Polyimide (Kapton, Dupont Corp.) based magnetostrictive thin film structures were designed and fabricated for micro device applications. In particular the growth of films on flexible substrates was studied to allow a ...Polyimide (Kapton, Dupont Corp.) based magnetostrictive thin film structures were designed and fabricated for micro device applications. In particular the growth of films on flexible substrates was studied to allow a simple integration of the system in miniaturized magnetostrictive devices. The films were fabricated on different substrates to compare their different magnetic and structural properties. It showed much more magnetostriction and higher impact resistance results compared with traditional Si based film type actuators. In the fabrication process, amorphous TbDyFe films with thicknesses of 500 nm, 1 μm, 1.5 μm respectively, were deposited on the designed substrate by DC magnetron sputtering. During sputtering process the substrate holder was maintained at room temperature. After the sputter process, X-ray diffraction studies were also carried out to determine the film structure and thickness of the sputtered film. At last, magnetization from VSM (Vibrating Sample Magnetometer) and magnetostriction from optical cantilever method of each structure were measured to estimate the magneto-mechanical characteristics under the external magnetic field lower than 0.7 T for micro-system applications.展开更多
The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience.In recent years,active micro/nano-bioelectronic d...The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience.In recent years,active micro/nano-bioelectronic devices have undergone significant advancements,thereby facilitating the study of electrophysiology.The distinctive configuration and exceptional functionality of these active micro-nano-collaborative bioelectronic devices offer the potential for the recording of high-fidelity action potential signals on a large scale.In this paper,we review three-dimensional active nano-transistors and planar active micro-transistors in terms of their applications in electroexcitable cells,focusing on the evaluation of the effects of active micro/nano-bioelectronic devices on electrophysiological signals.Looking forward to the possibilities,challenges,and wide prospects of active micro-nano-devices,we expect to advance their progress to satisfy the demands of theoretical investigations and medical implementations within the domains of cardiology and neuroscience research.展开更多
Supercapacitor diode is a novel ion device that performs both supercapacitor energy storage and ion diode rectification functions.However,previously reported devices are limited by their large size and complex process...Supercapacitor diode is a novel ion device that performs both supercapacitor energy storage and ion diode rectification functions.However,previously reported devices are limited by their large size and complex processes.In this work,we demonstrate a screen-printed micro supercapacitor diode(MCAPode)that based on the insertion of a finger mode with spinel ZnCo_(2)O_(4) as cathode and activated carbon as anode for the first time,and featuring an excellent area specific capacitance(1.21 mF cm^(-2)at 10 mV s^(-1))and high rectification characteristics(rectification ratioⅠof 11.99 at 40 mV s^(-1)).Taking advantage of the ionic gel electrolyte,which provides excellent stability during repeated flexing and at high temperatures.In addition,MCAPode exhibits excellent electrochemical performance and rectification capability in"AND"and"OR"logic gates.These findings provide practical solutions for future expansion of micro supercapacitor diode applications.展开更多
Aiming at localizing the telemetric capsule for detecting gastrointestinal physiological parameters in vivo accurately,a portable alternating current(AC)electromagnetic localization system is designed.To verify the fe...Aiming at localizing the telemetric capsule for detecting gastrointestinal physiological parameters in vivo accurately,a portable alternating current(AC)electromagnetic localization system is designed.To verify the feasibility of the method,the model and construction of the localization system are detailed.And static and dynamic accuracy of the localization system are tested by experiments.Next,we compare the simulating results of the electromagnetic radiation aroused by the localization system with the electromagnetic safety standards of human(ICNIRP guidelines and IEEE standard C95.1-1991).Finally,in terms of the results of the static and dynamic experiments,conclusions are drawn that the accuracy of portable positioning system is high(less than 10 mm)enough to satisfy the localization need of the micro invasive medical devices in vivo,and there is no harm of electromagnetic radiation to human.展开更多
In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeco...In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeconventional micro-machining techniques,3D printing offers versatility in material selection,such as polymers.3Dprinting technology has been gradually applied to the general field of microelectronic devices such as sensors,actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturingprocesses.Furthermore,3D printing technology has also been instrumental in the fabrication of microfluidic devices,both through direct and indirect processes.This paper provides an overview of the evolving landscape of 3D printingtechnology,delineating the essential materials and processes involved in fabricating microelectronic and microfluidicdevices in recent times.Additionally,it synthesizes the diverse applications of these technologies across differentdomains.展开更多
Micro thermoelectric device(μ-TED)emerges with great attention in energy generation,thermal management,and heat sensing applications.However,the large sensitive area is necessary to accommodate enough thermoelectric ...Micro thermoelectric device(μ-TED)emerges with great attention in energy generation,thermal management,and heat sensing applications.However,the large sensitive area is necessary to accommodate enough thermoelectric couples(TCs)for a high thermoelectric performance.This limits the potential in micro energy harvesting and ultrasensitive sensing applications.Here,we adopted an optimized MEMS-based process to fabricate the ultra-sensitive micro-thermoelectric device(μ-TED).With the help of MEMS-compatible electrochemical deposition,the small size(25μm),high aspect ratio(1:1.25),and alternating distributed P/N structures are achieved.As a result,theμ-TED realizes an ultra-high integration density of 19,900 thermoelectric couples per cm2.Moreover,it shows a great thermoelectric sensitivity of 212 mV/(K·cm2)and a competitive power factor of 0.51μW/(K2·cm2),which means theμ-TED is competent for miniaturized applications.Additionally,theμ-TED shows an ultra-low detection limit of 5 mm/s and a short response time of 100 ms,revealing great potential in fast detections of the ultra-low airflow.Furthermore,the ultra-sensitiveμ-TED is utilized as a flexible breath sensor,due to its compact size.The breath signal of different motion states is successfully detected.These results confirm that the ultra-sensitiveμ-TED holds outstanding potential for ultra-sensitive airflow sensing and energy harvesting devices.展开更多
This paper introduces a non-assembly manufacturing case with microstereolithography technology. The design and manufacturing process of a pneumatic thrust bearing is described, and a special tessellation method is dev...This paper introduces a non-assembly manufacturing case with microstereolithography technology. The design and manufacturing process of a pneumatic thrust bearing is described, and a special tessellation method is developed to further improve the capability of the manufacturing system thus bigger products can also be easily manufactured. Implemented in a layer-by-layer fashion, stereolithography has been used for the rapid manufacturing of complex devices, and it avoids the expensive assembly process in the traditional manufacturing. This paper presents that microstereolithography can produce high-resolution products with intricate details, small openings, and smooth surfaces. The potential of the microstereolithograhy technique is explored for the rapid manufacturing of small and complex objects.展开更多
Corona Virus Disease 2019(COVID-19)has developed into a global pandemic in the last two years,causing significant impacts on our daily life in many countries.Rapid and accurate detection of COVID-19 is of great import...Corona Virus Disease 2019(COVID-19)has developed into a global pandemic in the last two years,causing significant impacts on our daily life in many countries.Rapid and accurate detection of COVID-19 is of great importance to both treatments and pandemic management.Till now,a variety of point-of-care testing(POCT)approaches devices,including nucleic acid-based test and immunological detection,have been developed and some of them has been rapidly ruled out for clinical diagnosis of COVID-19 due to the requirement of mass testing.In this review,we provide a summary and commentary on the methods and biomedical devices innovated or renovated for the quick and early diagnosis of COVID-19.In particular,some of micro and nano devices with miniaturized structures,showing outstanding analytical performances such as ultra-sensitivity,rapidness,accuracy and low cost,are discussed in this paper.We also provide our insights on the further implementation of biomedical devices using advanced micro and nano technologies to meet the demand of point-of-care diagnosis and home testing to facilitate pandemic management.In general,our paper provides a comprehensive overview of the latest advances on the POCT device for diagnosis of COVID-19,which may provide insightful knowledge for researcher to further develop novel diagnostic technologies for rapid and on-site detection of pathogens including SARS-CoV-2.展开更多
Given the continuous and growing demand for point of care(POC)diagnostic tests,attention has been shifted toward integration and miniaturization of laboratory protocols into“sample-in-answer-out”devices.Microfluidic...Given the continuous and growing demand for point of care(POC)diagnostic tests,attention has been shifted toward integration and miniaturization of laboratory protocols into“sample-in-answer-out”devices.Microfluidic technologies have been considered an ideal solution to address the requirements of POC diagnostics since many laboratory functions can be miniaturized and incorporated onto a single integrated chip.In this review,we summarize the advances of integrated microfluidic devices for POC diagnostics in the last 3 years.Particularly,we summarize current materials used for microfluidic chip fabrication,discuss the innovation of versatile integrated microfluidic devices,especially the strategies for simplifying sample preparation in manual or self-driven systems,and new detection methods of microfluidic chips.In addition,we describe new integrated microfluidic devices for POC diagnostics of protein-targeted immunodiagnostics,nucleic acid molecular tests,and small molecule metabolites analysis.We also provide future perspectives and current challenges for clinical translation and commercialization of these microfluidic technologies.展开更多
Miniaturization of efficient thermoelectric(TE)devices has long been hindered by the weak mechanical strength and insufficient heat-to-electricity conversion efficiency of zone-melted(ZM)ingots.Here,we successfully pr...Miniaturization of efficient thermoelectric(TE)devices has long been hindered by the weak mechanical strength and insufficient heat-to-electricity conversion efficiency of zone-melted(ZM)ingots.Here,we successfully prepared a robust high-performance p-type Bi_(0.4)Sb_(1.6)Te_(3.72)bulk alloy by combining an ultrafast thermal explosion reaction with the spark plasma sintering(TER-SPS)process.It is observed that the introduced excess Te not only enhances the(00l)-oriented texture to ensure an outstanding power factor(PF)of 5 mW m^(−1)K^(−2),but also induces extremely high-density line defects of up to 10^(11)–10^(12)cm^(−2).Benefiting from such heavily dense line defects,the enhancement of the electronic thermal conductance from the increased electron mobility is fully compensated by the stronger phonon scattering,leading to an evident net reduction in total thermal conductivity.As a result,a superior ZT value of~1.4 at 350 K is achieved,which is 40%higher than that of commercial ZM ingots.Moreover,owing to the strengthening of grain refinement and highdensity line defects,the mechanical compressive stress reaches up to 94 MPa,which is 154%more than that of commercial single crystals.This research presents an effective strategy for the collaborative optimization of the texture,TE performance,and mechanical strength of Bi2Te3-based materials.As such,the present study contributes significantly to the future commercial development of miniature TE devices.展开更多
文摘Polyimide (Kapton, Dupont Corp.) based magnetostrictive thin film structures were designed and fabricated for micro device applications. In particular the growth of films on flexible substrates was studied to allow a simple integration of the system in miniaturized magnetostrictive devices. The films were fabricated on different substrates to compare their different magnetic and structural properties. It showed much more magnetostriction and higher impact resistance results compared with traditional Si based film type actuators. In the fabrication process, amorphous TbDyFe films with thicknesses of 500 nm, 1 μm, 1.5 μm respectively, were deposited on the designed substrate by DC magnetron sputtering. During sputtering process the substrate holder was maintained at room temperature. After the sputter process, X-ray diffraction studies were also carried out to determine the film structure and thickness of the sputtered film. At last, magnetization from VSM (Vibrating Sample Magnetometer) and magnetostriction from optical cantilever method of each structure were measured to estimate the magneto-mechanical characteristics under the external magnetic field lower than 0.7 T for micro-system applications.
基金The work is supported in part by the National Natural Science Foundation of China(Grant Nos.62171483,82061148011)Zhejiang Provincial Natural Science Foundation of China(Grant No.LZ23F010004)+1 种基金Hangzhou Agricultural and Social Development Research Key Project(Grant No.20231203A08)Doctoral Initiation Program of the Tenth Affiliated Hospital,Southern Medical University(Grant No.K202308).
文摘The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience.In recent years,active micro/nano-bioelectronic devices have undergone significant advancements,thereby facilitating the study of electrophysiology.The distinctive configuration and exceptional functionality of these active micro-nano-collaborative bioelectronic devices offer the potential for the recording of high-fidelity action potential signals on a large scale.In this paper,we review three-dimensional active nano-transistors and planar active micro-transistors in terms of their applications in electroexcitable cells,focusing on the evaluation of the effects of active micro/nano-bioelectronic devices on electrophysiological signals.Looking forward to the possibilities,challenges,and wide prospects of active micro-nano-devices,we expect to advance their progress to satisfy the demands of theoretical investigations and medical implementations within the domains of cardiology and neuroscience research.
基金the financial support from the Key Project of National Natural Science Foundation of China(12131010)the National Natural Science Foundation of China(22279166)+2 种基金the Special Project for Marine Economy Development of Guangdong Province(GDNRC[2023]26)the International Cooperation Base of Infrared Reflection Liquid Crystal Polymers and Device(2015B050501010)the Guangdong Basic and Applied Basic Research Foundation(2022B1515120019)。
文摘Supercapacitor diode is a novel ion device that performs both supercapacitor energy storage and ion diode rectification functions.However,previously reported devices are limited by their large size and complex processes.In this work,we demonstrate a screen-printed micro supercapacitor diode(MCAPode)that based on the insertion of a finger mode with spinel ZnCo_(2)O_(4) as cathode and activated carbon as anode for the first time,and featuring an excellent area specific capacitance(1.21 mF cm^(-2)at 10 mV s^(-1))and high rectification characteristics(rectification ratioⅠof 11.99 at 40 mV s^(-1)).Taking advantage of the ionic gel electrolyte,which provides excellent stability during repeated flexing and at high temperatures.In addition,MCAPode exhibits excellent electrochemical performance and rectification capability in"AND"and"OR"logic gates.These findings provide practical solutions for future expansion of micro supercapacitor diode applications.
基金National Natural Science Foundation of China(NSFC)(No.30570485)National High Technology Research and Development Program of China(863)(No.2006AA04Z368)Natural Science Foundation of Shanghai,China(No.06ER1406)
文摘Aiming at localizing the telemetric capsule for detecting gastrointestinal physiological parameters in vivo accurately,a portable alternating current(AC)electromagnetic localization system is designed.To verify the feasibility of the method,the model and construction of the localization system are detailed.And static and dynamic accuracy of the localization system are tested by experiments.Next,we compare the simulating results of the electromagnetic radiation aroused by the localization system with the electromagnetic safety standards of human(ICNIRP guidelines and IEEE standard C95.1-1991).Finally,in terms of the results of the static and dynamic experiments,conclusions are drawn that the accuracy of portable positioning system is high(less than 10 mm)enough to satisfy the localization need of the micro invasive medical devices in vivo,and there is no harm of electromagnetic radiation to human.
文摘In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeconventional micro-machining techniques,3D printing offers versatility in material selection,such as polymers.3Dprinting technology has been gradually applied to the general field of microelectronic devices such as sensors,actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturingprocesses.Furthermore,3D printing technology has also been instrumental in the fabrication of microfluidic devices,both through direct and indirect processes.This paper provides an overview of the evolving landscape of 3D printingtechnology,delineating the essential materials and processes involved in fabricating microelectronic and microfluidicdevices in recent times.Additionally,it synthesizes the diverse applications of these technologies across differentdomains.
基金supported by the Project(NO.62502010320)the National Key Research and Development Program of China(2020YFB2009102).
文摘Micro thermoelectric device(μ-TED)emerges with great attention in energy generation,thermal management,and heat sensing applications.However,the large sensitive area is necessary to accommodate enough thermoelectric couples(TCs)for a high thermoelectric performance.This limits the potential in micro energy harvesting and ultrasensitive sensing applications.Here,we adopted an optimized MEMS-based process to fabricate the ultra-sensitive micro-thermoelectric device(μ-TED).With the help of MEMS-compatible electrochemical deposition,the small size(25μm),high aspect ratio(1:1.25),and alternating distributed P/N structures are achieved.As a result,theμ-TED realizes an ultra-high integration density of 19,900 thermoelectric couples per cm2.Moreover,it shows a great thermoelectric sensitivity of 212 mV/(K·cm2)and a competitive power factor of 0.51μW/(K2·cm2),which means theμ-TED is competent for miniaturized applications.Additionally,theμ-TED shows an ultra-low detection limit of 5 mm/s and a short response time of 100 ms,revealing great potential in fast detections of the ultra-low airflow.Furthermore,the ultra-sensitiveμ-TED is utilized as a flexible breath sensor,due to its compact size.The breath signal of different motion states is successfully detected.These results confirm that the ultra-sensitiveμ-TED holds outstanding potential for ultra-sensitive airflow sensing and energy harvesting devices.
基金Supported by Centre of Excellence in Customized Assembly(CECA)
文摘This paper introduces a non-assembly manufacturing case with microstereolithography technology. The design and manufacturing process of a pneumatic thrust bearing is described, and a special tessellation method is developed to further improve the capability of the manufacturing system thus bigger products can also be easily manufactured. Implemented in a layer-by-layer fashion, stereolithography has been used for the rapid manufacturing of complex devices, and it avoids the expensive assembly process in the traditional manufacturing. This paper presents that microstereolithography can produce high-resolution products with intricate details, small openings, and smooth surfaces. The potential of the microstereolithograhy technique is explored for the rapid manufacturing of small and complex objects.
基金This work was supported by the Beijing Advanced Innovation Center for Biomedical Engineering at Beihang University,the NSFC(No.32071407,No.62003023,No.61971294)the 111 Project(No.B13003)+1 种基金City University of Hong Kong(Grant No.9610423,9667199)ZY thanks UK NERC Fellowship grant(NE/R013349/2).
文摘Corona Virus Disease 2019(COVID-19)has developed into a global pandemic in the last two years,causing significant impacts on our daily life in many countries.Rapid and accurate detection of COVID-19 is of great importance to both treatments and pandemic management.Till now,a variety of point-of-care testing(POCT)approaches devices,including nucleic acid-based test and immunological detection,have been developed and some of them has been rapidly ruled out for clinical diagnosis of COVID-19 due to the requirement of mass testing.In this review,we provide a summary and commentary on the methods and biomedical devices innovated or renovated for the quick and early diagnosis of COVID-19.In particular,some of micro and nano devices with miniaturized structures,showing outstanding analytical performances such as ultra-sensitivity,rapidness,accuracy and low cost,are discussed in this paper.We also provide our insights on the further implementation of biomedical devices using advanced micro and nano technologies to meet the demand of point-of-care diagnosis and home testing to facilitate pandemic management.In general,our paper provides a comprehensive overview of the latest advances on the POCT device for diagnosis of COVID-19,which may provide insightful knowledge for researcher to further develop novel diagnostic technologies for rapid and on-site detection of pathogens including SARS-CoV-2.
基金Fundamental Research Funds for the Central Universities,Grant/Award Number:ZQN-818State Key Laboratory of Chemo/Biosensing and Chemometrics,Grant/Award Number:2019006+1 种基金Natural Science Foundation of Fujian Province,China,Grant/Award Number:2021J01310National Natural Science Foundation of China,Grant/Award Numbers:21775128,21804022。
文摘Given the continuous and growing demand for point of care(POC)diagnostic tests,attention has been shifted toward integration and miniaturization of laboratory protocols into“sample-in-answer-out”devices.Microfluidic technologies have been considered an ideal solution to address the requirements of POC diagnostics since many laboratory functions can be miniaturized and incorporated onto a single integrated chip.In this review,we summarize the advances of integrated microfluidic devices for POC diagnostics in the last 3 years.Particularly,we summarize current materials used for microfluidic chip fabrication,discuss the innovation of versatile integrated microfluidic devices,especially the strategies for simplifying sample preparation in manual or self-driven systems,and new detection methods of microfluidic chips.In addition,we describe new integrated microfluidic devices for POC diagnostics of protein-targeted immunodiagnostics,nucleic acid molecular tests,and small molecule metabolites analysis.We also provide future perspectives and current challenges for clinical translation and commercialization of these microfluidic technologies.
基金financially supported by the National Key Research and Development Program of China (2018YFB0703600)the National Natural Science Foundation of China (51772232)+1 种基金the 111 Project of China (B07040)Wuhan Frontier Project on Applied Research Foundation (2019010701011405)
文摘Miniaturization of efficient thermoelectric(TE)devices has long been hindered by the weak mechanical strength and insufficient heat-to-electricity conversion efficiency of zone-melted(ZM)ingots.Here,we successfully prepared a robust high-performance p-type Bi_(0.4)Sb_(1.6)Te_(3.72)bulk alloy by combining an ultrafast thermal explosion reaction with the spark plasma sintering(TER-SPS)process.It is observed that the introduced excess Te not only enhances the(00l)-oriented texture to ensure an outstanding power factor(PF)of 5 mW m^(−1)K^(−2),but also induces extremely high-density line defects of up to 10^(11)–10^(12)cm^(−2).Benefiting from such heavily dense line defects,the enhancement of the electronic thermal conductance from the increased electron mobility is fully compensated by the stronger phonon scattering,leading to an evident net reduction in total thermal conductivity.As a result,a superior ZT value of~1.4 at 350 K is achieved,which is 40%higher than that of commercial ZM ingots.Moreover,owing to the strengthening of grain refinement and highdensity line defects,the mechanical compressive stress reaches up to 94 MPa,which is 154%more than that of commercial single crystals.This research presents an effective strategy for the collaborative optimization of the texture,TE performance,and mechanical strength of Bi2Te3-based materials.As such,the present study contributes significantly to the future commercial development of miniature TE devices.
