We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions...We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions is characterized by a scanning electron microscope. The average size in each region ranges from 270 nm to 320 nm,and the deviation is almost 4%, which is approaching the applicable value of 3% in the industrial process. We simulate the two-beam laser interference lithography system with MATLAB software and then calculate the distribution of light intensity around the 4 inch area. The experimental data fit very well with the calculated results. Analysis of the experimental data and calculated data indicates that laser beam quality and space filter play important roles in achieving a periodical nanoscale pattern with high uniformity and large area. There is the potential to obtain more practical applications.展开更多
We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydro...We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.展开更多
Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task...Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task.Here,a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.This approach enables alignment of each area of the laser interference lithography pattern arrays,including phase,period,and tilt angle.Two reference gratings are utilized:one is detached from the substrate,while the other remains fixed to it.To achieve global alignment,the exposure area is adjusted by alternating between moving the beam and the substrate.In our experiment,a 3×3 regions grating array was fabricated,and the−1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity.This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates.It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate.展开更多
Laser surface texturing(LST)has been proven to improve the tribological performance of machine elements.The micro-scale patterns manufactured by LST may act as lubricant reservoirs,thus supplying oil when encountering...Laser surface texturing(LST)has been proven to improve the tribological performance of machine elements.The micro-scale patterns manufactured by LST may act as lubricant reservoirs,thus supplying oil when encountering insufficient lubrication.However,not many studies have investigated the use of LST in the boundary lubrication regime,likely due to concerns of higher contact stresses that can occur with the increasing surface roughness.This study aims to examine the influence of LST on the fatigue lifetime of thrust rolling bearings under boundary lubrication.A series of periodic patterns were produced on the thrust rolling bearings,using two geometrically different designs,namely cross and dimple patterns.Base oil ISO VG 100 mixed with 0.05 wt%P of zinc dialkyldithiophosphate(ZDDP)was supplied.The bearings with cross patterns reduce the wear loss by two orders of magnitude.The patterns not only retain lubricant in the textured pockets but also enhance the formation of an anti-wear tribofilm.The tribofilm generation may be improved by the higher contact stresses that occur when using the textured surface.Therefore,in contrast to the negative concerns,the ball bearings with cross patterns were instead found to increase the fatigue life by a factor of three.展开更多
Carbon nanoparticle coatings on laser-patterned stainless-steel surfaces present a solid lubrication system where the pattern's recessions act as lubricant-retaining reservoirs.This study investigates the influenc...Carbon nanoparticle coatings on laser-patterned stainless-steel surfaces present a solid lubrication system where the pattern's recessions act as lubricant-retaining reservoirs.This study investigates the influence of the structural depth of line patterns coated with multi-walled carbon nanotubes(CNTs)and carbon onions(COs)on their respective potential to reduce friction and wear.Direct laser interference patterning(DLIP)with a pulse duration of 12 ps is used to create line patterns with three different structural depths at a periodicity of 3.5μm on AISI 304 steel platelets.Subsequently,electrophoretic deposition(EPD)is applied to form homogeneous carbon nanoparticle coatings on the patterned platelets.Tribological ball-on-disc experiments are conducted on the as-described surfaces with an alumina counter body at a load of 100 mN.The results show that the shallower the coated structure,the lower its coefficient of friction(COF),regardless of the particle type.Thereby,with a minimum of just below 0.20,CNTs reach lower COF values than COs over most of the testing period.The resulting wear tracks are characterized by scanning electron microscopy,transmission electron microscopy,and energy-dispersive X-ray spectroscopy.During friction testing,the CNTs remain in contact,and the immediate proximity,whereas the CO coating is largely removed.Regardless of structural depth,no oxidation occurs on CNT-coated surfaces,whereas minor oxidation is detected on CO-coated wear tracks.展开更多
基金Supported by the Scientific Equipment Research Program of Chinese Academy of Sciences under Grant No 2014Y4201449
文摘We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions is characterized by a scanning electron microscope. The average size in each region ranges from 270 nm to 320 nm,and the deviation is almost 4%, which is approaching the applicable value of 3% in the industrial process. We simulate the two-beam laser interference lithography system with MATLAB software and then calculate the distribution of light intensity around the 4 inch area. The experimental data fit very well with the calculated results. Analysis of the experimental data and calculated data indicates that laser beam quality and space filter play important roles in achieving a periodical nanoscale pattern with high uniformity and large area. There is the potential to obtain more practical applications.
基金support by the European Union’s Horizon 2020 research and innovation program through the project BioCombs4Nanofibres(Grant Agreement No.862016)。
文摘We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.
基金supported by the National Natural Science Foundation of China(no.62275142)the Shenzhen Stable Supporting Program(no.WDZC20231124201906001).
文摘Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task.Here,a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.This approach enables alignment of each area of the laser interference lithography pattern arrays,including phase,period,and tilt angle.Two reference gratings are utilized:one is detached from the substrate,while the other remains fixed to it.To achieve global alignment,the exposure area is adjusted by alternating between moving the beam and the substrate.In our experiment,a 3×3 regions grating array was fabricated,and the−1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity.This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates.It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate.
基金The present work is supported by Deutsche Forschungsgemeinschaft(DFG)in the priority program SPP 1551“Resource efficient machine elements”(GA 1706/2-2,Ja1940/2-2)This work is also supported by the government of Lower Austria for the endowed professorship tribology at TU Vienna(No.WST3-F-5031370/001-2017)The authors also acknowledge the support by“Austrian COMET-Programme”(Project InTribology,No.872176)under the scope of K2 XTribology and were developed in collaboration with the“Excellence Centre of Tribology”(AC2T research GmbH).
文摘Laser surface texturing(LST)has been proven to improve the tribological performance of machine elements.The micro-scale patterns manufactured by LST may act as lubricant reservoirs,thus supplying oil when encountering insufficient lubrication.However,not many studies have investigated the use of LST in the boundary lubrication regime,likely due to concerns of higher contact stresses that can occur with the increasing surface roughness.This study aims to examine the influence of LST on the fatigue lifetime of thrust rolling bearings under boundary lubrication.A series of periodic patterns were produced on the thrust rolling bearings,using two geometrically different designs,namely cross and dimple patterns.Base oil ISO VG 100 mixed with 0.05 wt%P of zinc dialkyldithiophosphate(ZDDP)was supplied.The bearings with cross patterns reduce the wear loss by two orders of magnitude.The patterns not only retain lubricant in the textured pockets but also enhance the formation of an anti-wear tribofilm.The tribofilm generation may be improved by the higher contact stresses that occur when using the textured surface.Therefore,in contrast to the negative concerns,the ball bearings with cross patterns were instead found to increase the fatigue life by a factor of three.
基金financial support by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)within the project MU 959/47-1Furthermore,the authors gratefully acknowledge funding in the ZuMat projectsupported by the State of Saarland from the European Regional Development Fund(Europäischer Fonds für Regionale Entwicklung,EFRE).P.Grützmacher and C.Gachot would like to thank the Government of Lower Austria(WST3)for financially supporting the endowed professorship tribology at the TU Wien.V.Presser thanks Eduard Arzt(INM)for his continuing support.
文摘Carbon nanoparticle coatings on laser-patterned stainless-steel surfaces present a solid lubrication system where the pattern's recessions act as lubricant-retaining reservoirs.This study investigates the influence of the structural depth of line patterns coated with multi-walled carbon nanotubes(CNTs)and carbon onions(COs)on their respective potential to reduce friction and wear.Direct laser interference patterning(DLIP)with a pulse duration of 12 ps is used to create line patterns with three different structural depths at a periodicity of 3.5μm on AISI 304 steel platelets.Subsequently,electrophoretic deposition(EPD)is applied to form homogeneous carbon nanoparticle coatings on the patterned platelets.Tribological ball-on-disc experiments are conducted on the as-described surfaces with an alumina counter body at a load of 100 mN.The results show that the shallower the coated structure,the lower its coefficient of friction(COF),regardless of the particle type.Thereby,with a minimum of just below 0.20,CNTs reach lower COF values than COs over most of the testing period.The resulting wear tracks are characterized by scanning electron microscopy,transmission electron microscopy,and energy-dispersive X-ray spectroscopy.During friction testing,the CNTs remain in contact,and the immediate proximity,whereas the CO coating is largely removed.Regardless of structural depth,no oxidation occurs on CNT-coated surfaces,whereas minor oxidation is detected on CO-coated wear tracks.
