By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or a...By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll （air-to-air） process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.展开更多
To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of pla...To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.展开更多
Low-frequency phenomena in the atmosphere are intimately related to stationary waves and, in a sense, the former may even be viewed as the time-varying part of the quasi-stationary waves themselves, Much attention has...Low-frequency phenomena in the atmosphere are intimately related to stationary waves and, in a sense, the former may even be viewed as the time-varying part of the quasi-stationary waves themselves, Much attention has been focused on nonlinear interactions in the conceptual study on stationary waves. Linear and nonlinear primitive-equation baroclinic spectral models are adopted to investigate the response of stationary waves to large- scale mechanical forcing and steady-state thermal forcing, both idealized and realistic, followed by calculations of the EP fluxes and three-dimensional wave activity fluxes (Plumb, 1985) for both the linear and nonlinear solu- tions. Results show that when the forcing source grows intense enough to be comparable to the real one, non- linear interaction becomes very important, especially for the maintenance of tropical and polar stationary waves. Care should be taken, however, in using the EP flux and Plumb's 3-D flux for diagnostic analysis of observational data as they are highly sensitive to nonlinear interaction.展开更多
Soil infiltration is the process by which water on the soil surface penetrates the soil.Quantifying the soil infiltration capacity(soil infiltrability)is very important for determining components of the hydrological m...Soil infiltration is the process by which water on the soil surface penetrates the soil.Quantifying the soil infiltration capacity(soil infiltrability)is very important for determining components of the hydrological modeling,irrigation design and many other natural or man made processes.In this paper,commonly used methods for soil infiltration rate measurement with their principles and application conditions are introduced.The advantages and disadvantages of each method under various application conditions are discussed for comparison.Three new methods for soil infiltrability measurement,including the corresponding algorithm models,and the experimental apparatus and procedures are introduced.These analyses should facilitate the choice of method used for soil infiltrability measurement.展开更多
基金supported by National Natural Science Foundation of China(No.11205201)
文摘By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll （air-to-air） process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.
基金by Hunan Provincial Science and Technology Department'Key Field Research and Development Project'(No.2019WK2011)。
文摘To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.
文摘Low-frequency phenomena in the atmosphere are intimately related to stationary waves and, in a sense, the former may even be viewed as the time-varying part of the quasi-stationary waves themselves, Much attention has been focused on nonlinear interactions in the conceptual study on stationary waves. Linear and nonlinear primitive-equation baroclinic spectral models are adopted to investigate the response of stationary waves to large- scale mechanical forcing and steady-state thermal forcing, both idealized and realistic, followed by calculations of the EP fluxes and three-dimensional wave activity fluxes (Plumb, 1985) for both the linear and nonlinear solu- tions. Results show that when the forcing source grows intense enough to be comparable to the real one, non- linear interaction becomes very important, especially for the maintenance of tropical and polar stationary waves. Care should be taken, however, in using the EP flux and Plumb's 3-D flux for diagnostic analysis of observational data as they are highly sensitive to nonlinear interaction.
基金This work was supported by the Natural Science Foundation of China under project No.40635027 and Changjiang Scholars and Innovative Research Team in University。
文摘Soil infiltration is the process by which water on the soil surface penetrates the soil.Quantifying the soil infiltration capacity(soil infiltrability)is very important for determining components of the hydrological modeling,irrigation design and many other natural or man made processes.In this paper,commonly used methods for soil infiltration rate measurement with their principles and application conditions are introduced.The advantages and disadvantages of each method under various application conditions are discussed for comparison.Three new methods for soil infiltrability measurement,including the corresponding algorithm models,and the experimental apparatus and procedures are introduced.These analyses should facilitate the choice of method used for soil infiltrability measurement.
