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Influence of surface preparation on atomic layer deposition of Pt films
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作者 葛亮 胡成 +3 位作者 朱志炜 张卫 吴东平 张世理 《Journal of Semiconductors》 EI CAS CSCD 2012年第8期32-36,共5页
We report Pt deposition on a Si substrate by means of atomic layer deposition(ALD) using(methylcyclopentadienyl) trimethylplatinum(CH_3C_5H_4Pt(CH_3)_3) and O_2.Silicon substrates with both HF-last and oxidela... We report Pt deposition on a Si substrate by means of atomic layer deposition(ALD) using(methylcyclopentadienyl) trimethylplatinum(CH_3C_5H_4Pt(CH_3)_3) and O_2.Silicon substrates with both HF-last and oxidelast surface treatments are employed to investigate the influence of surface preparation on Pt-ALD.A significantly longer incubation time and less homogeneity are observed for Pt growth on the HF-last substrate compared to the oxide-last substrate.An interfacial oxide layer at the Pt-Si interface is found inevitable even with HF treatment of the Si substrate immediately prior to ALD processing.A plausible explanation to the observed difference of Pt-ALD is discussed. 展开更多
关键词 PT atomic layer deposition surface treatment interfacial oxide layer
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Biomimetic liquid metal synapse
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作者 Chunxue Wan Jianye Gao +2 位作者 Xilong Zhang Lei Li Jing Liu 《npj Flexible Electronics》 2025年第1期208-220,共13页
This article proposes a new conceptual biomimetic liquid metal synapse(LMS),which operates on a principle that resembles electrochemical structural plasticity,distinct from conventional electronic state transitions.It... This article proposes a new conceptual biomimetic liquid metal synapse(LMS),which operates on a principle that resembles electrochemical structural plasticity,distinct from conventional electronic state transitions.Its core architecture and biomimetic working mechanism have been clarified,which are governed by synergistic,persistent changes in the interfacial oxide layer and ion concentration at the liquid metal-electrolyte junction.These synergistic effects enable the precise modulation of synaptic strength through electrolyte engineering.The LMS demonstrates electrical behaviors analogous to fundamental neurobiological functions,such as signal transmission and persistent state changes reminiscent of long-term plasticity,which are rooted in permanent morphological and compositional reconstruction akin to biological systems.The inherent deformability,self-repair capacity,and high conductivity of liquidmetal facilitate the design of neural networks that replicate the dynamic,adaptive signaling essential for flexible intelligent devices.The insights from the LMSs suggest a promising pathway for future research into next-generation neural functional architectures. 展开更多
关键词 liquid metal synapse modulation synaptic strength electronic state transitionsits synergistic effects interfacial oxide layer BIOMIMETIC electrochemical structural plasticitydistinct liquid metal synapse lms which
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