To obtain the form error of micro-structured surfaces robustly and accurately, a form er- ror evaluation method was developed based on the real coded genetic algorithm （RCGA）. The meth- od employed the average squar...To obtain the form error of micro-structured surfaces robustly and accurately, a form er- ror evaluation method was developed based on the real coded genetic algorithm （RCGA）. The meth- od employed the average squared distance as the matching criterion. The point to surface distance was achieved by use of iterative method and the modeling of RCGA for the surface matching was also presented in detail. Parameter selection for RCGA including the crossover rate and population size was discussed. Evaluation results of series simulated surfaces without form error show that this method can achieve the accuracy of root mean square deviation （ Sq ） less than 1 nm and surface pro- file error （ St ） less than 4 nm. Evaluation of the surfaces with different simulated errors illustrates that the proposed method can also robustly obtain the form error with nano-meter precision. The e- valuation of actual measured surfaces further indicates that the proposed method is capable of pre- cisely evaluating micro-structured surfaces.展开更多
The mathematical modeling for evaluation of the sphericity error is proposed with minimum radial separation center. To obtain the minimum sphericity error from the form data, a geometric approximation technique was de...The mathematical modeling for evaluation of the sphericity error is proposed with minimum radial separation center. To obtain the minimum sphericity error from the form data, a geometric approximation technique was devised. The technique regarded the least square sphere center as the initial center of the concentric spheres containing all measurement points, and then the center was moved gradually to reduce the radial separation till the minimum radial separation center was got where the constructed concentric spheres conformed to the minimum zone condition. The method was modeled firstly, then the geometric approximation process was analyzed, and finally,the software for data processing was programmed. As evaluation example, five steel balls were measured and the measurement data were processed with the developed program. The average iteration times of the approximation technique is 4.2, and on average the obtained sphericity error is 0. 529μm smaller than the least square solution,with accuracy increased by 7. 696%.展开更多
基金Supported by the Programme of Introducing Talents of Discipline to Universities (B07018)
文摘To obtain the form error of micro-structured surfaces robustly and accurately, a form er- ror evaluation method was developed based on the real coded genetic algorithm （RCGA）. The meth- od employed the average squared distance as the matching criterion. The point to surface distance was achieved by use of iterative method and the modeling of RCGA for the surface matching was also presented in detail. Parameter selection for RCGA including the crossover rate and population size was discussed. Evaluation results of series simulated surfaces without form error show that this method can achieve the accuracy of root mean square deviation （ Sq ） less than 1 nm and surface pro- file error （ St ） less than 4 nm. Evaluation of the surfaces with different simulated errors illustrates that the proposed method can also robustly obtain the form error with nano-meter precision. The e- valuation of actual measured surfaces further indicates that the proposed method is capable of pre- cisely evaluating micro-structured surfaces.
基金Supported by National Natural Science Foundation of China(No.50175081) andTianjin Municipal Science and Technology Commission (No.0431835116).
文摘The mathematical modeling for evaluation of the sphericity error is proposed with minimum radial separation center. To obtain the minimum sphericity error from the form data, a geometric approximation technique was devised. The technique regarded the least square sphere center as the initial center of the concentric spheres containing all measurement points, and then the center was moved gradually to reduce the radial separation till the minimum radial separation center was got where the constructed concentric spheres conformed to the minimum zone condition. The method was modeled firstly, then the geometric approximation process was analyzed, and finally,the software for data processing was programmed. As evaluation example, five steel balls were measured and the measurement data were processed with the developed program. The average iteration times of the approximation technique is 4.2, and on average the obtained sphericity error is 0. 529μm smaller than the least square solution,with accuracy increased by 7. 696%.
