Ultra-precision components have been widely used to produce advanced optoelectronic equipment.The so-called Electric field enhanced UltraViolet-Induced Jet Machining(EUV-INCJM)is an ultra-precision method that can ach...Ultra-precision components have been widely used to produce advanced optoelectronic equipment.The so-called Electric field enhanced UltraViolet-Induced Jet Machining(EUV-INCJM)is an ultra-precision method that can achieve sub-nanometer level surface quality polishing.This study focuses on the application of the EUV-INCJM with different nozzle structures to a single-crystal of silicon.Two kinds of electro-optic-liquid coupling nozzles with single-jet and multi-jet focusing structures are proposed accordingly.Simulations and experiments have been conducted to verify the material removal performance of these nozzles.The simulation results show that,under the same condition,the flow velocity of the single-jet nozzle is 1.05 times higher than that achieved with the multi-jet configuration,while the current density of the latter is 1.63 times higher than that of the single-jet nozzle.For the single-crystal silicon,the material removal efficiency of the multi-jet focusing nozzle exceeds by about 1.4 times that of the single-jet.These results confirm that the material removal ability of the multi-jet configuration is more suitable for ultra-smooth surface polishing.The surface roughness of Si workpiece was reduced from Rq 1.55 to Rq 0.816 nm with valleys and peaks on its surface being almost completely removed.展开更多
We study here effects of nozzle layout on the droplet ejection of a micro atomizer, which was fabricated with the arrayed nozzles by the MEMS technology and actuated by a piezoelectric disc. A theoretical model was fi...We study here effects of nozzle layout on the droplet ejection of a micro atomizer, which was fabricated with the arrayed nozzles by the MEMS technology and actuated by a piezoelectric disc. A theoretical model was first built for this piezoelectric-liquid-structure coupling system to characterize the acoustic wave propagation in the liquid chamber, which determined the droplet formation out of nozzles. The modal analysis was carried out numerically to predict resonant frequencies and simulate the corresponding pressure wave field. By comparing the amplitude contours of pressure wave on the liquid-solid interface at nozzle inlets with the designed nozzle layout, behaviors of the device under different vibration modes can be predicted. Experimentally, an impedance analyzer was used to measure the resonant frequencies of the system. Three types of atomizers with different nozzle layouts were fabricated for measuring the effect of nozzle distribution on the ejection performance. The visualization experiment of droplet generation was carried out and volume flow rates of these devices were measured. The good agreement between the experiment and the prediction proved that only the increase of nozzles may not enhance the droplet generation and a design of nozzle distribution from a view-point of frequency is necessary for a resonant related atomizer.展开更多
基金supported by the National Natural Science Foundation of China(52365056).
文摘Ultra-precision components have been widely used to produce advanced optoelectronic equipment.The so-called Electric field enhanced UltraViolet-Induced Jet Machining(EUV-INCJM)is an ultra-precision method that can achieve sub-nanometer level surface quality polishing.This study focuses on the application of the EUV-INCJM with different nozzle structures to a single-crystal of silicon.Two kinds of electro-optic-liquid coupling nozzles with single-jet and multi-jet focusing structures are proposed accordingly.Simulations and experiments have been conducted to verify the material removal performance of these nozzles.The simulation results show that,under the same condition,the flow velocity of the single-jet nozzle is 1.05 times higher than that achieved with the multi-jet configuration,while the current density of the latter is 1.63 times higher than that of the single-jet nozzle.For the single-crystal silicon,the material removal efficiency of the multi-jet focusing nozzle exceeds by about 1.4 times that of the single-jet.These results confirm that the material removal ability of the multi-jet configuration is more suitable for ultra-smooth surface polishing.The surface roughness of Si workpiece was reduced from Rq 1.55 to Rq 0.816 nm with valleys and peaks on its surface being almost completely removed.
基金the National Natural Science Foundation of China(50405001).
文摘We study here effects of nozzle layout on the droplet ejection of a micro atomizer, which was fabricated with the arrayed nozzles by the MEMS technology and actuated by a piezoelectric disc. A theoretical model was first built for this piezoelectric-liquid-structure coupling system to characterize the acoustic wave propagation in the liquid chamber, which determined the droplet formation out of nozzles. The modal analysis was carried out numerically to predict resonant frequencies and simulate the corresponding pressure wave field. By comparing the amplitude contours of pressure wave on the liquid-solid interface at nozzle inlets with the designed nozzle layout, behaviors of the device under different vibration modes can be predicted. Experimentally, an impedance analyzer was used to measure the resonant frequencies of the system. Three types of atomizers with different nozzle layouts were fabricated for measuring the effect of nozzle distribution on the ejection performance. The visualization experiment of droplet generation was carried out and volume flow rates of these devices were measured. The good agreement between the experiment and the prediction proved that only the increase of nozzles may not enhance the droplet generation and a design of nozzle distribution from a view-point of frequency is necessary for a resonant related atomizer.
