Anodic bonding between silicon and glass with dou bl e electric fields is presented.By this means,the damage caused by the electric f ield to the movable part during bonding can be avoided and the experiment result s ...Anodic bonding between silicon and glass with dou bl e electric fields is presented.By this means,the damage caused by the electric f ield to the movable part during bonding can be avoided and the experiment result s show that.展开更多
文摘Anodic bonding between silicon and glass with dou bl e electric fields is presented.By this means,the damage caused by the electric f ield to the movable part during bonding can be avoided and the experiment result s show that.