The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion c...The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young＇s moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square （RMS） of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.展开更多
This paper studies correlations between the spatial structure character of thermal forcing and deformation and the amplitude of rays of meridional wave train. It is shown that if thermal forcing appears a meridional l...This paper studies correlations between the spatial structure character of thermal forcing and deformation and the amplitude of rays of meridional wave train. It is shown that if thermal forcing appears a meridional linear variation the rays of quasi-stationary planetary wave may propagate along oblique lines and if the meridional variability of heat source has second order term the rays show distinct deformation as a great circular route. Additionally, the inhomogeneous distribution may cause lower frequency oscillations in mid- and low-latitudes. The combination of zonal and meridional wave numbers and distributive character of heat source may form an inverse mechanism of variational trend of generized wave energy, reflecting in some degree the physical process of transition between meridional and zonal flow patterns.展开更多
By processing S-wave data from the Fanshi-Huai’an-Taipusiqi DSS profile,which is a three-component,wide-angle reflection/refraction profile,and in the light of the results from P-wave interpretation,two-dimensional(2...By processing S-wave data from the Fanshi-Huai’an-Taipusiqi DSS profile,which is a three-component,wide-angle reflection/refraction profile,and in the light of the results from P-wave interpretation,two-dimensional(2-D)structures of the crust and upper mantle are presented,including S-wave velocity Vs and the physical parameter of medium-Poisson’s ratio a.Taking other geological and geophysical information into account,and with reference to the results from petrophysical experiments at home and abroad,we carried out interpretation and inference with respect to deep crustal structure,tectonics,and lithologic characters.It has been concluded that in the upper and middle crust,a values are mostly not greater than 0.25,and rocks,which generally assume brittle,are mainly composed of granite; the rocks in the lower layer of the upper crust between Yangyuan-Huai’an containing inorganic CO2 itself releases carbon; for the rocks in the lower crust and crust-mantle transitional zone,which are comparatively展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.60876072)the Tianjin Research Program of Application Foundation and Advanced Technology,China(Grant No.10JCZDJC15500)
文摘The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young＇s moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square （RMS） of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.
文摘This paper studies correlations between the spatial structure character of thermal forcing and deformation and the amplitude of rays of meridional wave train. It is shown that if thermal forcing appears a meridional linear variation the rays of quasi-stationary planetary wave may propagate along oblique lines and if the meridional variability of heat source has second order term the rays show distinct deformation as a great circular route. Additionally, the inhomogeneous distribution may cause lower frequency oscillations in mid- and low-latitudes. The combination of zonal and meridional wave numbers and distributive character of heat source may form an inverse mechanism of variational trend of generized wave energy, reflecting in some degree the physical process of transition between meridional and zonal flow patterns.
文摘By processing S-wave data from the Fanshi-Huai’an-Taipusiqi DSS profile,which is a three-component,wide-angle reflection/refraction profile,and in the light of the results from P-wave interpretation,two-dimensional(2-D)structures of the crust and upper mantle are presented,including S-wave velocity Vs and the physical parameter of medium-Poisson’s ratio a.Taking other geological and geophysical information into account,and with reference to the results from petrophysical experiments at home and abroad,we carried out interpretation and inference with respect to deep crustal structure,tectonics,and lithologic characters.It has been concluded that in the upper and middle crust,a values are mostly not greater than 0.25,and rocks,which generally assume brittle,are mainly composed of granite; the rocks in the lower layer of the upper crust between Yangyuan-Huai’an containing inorganic CO2 itself releases carbon; for the rocks in the lower crust and crust-mantle transitional zone,which are comparatively
