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Preparation of Nano-Particles (Pb,La)TiO_3 Thin Films by Liquid Source Misted Chemical Deposition
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作者 张之圣 曾建平 李小图 《Transactions of Tianjin University》 EI CAS 2004年第1期59-62,共4页
Nano particles lanthanum modified lead titanate (PLT) thin films are grown on Pt/Ti/SiO 2/Si substrate by liquid source misted chemical deposition (LSMCD). PLT films are deposited for 4-8 times, and then annealed at v... Nano particles lanthanum modified lead titanate (PLT) thin films are grown on Pt/Ti/SiO 2/Si substrate by liquid source misted chemical deposition (LSMCD). PLT films are deposited for 4-8 times, and then annealed at various temperature. XRD and SEM show that the prepared films have good crystallization behavior and perovskite structure. The crystallite is about 60 nm. The deposition speed is 3 nm/min. This deposition method can exactly control stoichiometry ratios, doping concentration ratio and thickness of PLT thin films. The best annealing process is to bake at 300 ℃ for 10 min and anneal at 600 ℃ for 1 h. 展开更多
关键词 liquid source misted chemical deposition (LSMCD) nano particle (Pb La)TiO 3 thin films XRD SEM
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Energy properties and spatial plume profile of ionic liquid ion sources based on an array of porous metal strips 被引量:7
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作者 Xinyu LIU Xiaoming KANG +1 位作者 Hanwen DENG Yiming SUN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第12期128-139,共12页
An ionic liquid ion source(ILIS)is a kind of high brightness ion source capable of providing high-speed positive or negative ion beams.This paper presents a miniaturized ILIS based on an array of porous metal strips.T... An ionic liquid ion source(ILIS)is a kind of high brightness ion source capable of providing high-speed positive or negative ion beams.This paper presents a miniaturized ILIS based on an array of porous metal strips.The porous emitter array,integrated with seven 10 mm long strips,is fabricated using wire electrical discharge machining(WEDM)combined with electrochemical etching.The assembled ILIS is 30 mm×30 mm×17.5 mm in size and weighs less than 25 g.A series of experiments,including anⅠ-Ⅴcharacteristic test,a retarding potential analyzer(RPA)test,and a spatial plume distribution test,have been conducted in vacuo to characterize the performance of the ILIS.Results show that the emitted current is up to about 800μA and ion transparency is as high as 94%.Besides,RPA curves reveal that the total fragmentation rate of the emitted particles accounts for 48.8%in positive mode and 59.8%in negative mode.Further,with the increase in applied acceleration voltage,the voltage loss rises while the energy efficiency decreases.It is also found that the plume perpendicular to the strips has a higher divergence than the one parallel to the strips.A numerical simulation by COMSOL reveals that the electric field distribution between the two electrodes results in such a spatial plume profile. 展开更多
关键词 ELECTROSPRAY ionic liquid ion source retarding potential analyzer energy distribution spatial plume profile
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