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Strong-confinement low-index-rib-loaded waveguide structure for etchless thin-film integrated photonics
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作者 Yifan Qi Gongcheng Yue +1 位作者 Ting Hao Yang Li 《Opto-Electronic Advances》 2025年第9期40-49,共10页
Novel thin films consisting of optical materials such as lithium niobate and barium titanate enable various high-performance integrated photonic devices.However,the nanofabrication of these devices requires high-quali... Novel thin films consisting of optical materials such as lithium niobate and barium titanate enable various high-performance integrated photonic devices.However,the nanofabrication of these devices requires high-quality etching of these thin films,necessitating the long-term development of the fabrication recipe and specialized equipment.Here we present a strong-confinement low-index-rib-loaded waveguide structure as the building block of various passive and active integrated photonic devices based on novel thin films.By optimizing this low-index-rib-loaded waveguide structure without etching the novel thin film,we can simultaneously realize strong optical power confinement in the thin film,low optical propagation loss,and strong electro-optic coupling for the fundamental transverse electric mode.Based on our low-index-rib-loaded waveguide structure,we designed and fabricated a thin film lithium niobate(TFLN)modulator,featuring a 3-dB modulation bandwidth over 110 GHz and a voltage-length product as low as 2.26 V·cm,which is comparable to those of the state-of-the-art etched TFLN modulators.By alleviating the etching of novel thin films,the proposed structure opens up new ways of fast proof-of-concept demonstration and even mass production of high-performance integrated electro-optic and nonlinear devices based on novel thin films. 展开更多
关键词 integrated photonics thin-film lithium niobate electro-optic modulator
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Recent progress in integrated electro-optic frequency comb generation 被引量:2
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作者 Hao Sun Mostafa K.halil +1 位作者 Zifei Wang Lawrence R.Chen 《Journal of Semiconductors》 EI CAS CSCD 2021年第4期5-16,共12页
Optical frequency combs have emerged as an important tool enabling diverse applications from test-and-measurement,including spectroscopy,metrology,precision distance measurement,sensing,as well as optical and microwav... Optical frequency combs have emerged as an important tool enabling diverse applications from test-and-measurement,including spectroscopy,metrology,precision distance measurement,sensing,as well as optical and microwave waveform synthesis,signal processing,and communications.Several techniques exist to generate optical frequency combs,such as mode-locked lasers,Kerr micro-resonators,and electro-optic modulation.Important characteristics of optical frequency combs include the number of comb lines,their spacing,spectral shape and/or flatness,and intensity noise.While mode-locked lasers and Kerr micro-resonators can be used to obtain a large number of comb lines compared to electro-optic modulation,the latter provides increased flexibility in tuning the comb spacing.For some applications in optical communications and microwave photonics,a high degree of integration may be more desirable over a very large number of comb lines.In this paper,we review recent progress on integrated electro-optic frequency comb generators,including those based on indium phosphide,lithium niobate,and silicon photonics. 展开更多
关键词 electro-optic frequency comb generation integrated photonics silicon photonics integrated lithium niobate indium phosphide
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A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO_3 photoelastic waveguide
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作者 Dong-lin TANG Xiao-dong ZHANG +3 位作者 Guang-hui ZHAO Zhi-yong DAI Xin LAI Feng GUO 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2009年第4期595-600,共6页
An investigation of the properties ofa LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferom... An investigation of the properties ofa LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide has been designed, which is capable of detecting seismic acceleration in high-accuracy seismic exploration. The Mach-Zehnder interferometer was successfully fabricated and a lighting test used to check its quality. The frequency response characteristic of the accelerometer was measured2 The accelerometer with a resonant frequency of 3549 Hz was demonstrated to show good linear frequency responding characteristics in the range of 100-3000 Hz. The accelerometer also shows good stability and consistency. Experimental results indicate that the outputs of the on- and cross-axis are 147 and 21.3 mV, respectively. 展开更多
关键词 integrated optics accelerometer Photoelastic waveguide Mach-Zehnder interferometer (MZI)
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A High-Performance Silicon Electro-Optic Phase Modulator with a Triple MOS Capacitor 被引量:2
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作者 黄北举 陈弘达 +2 位作者 刘金彬 顾明 刘海军 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第12期2089-2093,共5页
We propose and analyze a novel Si-based electro-optic modulator with an improved metal-oxide-semiconductor (MOS) capacitor configuration integrated into silicon-on-insulator (SOl). Three gate-oxide layers embedded... We propose and analyze a novel Si-based electro-optic modulator with an improved metal-oxide-semiconductor (MOS) capacitor configuration integrated into silicon-on-insulator (SOl). Three gate-oxide layers embedded in the silicon waveguide constitute a triple MOS capacitor structure, which boosts the modulation efficiency compared with a single MOS capacitor. The simulation results demonstrate that the Vπ Lπ product is 2. 4V · cm. The rise time and fall time of the proposed device are calculated to be 80 and 40ps from the transient response curve, respectively,indicating a bandwidth of 8GHz. The phase shift efficiency and bandwidth can be enhanced by rib width scaling. 展开更多
关键词 carrier accumulation plasma dispersion effect electro-optic phase modulator METAL-OXIDE-SEMICONDUCTOR optoelectronic integrated circuit
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Design and application of single-antenna GPS/accelerometers attitude determination system 被引量:4
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作者 He Jie Huang Xianlin Wang Guofeng 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2008年第2期220-227,共8页
In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system ... In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system is of large volume, high cost, and complex structure, this approach is presented to determine the attitude based on vector space with single-antenna GPS and accelerometers in the micro inertial measurement unit (MIMU). It can provide real-time and accurate attitude information. Subsequently, the single-antenna GPS/SINS integrated navigation system is designed based on the combination of position, velocity, and attitude. Finally the semi- physical simulations of single-antenna GPS attitude determination system and single-antenna GPS/SINS integrated navigation system are carried out. The simulation results, based on measured data, show that the single-antenna GPS/SINS system can provide more accurate navigation information compared to the GPS/SINS system, based on the combination of position and velocity. Furthermore, the single-antenna GPS/SINS system is characteristic of lower cost and simpler structure. It provides the basis for the application of a single-antenna GPS/SINS integrated navigation system in a micro aerial vehicle (MAV). 展开更多
关键词 single-antenna GPS attitude determination vector space accelerometer integrated navigation MAV.
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Review of micromachined optical accelerometers:from mg to sub-μg 被引量:17
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作者 Qianbo Lu Yinan Wang +3 位作者 Xiaoxu Wang Yuan Yao Xuewen Wang Wei Huang 《Opto-Electronic Advances》 SCIE 2021年第3期1-24,共24页
Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume... Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement. 展开更多
关键词 accelerometer Micro-Opto-Electro-Mechanical Systems(MOEMS) integrated optics accelerometer review
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Structural Design of a Compact in-Plane Nano-Grating Accelerometer 被引量:4
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作者 YAO Bao-Yin ZHOU Zhen +2 位作者 FENG Li-Shuang WANG Wen-Pu WANG Xiao 《Chinese Physics Letters》 SCIE CAS CSCD 2012年第11期219-223,共5页
A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating... A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is proposed.First,the numbers of diffraction orders are calculated.Then,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration mode.Finally,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam system.Based on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/mG.The nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent fabrication.These results provide a theoretical basis for the design and fabrication of nano-grating accelerometers. 展开更多
关键词 accelerometer BEAM integrating
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Organic electro-optic polymer materials and organic-based hybrid electro-optic modulators 被引量:2
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作者 Yan Wang Tongtong Liu +3 位作者 Jiangyi Liu Chuanbo Li Zhuo Chen Shuhui Bo 《Journal of Semiconductors》 EI CAS CSCD 2022年第10期28-38,共11页
High performance electro-optic modulator,as the key device of integrated ultra-wideband optical systems,have be-come the focus of research.Meanwhile,the organic-based hybrid electro-optic modulators,which make full us... High performance electro-optic modulator,as the key device of integrated ultra-wideband optical systems,have be-come the focus of research.Meanwhile,the organic-based hybrid electro-optic modulators,which make full use of the advant-ages of organic electro-optic(OEO)materials(e.g.high electro-optic coefficient,fast response speed,high bandwidth,easy pro-cessing/integration and low cost)have attracted considerable attention.In this paper,we introduce a series of high-perform-ance OEO materials that exhibit good properties in electro-optic activity and thermal stability.In addition,the recent progress of organic-based hybrid electro-optic devices is reviewed,including photonic crystal-organic hybrid(PCOH),silicon-organic hy-brid(SOH)and plasmonic-organic hybrid(POH)modulators.A high-performance integrated optical platform based on OEO ma-terials is a promising solution for growing high speeds and low power consumption in compact sizes. 展开更多
关键词 organic electro-optic materials MODULATOR organic-based hybrid modulator heterogeneous integration
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Design of Three-component Photoelastic Waveguide Accelerometer
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作者 GUO Feng TANG Dong-lin +1 位作者 LIU Ze-nian YANG Ling 《Semiconductor Photonics and Technology》 CAS 2008年第4期259-263,共5页
In order to realize a high accuracy seismic exploration in the high electro-magnetic field and to improve oil producibility and recovery efficiency,a three-component photoelastic waveguide accelerometer is designed. B... In order to realize a high accuracy seismic exploration in the high electro-magnetic field and to improve oil producibility and recovery efficiency,a three-component photoelastic waveguide accelerometer is designed. Based on the photoelastic effect,the Mach-Zehnder integrated optical interferometer is designed to measure the three-orthogonal components of acceleration and the combined three-component simple harmonic vibrator is designed to reduce the cross-talk among the acceleration components. According to the variation of LiNbO3 waveguide phase under the action of the applied acceleration,the cross-axise sensitivity and transverse sensitivity ratio(TSR) were analysed. The results reveal that the accelerometer has wide band and good linearity. It can satisfy the sensor requirements of high accuracy seismic exploration. The main design parameters of the geophone system are:phase sensitivity:1.86×10-4 Rad·m-1·s-2,natural frequency:3 500 Hz,and the transverse sensitivity ratio:0.11%. 展开更多
关键词 integrated optics accelerometer photoelastic effect LiNbO3 optical waveguide
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基于多新息融合的线加速度计磁灵敏度辨识方法
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作者 董雪明 王敏林 王晓云 《计量与测试技术》 2025年第5期4-7,共4页
针对线加速度计磁灵敏度校准系统,提出一种基于耦合辅助模型的多新息辨识算法。通过引入移位算子,将该系统模型转换为两个子识别模型,从而降低辨识计算复杂度。同时,借助递推辅助模型,设计用于子辨识模型的参数辨识的递推最小二乘辨识... 针对线加速度计磁灵敏度校准系统,提出一种基于耦合辅助模型的多新息辨识算法。通过引入移位算子,将该系统模型转换为两个子识别模型,从而降低辨识计算复杂度。同时,借助递推辅助模型,设计用于子辨识模型的参数辨识的递推最小二乘辨识算法。此外,为了进一步提高辨识过程的收敛速度,多新息递归辨识算法通过采用多步更新原理,解决了多新息长度问题,实现了参数的快速更新。 展开更多
关键词 线加速度计磁灵敏度校准系统 多新息融合 辅助模型 参数辨识
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横向过载下陀螺加速度计磁悬浮控制方法研究
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作者 王龙 李亮 +2 位作者 盛安冬 朱志刚 任墨璇 《仪器仪表学报》 北大核心 2025年第5期11-19,共9页
摆式积分陀螺加速度计作为单轴敏感加速度计,安装于惯性导航系统,一般使用情况下它敏感输入轴方向的视加速度,同时会受到垂直于输入轴方向的横向加速度的作用。针对摆式积分陀螺加速度计受到横向加速度作用时产生浮子绕输入轴进动周期... 摆式积分陀螺加速度计作为单轴敏感加速度计,安装于惯性导航系统,一般使用情况下它敏感输入轴方向的视加速度,同时会受到垂直于输入轴方向的横向加速度的作用。针对摆式积分陀螺加速度计受到横向加速度作用时产生浮子绕输入轴进动周期性摆动幅度大,从而影响仪表精度的问题,进行了浮子受力分析,建立了横向加速度和敏感加速度同时作用下的浮子径向动力学方程。在磁悬浮纯比例控制方法的基础上提出了一种磁悬浮比例积分控制方法,由此提供更大磁悬浮支撑刚度来克服摆力矩和消除静态误差,实现抑制浮子摆动幅度。对两种控制方法下的浮子径向运动进行了Simulink仿真与对比,当横向加速度0.866g和敏感加速度0.5g同时作用时,浮子径向磁悬浮位置进动周期性波动±0.62μm减小到±0.24μm;当横向加速度3g和敏感加速度1g同时作用时,浮子径向磁悬浮位置进动周期性波动±2.2μm减小到±0.74μm。通过摆式积分陀螺加速度计开展离心试验进行对比,当横向加速度3.15g和敏感加速度0.313g时,浮子径向磁悬浮位置进动周期性波动±2μm减小到±0.5μm,当横向加速度和敏感加速度同时变化时,浮子径向磁悬浮位置进动周期性波动减小50%左右。结果表明磁悬浮比例积分控制方法比磁悬浮纯比例控制方法能够大幅抑制浮子径向摆动,摆动幅度缩小50%及以上。该方法具有实用的工程意义,可以提升摆式积分陀螺加速度计受到横向加速度作用时的仪表测量精度。 展开更多
关键词 摆式积分陀螺加速度计 磁悬浮 位置 横向加速度 浮子 径向
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MEMS加速度计在采煤机摇臂上的倾角检测研究
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作者 陈子千 庄德玉 《电子测量与仪器学报》 北大核心 2025年第3期256-265,共10页
为满足采煤机在井下开采工况的安全采高控制需求,解决传统摇臂倾角检测方法如油缸行程位移法和编码电位器旋转测距法,存在因摇臂铰接轴长期磨损导致精度和可靠性下降,且维修困难的问题。因此,提出了基于微机电系统(MEMS)加速度计的采煤... 为满足采煤机在井下开采工况的安全采高控制需求,解决传统摇臂倾角检测方法如油缸行程位移法和编码电位器旋转测距法,存在因摇臂铰接轴长期磨损导致精度和可靠性下降,且维修困难的问题。因此,提出了基于微机电系统(MEMS)加速度计的采煤机摇臂倾角检测方法。首先,为抑制强振动工况下的高频高幅值振动噪声,提高倾角测量精度,采用临界阻尼法和组合积分法对加速度计三轴原始数据进行滤波处理,成功分离并提取出有效的重力加速度数据并得到角度;其次,通过搭建摇臂振动模拟实验台获取滤波处理后的数据,实现了振动环境下的动态倾角辨识,有效地提高了角度测量精度。实验结果表明,在5g振动环境下,两种滤波器设计具备较快的响应速度,能够迅速跟踪输入信号变化,经过组合积分滤波器后角度误差小于0.3°,经过临界阻尼滤波器后角度误差小于0.1°,测量精度能够满足实际摇臂采高需求,为实现摇臂倾角检测提供一种可行的方法。 展开更多
关键词 采煤机摇臂 MEMS加速度计 组合积分滤波 临界阻尼滤波 倾角检测
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一种高精度微型石英挠性加速度计信号检测电路
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作者 沈时俊 何一蕾 +1 位作者 刘嘉 王晨阳 《电子产品可靠性与环境试验》 2025年第4期98-103,共6页
针对高精度捷联惯导核心器件石英挠性加速度计的输出电流信号检测需求,基于Δ-Σ型模数转换器与高精度差分信号调理技术设计检测电路;依托高密度布线双腔氮化铝陶瓷封装外壳及裸芯片混合集成微组装工艺实现系统级高密度封装;并通过热-... 针对高精度捷联惯导核心器件石英挠性加速度计的输出电流信号检测需求,基于Δ-Σ型模数转换器与高精度差分信号调理技术设计检测电路;依托高密度布线双腔氮化铝陶瓷封装外壳及裸芯片混合集成微组装工艺实现系统级高密度封装;并通过热-应力联合仿真验证方案可靠性。该方案在保持与传统电流频率转换电路同等精度的前提下,大幅缩减电路规模,其最终产品尺寸仅31 mm×25 mm×5.1 mm且可靠性达H级,这一特性显著提升了在航空航天等极端环境下的工程适用性。 展开更多
关键词 石英挠性加速度计 Δ-Σ型模数转换器 差分信号调理 氮化铝陶瓷外壳 混合集成 电流信号检测电路
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X射线脉冲星敏感器与加表组合天文导航及漂移估计
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作者 王献忠 《航天控制》 2025年第1期68-72,共5页
研究基于PI滤波估计加速度漂移的X射线脉冲星敏感器与加表组合导航算法。因长时间惯导误差积累导致发散,X射线脉冲星敏感器不能实时定位,且不能确定速度,提出利用X射线脉冲星敏感器脉冲到达时间(Time of arrival,TOA)作为观测量,与惯导... 研究基于PI滤波估计加速度漂移的X射线脉冲星敏感器与加表组合导航算法。因长时间惯导误差积累导致发散,X射线脉冲星敏感器不能实时定位,且不能确定速度,提出利用X射线脉冲星敏感器脉冲到达时间(Time of arrival,TOA)作为观测量,与惯导推算的航天器位置在脉冲星指向上的投影估计位置误差,基于PI滤波估计加速度漂移,修正惯导误差,通过组合导航连续确定位置/速度。仿真表明,基于X射线脉冲星敏感器相位ϕ与加表组合天文导航算法能有效估计加速度漂移,并给出较高精度的位置/速度。 展开更多
关键词 组合天文导航 PI滤波估计 加表漂移估计 X射线脉冲星敏感器
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An integrated MEMS piezoresistive tri-axis accelerometer
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作者 张永平 何常德 +4 位作者 于佳琪 杜春晖 张娟婷 丑修建 张文栋 《Journal of Semiconductors》 EI CAS CSCD 2013年第10期76-82,共7页
An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to com... An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, crossaxis-coupling degree, and linearity are presented. The sensitivity of X, Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the crossaxis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor. 展开更多
关键词 accelerometer integrATION PIEZORESISTIVE tri-axis MEMS
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Accelerometer Bias and Star Sensor Installation Error Joint Calibration for the SINS/CNS Integrated Navigation System Using Attitude Maneuver
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作者 Xiaolin Ning Yuqing Yang +1 位作者 Xiaoyu Liang Jie Zhang 《Guidance, Navigation and Control》 2022年第2期18-32,共15页
The integrated strap-down inertial nav igation system/olelestial navigation system(SINS/CNS)i an important autonomous navigation method with efective concealment and high predision.Both accelerometer biss and star ens... The integrated strap-down inertial nav igation system/olelestial navigation system(SINS/CNS)i an important autonomous navigation method with efective concealment and high predision.Both accelerometer biss and star ensor installation error ame important factors that aflect the performanoe of this mavigation system,which needl to be calibratexd and compensatedl.A new acelerometer bias and star sensor installation error joint calibration method for the SINS/CNS integrated navigation system i propoeed.In this newly propoeed method,the installation error of star sensor is augmented to the state vector,and the star vector,nadir angle,horkzontal poeition error and velbcity error ame ueed a8 measurementa to calbrate the two errors mentioned above.Simulations show that both accelerometer bias and star sensor installation enror an be calibratedl efectively. 展开更多
关键词 SINS/CNS integrated navigation accelerometer bias star sensor installation error calibration method
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陀螺加速度计精细化建模仿真方法研究 被引量:1
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作者 荣吉利 杨梓航 +4 位作者 周晓俊 李亮 李剑峰 刘睿 程修妍 《北京理工大学学报》 EI CAS CSCD 北大核心 2024年第12期1233-1240,共8页
研究陀螺加速度计精细化建模仿真分析方法.对整表结构进行了有限元网格划分,采用螺栓单元法进行简化处理,通过虚质量法对高密度浮油进行建模,计算外环轴轴承相关参数,并通过刚度轴承建模法进行仿真,建立了精细化陀螺加速度计有限元仿真... 研究陀螺加速度计精细化建模仿真分析方法.对整表结构进行了有限元网格划分,采用螺栓单元法进行简化处理,通过虚质量法对高密度浮油进行建模,计算外环轴轴承相关参数,并通过刚度轴承建模法进行仿真,建立了精细化陀螺加速度计有限元仿真模型.通过模态测试与模态仿真相对比,验证了有限元仿真模型的有效性.基于有限元模型,分析研究了在过载条件下外环轴轴承预紧力对仪表浮子质心偏移的影响,并据此进一步分析了预紧力对整表精度的影响.结果表明:适当提升外环轴预紧力有助于提高整表精度;过高的预紧力会导致精度下降,预紧力对于精度的影响大小也与视加速度相关. 展开更多
关键词 陀螺加速度计 有限元仿真 模态测试 误差预示
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工程化硅微谐振加速度计设计与实现 被引量:2
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作者 高乃坤 刘福民 +3 位作者 徐杰 高适萱 王学锋 阚宝玺 《传感器与微系统》 CSCD 北大核心 2024年第4期112-114,118,共4页
提出一种基于MEMS敏感结构芯片与专用集成电路芯片(ASIC)集成封装的硅微谐振加速度计设计方案。敏感结构主要包括敏感质量块、一级微杠杆放大结构和双端固定音叉谐振器。整体结构采用左右差分对称布局,实现器件高灵敏度。敏感结构芯片... 提出一种基于MEMS敏感结构芯片与专用集成电路芯片(ASIC)集成封装的硅微谐振加速度计设计方案。敏感结构主要包括敏感质量块、一级微杠杆放大结构和双端固定音叉谐振器。整体结构采用左右差分对称布局,实现器件高灵敏度。敏感结构芯片基于全硅晶圆级封装工艺,实现敏感结构芯片的低应力与批量化加工。敏感结构芯片与ASIC芯片采用堆叠式集成封装,实现器件的小型化与低功耗。所设计加速度计的谐振频率约为18.2 kHz,量程为±20 g_(n),标度因数为216 Hz/g_(n),标度因数稳定性为5×10^(-6),零偏稳定性为6.5μg_(n)(1σ,10 s)。所提方案实现了器件的小型化、低功耗与集成化。 展开更多
关键词 硅微谐振加速度计 差分检测 集成封装
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用于三轴MEMS加速度计的集成数字调理电路 被引量:1
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作者 王晓 任臣 杨拥军 《微纳电子技术》 CAS 2024年第6期138-147,共10页
基于0.18μm互补金属氧化物半导体(CMOS)工艺,设计了一种用于三轴微电子机械系统(MEMS)加速度计的集成数字调理电路,实现了三轴加速度信号的数字后处理。该数字调理电路采用级联积分梳状(CIC)与有限冲击响应(FIR)相结合的滤波器形式,有... 基于0.18μm互补金属氧化物半导体(CMOS)工艺,设计了一种用于三轴微电子机械系统(MEMS)加速度计的集成数字调理电路,实现了三轴加速度信号的数字后处理。该数字调理电路采用级联积分梳状(CIC)与有限冲击响应(FIR)相结合的滤波器形式,有效滤除了带外的量化噪声,提高了输出信号的信噪比;零位采用四阶多项式拟合温补算法,标度因数采用二阶多项式拟合温补算法,有效降低了加速度输出随温度的漂移,提升了加速度计的测量精度。此外,FIR滤波器采用时分复用的实现形式,温补模块采用串行实现形式,有效减小了芯片面积,最终芯片面积为1.5 mm^(2)。测试结果表明,滤波器符合设计值,三轴MEMS加速度计的零偏不稳定性为15μg,速率随机游走为0.035 m/s/√h,温补后零偏全温区变化量为3.55mg,提升了5.4倍;温补后标度因数全温区变化量为0.0026,提升了4.1倍,电路性能良好。 展开更多
关键词 数字调理电路 微电子机械系统(MEMS) 加速度计 级联积分梳状(CIC)滤波器 有限冲击响应(FIR)滤波器 时分复用 温度补偿
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Experimental study on the effect of wind on pointing accuracy of antenna structures
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作者 Li Fu Wang Li +5 位作者 Lingling Wang Wen Guo Qinghui Liu Zhiqiang Shen Xu Wang Haiming Liu 《Astronomical Techniques and Instruments》 CSCD 2024年第5期284-294,共11页
Wind loads have instantaneity and turbulence characteristics that will lead to pointing errors in antenna structures,and these errors cannot be ignored in high-frequency observations.Using the Tianma 65 m radio telesc... Wind loads have instantaneity and turbulence characteristics that will lead to pointing errors in antenna structures,and these errors cannot be ignored in high-frequency observations.Using the Tianma 65 m radio telescope(TMRT)as an example object,the pointing errors caused by wind loads are investigated using an accelerometer system.First,the resonant frequency range of the antenna structure is used for reference to acquire useful signals through the bandpass filtering method.Then,the direct current(DC)component of these signals is filtered out using the fast discrete Fourier transform method,and the baseline of the acceleration is corrected using the least-squares method.Finally,the acceleration integral is solved approximately using the discrete trapezoidal area method,and the structural vibration displacement of the antenna is determined using a double integral of acceleration.The pointing errors are then obtained based on the displacement relationship between the primary and subreflector surfaces.When the wind speed is 3.2 m/s,the antenna pitch angle is 61.7°and the wind direction angle is 80°,the generated pitch pointing error is 3.05'',and the azimuth pointing error is 1.14''.These results are consistent with those obtained via inclinometer measurements,thus validating the signal processing method and the pointing error calculation method proposed in this paper.The research methods and data analysis results reported here provide a basis for further wind-induced pointing error correction studies. 展开更多
关键词 accelerometer Double integral Pointing error Bandpass filtering
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