The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone t...The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.展开更多
Short tool life and rapid tool wear in micromachining of hard-to-machine materials remain a barrier to the process being economically viable. In this study, standard procedures and conditions set by the ISO for tool l...Short tool life and rapid tool wear in micromachining of hard-to-machine materials remain a barrier to the process being economically viable. In this study, standard procedures and conditions set by the ISO for tool life testing in milling were used to analyze the wear of tungsten carbide micro-end-milling tools through slot milling conducted on titanium alloy Ti-6 Al-4 V. Tool wear was characterized by flank wear rate,cutting-edge radius change, and tool volumetric change. The effect of machining parameters, such as cutting speed and feedrate, on tool wear was investigated with reference to surface roughness and geometric accuracy of the finished workpiece. Experimental data indicate different modes of tool wear throughout machining, where nonuniform flank wear and abrasive wear are the dominant wear modes. High cutting speed and low feedrate can reduce the tool wear rate and improve the tool life during micromachining.However, the low feedrate enhances the plowing effect on the cutting zone, resulting in reduced surface quality and leading to burr formation and premature tool failure. This study concludes with a proposal of tool rejection criteria for micro-milling of Ti-6 Al-4 V.展开更多
The current research of micro-grinding mainly focuses on the optimal processing technology for different materials. However, the material removal mechanism in micro-grinding is the base of achieving high quality proce...The current research of micro-grinding mainly focuses on the optimal processing technology for different materials. However, the material removal mechanism in micro-grinding is the base of achieving high quality processing surface. Therefore, a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion topography is proposed in this paper. The differences of material removal mechanism between convention grinding process and micro-grinding process are analyzed. Topography characterization has been done on micro-grinding tools which are fabricated by electroplating. Models of grain density generation and grain interval are built, and new predicting model of micro-grinding surface roughness is developed. In order to verify the precision and application effect of the surface roughness prediction model proposed, a micro-grinding orthogonally experiment on soda-lime glass is designed and conducted. A series of micro-machining surfaces which are 78 nm to 0.98 ~tm roughness of brittle material is achieved. It is found that experimental roughness results and the predicting roughness data have an evident coincidence, and the component variable of describing the size effects in predicting model is calculated to be 1.5x 107 by reverse method based on the experimental results. The proposed model builds a set of distribution to consider grains distribution densities in different protrusion heights. Finally, the characterization of micro-grinding tools which are used in the experiment has been done based on the distribution set. It is concluded that there is a significant coincidence between surface prediction data from the proposed model and measurements from experiment results. Therefore, the effectiveness of the model is demonstrated. This paper proposes a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion topography, which would provide significant research theory and experimental reference of material removal mechanism in micro-grinding of soda-lime glass.展开更多
Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial c...Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial compound eyes. However, spherical optical compound eyes are less at optical performance than the eyes of insects, and it is difficult to further improve the imaging quality of compound eyes by means of micro-nano optical manufacturing. In this research, nonhomogeneous aspheric compound eyes （ACEs） are designed and fabricated. The nonhomogeneous aspheric structure is applied to calibrate the spherical aberration. Micro milling with advantages in processing three-dimensional micro structures is adopted to manufacture ACEs. In order to obtain ACEs with high imaging quality, the tool paths are optimized by analyzing the influence factors consisting of interpolation allowable error, scallop height and tool path pattern. In the experiments, two kinds of ACEs are manufactured by micro-milling with different too path patterns and cutting parameter on the miniature precision five-axis milling machine tool. The experimental results indicate that the ACEs of high surface quality can be achieved by circularly milling small micro-lens individually with changeable cutting depth. A prototype of the aspheric compound eye （ACE） with surface roughness （Ra） below 0.12 p.m is obtained with good imaging performance. This research ameliorates the imaging quality of 3D artificial compound eyes, and the proposed method of micro-milling can improve surface processing quality of compound eyes.展开更多
Microcutting is a precision technology that offers flexible fabrication of microfeatures or complex three-dimensional components with high machining accuracy and superior surface quality.This technology may offer grea...Microcutting is a precision technology that offers flexible fabrication of microfeatures or complex three-dimensional components with high machining accuracy and superior surface quality.This technology may offer great potential as well as advantageous process capabilities for the machining of hard-to-cut materials,such as tungsten carbide.The geometrical design and dimension of the tool cutting edge is a key factor that determines the size and form accuracy possible in the machined workpiece.Currently,the majority of commercial microtools are scaled-down versions of conventional macrotool designs.This approach does not impart optimal performance due to size effects and associated phenomena.Consequently,in-depth analysis and implementation of microcutting mechanics and fundamentals are required to enable successful industrial adaptation in microtool design and fabrication methods.This paper serves as a review of recent microtool designs,materials,and fabrication methods.Analysis of tool performance is discussed,and new approaches and techniques are examined.Of particular focus is tool wear suppression in the machining of hard materials and associated process parameters,including internal cooling and surface patterning techniques.The review concludes with suggestions for an integrated design and fabrication process chain which can aid industrial microtool manufacture.展开更多
The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness ca...The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness can be machined by using ultra-precision machine tools,the micro pattern on a large light guide plate (LGP) is mainly machined using a diamond tool.The tool wear occurs due to long machining distances and time while machining a large-area LGP mold.The deformation and dimensional error of micro pattern are caused by tool wear,as a result,the light efficiency of LGP declines.The characteristics of tool wear should be analyzed in order to precisely machine large-area LGP mold from all sorts of materials.The experiments were performed in order to compare wear characteristics of a V90° diamond tool using Al3003,5052,6061 and 7075.The prism pattern of depth 10 μm was machined in order to analyze characteristics of tool wear according to machining distances (0.5,1 and 1.5 km).The effects of tool wear on pattern shape were analyzed by applying overlapped cutting depths (Rough machining is (10+8+7) μm and Finish machining is (5+3+2+1) μm) by continuously machining a prism pattern of W shape of 25 μm in depth.展开更多
An experimental study of micro-tool servo with electrostrictive actuator is presented.The design methods as well as the performance of the entire mechanism is given out.The results of the experiment show that the reso...An experimental study of micro-tool servo with electrostrictive actuator is presented.The design methods as well as the performance of the entire mechanism is given out.The results of the experiment show that the resolution of the micro-tool servo is 0.02μm and the frequency response is up to 200Hz,which satisfies the requirements of the ultra-precision machining.展开更多
Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The ma...Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The manufacturing of high-quality micro diamond tools relies on scientific design methods and appropriate processing techniques.However,there is currently a lack of systematic review on the design and manufacturing methods of micro diamond tools in academia.This study systematically summarizes and analyzes modern manufacturing methods for micro diamond tools,as well as the impact of tool waviness,sharpness,and durability on machining quality.Subsequently,a design method is proposed based on the theory of cutting edge strength distribution to enhance tool waviness,sharpness,and durability.Finally,this paper presents current technical challenges faced by micro diamond tools along with potential future solutions to guide scientists in this field.The aim of this review is to contribute to the further development of the current design and manufacturing processes for micro diamond cutting tools.展开更多
Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidanc...Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.展开更多
Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experi...Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.展开更多
Smart machining has tremendous potential and is becoming one of new generation high value precision manufacturing technologies in line with the advance of Industry 4.0 concepts. This paper presents some innovative des...Smart machining has tremendous potential and is becoming one of new generation high value precision manufacturing technologies in line with the advance of Industry 4.0 concepts. This paper presents some innovative design concepts and, in particular, the development of four types of smart cutting tools, including a force-based smart cutting tool, a temperature-based internally-cooled cutting tool, a fast tool servo （FTS） and smart collets for ultra- precision and micro manufacturing purposes. Implemen- tation and application perspectives of these smart cutting tools are explored and discussed particularly for smart machining against a number of industrial application requirements. They are contamination-free machining, machining of tool-wear-prone Si-based infra-red devices and medical applications, high speed micro milling and micro drilling, etc. Furthermore, implementation tech- niques are presented focusing on： （a） plug-and-produce design principle and the associated smart control algo- rithms, （b） piezoelectric film and surface acoustic wave transducers to measure cutting forces in process, （c） critical cutting temperature control in real-time machining, （d） in- process calibration through machining trials, （e） FE-based design and analysis of smart cutting tools, and （f） applica- tion exemplars on adaptive smart machining.展开更多
The cutting performance of particulate reinforced me tallic matrix composites(PRMMCs) SiC p/Al in ultrasonic vibration cutting and c ommon cutting with carbide tools and PCD tools was researched in the paper. Mic rost...The cutting performance of particulate reinforced me tallic matrix composites(PRMMCs) SiC p/Al in ultrasonic vibration cutting and c ommon cutting with carbide tools and PCD tools was researched in the paper. Mic rostructure of machined surface was described, the relation between cutting para meters and surface roughness was presented, and characteristic of the surface re mained stress was also presented. Furthermore, wear regularity and abrasion resi stance ability of tools in ultrasonic vibration cutting and common cutting o f PRMMCs were discussed in detail. The test results show: (1) The surface config urations are obviously different when using different tools to machine such PRMM Cs. The surface machined with carbide tools looks luminous and orderly and there are seldom surface defects on it. The reason is that the soft basal body is apt to flow during cutting, therefore a layer of Al matrix film covers machined sur face. On the contrary, the surface machined with PCD tools looks lackluster. But the profile of machined surface is very clear. Superfine grooves, pits and blac k reinforce particulates can be seen easily without obvious Al film. (2) Because of unstable cutting process in common cutting, the surface is easy to produce s ome defects such as burrs, built-up edges and so on so that the quality of surf ace becomes very poor. Vibration cutting can reduce the influence of tearing, pl astic deformation and built-up edge in cutting and can restrain flutter so as t o make cutting process more stable. Therefore, surface roughness of vibration cu tting is better than that of common cutting. (3) There is an optimum value of fe ed rate in vibration cutting of PRMMCs due to the influence of material characte ristics. Whether feed rate is more than or less than this optimum value, surface roughness will increase. (4) According to analyzing the wear rate of tools in v ibration cutting PRMMCs, it can be concluded that abrasion resistance of tools w ill be improved remarkably when vibration cutting composites have a lower pe rcentage of reinforce particulate. If the percentage of reinforce particulate is higher, the influence on abrasion resistance of carbide tool in vibration cut ting will not be obvious. The research result indicates that vibration cutting effect has a close relation with material characteristics.展开更多
A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves t...A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space.Using a small size of the round-ball tool takes less time for the same amount of In2O3 SnO 2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power.A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate.A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece.Through the ultra-precise etching of In2O 3 SnO2,the optoelectronic semiconductor industry can effectively reuse the defective products,reducing production costs.This precision etching process is of high efficiency and requires only a short period of time to remove the In2O3 SnO2 nanostructures.展开更多
In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) te...In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.展开更多
A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a r...A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a rough surface for better mechanical interlocking. Subsequently, surface Co was removed by etching in acid solution. Then the hard metal substrate was boronized to form a compound interlayer which acted as an efficient diffusion barrier to prevent the outward diffusion of Co. Novel nano-microcrystalline composite diamond film coatings with a very smooth surface was deposited on the surface engineering pre-treated hard metal surface. Promising results of measurement in adhesion strength as well as field cutting tests have been obtained.展开更多
基金Project(50875257) supported by the National Natural Science Foundation of China
文摘The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.
基金the Engineering and Physical Sciences Research Council (EP/M020657/1) for the support for this work
文摘Short tool life and rapid tool wear in micromachining of hard-to-machine materials remain a barrier to the process being economically viable. In this study, standard procedures and conditions set by the ISO for tool life testing in milling were used to analyze the wear of tungsten carbide micro-end-milling tools through slot milling conducted on titanium alloy Ti-6 Al-4 V. Tool wear was characterized by flank wear rate,cutting-edge radius change, and tool volumetric change. The effect of machining parameters, such as cutting speed and feedrate, on tool wear was investigated with reference to surface roughness and geometric accuracy of the finished workpiece. Experimental data indicate different modes of tool wear throughout machining, where nonuniform flank wear and abrasive wear are the dominant wear modes. High cutting speed and low feedrate can reduce the tool wear rate and improve the tool life during micromachining.However, the low feedrate enhances the plowing effect on the cutting zone, resulting in reduced surface quality and leading to burr formation and premature tool failure. This study concludes with a proposal of tool rejection criteria for micro-milling of Ti-6 Al-4 V.
基金supported by National Natural Science Foundation for Young Scholars of China(Grant No.51205053)National Natural Science Foundation of China(Grant No.51075064)
文摘The current research of micro-grinding mainly focuses on the optimal processing technology for different materials. However, the material removal mechanism in micro-grinding is the base of achieving high quality processing surface. Therefore, a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion topography is proposed in this paper. The differences of material removal mechanism between convention grinding process and micro-grinding process are analyzed. Topography characterization has been done on micro-grinding tools which are fabricated by electroplating. Models of grain density generation and grain interval are built, and new predicting model of micro-grinding surface roughness is developed. In order to verify the precision and application effect of the surface roughness prediction model proposed, a micro-grinding orthogonally experiment on soda-lime glass is designed and conducted. A series of micro-machining surfaces which are 78 nm to 0.98 ~tm roughness of brittle material is achieved. It is found that experimental roughness results and the predicting roughness data have an evident coincidence, and the component variable of describing the size effects in predicting model is calculated to be 1.5x 107 by reverse method based on the experimental results. The proposed model builds a set of distribution to consider grains distribution densities in different protrusion heights. Finally, the characterization of micro-grinding tools which are used in the experiment has been done based on the distribution set. It is concluded that there is a significant coincidence between surface prediction data from the proposed model and measurements from experiment results. Therefore, the effectiveness of the model is demonstrated. This paper proposes a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion topography, which would provide significant research theory and experimental reference of material removal mechanism in micro-grinding of soda-lime glass.
基金Supported by National Natural Science Foundation of China(Grant No.50935003)National Numerical Control Major Projects of China(Grant No.2013ZX04001000215)
文摘Structure design and fabricating methods of three-dimensional （3D） artificial spherical compound eyes have been researched by many scholars. Micro-nano optical manufacturing is mostly used to process 3D artificial compound eyes. However, spherical optical compound eyes are less at optical performance than the eyes of insects, and it is difficult to further improve the imaging quality of compound eyes by means of micro-nano optical manufacturing. In this research, nonhomogeneous aspheric compound eyes （ACEs） are designed and fabricated. The nonhomogeneous aspheric structure is applied to calibrate the spherical aberration. Micro milling with advantages in processing three-dimensional micro structures is adopted to manufacture ACEs. In order to obtain ACEs with high imaging quality, the tool paths are optimized by analyzing the influence factors consisting of interpolation allowable error, scallop height and tool path pattern. In the experiments, two kinds of ACEs are manufactured by micro-milling with different too path patterns and cutting parameter on the miniature precision five-axis milling machine tool. The experimental results indicate that the ACEs of high surface quality can be achieved by circularly milling small micro-lens individually with changeable cutting depth. A prototype of the aspheric compound eye （ACE） with surface roughness （Ra） below 0.12 p.m is obtained with good imaging performance. This research ameliorates the imaging quality of 3D artificial compound eyes, and the proposed method of micro-milling can improve surface processing quality of compound eyes.
基金supported by Science Foundation Ireland(No.15/RP/B3208)the National Natural Science Foundation of China(Nos.51320105009&61635008)the‘111’Project by the State Administration of Foreign Experts Affairs and the Ministry of Education of China(Grant No.B07014).
文摘Microcutting is a precision technology that offers flexible fabrication of microfeatures or complex three-dimensional components with high machining accuracy and superior surface quality.This technology may offer great potential as well as advantageous process capabilities for the machining of hard-to-cut materials,such as tungsten carbide.The geometrical design and dimension of the tool cutting edge is a key factor that determines the size and form accuracy possible in the machined workpiece.Currently,the majority of commercial microtools are scaled-down versions of conventional macrotool designs.This approach does not impart optimal performance due to size effects and associated phenomena.Consequently,in-depth analysis and implementation of microcutting mechanics and fundamentals are required to enable successful industrial adaptation in microtool design and fabrication methods.This paper serves as a review of recent microtool designs,materials,and fabrication methods.Analysis of tool performance is discussed,and new approaches and techniques are examined.Of particular focus is tool wear suppression in the machining of hard materials and associated process parameters,including internal cooling and surface patterning techniques.The review concludes with suggestions for an integrated design and fabrication process chain which can aid industrial microtool manufacture.
文摘The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness can be machined by using ultra-precision machine tools,the micro pattern on a large light guide plate (LGP) is mainly machined using a diamond tool.The tool wear occurs due to long machining distances and time while machining a large-area LGP mold.The deformation and dimensional error of micro pattern are caused by tool wear,as a result,the light efficiency of LGP declines.The characteristics of tool wear should be analyzed in order to precisely machine large-area LGP mold from all sorts of materials.The experiments were performed in order to compare wear characteristics of a V90° diamond tool using Al3003,5052,6061 and 7075.The prism pattern of depth 10 μm was machined in order to analyze characteristics of tool wear according to machining distances (0.5,1 and 1.5 km).The effects of tool wear on pattern shape were analyzed by applying overlapped cutting depths (Rough machining is (10+8+7) μm and Finish machining is (5+3+2+1) μm) by continuously machining a prism pattern of W shape of 25 μm in depth.
文摘An experimental study of micro-tool servo with electrostrictive actuator is presented.The design methods as well as the performance of the entire mechanism is given out.The results of the experiment show that the resolution of the micro-tool servo is 0.02μm and the frequency response is up to 200Hz,which satisfies the requirements of the ultra-precision machining.
基金the China Postdoctoral Science Foundation(No.2024M754169)Fundamentals of Equipment Technology(No.2212W22002)for the support of this work。
文摘Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The manufacturing of high-quality micro diamond tools relies on scientific design methods and appropriate processing techniques.However,there is currently a lack of systematic review on the design and manufacturing methods of micro diamond tools in academia.This study systematically summarizes and analyzes modern manufacturing methods for micro diamond tools,as well as the impact of tool waviness,sharpness,and durability on machining quality.Subsequently,a design method is proposed based on the theory of cutting edge strength distribution to enhance tool waviness,sharpness,and durability.Finally,this paper presents current technical challenges faced by micro diamond tools along with potential future solutions to guide scientists in this field.The aim of this review is to contribute to the further development of the current design and manufacturing processes for micro diamond cutting tools.
基金Supported by the National Natural Science Foundation of China(No.50935003)Science and Technology Support Project of Jiangsu Province,China(No.BE2012172)
文摘Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.
文摘Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.
基金Supported by the UK Technology Strategy Board(TSB)(SEEM Project,Contract No.:BD266E)Innovate UK(KTP Project,Contract No.:9277)
文摘Smart machining has tremendous potential and is becoming one of new generation high value precision manufacturing technologies in line with the advance of Industry 4.0 concepts. This paper presents some innovative design concepts and, in particular, the development of four types of smart cutting tools, including a force-based smart cutting tool, a temperature-based internally-cooled cutting tool, a fast tool servo （FTS） and smart collets for ultra- precision and micro manufacturing purposes. Implemen- tation and application perspectives of these smart cutting tools are explored and discussed particularly for smart machining against a number of industrial application requirements. They are contamination-free machining, machining of tool-wear-prone Si-based infra-red devices and medical applications, high speed micro milling and micro drilling, etc. Furthermore, implementation tech- niques are presented focusing on： （a） plug-and-produce design principle and the associated smart control algo- rithms, （b） piezoelectric film and surface acoustic wave transducers to measure cutting forces in process, （c） critical cutting temperature control in real-time machining, （d） in- process calibration through machining trials, （e） FE-based design and analysis of smart cutting tools, and （f） applica- tion exemplars on adaptive smart machining.
文摘The cutting performance of particulate reinforced me tallic matrix composites(PRMMCs) SiC p/Al in ultrasonic vibration cutting and c ommon cutting with carbide tools and PCD tools was researched in the paper. Mic rostructure of machined surface was described, the relation between cutting para meters and surface roughness was presented, and characteristic of the surface re mained stress was also presented. Furthermore, wear regularity and abrasion resi stance ability of tools in ultrasonic vibration cutting and common cutting o f PRMMCs were discussed in detail. The test results show: (1) The surface config urations are obviously different when using different tools to machine such PRMM Cs. The surface machined with carbide tools looks luminous and orderly and there are seldom surface defects on it. The reason is that the soft basal body is apt to flow during cutting, therefore a layer of Al matrix film covers machined sur face. On the contrary, the surface machined with PCD tools looks lackluster. But the profile of machined surface is very clear. Superfine grooves, pits and blac k reinforce particulates can be seen easily without obvious Al film. (2) Because of unstable cutting process in common cutting, the surface is easy to produce s ome defects such as burrs, built-up edges and so on so that the quality of surf ace becomes very poor. Vibration cutting can reduce the influence of tearing, pl astic deformation and built-up edge in cutting and can restrain flutter so as t o make cutting process more stable. Therefore, surface roughness of vibration cu tting is better than that of common cutting. (3) There is an optimum value of fe ed rate in vibration cutting of PRMMCs due to the influence of material characte ristics. Whether feed rate is more than or less than this optimum value, surface roughness will increase. (4) According to analyzing the wear rate of tools in v ibration cutting PRMMCs, it can be concluded that abrasion resistance of tools w ill be improved remarkably when vibration cutting composites have a lower pe rcentage of reinforce particulate. If the percentage of reinforce particulate is higher, the influence on abrasion resistance of carbide tool in vibration cut ting will not be obvious. The research result indicates that vibration cutting effect has a close relation with material characteristics.
基金Project(100-2221-E-152-003)supported by National Science Council
文摘A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3 SnO2 thin film from the surfaces of digital paper display was presented.The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space.Using a small size of the round-ball tool takes less time for the same amount of In2O3 SnO 2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power.A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate.A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece.Through the ultra-precise etching of In2O 3 SnO2,the optoelectronic semiconductor industry can effectively reuse the defective products,reducing production costs.This precision etching process is of high efficiency and requires only a short period of time to remove the In2O3 SnO2 nanostructures.
文摘In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.
文摘A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a rough surface for better mechanical interlocking. Subsequently, surface Co was removed by etching in acid solution. Then the hard metal substrate was boronized to form a compound interlayer which acted as an efficient diffusion barrier to prevent the outward diffusion of Co. Novel nano-microcrystalline composite diamond film coatings with a very smooth surface was deposited on the surface engineering pre-treated hard metal surface. Promising results of measurement in adhesion strength as well as field cutting tests have been obtained.
