In cabin-type component alignment, digital measurement technology is usually adopted to provide guidance for assembly. Depending on the system of measurement, the alignment process can be divided into measurement-assi...In cabin-type component alignment, digital measurement technology is usually adopted to provide guidance for assembly. Depending on the system of measurement, the alignment process can be divided into measurement-assisted assembly(MAA) and force-driven assembly. In MAA,relative pose between components is directly measured to guide assembly, while in force-driven assembly, only contact state can be recognized according to measured six-dimensional force and torque(6 D F/T) and the process is completed based on preset assembly strategy. Aiming to improve the efficiency of force-driven cabin-type component alignment, this paper proposed a heuristic alignment method based on multi-source data fusion. In this method, measured 6 D F/T, pose data and geometric information of components are fused to calculate the relative pose between components and guide the movement of pose adjustment platform. Among these data types, pose data and measured 6 D F/T are combined as data set. To collect the data sets needed for data fusion, dynamic gravity compensation method and hybrid motion control method are designed. Then the relative pose calculation method is elaborated, which transforms collected data sets into discrete geometric elements and calculates the relative poses based on the geometric information of components.Finally, experiments are conducted in simulation environment and the results show that the proposed alignment method is feasible and effective.展开更多
Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task...Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task.Here,a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.This approach enables alignment of each area of the laser interference lithography pattern arrays,including phase,period,and tilt angle.Two reference gratings are utilized:one is detached from the substrate,while the other remains fixed to it.To achieve global alignment,the exposure area is adjusted by alternating between moving the beam and the substrate.In our experiment,a 3×3 regions grating array was fabricated,and the−1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity.This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates.It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate.展开更多
基金co-supported by the Special Research on Civil Aircraft of China (No.MJZ-2017-J-96)the Defense Industrial Technology Development Program of China (No.JCKY2016206B009)。
文摘In cabin-type component alignment, digital measurement technology is usually adopted to provide guidance for assembly. Depending on the system of measurement, the alignment process can be divided into measurement-assisted assembly(MAA) and force-driven assembly. In MAA,relative pose between components is directly measured to guide assembly, while in force-driven assembly, only contact state can be recognized according to measured six-dimensional force and torque(6 D F/T) and the process is completed based on preset assembly strategy. Aiming to improve the efficiency of force-driven cabin-type component alignment, this paper proposed a heuristic alignment method based on multi-source data fusion. In this method, measured 6 D F/T, pose data and geometric information of components are fused to calculate the relative pose between components and guide the movement of pose adjustment platform. Among these data types, pose data and measured 6 D F/T are combined as data set. To collect the data sets needed for data fusion, dynamic gravity compensation method and hybrid motion control method are designed. Then the relative pose calculation method is elaborated, which transforms collected data sets into discrete geometric elements and calculates the relative poses based on the geometric information of components.Finally, experiments are conducted in simulation environment and the results show that the proposed alignment method is feasible and effective.
基金supported by the National Natural Science Foundation of China(no.62275142)the Shenzhen Stable Supporting Program(no.WDZC20231124201906001).
文摘Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task.Here,a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.This approach enables alignment of each area of the laser interference lithography pattern arrays,including phase,period,and tilt angle.Two reference gratings are utilized:one is detached from the substrate,while the other remains fixed to it.To achieve global alignment,the exposure area is adjusted by alternating between moving the beam and the substrate.In our experiment,a 3×3 regions grating array was fabricated,and the−1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity.This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates.It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate.
