期刊文献+
共找到864篇文章
< 1 2 44 >
每页显示 20 50 100
Simple and universal method in designs of high-efficiency diffractive optical elements for spectrum separation and beam concentration 被引量:2
1
作者 徐文琪 林冬风 +8 位作者 许信 叶佳声 王新柯 冯胜飞 孙文峰 韩鹏 张岩 孟庆波 杨国桢 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第7期89-95,共7页
Diffractive optical elements(DOEs) with spectrum separation and beam concentration(SSBC) functions have important applications in solar cell systems. With the SSBC DOEs, the sunlight radiation is divided into seve... Diffractive optical elements(DOEs) with spectrum separation and beam concentration(SSBC) functions have important applications in solar cell systems. With the SSBC DOEs, the sunlight radiation is divided into several wave bands so as to be effectively absorbed by photovoltaic materials with different band gaps. A new method is proposed for designing high-efficiency SSBC DOEs, which is physically simple, numerically fast, and universally applicable. The SSBC DOEs are designed by the new design method, and their performances are analyzed by the Fresnel diffraction integral method.The new design method takes two advantages over the previous design method. Firstly, the optical focusing efficiency is heightened by up to 10%. Secondly, focal positions of all the designed wavelengths can be designated arbitrarily and independently. It is believed that the designed SSBC DOEs should have practical applications to solar cell systems. 展开更多
关键词 diffractive optical element spectrum separation and beam concentration optical focusing efficiency solar cell system
原文传递
Large aperture phase-coded diffractive lens for achromatic and 16°field-of-view imaging with high efficiency
2
作者 Gu Ma Peng-Lei Zheng +4 位作者 Zheng-Wen Hu Suo-Dong Ma Feng Xu Dong-Lin Pu Qin-Hua Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第7期349-360,共12页
Diffractive lenses(DLs)can realize high-resolution imaging with light weight and compact size.Conventional DLs suffer large chromatic and off-axis aberrations,which significantly limits their practical applications.Al... Diffractive lenses(DLs)can realize high-resolution imaging with light weight and compact size.Conventional DLs suffer large chromatic and off-axis aberrations,which significantly limits their practical applications.Although many achromatic methods have been proposed,most of them are used for designing small aperture DLs,which have low diffraction efficiencies.In the designing of diffractive achromatic lenses,increasing the aperture and improving the diffraction efficiency have become two of the most important design issues.Here,a novel phase-coded diffractive lens(PCDL)for achromatic imaging with a large aperture and high efficiency is proposed and demonstrated experimentally,and it also possesses wide field-of-view(FOV)imaging at the same time.The phase distribution of the conventional phase-type diffractive lens(DL)is coded with a cubic function to expand both the working bandwidth and the FOV of conventional DL.The proposed phase-type DL is fabricated by using the laser direct writing of grey-scale patterns for a PCDL of a diameter of 10 mm,a focal length of 100 mm,and a cubic phase coding parameter of 30π.Experimental results show that the working bandwidth and the FOV of the PCDL respectively reach 50 nm and 16°with over 8%focusing efficiency,which are in significant contrast to the counterparts of conventional DL and in good agreement with the theoretical predictions.This work provides a novel way for implementing the achromatic,wide FOV,and high-efficiency imaging with large aperture DL. 展开更多
关键词 achromatic imaging diffractive lens phase coding large aperture high efficiency
原文传递
Study of transmission grating diffraction efficiencies for soft X-ray
3
作者 YANG Jiamin DING Yaonan +8 位作者 ZHENG Zhijian YI Rongqing SUN Kexu CUI Mingqi CUl Congwu ZHU Peiping CHEN Zhenlin LI Chaoguang WANG Yaomei 《Nuclear Science and Techniques》 SCIE CAS CSCD 1999年第2期78-82,共5页
Tansmission grating spectrometers are extensively used to measure absthlute X-ray spectra in a photon-energy range below 1000 eV. The transmission grating,as its dispersive element, must be calibrated to obtain its da... Tansmission grating spectrometers are extensively used to measure absthlute X-ray spectra in a photon-energy range below 1000 eV. The transmission grating,as its dispersive element, must be calibrated to obtain its danaction efficiencies. Calibrations of absolute distraction efficiencies of the tlansmission grating at photon energyof 844eV have been carried out on Beliing Synchrotron mediation Facility. With theaid of grating model, all of the grating structure paraxneters have been determinedand the absolute dchaction efficiencies in a photon-energy range below 2000eV havealso been calculated and discussed. 展开更多
关键词 同步加器辐射 衍射效率 软X射线
在线阅读 下载PDF
Mode Conversion and Diffraction of Guided Optical Waves from Magnetostatic Waves under Inclined Bias Magnetic Field 被引量:5
4
作者 WU Bao-Jian LIU Gong-Qiang ZOU Zhi-Qiang 《Communications in Theoretical Physics》 SCIE CAS CSCD 2001年第10期497-502,共6页
The noncollinear interaction of guided optical waves with magnetostatic waves under inclined bias magnetic field is theoretically studied in detail. Similar approach can also be applied to the collinear interaction. C... The noncollinear interaction of guided optical waves with magnetostatic waves under inclined bias magnetic field is theoretically studied in detail. Similar approach can also be applied to the collinear interaction. Calculation results indicate that the diffraction efficiency (DE) in magnitude is equal to the mode-conversion efficiency (MCE) under vertical bias magnetic field, but they differ greatly under inclined bias magnetic field. By comparison to the case of vertical magnetization, the DE or the MCE can be greatly increased under inclined magnetic field. The characteristic of the DE curves obtained is basically in agreement with the experimental result. 展开更多
关键词 GUIDED OPTICAL wave MAGNETOSTATIC wave mode conversion diffraction efficiency
在线阅读 下载PDF
Extraction efficiency enhancement of LEDs using 2-D photonic crystal 被引量:2
5
作者 李志全 王亚男 +2 位作者 李文超 曹平 张景茹 《Optoelectronics Letters》 EI 2012年第3期186-189,共4页
Using photonic crystals (PCs), the extraction efficiency of the light-emitting diodes (LEDs) can be greatly enhanced by the effects of photonic band gap (PBG) and grating diffraction. The two theoretical methods are a... Using photonic crystals (PCs), the extraction efficiency of the light-emitting diodes (LEDs) can be greatly enhanced by the effects of photonic band gap (PBG) and grating diffraction. The two theoretical methods are also discussed. Meanwhile, we demonstrate that LEDs can achieve high extraction efficiency by employing photonic crystal as diffraction grating. PCs with square lattice of cylindrical unit cells are fabricated in GaN layer of GaN-based blue LED. We present a theoretical discussion on the extraction efficiency of PC-LED, which relies on the effective medium theory and transmission matrix method to investigate the effect of lattice constant. The results show that the extraction efficiency of the high performance LEDs can achieve 61.8% when the lattice constant is 270 nm. 展开更多
关键词 diffraction diffraction gratings efficiency EXTRACTION Gallium nitride Lattice constants Microcomputers Photonic band gap
原文传递
Mechanism of Bragg Diffraction-Assisted Light Extraction in GaN-based Light-Emitting Diodes Based on a Self-Consistent Model
6
作者 LIU Wen-De GAN Zi-Zhao 《Communications in Theoretical Physics》 SCIE CAS CSCD 2009年第9期545-548,共4页
By introducing the distribution of the light energy density in GaN-based light-emitting diode (LED),theLED model based on the incoherent regime and the light extraction efficiency are investigated.The energy density a... By introducing the distribution of the light energy density in GaN-based light-emitting diode (LED),theLED model based on the incoherent regime and the light extraction efficiency are investigated.The energy density asa function of the angle of incidence is calculated to demonstrate the mechanism of the light extraction.The deviationbetween the tendencies of the transmissivity of the output layer and the extraction efficiency is also demonstrated. 展开更多
关键词 light-emitting diodes extraction efficiency Bragg diffraction photonic crystals
在线阅读 下载PDF
Analysis and Optimum Design of a Portable Q-Switch Based on Raman-Nath Diffraction
7
作者 Huadong Gu Zhongxing Shao +2 位作者 Jie Yang Chenqi Zheng Ruitao Chen 《Optics and Photonics Journal》 2017年第8期20-25,共6页
The optimal acousto-optic interaction length in Raman-Nath diffraction is investigated by using deliberately designed apparatus working with pure water. Then the optimum interaction length, the suitable dimensions of ... The optimal acousto-optic interaction length in Raman-Nath diffraction is investigated by using deliberately designed apparatus working with pure water. Then the optimum interaction length, the suitable dimensions of the transducer, and the required index difference dominated by the ultrasonic frequency and power for achieving the ultimate efficiency are analyzed. The portable device analogy to the solid appliance is designed based on the optimization. Taking advantage of the device the highest diffraction efficiency of more than 98% is obtained. The feasibility of using the portable device to act as a Q-switch for ultraviolet and visible lasers is discussed. 展开更多
关键词 Raman-Nath diffraction OPTIMUM Interaction LENGTH ULTIMATE diffraction efficiency
在线阅读 下载PDF
High⁃Efficiency Two⁃Port Encapsulated Low⁃Contrast Grating with Suppressed Zeroth Order under Normal Incidence
8
作者 Bowen Gong Huiying Wen Hongtao Li 《Journal of Harbin Institute of Technology(New Series)》 CAS 2021年第5期28-37,共10页
A two⁃port encapsulated low⁃contrast grating with suppressed zeroth order under normal incidence is described in this paper.Based on such grating configuration,the improved efficiency and spectral bandwidth of the fir... A two⁃port encapsulated low⁃contrast grating with suppressed zeroth order under normal incidence is described in this paper.Based on such grating configuration,the improved efficiency and spectral bandwidth of the first order for TE and TM polarizations with a designed period of 1860 nm can be obtained.On the one hand,some of the accurate grating parameters were numerically optimized utilizing a rigorous coupled⁃wave analysis;on the other hand,the inherent physical mechanism suppressing the zeroth order through an encapsulated fused⁃silica grating was adequately interpreted on account of a simplified modal method.Encapsulated grating with a cover layer cannot be simply considered as adding a coating on it.Compared with reported surface⁃relief grating,all parameters of encapsulated grating should be re⁃optimized and the optimized performances of encapsulated grating were greatly improved.Therefore,the encapsulated grating can be potentially applied in writing fiber Bragg gratings. 展开更多
关键词 encapsulated grating suppression of the zeroth order improved diffraction efficiency improved spectral bandwidth
在线阅读 下载PDF
Multifrequency Magneto-optic Bragg Diffraction and Radio Frequency Signal Parallel Processing
9
作者 SHANG Dan WU Bao-jian QIU Kun 《Semiconductor Photonics and Technology》 CAS 2008年第1期22-27,共6页
Magneto-optic(MO)coupling of guided optical waves with microwave magnetostatic waves(MSWs)simultaneously excited by multiple radio frequency(RF)signals can lead to multifrequency diffraction effects and then parallel ... Magneto-optic(MO)coupling of guided optical waves with microwave magnetostatic waves(MSWs)simultaneously excited by multiple radio frequency(RF)signals can lead to multifrequency diffraction effects and then parallel processing of RF signals can be realized by using of the characteristics that diffraction efficiencies(DEs)are approximately in direct proportion to RF signals intensities and diffraction angles are related to frequencies of the corresponding RF signals within linear MO interaction region.In this paper,studied is the multifrequency MO Bragg diffraction in first-order MO interaction approximation,and obtained was the approximate analytical expression for principle diffraction efficiency(PDE).Also,put forward was a parallel imaging method of relative intensity of RF signals based on single-frequency diffraction.By calculation and analysis,it is shown that the relative error is not more than 0.3dB for the case of three RF signals within the frequency space of 60MHz. 展开更多
关键词 microwave magneto-optic effect parallel spectrum analysis magnetostatic forward volumewave Bragg diffraction efficiency
在线阅读 下载PDF
Diffractive characteristics of the liquid crystal spatial light modulator 被引量:3
10
作者 曹召良 穆全全 +2 位作者 胡立发 刘永刚 宣丽 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第6期1665-1671,共7页
The liquid crystal spatial light modulator (LC SLM) is very suitable for wavefront correction and optical testing and can produce a wavefront with large phase change and high accuracy. The LC SLM is composed of thou... The liquid crystal spatial light modulator (LC SLM) is very suitable for wavefront correction and optical testing and can produce a wavefront with large phase change and high accuracy. The LC SLM is composed of thousands of pixels and the pixel size and shape have effects on the diffractive characteristics of the LC SLM. This paper investigates the pixel effect on the phase of the wavefront with the scalar diffractive theory. The results show that the maximum optical path difference modulation is 41μm to produce the paraboloid wavefront with the peak to valley accuracy better than λ/10. Effects of the mismatch between the pixel and the period, and black matrix on the diffraction efficiency of the LC SLM are also analysed with the Fresnel phase lens model. The ability of the LC SLM is discussed for optical testing and wavefront correction based on the calculated results. It shows that the LC SLM can be used as a wavefront corrector and a compensator. 展开更多
关键词 liquid crystal spatial light modulator diffraction efficiency PIXEL WAVEFRONT
原文传递
High-efficiency mode group demultiplexing based on diffractive optical network
11
作者 ZHIBING LIU SIQING ZENG +8 位作者 SHUIXIAN YANG YUETONG SHI HONGFEI CHEN YAOMING FENG SHECHENG GAO JIAJING TU DAWEI WANG ZHAOJIAN CHEN ZHAOHUI LI 《Photonics Research》 2025年第5期1400-1407,共8页
Space division multiplexing(SDM)can achieve higher communication transmission capacity by exploiting more spatial channels in a single optical fiber.For weakly coupled few-mode fiber,different mode groups(MGs)are high... Space division multiplexing(SDM)can achieve higher communication transmission capacity by exploiting more spatial channels in a single optical fiber.For weakly coupled few-mode fiber,different mode groups(MGs)are highly isolated from each other,so the SDM system can be simplified by utilizing MG multiplexing and intensity modulation direct detection.A key issue to be addressed here is MG demultiplexing,which requires processing all the modes within a single MG in contrast to MG multiplexing.Benefiting from the great light manipulation freedom of the diffractive optical network(DON),we achieve efficient separation of the MGs and receive them with the multimode fiber(MMF)array.To fully exploit the mode field freedom of the MMF,a non-deterministic mode conversion strategy is proposed here to optimize the DON,which enables high-efficiency demultiplexing with a much smaller number of phase plates.As a validation,we design a 6-MG demultiplexer consisting of only five phase plates;each MG is constituted by several orbital angular momentum modes.The designed average loss and crosstalk at the wavelength of 1550 nm are 0.5 dB and-25 dB,respectively.In the experiment,the loss after coupling to the MMF ranged from 4.1 to 4.9 dB,with an average of 4.5 dB.The inter-MG crosstalk is better than-12 dB,with an average of-18 dB.These results well support the proposed scheme and will provide a practical solution to the MG demultiplexing problem in a short-distance SDM system. 展开更多
关键词 optical fiberfor space division multiplexing spatial channels high efficiency mode demultiplexing diffractive optical network mode groups mgs processing all modes space division multiplexing sdm can
原文传递
Real Time Diffraction Efficiency and the Anti-humidity Mechanism of NGD Holograms
12
作者 陈其瑞 汪国平 +1 位作者 郭履容 戴朝明 《Science China Mathematics》 SCIE 1994年第2期221-226,共6页
<正> Jn this paper,a new holographic recording material,nongelatin dichromated holographic film (NGU).is reported.The NGD holograms exhibit stronger real time effect,higher diffraction efficiency,better humidity... <正> Jn this paper,a new holographic recording material,nongelatin dichromated holographic film (NGU).is reported.The NGD holograms exhibit stronger real time effect,higher diffraction efficiency,better humidity,stability,stronger surface relief modulation,etc.An experimental study of the influence of electron donors on real time diffraction efficiency (RTDE) of NGD holograms has been earned out,and the anti-humidity mechanism of holograms analysed based on the rracrochemical structure of chelate.The concept that the symmetry of chelate structure is essential for good humidity stability of holograms is suggested.Remarkable is the contrast between NGD and DCG.The latter is another member of dichromated light sensitive systems and used to be considered the best phase holographic recording material However,the holograms of DCG,if not sealed,would decay quickly after several hours at relatively high temperature and humidity 展开更多
关键词 nongelatin DICHROMATE real time diffraction efficiency electron DONOR SYMMETRY
原文传递
SU-8微米光栅衍射性能研究
13
作者 李景鹏 王珏 +5 位作者 张雪凤 李毅 岱钦 崔建丰 王磊 乌日娜 《强激光与粒子束》 北大核心 2025年第6期43-47,共5页
研究了栅高对SU-8微米光栅衍射效率的影响。使用严格耦合波理论模拟分析了栅高分别为6~8μm、12~16μm、6~30μm时的衍射效率,以及6~30μm连续变化的0级和1级衍射效率。模拟结果显示,栅高6μm时,0级衍射效率最低,1级衍射效率最高;在12μ... 研究了栅高对SU-8微米光栅衍射效率的影响。使用严格耦合波理论模拟分析了栅高分别为6~8μm、12~16μm、6~30μm时的衍射效率,以及6~30μm连续变化的0级和1级衍射效率。模拟结果显示,栅高6μm时,0级衍射效率最低,1级衍射效率最高;在12μm时,0级衍射效率最高,1级衍射效率最低。栅高6~30μm连续变化时,衍射效率随之周期性变化。制备不同厚度的SU-8薄膜,采用皮秒激光刻蚀技术,制备了不同栅高的40μm周期光栅。测量结果显示,周期40μm光栅的栅高6.83μm时,-1级衍射效率为28.4%, 0级衍射效率约为14.7%;栅高13.45μm时,0级衍射效率为31.46%,1级衍射效率12.35%。0级和1级衍射效率的大小随着栅高周期变化。理论模拟和实验探索,为SU-8微米光栅的制备和一级衍射效率的提高提供重要的参考。 展开更多
关键词 衍射光栅 衍射效率 严格耦合理论 皮秒加工
在线阅读 下载PDF
斜入射高衍射效率双层衍射光学元件优化方法
14
作者 刘子龙 付跃刚 +2 位作者 胡源 周新雨 关禹聪 《电光与控制》 北大核心 2025年第1期80-85,共6页
针对双层衍射光学元件传统优化方法斜入射时衍射效率偏低的问题,基于双层衍射光学元件衍射效率与入射角度及波长的理论关系模型,提出了角度优化设计方法。通过分析设计过程中不同入射角和微结构高度对衍射效率的影响,优化选取微结构高度... 针对双层衍射光学元件传统优化方法斜入射时衍射效率偏低的问题,基于双层衍射光学元件衍射效率与入射角度及波长的理论关系模型,提出了角度优化设计方法。通过分析设计过程中不同入射角和微结构高度对衍射效率的影响,优化选取微结构高度,显著提高了大视场下的衍射效率。为了验证上述理论,采用长短波衍射效率相等法、带宽积分平均衍射效率最大法以及提出的角度优化设计方法,分别对可见光波段和红外波段的双层衍射光学元件进行设计。结果表明,角度优化设计方法能够有效提高双层衍射光学元件的角度带宽积分平均衍射效率,进而提高光学系统的成像质量。最后,基于角度优化设计方法设计了长焦折衍混合系统,实现了高衍射效率下的高像质折衍混合系统。 展开更多
关键词 双层衍射光学元件 衍射效率 入射角度 折衍混合光学系统
在线阅读 下载PDF
布比卡因多囊脂质体的包封率及粒径测定研究 被引量:1
15
作者 彭玉帅 郭文娣 +2 位作者 孙长迎 陈华 尹利辉 《中国医药导刊》 2025年第1期41-46,共6页
目的:测定两种不同工艺的布比卡因多囊脂质体仿制药和原研药的包封率及粒径分布,评估两种不同工艺的仿制产品和原研产品的区别,为后续该产品的一致性评价提供参考依据。方法:采用直接离心法加超滤离心法测定3种产品的包封率,直接离心法... 目的:测定两种不同工艺的布比卡因多囊脂质体仿制药和原研药的包封率及粒径分布,评估两种不同工艺的仿制产品和原研产品的区别,为后续该产品的一致性评价提供参考依据。方法:采用直接离心法加超滤离心法测定3种产品的包封率,直接离心法离心转速为6000 rpm,离心时间为10 min,而后再取直接离心法的上清液进行超滤离心,离心转速为6000 rpm,离心时间为20 min,使用HPLC法对布比卡因进行检测,以Waters XBridge C18为色谱柱,以0.02 mol·L^(-1)磷酸二氢钠缓冲溶液(pH=5.0)-乙腈(75∶25)为流动相,检测波长为240 nm,流速为1.5 mL·min^(-1);柱温为35℃;进样量为20μL。采用激光衍射法进行粒径大小和分布的测定,样品溶液的遮光率为15%,搅拌速率为80 rpm,样品池尺寸2 mm,分散介质为水,测试时间为10 s,样品平行测试3次。结果:HPLC检测包封率样品的方法中,布比卡因的质量浓度线性范围为4.58~45.81μg·mL^(-1)(r=0.9999),日内精密度RSD为0.27%(n=6),日间精密度为0.16%(n=3),重复性为0.60%(n=6),回收率为100.88%,RSD为2.67%(n=6)。样品1、样品2和原研产品包封率结果分别为86.52%、89.74%和86.91%。样品1、样品2和原研产品的中值粒径(X50)分别为25.35、22.65、25.79μm,RSD分别为0.36%、0.37%、0.51%(n=3)。结论:样品1的包封率和粒径大小与原研相似,而样品2的包封率和粒径与原研样品存在显著性差别,所建方法简单快捷,可以区分不同工艺的布比卡因多囊脂质体的包封率及粒径分布。 展开更多
关键词 布比卡因多囊脂质体 包封率 粒径分布 离心 激光衍射
暂未订购
低功耗高性能的新型硫系玻璃光纤声光调制器
16
作者 王莹莹 李长佑 +3 位作者 姜玲玲 吴中超 林常规 戴世勋 《国防科技大学学报》 北大核心 2025年第5期62-69,共8页
硫系玻璃因其宽红外透过范围、高声光品质因数等特点,成了低功耗高性能声光调制器的理想工作介质,有望突破传统介质声光调制器在效率与功耗方面的局限。以宽红外透过范围、高折射率的Ge_(21)Sb_(18)S_(61)硫系玻璃为研究对象,系统分析... 硫系玻璃因其宽红外透过范围、高声光品质因数等特点,成了低功耗高性能声光调制器的理想工作介质,有望突破传统介质声光调制器在效率与功耗方面的局限。以宽红外透过范围、高折射率的Ge_(21)Sb_(18)S_(61)硫系玻璃为研究对象,系统分析了其热学、物理、光学及声学性能,并基于此成功研制出高性能光纤声光调制器。实验结果表明,在0.52 W射频驱动功率下,该调制器衍射效率达84%,上升时间为41 ns,消光比高达61 d B,展现出低功耗、高效率的优异性能。该声光调制器的研制为新型声光器件的设计与开发提供了重要技术支撑,对推动高速光通信、光纤传感等领域的应用具有重要意义。 展开更多
关键词 硫系玻璃 声光调制器 功耗 衍射效率
在线阅读 下载PDF
用于星载甲烷成像光谱仪的高衍射效率棱镜光栅(封面文章·特邀)
17
作者 刘全 周能华 +4 位作者 王可欣 陈志伟 杨子江 潘俏 陈新华 《红外与激光工程》 北大核心 2025年第5期1-7,共7页
棱镜光栅是星载甲烷成像光谱仪的重要分光元件,与传统光栅不同的是,棱镜光栅的槽形是将光栅浸没于高折射率介质中,由于光栅槽形嵌入在高折射率介质中,使得光栅的角色散和分辨率都提高了n倍,其中n是高折射率介质的折射率。相比于传统光栅... 棱镜光栅是星载甲烷成像光谱仪的重要分光元件,与传统光栅不同的是,棱镜光栅的槽形是将光栅浸没于高折射率介质中,由于光栅槽形嵌入在高折射率介质中,使得光栅的角色散和分辨率都提高了n倍,其中n是高折射率介质的折射率。相比于传统光栅,棱镜光栅在同样的光谱分辨率下可以减小光栅的尺寸,实现更加紧凑的光机结构。因此研制棱镜光栅具有重要的意义。针对甲烷的2.3μm波段,分析了棱镜光栅的衍射特性,为了进一步提高系统的结构紧凑性,在石英棱镜光栅中引入高折射率材料TiO_(2)介质膜,对于矩形槽形,占空比在0.3~0.45范围内,TiO_(2)膜层厚度在165~170 nm之间,槽深在800~950 nm之间时,光栅的衍射效率高于70%,TiO_(2)膜层厚度为165 nm,槽深在870~930 nm之间时,衍射效率高于80%。采用全息光刻-离子束刻蚀结合原子层沉积技术,制作了周期为1020 nm、光栅有效面积大于110×275 mm的棱镜光栅。实验测量中,为了消除光源波动的影响,采用了双光路测试法进行衍射效率测量,在2.275~2.325μm波段,一级衍射效率大于70%。 展开更多
关键词 棱镜光栅 全息光刻 离子束刻蚀 衍射效率
原文传递
SU-8光栅的制备及其衍射性能研究
18
作者 鲁小鑫 王萧 +3 位作者 张雪凤 王浪 岱钦 乌日娜 《传感器与微系统》 北大核心 2025年第1期55-58,共4页
衍射效率的大小是衡量光刻光栅性能优劣的重要指标。使用严格耦合波分析(RCWA)模拟得到周期10μm和12μm的SU-8微米光栅的各级次衍射效率。采用掩模版紫外光刻技术制作曝光时间分别为27,30,33,36 s的SU-8光栅。通过显微镜观察,发现曝光... 衍射效率的大小是衡量光刻光栅性能优劣的重要指标。使用严格耦合波分析(RCWA)模拟得到周期10μm和12μm的SU-8微米光栅的各级次衍射效率。采用掩模版紫外光刻技术制作曝光时间分别为27,30,33,36 s的SU-8光栅。通过显微镜观察,发现曝光时间30 s制得的光栅结构更加清晰和平整。测量光栅样品的衍射效率,结果显示,0级衍射效率最大,与理论模拟结果相符。曝光时间27,33,36 s光栅的0级衍射效率较30s的相对偏高。以周期10μm光栅TE偏振光入射为例,使用RCWA理论模拟了光栅的栅条有缺口以及栅槽有额外薄膜层两种情况,分析了0级衍射效率偏高的现象。 展开更多
关键词 SU-8光刻胶 衍射效率 严格耦合波分析
在线阅读 下载PDF
拼接原子光刻光栅衍射性能研究
19
作者 吴益泽 薛栋柏 +3 位作者 肖光旭 沈俊宇 邓晓 孔明 《红外与激光工程》 北大核心 2025年第3期228-237,共10页
光栅干涉仪作为一种精密位移测量手段,具备高精度、高分辨力以及强抗干扰能力等优势。光栅作为干涉仪的测量基准,其周期准确性与位移测量结果的精度直接相关。基于原子光刻沉积技术的原子光刻光栅周期直接溯源至铬原子跃迁频率,将其运... 光栅干涉仪作为一种精密位移测量手段,具备高精度、高分辨力以及强抗干扰能力等优势。光栅作为干涉仪的测量基准,其周期准确性与位移测量结果的精度直接相关。基于原子光刻沉积技术的原子光刻光栅周期直接溯源至铬原子跃迁频率,将其运用于光栅干涉仪的研制,使得测量结果可直接溯源,保障了测量结果的准确性和一致性。然而单次原子光刻制备的光栅面积较小,限制了干涉仪的测量量程。尽管采用拼接原子光刻技术可实现原子光刻光栅面积的延拓,且理论上不引入周期误差,但是拼接区域光栅峰谷高度存在不均匀性,将会影响光栅的衍射效率。文中基于严格耦合波分析理论对拼接原子光刻光栅的衍射特性进行了仿真分析,当光栅峰谷高度从30~85 nm改变时,TE偏振入射光对应衍射效率从0.3%升高至1.9%,TM偏振入射光对应衍射效率随着峰谷高度变化逐步升高,最大值可达36.8%。同步进行了光栅衍射性能的实验测试,结果表明实验测试结果与仿真理论结果的变化趋势一致。该研究为基于拼接原子光刻光栅的直接溯源型光栅干涉仪测量量程扩展提供了技术指导。 展开更多
关键词 拼接原子光刻光栅 峰谷高度 衍射效率 严格耦合波理论
原文传递
可见光波段计算单层衍射光学元件设计
20
作者 邹慧田 朴明旭 +4 位作者 张贤 童英然 王浩然 娄一辰 蒋红梅 《红外与激光工程》 北大核心 2025年第8期320-331,共12页
在光学成像领域,为了优化系统结构并提升成像质量,单元件成像系统与计算成像技术的结合已成为一种关键的技术趋势。提出了一种计算单层衍射光学元件(Computational Single-layer Diffractive Optical Element,CSDOE)的设计方法,基于赛... 在光学成像领域,为了优化系统结构并提升成像质量,单元件成像系统与计算成像技术的结合已成为一种关键的技术趋势。提出了一种计算单层衍射光学元件(Computational Single-layer Diffractive Optical Element,CSDOE)的设计方法,基于赛德尔像差理论,推导了CSDOE的色差表达式,并通过分析不同颜色通道之间的关系,建立了考虑衍射效率的色差校正模型。设计并加工了焦距为50 mm、全视场为3°、波段范围为405~690 nm的CSDOE,利用考虑衍射效率的色差校正模型结合优化迭代算法处理图像,消除了色差与衍射效率对成像的影响。理论模拟和实际测试结果表明,对比度、灰度值梯度和标准差分别提高了17%、22.2%、21.7%和17.6%、41.1%、10.3%。该方法不仅实现了光学系统的小型化和轻量化,还为光学系统的设计与发展提供了新的思路。 展开更多
关键词 光学设计 计算成像 衍射元件 点扩散函数 消色差 衍射效率
原文传递
上一页 1 2 44 下一页 到第
使用帮助 返回顶部