We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin...We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction(XRD) and scanning electric microstructure(SEM).The effect of the TiO2 seed layer on PMN-PT films was studied.展开更多
文摘We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction(XRD) and scanning electric microstructure(SEM).The effect of the TiO2 seed layer on PMN-PT films was studied.
