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Study of Ge Thin Heterostructures by Synchrotron Radiation X-Ray Reflection
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作者 ZHENG Wen-Li JIA Quan-Ji +1 位作者 JIANG Xiao-Ming JIANG Zui-Min 《Beijing Synchrotron Radiation Facility》 2001年第2期187-193,共7页
Synchrotron radiation X-ray reflection method is used to atudy the depth distribution ofGe atoms in Si crystals caused by surface segregation during the MBE growth.The distribution of Geatoms in Si crystal is found to... Synchrotron radiation X-ray reflection method is used to atudy the depth distribution ofGe atoms in Si crystals caused by surface segregation during the MBE growth.The distribution of Geatoms in Si crystal is found to have aaymmetric exponential shape by simulating the experimental re-lectivity based on X-ray reflection theory and Parratt method.The distribution decay lengths forwardand backward along the growth direction are obtained as 8Ãand 3Ã,respectively,and do nolchange with different thicknesses of the Ge layers.The influences on X-ray reflectivity of differentparameters,such as the thickness of the Si cap layer,the decay length,the surface roughness,andthe thickness of SiO-over the surface are discussed briefly. 展开更多
关键词 HETEROSTRUCTURE syochrotron radiation x-ray reflectivity surface segregation
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Erratum to “Accurate determination of film thickness by low-angle x-ray reflection”
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作者 Ming Xu Tao Yang +5 位作者 Wenxue Yu Ning Yang Cuixiu Liu Zhenhong Mai Wuyan Lai Kun Tao 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第9期658-658,共1页
Equation(6)in Chin.Phys.090833(2000)is corrected.All subsequent derivations were given based on the correct Eq.(6),so the conclusions in the paper are not ffected by the rrata.
关键词 erratum film thickness x-ray
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An analytical study for detonation wave boundary layer interactions under reflections
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作者 Hao YAN Xin HAN +2 位作者 Haochen XIONG Chongguang SHI Yancheng YOU 《Chinese Journal of Aeronautics》 2026年第2期178-201,共24页
Numerical simulations and theoretical models are developed in this paper for the Detonation-Wave/Boundary-Layer Interactions(DWBLIs)under reflections.Transient flow fields demonstrate the highly non-stationarity of th... Numerical simulations and theoretical models are developed in this paper for the Detonation-Wave/Boundary-Layer Interactions(DWBLIs)under reflections.Transient flow fields demonstrate the highly non-stationarity of the DWBLIs when Mach Reflection(MR)occur,and subsequent analyses show that the subsonic region introduced by the boundary layer exacerbates the instability.Further quantitative analyses show that viscosity has little effect on propulsive performance and the separation wave can be considered as an oblique detonation wave.Influence parameters to DWBLIs such as combustion chamber height,incoming Mach number,equivalence ratio,and inlet channel length are categorized and studied.Besides simulations,theoretical analytical modeling is established for Regular Reflection(RR)and MR of DWBLIs.Multiple formulas for the separation zone length are obtained according to the mass conservation under different transformation type between inviscid and viscid reflections.Comparison with the numerical simulations verifies the validity of the model and it can be further generalized to the curved DWBLIs.The developed model makes the theoretical solution process of DWBLIs possible and provides the key foundation for further analysis and solution. 展开更多
关键词 Boundary layer interaction Detonation wave Hypersonic flow reflection VISCOSITY
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Heterolayered Carbonized MXene/Polyimide Aerogel for Low-Reflection Electromagnetic Interference Shielding and Multi-Spectrum Compatible Protection
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作者 Shan Zhang Chen‑Ming Liang +5 位作者 Lu Zhou Juntao Wu Martin CKoo Zongxin Wu Yun‑Tian Chen Guang‑Sheng Wang 《Nano-Micro Letters》 2026年第6期702-716,共15页
The advancement of next-generation high-frequency communication systems and stealth detection technologies necessitate the development of efficient,multi-spectrum compatible shielding materials.However,the achievement... The advancement of next-generation high-frequency communication systems and stealth detection technologies necessitate the development of efficient,multi-spectrum compatible shielding materials.However,the achievement of simultaneous high efficiency and low reflectivity across microwave,terahertz,and infrared spectra remains a formidable challenge.Herein,a carbonized MXene/polyimide(C-MXene/PI)aerogel material integrating a spatially coupled hierarchically anisotropic structure with stepwise conductivity gradients was constructed.Electromagnetic waves propagate through the top-down vertical disordered horizontal architecture and progressive conductivity gradient of C-MXene/PI aerogel,undergoing stepwise absorption-dissipation-re-dissipation processes.The C-MXene/PI aerogel exhibits an average electromagnetic interference(EMI)shielding effectiveness of91.0 dB in X-band and a reflection coefficient of 0.40.In the terahertz frequency band,the average EMI shielding performance reaches66.2 dB with a reflection coefficient of 0.33.Furthermore,the heterolayered porous architecture of C-MXene/PI aerogels exhibits low thermal conductivity and reduced infrared emissivity,enabling exceptional infrared stealth capability across the 2-16μm wavelength spectrum.This study provides an feasible strategy for constructing low-reflectivity multi-spectrum compatible shielding materials. 展开更多
关键词 Heterolayered Electromagnetic interference shielding Multi-spectrum Low reflection High efficiency
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Hard X-ray resonant reflectivity studies of ultrathin WS_(2) layers grown by pulsed laser deposition
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作者 Sergey M.Suturin Polina A.Dvortsova +3 位作者 Alexander M.Korovin Vladimir V.Fedorov Evgeniya Yu.Lobanova Nikolai S.Sokolov 《Journal of Semiconductors》 2025年第3期102-108,共7页
Synchrotron method of resonant X-ray reflectivity 2D mapping has been applied to study ultrathin epitaxial layers of WS_(2)grown by pulsed laser deposition on Al_(2)O_(3)(0001)substrates.The measurements were carried ... Synchrotron method of resonant X-ray reflectivity 2D mapping has been applied to study ultrathin epitaxial layers of WS_(2)grown by pulsed laser deposition on Al_(2)O_(3)(0001)substrates.The measurements were carried out across the L absorption edge of tungsten to perform depth-dependent element-selective analysis sensitive to potential chemical modification of the WS_(2)layer in ambient conditions.Despite the few monolayer thickness of the studied film,the experimentally measured maps of reflectance as a function of incident angle and photon energy turned out to be quite informative showing well-pronounced interference effects near W absorption edge at 10210 eV.The synchrotron studies were complemented with conventional non-resonant reflectance measurements carried out in the laboratory at a fixed photon energy corresponding to Cu Kαemission.The reconstruction of the depth and energy dependent scattering length density within the studied multilayers was carried out using the OpenCL empowered fitting software utilizing spectral shaping algorithm which does not rely on the pre-measured reference absorption spectra.A thin WO_(x) layer has been revealed at the surface of the WS_(2)layer pointing out to the effect of water assisted photo-oxidation reported in a number of works related to ultrathin layers of transition metal dichalcogenides. 展开更多
关键词 transition metal dichalcogenides epitaxial multilayers pulsed layer deposition resonant x-ray reflectivity non-destructive depth profiling
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Multistage microcellular waterborne polyurethane composite with optionally low-reflection behavior for ultra-efficient electromagnetic interference shielding 被引量:5
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作者 Jianming Yang Hu Wang +4 位作者 Hexin Zhang Peng Lin Hong Gao Youyi Xia Xia Liao 《Journal of Materials Science & Technology》 2025年第5期132-140,共9页
Electromagnetic interference(EMI)shielding materials with superior shielding efficiency and low-reflection properties hold promising potential for utilization across electronic components,precision instruments,and fif... Electromagnetic interference(EMI)shielding materials with superior shielding efficiency and low-reflection properties hold promising potential for utilization across electronic components,precision instruments,and fifth-generation communication equipment.In this study,multistage microcellular waterborne polyurethane(WPU)composites were constructed via gradient induction,layer-by-layer casting,and supercritical carbon dioxide foaming.The gradient-structured WPU/ironcobalt loaded reduced graphene oxide(FeCo@rGO)foam serves as an impedance-matched absorption layer,while the highly conductive WPU/silver loaded glass microspheres(Ag@GM)layer is employed as a reflection layer.Thanks to the incorporation of an asymmetric structure,as well as the introduction of gradient and porous configurations,the composite foam demonstrates excellent conductivity,outstanding EMI SE(74.9 dB),and minimal reflection characteristics(35.28%)in 8.2-12.4 GHz,implying that more than 99.99999%of electromagnetic(EM)waves were blocked and only 35.28%were reflected to the external environment.Interestingly,the reflectivity of the composite foam is reduced to 0.41%at 10.88 GHz due to the resonance for incident and reflected EM waves.Beyond that,the composite foam is characterized by low density(0.47 g/cm^(3))and great stability of EMI shielding properties.This work offers a viable approach for craft-ing lightweight,highly shielding,and minimally reflective EMI shielding composites. 展开更多
关键词 Electromagnetic interference shielding Supercritical carbon dioxide(ScCO_(2))foaming Low reflectivity Multilayered structure MICROCELLULAR
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Influence of interface roughness on reflectivity of tungsten/boron-carbide multilayers with variable bi-layer number by X-ray reflection and diffuse scattering 被引量:1
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作者 代敏 张众 +7 位作者 朱京涛 王晓强 徐敬 付秀华 白亮 黄秋实 王占山 陈玲燕 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第8期738-740,共3页
Infuence of interface roughness on the reflectivity of Tungsten/boron-carbide (W/B4C) multilayers varying with bi-layer number, N, is investigated. For W/B4C multilayers with the same design period thickness of 2.5 ... Infuence of interface roughness on the reflectivity of Tungsten/boron-carbide (W/B4C) multilayers varying with bi-layer number, N, is investigated. For W/B4C multilayers with the same design period thickness of 2.5 nm, a real-structure model is used to calculate the variation of reflectivities with N = 50, 100, 150, and 200, respectively. Then, these multilayers are fabricated by a direct current (DC) magnetron sputtering system. Their reflectivity and scattering intensity are measured by an X-ray diffractometer (XRD) working at Cu Kα line. The X-ray reflectivity measurement indicates that the reflectivity is a function of its bi-layer number. The X-ray scattering measured results show that the interface roughness of W/B4C multilayers increases slightly from layer to layer during multilayer growing. The variation of the reflectivity and interface roughness with bi-layer number is accurately explained by the presented realstructure model. 展开更多
关键词 Carbides reflection Scattering X ray diffraction
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SMONTE CARLO CALCULATION FOR CALIBRATION FUNCTIONS IN TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROMETRY
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作者 范钦敏 刘亚雯 魏成连 《Nuclear Science and Techniques》 SCIE CAS CSCD 1995年第1期14-17,共4页
Simulation approach includes such processes as photon emissions from X-ray tube with a spectral distribution, total reflection on the sample support, photoelectric effect in thin layer sample, as well as characteristi... Simulation approach includes such processes as photon emissions from X-ray tube with a spectral distribution, total reflection on the sample support, photoelectric effect in thin layer sample, as well as characteristic line absorption and detection. The calculation results are in agreement with experimental ones. 展开更多
关键词 Total reflection x-ray fluorescence analysis Calibration function Monte Carlo simulation
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A high quality surface finish grinding process to produce total reflection mirror for x-ray fluorescence analysis 被引量:3
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作者 Hitoshi Ohmori Shinjiro Umezu +8 位作者 Yunji Kim Yoshihiro Uehara Hiroshi Kasuga Teruko Kato Nobuhide Itoh Syuhei Kurokawa Takayuki Kusumi Yugo Sugawara Shinsuke Kunimura 《International Journal of Extreme Manufacturing》 2020年第1期156-162,共7页
Total reflection x-ray fluorescence analysis is applied to trace element detection in liquid for effective environmental monitoring.This analytical approach requires x-ray total reflection mirrors.In order to achieve ... Total reflection x-ray fluorescence analysis is applied to trace element detection in liquid for effective environmental monitoring.This analytical approach requires x-ray total reflection mirrors.In order to achieve high sensitivity element detection,the mirrors require high surface quality for high x-ray reflectivity.Surface finishing for x-ray mirrors is typically conducted through a series of abrasive processes,such as grinding and polishing,and is thus time consuming.The purpose of this study is to streamline and enhance the surface finishing process based on unique high quality grinding techniques for the production of x-ray total reflection mirrors. 展开更多
关键词 GRINDING FINISHING x-ray mirror
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The Influence of Death Reflection on Existential Well-Being: The Mediating Role of Relational Self-Esteem
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作者 Lei Yue 《心理学研究评论(中英文版)》 2025年第1期1-6,共6页
Global challenges like epidemics,wars,and climate change expose humans to life-and-death threats daily,triggering death anxiety and subsequent death reflection,which involves deliberate cognitive processing of mortali... Global challenges like epidemics,wars,and climate change expose humans to life-and-death threats daily,triggering death anxiety and subsequent death reflection,which involves deliberate cognitive processing of mortality.While some studies have shown the positive impacts of death reflection,such as on well-being,the relationship between death reflection and existential well-being,closely related to life and death,remains unexplored.This study aimed to investigate the effects of death reflection on existential well-being and the mediating role of relational self-esteem.675 university students from Sichuan and Hubei,China,completed the death reflection scale,relational self-esteem scale,and the existential well-being subscale of the spiritual well-being scale.Results indicated that death reflection was positively correlated with both relational self-esteem and existential well-being,and relational self-esteem was positively related to existential well-being.Mediation analysis confirmed that relational self-esteem mediated the relationship between death reflection and existential well-being.This study not only enriches the research content on the positive effects of death reflection theoretically,but also holds significant practical value in guiding individuals who have experienced death or been exposed to death-related information in their psychological reconstruction and recovery. 展开更多
关键词 Death reflection Existential Well-Being Relational Self-esteem
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Abnormal focal length increase of terajet generated in reflection mode
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作者 Yu-Jing Yang Jiang-Tao Qin +2 位作者 De-Long Zhang Sai-Dong Xue Ning Yuan 《Chinese Physics B》 2025年第9期204-209,共6页
We report an interesting and abnormal electromagnetic phenomenon with regard to a terajet(TJ)that is generated in a reflection mode,which is realized by placing a dielectric scatterer onto a metal reflection plate.We ... We report an interesting and abnormal electromagnetic phenomenon with regard to a terajet(TJ)that is generated in a reflection mode,which is realized by placing a dielectric scatterer onto a metal reflection plate.We show that the introduction of an air hollow into metal reflection plate beneath the scatterer does not induce an expected decrease but an abnormal increase of focal length of the TJ by as much as more than three times.This abnormal phenomenon takes place in case that the air hollow is shallow and there exists a critical hollow depth for a given lateral size of air hollow.Larger than the critical depth,the phenomenon no longer occurs.It is explained from viewpoints of both ray optics in terms of role of relative portion of central waves in TJ formation and electromagnetic field theory with regard to hollow-induced phase singularities. 展开更多
关键词 terajet reflection mode air hollow focal length phase singularity
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Discrete Ultra-Broadband Perfect Anomalous Reflection in Depth Gradient Metasurfaces
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作者 Siyu Gu Cong Wang +5 位作者 Ziying Gao Lei Gao Drolgar Feng Gao Shaojun Wang Yadong Xu 《Chinese Physics Letters》 2025年第9期28-33,共6页
Perfect anomalous reflections have been demonstrated in optical phase gradient metasurfaces(PGMs),but they suffer from single-frequency(narrow-band)response due to the intrinsic limitation of natural geometric periodi... Perfect anomalous reflections have been demonstrated in optical phase gradient metasurfaces(PGMs),but they suffer from single-frequency(narrow-band)response due to the intrinsic limitation of natural geometric periodicity.Here,we provide both numerical and analytical evidence that a depth gradient metasurface can achieve discrete ultra-broadband perfect anomalous reflection in the microwave range in the absence of geometric periodicity.Remarkably,by adjusting the operating frequency of the incident wave,the same effect can be steadily obtained via a physically equivalent phase periodicity in the PGM.Based on this mechanism,a perfect retroreflector with a broadband response ranging from 1 GHz to 40 GHz is realized.Our work has promising applications in communication,source tracking,and military satellites. 展开更多
关键词 phase gradient metasurfaces pgms discrete ultra broadband perfect anomalous reflection depth gradient metasurfaces optical phase gradient metasurfaces geometric periodicity adjusting operating frequency perfect anomalous reflections microwave range
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On U_(S)-admitting Reflections of T_(0) Spaces
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作者 Liqun LIN Jinbo YANG 《Journal of Mathematical Research with Applications》 2025年第6期800-812,共13页
U_(S)-admitting spaces,which were introduced by Heckmann,enjoy many nice properties similar to those of the extensively studied well-filtered spaces.In this paper,we present a direct construction of the U_(S)-admittin... U_(S)-admitting spaces,which were introduced by Heckmann,enjoy many nice properties similar to those of the extensively studied well-filtered spaces.In this paper,we present a direct construction of the U_(S)-admitting reflections by using U_(S)-admitting determined sets. 展开更多
关键词 well-filtered space reflective subcategory sober space U_(S)-admitting space
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Effect and Reflection of Ideological and Political Teaching Reform in Preliminary Landscape Design Course
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作者 JIA Dehua XIAO Guozeng +1 位作者 XIAO Wenjing WANG Wanxi 《Journal of Landscape Research》 2025年第1期81-84,共4页
Curriculum ideological and political education is an important direction of higher education reform in the new era,aiming to realize the organic integration of professional knowledge imparting and ideological and poli... Curriculum ideological and political education is an important direction of higher education reform in the new era,aiming to realize the organic integration of professional knowledge imparting and ideological and political education.Taking preliminary landscape design course as an example,this paper expounded in detail the implementation of teaching reform from three aspects:the formulation of teaching objectives,the integration of teaching contents and the innovation of teaching methods.This paper systematically summarized the implementation effect of ideological and political education reform,and reflected on the excavation of ideological and political elements,integration degree,innovation of teaching methods,teachers’ideological and political ability and practical teaching.The exploration on curriculum ideological and political teaching provides useful reference and thinking for similar courses,and promotes the sustainable development of curriculum ideological and political education. 展开更多
关键词 Preliminary landscape design Curriculum ideological and political education Teaching effectiveness Teaching reflection Teaching reform
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Experimental Study on the Influence of a Partial Reflection Wall on the Power Performance of a Box-Type Wave Energy Converter
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作者 ZHANG Qi LI Xiao-zhong +3 位作者 LIN Chu-sen JIN Peng YUAN Yu-ming ZHOU Bin-zhen 《China Ocean Engineering》 2025年第4期675-686,共12页
The power generation performance of a heaving body wave energy converter(HBWEC)can be enhanced through strategic deployment in proximity to natural or artificial coastal structures.In this study,coastal structures are... The power generation performance of a heaving body wave energy converter(HBWEC)can be enhanced through strategic deployment in proximity to natural or artificial coastal structures.In this study,coastal structures are represented by a partial reflection wall,enabling the device to harness additional reflected wave energy.However,the mechanisms by which the reflection coefficient and the clearance between the wall and the device affect energy conversion performance remain inadequately understood.This study experimentally investigates these effects.The findings demonstrate that the clearance impact on HBWEC power performance near partial reflection walls aligns with standing wave variation characteristics,with optimal positioning near the second antinode of the HBWEC's heaving natural period.Enhanced reflection coefficients improve energy conversion efficiency within the wave spectrum around the device's heaving natural period.Additionally,significant water sloshing observed within the clearance may diminish power performance,as verified through computational fluid dynamics(CFD)analysis.This phenomenon results from the multiplicative relationship of leeside clearance with 0.5λ(λis the wavelength).These insights suggest that practical engineering implementation requires balanced consideration of reflection coefficient,clearance,sloshing phenomenon,and heaving restriction system,rather than individual parameter optimization. 展开更多
关键词 heaving body wave energy converter partial reflection wall power performance heaving restriction system sloshing phenomenon
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One-dimensional(C_(12)H_(12)N)_(3)Cu_(3)I_(6)for high-performance direct X-ray detection
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作者 Pan Gao Qingzheng Kong +8 位作者 Ying Sun Qian Ma Qi Wang Zeyu Guo Ledi Li Bingbing Li Jingwei Xu Xiaomei Jiang Zhaolai Chen 《Chinese Journal of Structural Chemistry》 2026年第1期61-67,共7页
X-ray detectors,as crucial elements in medical imaging and industrial fields,can be categorized into direct and indirect types.Direct detectors,which directly convert X-ray photons into electrical signals,exhibit high... X-ray detectors,as crucial elements in medical imaging and industrial fields,can be categorized into direct and indirect types.Direct detectors,which directly convert X-ray photons into electrical signals,exhibit high sensitivity and low detection limits,enabling the capture of high-resolution images and reducing radiation exposure to patients.Organic copper halides,recognized as potential active materials for X-ray detection,have been widely explored in the indirect scintillation field but remain under-explored in direct X-ray detector applications.In this work,(C_(12)H_(12)N)_(3)Cu_(3)I_(6)is demonstrated as an efficient semiconductor for direct X-ray detection with excellent stability.A lateral-structured X-ray detector was fabricated with gold electrodes,which exhibits a maximum sensitivity of 1464.14μC·Gy^(-1)·cm^(-2),a lowest detection limit of 19.8 nGy·s^(-1),a high on-off ratio of 2140,and an excellent operational stability of retaining 96%performance after 600 s continuous X-ray radiation.Furthermore,the detector successfully imaged a 0.1 mm“F”-shaped lead sheet,validating its capacity for X-ray imaging.This study highlights the potential of(C_(12)H_(12)N)_(3)Cu_(3)I_(6)as a promising semiconductor for high-performance direct X-ray detection,expanding the application scope of organic copper halides in this critical field. 展开更多
关键词 Organic copper halides One-dimensional structure x-ray detection x-ray imaging
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Response estimation and evaluation of direct-conversion dual-layer perovskite X-ray detectors:a numerical study with a cascaded signal model
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作者 Han Cui Yu-Hang Tan +7 位作者 Xin Zhang Hao-Di Wu Ting Su Jiong-Tao Zhu Hai-Rong Zheng Dong Liang Xiang-Ming Sun Yong-Shuai Ge 《Nuclear Science and Techniques》 2026年第2期156-168,共13页
This study aims to investigate the responses of a perovskite-based direct-conversion dual-layer flat-panel detector(DL-FPD)numerically.To this end,the X-ray sensitivity,spatial resolution quantified by the modulation ... This study aims to investigate the responses of a perovskite-based direct-conversion dual-layer flat-panel detector(DL-FPD)numerically.To this end,the X-ray sensitivity,spatial resolution quantified by the modulation transfer function(MTF),and detective quantum efficiency(DQE)of the DL-FPD are evaluated numerically using a linear cascade model.In addition,both the single-crystal(SC)and polycrystalline(PC)structures of MAPbI_(3)are investigated,along with various other key parameters such as the material thickness,electric field strength,X-ray beam spectrum,and electronic readout noise.The results demonstrate that SC perovskite consistently exhibits better performance than PC perovskite owing to fewer material defects.Increasing the layer thickness may decrease the MTF,but can also enhance the sensitivity and DQE.Moreover,appropriately increasing the external electric field within the material can improve the sensitivity,MTF,and DQE.Finally,reducing the electronic readout noise can significantly enhance the DQE for low-dose imaging.This study demonstrates the potential of high-quality dual-energy X-ray imaging using direct-conversion perovskite DL-FPDs. 展开更多
关键词 x-ray imaging Dual-layer flat-panel detector Perovskite x-ray detector
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Impacts of X-ray energy and beam size on CD-SAXS measurement precision
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作者 Xu-Yang Qin Bing Guo +7 位作者 Nan Pan Xin-Hao Gao Shu-Min Yang Chun-Xia Hong Ying Wang Xiu-Hong Li Chun-Ming Yang Feng-Gang Bian 《Nuclear Science and Techniques》 2026年第4期65-78,共14页
With the development of the semiconductor industry below the 7 nm scale,critical dimension small-angle X-ray scattering(CD-SAXS)has emerged as a powerful tool for quantitatively measuring nanoscale deviations.In this ... With the development of the semiconductor industry below the 7 nm scale,critical dimension small-angle X-ray scattering(CD-SAXS)has emerged as a powerful tool for quantitatively measuring nanoscale deviations.In this study,the effects of X-ray beam size and photon energy on the accuracy of critical dimension measurements were investigated.Critical dimensions measured using beams with different spot sizes showed different deviations from the expected values.Beam sizes that were either too large or too small did not improve confidence intervals.As the incident energy increased,the X-ray transmission rate increased,while the scattering cross section decreased,resulting in a gradual decrease in the signal-to-noise ratio of the diffraction peaks,which reduced the accuracy of the CD-SAXS measurements.An optimal accuracy was obtained at 12 keV with a smaller beam size.Using an effective trapezoid model,the results yielded an average pitch of 100.4±0.2 nm,width of 49.8±0.2 nm,height of 130.0±0.2 nm,and a sidewall angle below 1.1°±0.1°.These results provide crucial guidance for the future development of CD-SAXS laboratories and the construction of X-ray machines as well as robust support for research in related fields. 展开更多
关键词 Critical dimension small-angle x-ray scattering Nonlinear fitting Beam size x-ray energy Chip
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