Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 μm diamond-shaped aper- ture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitr...Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 μm diamond-shaped aper- ture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxida- tion of Ⅲ-Ⅴ semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55℃ from the threshold to 4 mA.展开更多
In order to choose the proper radius of oxide aperture for few-mode vertical-cavity surface-emitting lasers （VCSELs）, the influences of oxide aperture size on the multi-transverse-mode behaviors are investigated in ...In order to choose the proper radius of oxide aperture for few-mode vertical-cavity surface-emitting lasers （VCSELs）, the influences of oxide aperture size on the multi-transverse-mode behaviors are investigated in detail. By establishing the effective refractive index model to simulate VCSELs with different radii of oxide apertures, the wavelength and corresponding order of different modes are obtained. VCSELs with three kinds of oxide apertures are manufactured. Then the multi-transverse-mode spectra and near-field are measured. It is found that when the radius is between 1.5 and 4.5μm, few-mode VCSELs can be implemented. The 2.5μm VCSEL manufactured in this paper only emits LP01 mode and LP21 mode. Since the space distance between the two modes is 2μm, it is expected to realize direct-modulation few-mode VCSELs by channel etching or ion implantation between the two modes.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 61222501 and 61335004the Specialized Research Fund for the Doctoral Program of Higher Education of China under Grant No 20111103110019
文摘Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 μm diamond-shaped aper- ture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxida- tion of Ⅲ-Ⅴ semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55℃ from the threshold to 4 mA.
基金supported by the National Basic Research Program of China(No.2014CB3400102)the National Natural Science Foundation of China(No.61335004)+1 种基金the National High Technology Research and Development Program of China(No.2015AA017101)the National Key Technologies R&D Program of China(No.2016YFB0400603)
文摘In order to choose the proper radius of oxide aperture for few-mode vertical-cavity surface-emitting lasers （VCSELs）, the influences of oxide aperture size on the multi-transverse-mode behaviors are investigated in detail. By establishing the effective refractive index model to simulate VCSELs with different radii of oxide apertures, the wavelength and corresponding order of different modes are obtained. VCSELs with three kinds of oxide apertures are manufactured. Then the multi-transverse-mode spectra and near-field are measured. It is found that when the radius is between 1.5 and 4.5μm, few-mode VCSELs can be implemented. The 2.5μm VCSEL manufactured in this paper only emits LP01 mode and LP21 mode. Since the space distance between the two modes is 2μm, it is expected to realize direct-modulation few-mode VCSELs by channel etching or ion implantation between the two modes.
