the CNT fibers was increased from 168.22 m^2/g to 208.01 m^2/g after plasma functionalization.The pore size distribution of the fibers was also altered by this processing.The improved electrochemical data was attributed to enhanced wettability,increased surface area,and the presence of oxygen functional groups,which promoted the capacitance of the fibers.Fiber supercapacitors were fabricated from the oxygen plasma functionalized CNT fiber electrodes using different electrolyte systems.The devices with functionalized electrodes exhibited excellent cyclic stability(93.2% after 4000 cycles),flexibility,bendability,and good energy densities.At 0.5 m A/cm^2,the EMIMBF4 device revealed a specific capacitance,which is 27% and 65%greater than the specific capacitances of devices using EMIMTFSI and H2SO4 electrolytes,respectively.The practiced in this work plasma surface processing can be employed in other applications where fibers,yarns,ribbons,and sheets need to be chemically modified. 展开更多
关键词 oxygen plasma functionalization Fiber supercapacitors CNT fiber electrodes Ionic liquid
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Effect of Oxygen Plasma on Low Dielectric Constant HSQ (Hydrogensilsesquioxane) Films 被引量:1
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作者 袁强华 殷桂琴 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第1期86-88,共3页
The commercially available hydrogensilsesquioxane (HSQ) offers a low dielectric constant. In this paper, the impact of oxygen plasma treatment has been investigated on the low- k HSQ films. Fourier transform infrar... The commercially available hydrogensilsesquioxane (HSQ) offers a low dielectric constant. In this paper, the impact of oxygen plasma treatment has been investigated on the low- k HSQ films. Fourier transform infrared (FTIR) spectroscopy was used to identify the network structure and cage structure of Si-O-Si bonds and other possible bonds after treatments. C-V and I-V measurements were used to determine the dielectric constant, the electronic resistivity and the breakdown electric field, respectively. The result indicates that oxygen plasma treatment will damage the HSQ films by removing the hydrogen content. Both dielectric constant and leakage current density increase significantly after oxygen plasma exposure. The dielectric constant and leakage current density can both be decreased by annealing at 350 ℃ for 1.5 h in nitrogen ambient. The reason is that the open porous of the external films can be modified and density of thin film be increased. The rough surface can be smoothed. 展开更多
关键词 thin films oxygen plasma exposure ANNEALING
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Balancing the corrosion resistance and through-plane electrical conductivity of Cr coating via oxygen plasma treatment 被引量:1
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作者 Xian-Zong Wang Hong-Qiang Fan +2 位作者 Triratna Muneshwar Ken Cadien Jing-Li Luo 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2021年第2期75-84,共10页
Developing an electrically conductive and corrosion-resistant coating is essential for metal bipolar plates of polymer electrolyte membrane fuel cells(PEMFCs). Although enhanced corrosion resistance was seen for Cr co... Developing an electrically conductive and corrosion-resistant coating is essential for metal bipolar plates of polymer electrolyte membrane fuel cells(PEMFCs). Although enhanced corrosion resistance was seen for Cr coated stainless steel(Cr/SS) bipolar plates, they experience a quick decrease of through-plane electrical conductivity due to the formation of a porous and low-conductive corrosion product layer at the plate surface, thus leading to an increase in interfacial contact resistance(ICR). To tackle this issue, the multilayer Cr coatings were deposited using the magnetron sputtering with a remote inductively coupled oxygen plasma(O-ICP) in the present study. After the O-ICP treatment, a Cr oxide layer(Cr O*) is formed on the specimen surface. The Cr O*/Cr/SS has a remarkably lower stable corrosion rate(iss) than that of the native Cr oxides(Cr On/Cr/SS). Compared with Cr On/Cr/SS, the excellent performance of Cr O*/Cr/SS is attributed to a denser and thicker surface layer of Cr O* with Cr being oxidized to its highest valence state,Cr(VI). More importantly, the through-plane electrical conductivity of the specimens treated by the optimized O-ICP decreases much slowly than Cr On/Cr/SS and thus, the increament of ICR of Cr O*/Cr/SS after the potentiostatic polarization test is considerably smaller than that of Cr On/Cr/SS, which is benefited from the reduced issthat mitigates the deposition of corrosion products and hinders further oxidation of Cr coating. Therefore, Cr O*/Cr/SS proves to be a well balanced trade-off between corrosion resistance and through-plane electrical conductivity. The results of this study demonstrate that O-ICP treatment on a conductive metal coating is an effective strategy to improve the corrosion resistance and suppress the increase of ICR over the long-term polarization. The technique reported herein exhibits its promising potential application in preparing corrosion resistant and electrically conductive coatings on metal bipolar plates to be used in PEMFCs. 展开更多
关键词 Metal bipolar plates oxygen plasma treatment Chromium coating Corrosion resistance Electrical conductivity Polymer electrolyte membrane fuel cells
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Study on Bombyx mori silk treated by oxygen plasma 被引量:1
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作者 陈宇岳 林红 +2 位作者 任煜 王红卫 朱良均 《Journal of Zhejiang University Science》 EI CSCD 2004年第8期918-922,共5页
Study of the morphology, aggregation structure and properties ofBombyx mori silk treated by low temperature oxygen plasma showed that slight flutes appeared on the surface of Bombyx mori silk fiber and that its surfac... Study of the morphology, aggregation structure and properties ofBombyx mori silk treated by low temperature oxygen plasma showed that slight flutes appeared on the surface of Bombyx mori silk fiber and that its surface structure changed after plasma treatment. The conformation also changed and crystalline degree decreased. The stannic filling rate of treated fiber was improved. Because of etching, the weight of the fiber decreased but the breaking strength changed little after short-time treatment. 展开更多
关键词 oxygen plasma Bombyx mori silk MORPHOLOGY STRUCTURE PROPERTIES
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Surface Properties of AZ31B Magnesium Alloy by Oxygen Plasma Immersion Ion Implantation
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作者 韦春贝 巩春志 +3 位作者 田修波 杨士勤 傅劲裕 朱剑豪 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第1期33-37,共5页
Oxygen plasma immersion ion implantation (PIII) has been conducted on AZ31B magnesium alloy using different bias voltages. The modified layer is mainly composed of MgO and some MgAl2O4. Results form Rutherford backs... Oxygen plasma immersion ion implantation (PIII) has been conducted on AZ31B magnesium alloy using different bias voltages. The modified layer is mainly composed of MgO and some MgAl2O4. Results form Rutherford backscattering spectrometry (RBS) and X-ray photoelectron spectroscopy (XPS) indicate that the bias voltage has a significant impact on the structure of the films. The oxygen implant fluences and the thickness of the implanted layer increase with higher bias voltages. A high bias voltage such as 60 kV leads to an unexpected increments in the oxygen-rich layer's thickness compared to those of the samples implanted at 20 kV and 40 kV. The hardness is hardly enhanced by oxygen PIII. The corrosion resistance of magnesium alloy may be improved by a proper implantation voltage. 展开更多
关键词 magnesium alloy oxygen plasma implantation structure HARDNESS corrosion resistance
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SURFACE REARRANGEMENTS OF OXYGEN PLASMA TREATED POLYSTYRENE:SURFACE DYNAMICS AND HUMIDITY EFFECT
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作者 JunweiLi KyunghuiOh HyukYu 《Chinese Journal of Polymer Science》 SCIE CAS CSCD 2005年第2期187-196,共10页
The time evolution of oxygen plasma treated polystyrene(PS)surfaces was investigated upon storing them in theair under controlled humidity conditions.The methods of water contact angle,X-ray photoelectron spectroscopy... The time evolution of oxygen plasma treated polystyrene(PS)surfaces was investigated upon storing them in theair under controlled humidity conditions.The methods of water contact angle,X-ray photoelectron spectroscopy(XPS),sumfrequency generation(SFG)vibrational spectroscopy,and atomic force microscopy(AFM)were used to infer the surfaceproperties and structure.Chemical groups containing oxygen were formed on the PS surface with the plasma treatment,demonstrated by water contact angle and XPS.The surface polarity decayed markedly on time,as assessed by steady increasein the water contact angle as a function of storage time,from zero to around 60°.The observed decay is interpreted as arisingfrom surface rearrangement processes to burying polar groups away from the uppermost layer of the surfaces,which is incontact with air.On the other hand,XPS results show that the chemical composition in the first 3 nm surface layer isunaffected by the surface aging,and the depth profile of oxygen is essentially the same with time.A possible change of PSsurface roughness was examined by AFM,and it showed that the increase of water contact angle during surface aging couldnot be attributed to surface roughness.Thus,it is concluded that surface aging is attributable to surface reorganization andthe motion of oxygen containing groups is confined within the XPS probing depth.SFG spectroscopy,which is intrinsicallyinterface-specific,was used to detect the chemical structure of PS surface at the molecular level after various aging times.The results are interpreted as follows.During the aging of the plasma treated PS surfaces,the oxygen containing groupsundergo reorientation processes toward the polymer bulk and/or parallel to the surface,while the CH_2 moiety stands up onthe PS surface.Our results indicate that the surface configuration changes do not require large length scale segmentalmotions or migration of macromolecules.Motions that are responsible for surface configuration changes could be relativelysmall rotational motions.The aging behaviors under different relative humidity conditions were shown to be similar from18% to 91%,whereas the kinetics of surface polarity decays were faster in higher relative humidity.Here,the surfacerearrangement of polystyrene films that were previously treated by oxygen plasma and aged,and was investigated in terms ofcontact angle after the water immersion.The contact angles of the water-immersed samples were found to change andapproach the initial values before the immersion asymptotically. 展开更多
关键词 Surface aging Surface rearrangement oxygen plasma treatment Spin-cast polystyrene film Aging of surface functionalized film Contact angle recovery.
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Effects of microwave oxygen plasma treatments on microstructure and Ge-V photoluminescent properties of diamond particles
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作者 Ling-Xiao Sheng Cheng-Ke Chen +2 位作者 Mei-Yan Jiang Xiao Li Xiao-Jun Hu 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第8期489-494,共6页
The microstructure and Ge-V photoluminescent properties of diamond particles treated by microwave oxygen plasma are investigated.The results show that in the first 5 min of microwave plasma treatment,graphite and diso... The microstructure and Ge-V photoluminescent properties of diamond particles treated by microwave oxygen plasma are investigated.The results show that in the first 5 min of microwave plasma treatment,graphite and disordered carbon on the surface of the particles are etched away,so that diamond with regular crystal plane,smaller lattice stress,and better crystal quality is exposed,producing a Ge-V photoluminescence(PL)intensity 4 times stronger and PL peak FWHM(full width at half maximum)value of 6.6 nm smaller than the as-deposited sample.It is observed that the cycles of‘diamond is converted into graphite and disordered carbon,then the graphite and disordered carbon are etched’can occur with the treatment time further increasing.During these cycles,the particle surface alternately appears smooth and rough,corresponding to the strengthening and weakening of Ge-V PL intensity,respectively,while the PL intensity is always stronger than that of the as-deposited sample.The results suggest that not only graphite but also disordered carbon weakens the Ge-V PL intensity.Our study provides a feasible way of enhancing the Ge-V PL properties and effectively controlling the surface morphology of diamond particle. 展开更多
关键词 diamond particles Ge-V center microwave oxygen plasma treatment PL enhancement
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Synergistic tuning of electrochemical surface area and surface Co^(3+)by oxygen plasma enhances the capacities of Co_(3)O_(4)lithium-oxygen battery cathodes
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作者 Xueli Guo Liang Xiao +3 位作者 Pengfei Yan Ming Li Mingjun Zhu Jinping Liu 《Chinese Chemical Letters》 SCIE CAS CSCD 2021年第11期3491-3495,共5页
Modifying electrochemical surface area(ECSA)and surface chemistry are promising approaches to enhance the capacities of oxygen cathodes for lithium-oxygen(Li-O_(2))batteries.Although various chemical approaches have b... Modifying electrochemical surface area(ECSA)and surface chemistry are promising approaches to enhance the capacities of oxygen cathodes for lithium-oxygen(Li-O_(2))batteries.Although various chemical approaches have been successfully used to tune the cathode surface,versatile physical techniques including plasma etching etc.could be more effortless and effective than arduous chemical treatments.Herein,for the first time,we propose a facile oxygen plasma treatment to simultaneously etch and modify the surface of Co_(3)O_(4)nanosheet arrays(NAs)cathode for Li-O_(2)batteries.The oxygen plasma not only etches Co_(3)O_(4)nanosheets to enhance the ECSA but also lowers the oxygen vacancy concentration to enable a Co^(3+)-rich surface.In addition,the NA architecture enables the full exposure of oxygen vacancies and surface Co^(3+)that function as the catalytically active sites.Thus,the synergistic effects of enhanced ECSA,modest oxygen vacancy and high surface Co^(3+)achieve a significantly enhanced reversible capacity of 3.45 mAh/cm^(2)for Co_(3)O_(4)NAs.This work not only develops a promising high-capacity cathode for Li-O_(2)batteries,but also provides a facile physical method to simultaneously tune the nanostructure and surface chemistry of energy storage materials. 展开更多
关键词 CO_(3)O_(4)nanosheet arrays oxygen plasma Electrochemical surface area oxygen vacancy Co^(3+)-rich surface
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Effect of Krypton Addition on Electron Cyclotron Resonance-Radio Frequency Hybrid Oxygen Plasma for Patterning Diamond Surfaces
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作者 汪磊 王鸿勇 +4 位作者 柯博 丁芳 陈牧笛 周海洋 朱晓东 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第1期31-34,共4页
Electron cyclotron resonance radio frequency (ECR-rf) hybrid krypton-diluted oxygen plasmas were used to pattern the surfaces of diamond films with the assistance of a physical mask, while optical emission spectrosc... Electron cyclotron resonance radio frequency (ECR-rf) hybrid krypton-diluted oxygen plasmas were used to pattern the surfaces of diamond films with the assistance of a physical mask, while optical emission spectroscopy was employed to characterize the plasma. It was found that with krypton dilution the etching rate decreased, and also the aspect ratios of nanotips formed in micro-holes were significantly modified. The oxygen atomic densities were estimated by oxygen atom optical emission and argon actinometry. Under a microwave power of 300 W and rf bias of-300 V, the absolute density of ground-state oxygen atoms decreased from 1.3×10^12 cm^-3 to 1.4×10^11 cm^-3 as the krypton dilution ratio increased to 80%, accompanied by the decrease in the plasma excitation temperature. It is concluded that oxygen atoms play a dominant role in diamond etching. The relative variations in the horizontal and vertical etching rates induced by the addition of krypton are attributed to the observations of thicker nanotips at a high krypton dilution ratio. 展开更多
关键词 diamond etching oxygen/krypton plasma surface
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Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment
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作者 赵平 夏义本 +4 位作者 王林军 刘健敏 徐闰 彭鸿雁 史伟民 《中国有色金属学会会刊:英文版》 CSCD 2006年第B01期310-312,共3页
The room-temperature oxygen plasma treatment before depositing ZnO films on nanocrystalline diamond substrates was studied. The nanocrystalline diamond substrates were pretreated in oxygen plasma at 50 W for 30 min at... The room-temperature oxygen plasma treatment before depositing ZnO films on nanocrystalline diamond substrates was studied. The nanocrystalline diamond substrates were pretreated in oxygen plasma at 50 W for 30 min at room temperature and then ZnO films were sputtered on diamond substrates at 400 W. The X-ray diffraction (XRD) patterns show that the c-axis orientation of ZnO film increases evidently after oxygen plasma pretreatment. The AFM and SEM measurements also show that the high c-axis orientation of ZnO film and the average surface roughness is less than 5 nm. The resistivity of ZnO films increases nearly two orders of magnitude to 1.04×108■·cm. As a result, room-temperature oxygen plasma pretreatment is indeed a simple and effective way to improve the performance of ZnO film used in SAW devices by ameliorating the combination between diamond film and ZnO film and also complementing the absence of oxygen atoms in ZnO film. 展开更多
关键词 氧化锌薄膜 室温 氧等离子体预处理 性能改进 纳米晶金刚石膜 声表面波器件
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Characteristics of DBD micro-discharge at different pressure and its effect on the performance of oxygen plasma reactor 被引量:1
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作者 Rui LIU Zhe YU +2 位作者 Huijuan CAO Pu LIU Zhitao ZHANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第5期5-13,共9页
The oxygen plasma reactor based on dielectric barrier discharge principle can produce a high concentration of reactive oxygen species,which can cooperate with hydraulic cavitation gas-liquid mixer to realize the appli... The oxygen plasma reactor based on dielectric barrier discharge principle can produce a high concentration of reactive oxygen species,which can cooperate with hydraulic cavitation gas-liquid mixer to realize the application of advanced oxidation technology in water treatment.In this technology,the work pressure of the oxygen plasma reactor is decreased by the vacuum suction effect generated in the snap-back section of the gas-liquid mixed container.In this paper,the characteristics of single micro-discharge at different pressures were investigated with the methods of discharge image,electrical characteristics and spectral diagnosis,in order to analyze the electrical characteristics and reactive oxygen species generation efficiency of oxygen plasma reactor at the pressure range from 60 kPa to 100 kPa.The study indicated that,when the pressure decreases,the duty ratio of ionization in the discharge gap and number of electrons with high energy increases,leading to a rise in reactive oxygen species production.When the oxygen reaches the maximum ionization,the concentration of reactive oxygen species is the highest.Then,the discharge intensity continues to increase,producing more heat,which will decompose the ozone and lower the production of reactive oxygen species.The oxygen plasma reactor has an optimum working pressure at different input powers,which makes the oxygen plasma reactor the most efficient in generating reactive oxygen species. 展开更多
关键词 atmospheric PRESSURE plasma REACTOR PRESSURE active oxygen particle dielectric BARRIER DISCHARGE
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Atmospheric Pressure Cold Argon/Oxygen Plasma Jet Assisted by Preionization of Syringe Needle Electrode 被引量:4
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作者 钱沐杨 任春生 +2 位作者 王德真 冯岩 张家良 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期561-565,共5页
An atmospheric pressure nonequilibrium argon/oxygen plasma jet assisted by the preionization of syringe needle electrode discharge is reported. With the syringe needle plasma as its pre-ionization source, the hybrid b... An atmospheric pressure nonequilibrium argon/oxygen plasma jet assisted by the preionization of syringe needle electrode discharge is reported. With the syringe needle plasma as its pre-ionization source, the hybrid barrier-jet was shown to generate uniform discharge with a lower breakdown voltage and a relatively low gas temperature varying from 390 K to 440 K, even when the vol.% oxygen in argon was up to 6%. Utilizing the actinometry method, the concentration of atomic oxygen was estimated to be about in an orders of magnitude of 10^17 cm^-3. The argon/oxygen plasma jet was then employed to clean out heat transfer oil, with a maximum cleaning rate of 0.1 mm/s achieved. 展开更多
关键词 atmospheric pressure nonequilibrium Ar/02 plasma PREIONIZATION ACTINOMETRY concentration of atomic oxygen heat transfer oil
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Regulating the conductance of tungsten diselenide by oxygen plasma and improving its electrical stability by encapsulation
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作者 Zhaofang Cheng Shaodan He +7 位作者 Shimin Zhang Shijun Duan Min Wang Ziyu Liu Rong Zhang Wenya Qiang Xudong Zhang Minggang Xia 《Nano Research》 SCIE EI CSCD 2024年第4期3253-3260,共8页
Two-dimensional(2D)tungsten selenide(WSe_(2))is promising candidate material for future electronic applications,owing to its potential for ultimate device scaling.For improving the electronic performance of WSe_(2)-ba... Two-dimensional(2D)tungsten selenide(WSe_(2))is promising candidate material for future electronic applications,owing to its potential for ultimate device scaling.For improving the electronic performance of WSe_(2)-based field-effect transistors(FETs),the modification of surface properties is essential.In this study,the seamless structural phase transition in WSe_(2) lattice is achieved by soft oxygen plasma,regulating the electrical conductance of WSe_(2)-based FETs.We found that during the soft oxygen plasma treatment with optimal processing time,the generated oxygen ions can substitute some selenium atoms and thus locally modify the bond length,inducing 2H→1T phase transition in WSe_(2) with seamless interfaces.The mosaic structures have been proven to tailor the electronic structure and increase the hole carrier concentration inside WSe_(2),significantly increasing the channel conductance of WSe_(2) FETs.With the further increase of the oxygen plasma treatment time,the creation of more selenium vacancy defects leads to the electronic doping,resulting in the reduction of conductance.Benefiting from the hexagonal boron nitride(h-BN)encapsulation to interrupt the partial structural relaxation from 1T to 2H phase,our WSe_(2) FET exhibits high electronic stability with conductance of 6.8×10^(-4) S,which is about four orders of magnitude higher than 2H WSe_(2)(5.8×10^(-8) S).This study could further broaden the WSe_(2) FETs in applications for functionalization and integration in electronics. 展开更多
关键词 tungsten selenide(WSe2) structural phase transition oxygen plasma CONDUCTANCE hexagonal boron nitride(h-BN)encapsulation
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Effect of oxygen plasma treatment on the nanofiltration performance of reduced graphene oxide/cellulose nanofiber composite membranes 被引量:4
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作者 Shabin Mohammed Hanaa MHegab +5 位作者 Ranwen Ou Shasha Liu Hongyu Ma Xiaofang Chen Tam Sridhar Huanting Wang 《Green Chemical Engineering》 2021年第1期122-131,共10页
Graphene based nanosheets have been widely used as building blocks for fabrication of superior separation membrane for water processing.In particular,membranes made of reduced graphene oxide(rGO)show better stability ... Graphene based nanosheets have been widely used as building blocks for fabrication of superior separation membrane for water processing.In particular,membranes made of reduced graphene oxide(rGO)show better stability compared with graphene oxide(GO).However,densely stacked of rGO often results in low water flux.In this study,cellulose nanofibers(CNFs)were incorporated into the rGO laminates by vacuum filtration of dilute GO/CNF solution and thermal reduction at 150C for 1.5 h.The resulting rGO/CNF membrane was treated with oxygen plasma for 1–4 min to create nanopores on the membrane surface for the purpose of enhancing nano-filtration performance.The results showed that the optimum membrane performance was obtained by using the equal amount of GO(31.83 mg m^(-2))and CNFs accompanied by 3 min of plasma treatment,exhibiting a pure water permeance of 37.23.9 L m^(-2)h^(-1)bar^(-1)maintaining a rejection above 90%for Acid Fuchsin(1.2×1.1 nm),Rose Bengal(1.5×1.2 nm)and Brilliant Blue(2.2×1.7 nm). 展开更多
关键词 Graphene oxide MEMBRANE NANOFILTRATION Cellulose nanofibers oxygen plasma treatment
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Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors 被引量:1
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作者 Qi Huang Jiye Xia +4 位作者 Jie Zhao Guodong Dong Fang Liu Hu Meng Xuelei Liang 《Science Bulletin》 SCIE EI CSCD 2018年第12期802-806,共5页
Carbon nanotube thin film transistor (CNT-TFF) is an emerging technology for future macroelectronics, such as chemical and biological sensors, optical detectors, and the backplane driving circuits for flat panel dis... Carbon nanotube thin film transistor (CNT-TFF) is an emerging technology for future macroelectronics, such as chemical and biological sensors, optical detectors, and the backplane driving circuits for flat panel displays. The mostly reported fabrication method of CNT-TFT is a lift-off based photolithography process. In such fabrication process, photoresist (PR) residue contaminates the interface of tube-metal contact and deteriorates the device performance. In this paper, ultraviolet ozone (UVO) and oxygen plasma treat- ments were employed to remove the PR contamination. Through our well-designed experiments, the UVO treatment is confirmed an effective way of cleaning contamination at the tube-metal interface, while oxygen plasma treatment is too reactive and hard to control, which is not appropriate for CNT-TFTs. It is determined that 2-6 rain UVO treatment is the preferred window, and the best optimized treatment time is 4 rain, which leads to 15% enhancement of device performance. 展开更多
关键词 Carbon nanotube Thin film transistor Contact UVO oxygen plasma
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The effect of oxygen plasma ashing on the resistance of TiN bottom electrode for phase change memory
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作者 高丹 刘波 +10 位作者 李莹 宋志棠 任万春 李俊焘 许震 吕士龙 朱南飞 任佳栋 詹奕鹏 吴汉明 封松林 《Journal of Semiconductors》 EI CAS CSCD 2015年第5期181-186,共6页
Phase change memory (PCM) has been regarded as a promising candidate for the next generation of nonvolatile memory. To decrease the power required to reset the PCM cell, titanium nitride (TIN) is preferred to be u... Phase change memory (PCM) has been regarded as a promising candidate for the next generation of nonvolatile memory. To decrease the power required to reset the PCM cell, titanium nitride (TIN) is preferred to be used as the bottom electrode of PCM due to its low thermal and suitable electrical conductivity. However, during the manufacture of PCM cell in 40 nm process node, abnormally high and discrete distribution of the resistance of TiN bottom electrode was found, which might be induced by the surface oxidation of TiN bottom electrode during the photoresist ashing process by oxygen plasma. In this work, we have studied the oxidation of TiN and found that with the increasing oxygen plasma ashing time, the thickness of the TiO2 layer became thicker and the state of the TiO2 layer changed from amorphous to crystalline, respectively. The resistance of TiN electrode contact chain with 4-5 nm TiO2 layer was confirmed to be almost three-orders of magnitude higher than that of pure TiN electrode, which led to the failure issue of PCM cell. We efficiently removed the oxidation TiO2 layer by a chemical mechanical polishing (CMP) process, and we eventually recovered the resistance of TiN bottom electrode from 1×10^5Ω/via back to 6×10^2 Ωvia and successfully achieved a uniform resistance distribution of the TiN bottom electrode. 展开更多
关键词 PCM oxygen plasma ashing titanium nitride bottom electrode OXIDATION CMP
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Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment 被引量:1
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作者 李泽斌 吴忠航 +6 位作者 居家奇 何孔多 陈枕流 杨曦露 颜航 区琼荣 梁荣庆 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第1期79-82,共4页
Al-doped zinc-oxide (AZO) thin films treated by oxygen and chlorine inductively coupled plasma (ICP) were compared. Kelvin probe (KP) and X-ray photoelectron spectroscopy (XPS) were employed to characterize th... Al-doped zinc-oxide (AZO) thin films treated by oxygen and chlorine inductively coupled plasma (ICP) were compared. Kelvin probe (KP) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the effect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP (O-ICP)'s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP (CI-ICP), the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP's treatment, while the work function after Cl-ICP's treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more effective than CI-ICP for enhancing the work function of AZO films, which is well consistent with KP results. 展开更多
关键词 oxygen inductively coupled plasma Al-doped zinc-oxide (AZO) work function
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Methane conversion in the presence of oxygen under low-temperature radio frequency plasma 被引量:1
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作者 Jinhai Yuan Xuejun Zhong Shiyu Tan 《Journal of Natural Gas Chemistry》 EI CAS CSCD 2010年第6期605-610,共6页
Methane conversion in the presence of oxygen under low-temperature radio frequency (RF) plasma was investigated.The experiment results indicated that the following four factors,i.e.,discharge voltage,discharge area,... Methane conversion in the presence of oxygen under low-temperature radio frequency (RF) plasma was investigated.The experiment results indicated that the following four factors,i.e.,discharge voltage,discharge area,O2/CH4 molar ratio and total gas flowrate,affected remarkably the reaction performance.The optimum reaction conditions of methane conversion in the presence of O2 under RF plasma are as follows:discharge voltage 1050 V,discharge area 989.1mm 2,O2/CH4 molar ratio 1/10 and total gas flowrate 200 ml/min.A methane conversion of 91% could be reached under the optimum conditions.Oxygen is good for the breaking of C-H bonds and also acts as a sort of thinner.According to the low-temperature plasma characteristics,the macroscopic kinetics model of methane conversion in the presence of O2 under radio frequency plasma was studied. 展开更多
关键词 METHANE oxygen radio frequency plasma C2 hydrocarbons KINETICS
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Quantitative Determination of Density of Ground State Atomic Oxygen from Both TALIF and Emission Spectroscopy in Hot Air Plasma Generated by Microwave Resonant Cavity 被引量:1
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作者 F.MARCHAL M.YOUSFI +2 位作者 N.MERBAHI G.WATTIEAUX A.PIQUEMAL 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第3期259-265,共7页
Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated by a microwave (MW) resonant cavity. The latter operates at a frequency of 2.45 GHz inside a c... Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated by a microwave (MW) resonant cavity. The latter operates at a frequency of 2.45 GHz inside a cell of gas conditioning at a pressure of 600 mbar, an injected air flow of 12 L/min and an input MW power of 1 kW. The first technique is based on the standard two photon absorption laser induced fluorescence (TALIF) using xenon for calibration but applied for the first time in the present post discharge hot air plasma column having a temperature of about 4500 K near the axis of the nozzle. The second diagnostic technique is an actinometry method based on optical emission spectroscopy (OES). In this case, we compared the spectra intensities of a specific atomic oxygen line (844 nm) and the closest wavelength xenon line (823 nm). The two lines need to be collected under absolutely the same spectroscopic parameters. The xenon emission is due to the addition of a small proportion of xenon (1% Xe) of this chemically inert gas inside the air while a further small quantity of H2 (2~) is also added in the mixture in order to collect OH(A- X) and NH(A-X) spectra without noise. The latter molecular spectra are required to estimate gas and excitation temperatures. Optical emission spectroscopy measurements, at for instance the position z=12 mm on the axis plasma column that leads to a gas measured temperature equal to 3500 K, an excitation temperature of about 9500 K and an atomic oxygen density 2.09× 1017+ 0.2×1017 cm-3. This is in very good agreement with the TALIF measurement, which is equal to 2.0×101T cm-3. 展开更多
关键词 TALIF microwave air plasma atomic oxygen concentration actinometry optical emission spectroscopy
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Nanotexture optimization by oxygen plasma of mesoporous silica thin film for enrichment of low molecular weight peptides captured from human serum
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作者 Louis BROUSSEAU Ali BOUAMRANI Mauro FERRARI 《Science China Chemistry》 SCIE EI CAS 2010年第11期2257-2264,共8页
The optimization of mesoporous silica thin films by nanotexturing using oxygen plasma versus thermal oxidation was investigated.Calcination in oxygen plasma provides superior control over pore formation with regard to... The optimization of mesoporous silica thin films by nanotexturing using oxygen plasma versus thermal oxidation was investigated.Calcination in oxygen plasma provides superior control over pore formation with regard to the pore surface and higher fidelity to the structure of the polymer template.The resulting porous film offers an ideal substrate for the selective partitioning of peptides from complex mixtures.The improved chemico-physical characteristics of porous thin films(pore size distribution,nanostructure,surface properties and pore connectivity) were systematically characterized with XRD,Ellipsometry,FTIR,TEM and N2 adsorption/desorption isotherm.The enrichment of low molecular weight proteins captured from human serum on mesoporous silica thin films fabricated by both methodologies was investigated by comparison of their MALDI-TOF MS profiles.This novel on-chip fractionation technology offers advantages in recovering the low molecular weight peptides from human serum,which has been recognized as an informative resource for early diagnosis of cancer and other diseases. 展开更多
关键词 MESOPOROUS silica thin film oxygen plasma low molecular weight PROTEOME
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