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TiO_(2)对反应烧结SiC陶瓷性能的影响
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作者 胡苗 鞠茂奇 +3 位作者 陈定 顾华志 黄奥 付绿平 《武汉科技大学学报》 北大核心 2026年第1期31-36,共6页
以SiC粉、炭黑和造孔剂为主要原料,外加不同含量的TiO_(2)粉末,经混料、压制成型、110℃干燥后,通过1740℃真空渗硅烧结1 h制得反应烧结SiC陶瓷,研究了TiO_(2)添加量对反应烧结SiC陶瓷的力学性能和显微结构的影响。结果表明,TiO_(2)的... 以SiC粉、炭黑和造孔剂为主要原料,外加不同含量的TiO_(2)粉末,经混料、压制成型、110℃干燥后,通过1740℃真空渗硅烧结1 h制得反应烧结SiC陶瓷,研究了TiO_(2)添加量对反应烧结SiC陶瓷的力学性能和显微结构的影响。结果表明,TiO_(2)的最佳添加量为9%,此时所制反应烧结SiC陶瓷的抗弯强度和断裂韧性分别达到294 MPa、4.84 MPa·m^(1/2)。这是因为TiO_(2)和游离Si反应生成了力学性能优异的Ti_(3)SiC_(2)增韧相,同时TiO_(2)能有效降低游离Si的含量并细化其尺寸,从而提高了陶瓷材料的力学性能。 展开更多
关键词 反应烧结sic陶瓷 Ti_(3)sic_(2) 游离si 力学性能 显微结构
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一种SiC/Si混合五电平逆变器及其优化调制策略
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作者 莫文逸 张犁 邹宇航 《电源学报》 北大核心 2026年第1期40-50,共11页
提出了1种SiC/Si混合五电平逆变器拓扑及其优化调制策略,所提拓扑由4支SiC MOSFET和4支Si IGBT组成,通过直流侧分裂电容构成五电平结构;所提调制策略中所有高频开关损耗由4支SiC MOSFET承担,4支Si IGBT仅承担通态损耗与部分结电容充放... 提出了1种SiC/Si混合五电平逆变器拓扑及其优化调制策略,所提拓扑由4支SiC MOSFET和4支Si IGBT组成,通过直流侧分裂电容构成五电平结构;所提调制策略中所有高频开关损耗由4支SiC MOSFET承担,4支Si IGBT仅承担通态损耗与部分结电容充放电损耗。损耗建模分析表明,所提SiC/Si混合调制策略能够优化器件损耗分布,充分发挥SiC MOSFET的低开关损耗优势与Si IGBT在大电流条件下的低通态损耗优势。相比于全-Si方案,所提SiC/Si混合方案在大幅提高变换效率的同时仅少量增加硬件成本;相比于全-SiC方案,所提SiC/Si混合方案在实现相近效率性能的同时大幅降低硬件成本,且SiC/Si混合方案在重载工况下的效率优于全-SiC方案。最后,搭建4 kW SiC/Si混合五电平逆变器实验平台,验证所提SiC/Si混合五电平逆变器拓扑及其优化调制策略的可行性与有效性。 展开更多
关键词 五电平逆变器 sic/si混合 脉宽调制 损耗分析 效率
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不同密度2D-C/SiC复合材料的抗氧化性能研究
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作者 魏俊飞 杨成鹏 贾斐 《材料导报》 北大核心 2026年第4期30-37,共8页
为深究揭示2D-C/SiC复合材料抗氧化性能的影响因素,通过预加载在两种不同密度2D-C/SiC材料中引入基体开裂和界面脱粘损伤,然后进行700℃、900℃和1100℃静态氧化实验和室温剩余拉伸强度实验,研究了密度、细观损伤和温度对材料氧化剩余... 为深究揭示2D-C/SiC复合材料抗氧化性能的影响因素,通过预加载在两种不同密度2D-C/SiC材料中引入基体开裂和界面脱粘损伤,然后进行700℃、900℃和1100℃静态氧化实验和室温剩余拉伸强度实验,研究了密度、细观损伤和温度对材料氧化剩余模量和强度的影响。实验结果显示:经高温氧化后,两种材料均发生了不同程度的软化和弱化现象,纤维拔出长度增加;材料力学性能的衰减与氧化温度以及预加载产生的细观损伤均为正相关;与密度较高的材料A相比,材料B的细观损伤更严重,氧化后的性能下降幅度更大;随着氧化温度的升高,两种材料均发生了断裂模式的转变;密度较低的材料B在900℃氧化后力学性能衰减最严重,拉伸强度和模量损失率分别高达59.5%和29.8%。材料残余性能与纤维拔出长度的关联性表明,含有细观损伤的2D-C/SiC复合材料在高温氧化性环境中服役时,界面弱化是一个非常严重的问题。最后,基于物理-化学机制的氧化剩余拉伸强度模型,分析表征了两种2D-C/SiC材料的剩余拉伸强度性能,揭示了材料的氧化损伤细观关键因素,实现了氧化剩余拉伸强度的有效预测。 展开更多
关键词 2D-C/sic复合材料 预加载 氧化 界面损伤 残余性能 强度预测
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n型SiC外延材料少子寿命的关键影响因素与提升方法
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作者 王翼 孔龙 +3 位作者 熊瑞 赵志飞 曹越 李赟 《固体电子学研究与进展》 2026年第1期11-16,共6页
系统研究了外延生长和氢气气氛退火工艺条件对4H-SiC同质外延材料少子寿命的影响,并分析了退火后少子寿命变化与前期外延速率之间的关联性。研究结果表明,SiC外延材料少子寿命与外延层厚度具有明显的正相关性,但随生长速率和进气端C/Si... 系统研究了外延生长和氢气气氛退火工艺条件对4H-SiC同质外延材料少子寿命的影响,并分析了退火后少子寿命变化与前期外延速率之间的关联性。研究结果表明,SiC外延材料少子寿命与外延层厚度具有明显的正相关性,但随生长速率和进气端C/Si比的提高并非单调递增关系。在本文采用的工艺条件中,进气端C/Si为0.84、生长速率为72.1μm/h时外延材料少子寿命最高,达到2280 ns。采用不同温度和乙烯流量的氢气退火工艺均能在不同程度上提高已有SiC外延材料的少子寿命。在1600℃退火后少子寿命提升幅度最大,但继续提升退火温度对少子寿命的提升效果减弱。退火效果和乙烯流量之间存在正相关性,但当乙烯流量达到50 sccm(标准状态下1 sccm=1 mL/min)时,材料表面质量退化,缺陷扩展区域粗糙度高达8.35 nm。前期外延生长速率不同,会导致退火后少子寿命提升幅度存在差异,采用高生长速率生长的外延材料,退火后少子寿命提升效果更加显著。 展开更多
关键词 少子寿命 4H-sic C/si 生长速率 退火
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基于CVD碳源和GSI工艺制备C/C-SiC复合材料过程C-Si反应机理研究
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作者 龙宪海 赵子剑 刘益林 《湖南文理学院学报(自然科学版)》 2026年第1期44-48,共5页
为探究气相渗硅工艺(GSI)过程中Si蒸气原子与固态C晶体之间的C-Si反应机理,本文设计了C-Si反应实验。采用扫描电镜对样品进行显微形貌观察并结合原子层级透射电镜照片进行分析。结果表明, C-Si反应的过程分为2个阶段。初始阶段,气态Si... 为探究气相渗硅工艺(GSI)过程中Si蒸气原子与固态C晶体之间的C-Si反应机理,本文设计了C-Si反应实验。采用扫描电镜对样品进行显微形貌观察并结合原子层级透射电镜照片进行分析。结果表明, C-Si反应的过程分为2个阶段。初始阶段,气态Si原子撞击到固态碳的表面并被捕获,从而在碳表面迅速形成一层SiC层。第二阶段,碳原子和Si原子在空间上被生成的SiC层隔开,此后的Si碳原子反应(结合)和SiC层的生长均是由Si碳原子经过SiC层的扩散来完成。靠近CVD碳界面处的SiC晶粒相对较小,而远离CVD碳界面处的SiC晶粒逐渐增大。 展开更多
关键词 气相渗硅 CVD碳 C/C-sic复合材料 C-sic界面 反应机理
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Recycled micron-sized silicon anode for fast and highly stable lithium-ion storage via interface design engineering
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作者 Dandan Luo Yongjun Lu +3 位作者 Guanjia Zhu Jihao Li Xiuyan Liu Haijiao Zhang 《Journal of Energy Chemistry》 2025年第8期63-73,共11页
Micron-sized silicon anodes offer significant industrial advantages over nanoscale counterparts due to their cost-effectiveness and scalability.However,their practical applications are significantly hindered by severe... Micron-sized silicon anodes offer significant industrial advantages over nanoscale counterparts due to their cost-effectiveness and scalability.However,their practical applications are significantly hindered by severe stress-induced fragmentation,leading to rapid capacity decay.Addressing this challenge,we introduce a novel dual-conformal encapsulated micron-sized porous Si(μm-pSi)anode by utilizingμm-Si recycled from the photovoltaic industry as the Si precursor.This encapsulation design of the internal conformal SiO_(x)/C layer and external Ti_(3)C_(2)Tx MXene layer forms intergranular and intragranular protective skins onμm-pSi,ensuring simultaneous mechanical and electrochemical stability for efficient Li+storage.As a result,the fabricated WpSi@SiO_(x)/C@MXene anode demonstrates an exceptional cycling performance,delivering 535.1 mA h g^(−1)after 1500 cycles at 5 A g^(−1)with a minimal capacity decay of 0.003%per cycle.Chemo-mechanical modeling and SEI analysis reveal that the dual-conformal coating achieves exceptional mechanical and electrochemical stability through robust mechanical confinement and ultra-fast Li+diffusion kinetics during lithiation,coupled with a Li_(2)CO_(3)/LiF-rich hybrid SEI that facilitates Li+transport,collectively enabling rate-insensitive stress evolution,long-term structural durability,and stable cycling under high-rate conditions.This work provides a compelling design strategy for leveraging sustainableμm-Si to achieve high-rate and long-life lithium-ion batteries. 展开更多
关键词 Micron-sized si Dual-conformal coating interface engineering ANODE Lithium-ion batteries
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Interface Stability of the SiC Particles/Fe Matrix Composite System 被引量:3
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作者 汤文明 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2006年第3期49-53,共5页
The interface reaction between the SiC particles ( SiCp ) and Fe was stndicd during sintering the SiCp reinforced Fe matrix composites at 1423 K for 1 h. In the composite having 3wt% (weight ratio) SiCp (the 3SiC... The interface reaction between the SiC particles ( SiCp ) and Fe was stndicd during sintering the SiCp reinforced Fe matrix composites at 1423 K for 1 h. In the composite having 3wt% (weight ratio) SiCp (the 3SiCp/ Fe composite), the interface reaction products of Fe3 Si, the carbon precipitates, and Fe3 C or pearlite were generated. Fe3 Si coustructs the bright matrix of the reaction zone in the original situation of the SiCp. The carbon precipitates are randondy embedded in the reaction zone. Fe3 C or pearlite exists at the grain boundaries of the Fe matrix. As increasing the SiCp concentration in the SiCp/ Fe composite, the inteusity of the interface reaction between SiCp and Fe iacreases. After the 10SiCp/ Fe composite ( having 10wt .% SiCp ) sintered at 1423 K for 1 h, all of SiCp are decomposed, and replaced by the reaction zone composed of Fe3 Si and the carbon precipitates. No Fe3 C or pearlite was genertaed during the reaction. The effects of the techniques of oxidizing of SiCp , coating SiCp by interaction with the Cr powder, and alloying the Fe matrix by adding the Cr element on the interface stability of the SiCp/ Fe composite system were also investigated, respectitely. The oxide membrane and the coating layer on SiCp can inhibit the interface reaction between SiCp and Fe by isolating SiCp from the Fe matrix during sintering. The interface reaction does not occur in the 3 SiCp/ Fe- 10 Cr composite but in the 3 SiCp/ Fe-5 Cr composite. In the SiCp/ Fe-Cr alloy composites, the interface reaction between SiCp and the Fe- Cr alloys is weaker than that between SiCp and Fe . The Cr element behaves as a diluent, it causes a redaction in the interface reaction, which is proportional to the amount of the element added. 展开更多
关键词 interface reaction interface stability oxidation of sic COATING ALLOYING
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Effects of Nitridation on Properties of SiC Fiber and Interface of Ti Matrix Composite 被引量:1
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作者 NanlinSHI Z.X.Guo 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第6期563-565,共3页
Prenitridation of the TiBx coating surface of the Sigma SM1240 SiC fiber can form more stable compounds at the surface and obstruct the release of boron atoms into the Ti-based alloy matrix. The effect of nitridation ... Prenitridation of the TiBx coating surface of the Sigma SM1240 SiC fiber can form more stable compounds at the surface and obstruct the release of boron atoms into the Ti-based alloy matrix. The effect of nitridation on the tensile strength of the fiber was investigated in this work. Nitridation could degrade the tensile strength of the SiC fiber if the treating temperature and time are not optimized. The chemical reaction between the W core and SiC and the modification of fiber microstructure during the nitridation are responsible for the degradation in strength. The strength can be maintained by further optimization of the treating temperature and time. Therefore, stabilizing the surface of TiBx coating and hence the interface of the SiCf/Ti composite by the nitridation of the SiC fiber is a feasible technique for practical applications. 展开更多
关键词 sic fiber Surface coating NITRIDATION Tensile strength interface
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Tunable strength of SiCf/β-Yb_(2)Si_(2)O_(7) interface for different requirements in SiCf/SiC CMC:Inspiration from model composite investigation 被引量:3
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作者 Xirui Lv Mengkun Yue +6 位作者 Wenfan Yang Xue Feng Xiaoyan Li Yumin Wang Jiemin Wang Jie Zhang Jingyang Wang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2021年第8期165-173,共9页
Model composites consisting of Si C fiber embedded inβ-Yb_(2)Si_(2)O_(7) matrix were processed by Spark Plasma Sintering method and the feasibility of tunable Si Cf/Yb_(2)Si_(2)O_(7) interface in Si C-based CMCs were... Model composites consisting of Si C fiber embedded inβ-Yb_(2)Si_(2)O_(7) matrix were processed by Spark Plasma Sintering method and the feasibility of tunable Si Cf/Yb_(2)Si_(2)O_(7) interface in Si C-based CMCs were estimated.Weak and strengthened Si Cf/Yb_(2)Si_(2)O_(7) interfaces were achieved by adjusting sintering temperatures.The indentation crack test and fiber push out experiments clearly demonstrated the different debonding mechanisms in the samples.Weak interfaces sintered at 1200 and 1250℃exhibited crack deflection at interface in indentation test.Their low debond energy at the interface,which were comparable to those of Py C or BN,satisfied the well-recognized interfacial debond and crack deflection criteria for CMCs.The interface was strengthened by atomic bonding in model composite sintered at 1450℃,leading to crack penetrating into Si C fiber and high debond energy.The strong interface may be promising in Si Cf/Si C CMC to withstand higher combustion temperature,because Yb_(2)Si_(2)O_(7) will provide plastic deformation capacity,which would serve as weak interphase for crack deflection and energy dissipation.Therefore,it is possible to design the capability of Si C_(f)/RE_(2)Si_(2)O_(7) interface for different requirements by adjusting interfacial strength or debond energy to reach optimal mechanical fuse mechanism in SiC_(f)/SiC CMC. 展开更多
关键词 sicf/sic composite INTERPHASE Rare earth disilicate Tunable interface
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High-mobility SiC MOSFET with low density of interface traps using high pressure microwave plasma oxidation 被引量:2
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作者 Xin-Yu Liu Ji-Long Hao +4 位作者 Nan-Nan You Yun Bai Yi-Dan Tang Cheng-Yue Yang Sheng-Kai Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第3期346-352,共7页
The microwave plasma oxidation under the relatively high pressure(6 kPa)region is introduced into the fabrication process of SiO_(2)/4 H-SiC stack.By controlling the oxidation pressure,species,and temperature,the reco... The microwave plasma oxidation under the relatively high pressure(6 kPa)region is introduced into the fabrication process of SiO_(2)/4 H-SiC stack.By controlling the oxidation pressure,species,and temperature,the record low density of interface traps(~4×10^(10)cm^(-2)·eV^(-1)@Ec-0.2 eV)is demonstrated on SiO_(2)/SiC stack formed by microwave plasma oxidation.And high quality SiO_(2)with very flat interface(0.27-nm root-mean-square roughness)is obtained.High performance Si C metal–oxide–semiconductor field-effect transistors(MOSFETs)with peak field effect mobility of 44 cm^(-2)·eV^(-1)is realized without additional treatment.These results show the potential of a high-pressure plasma oxidation step for improving the channel mobility in SiC MOSFETs. 展开更多
关键词 sic plasma oxidation interface traps MOSFET
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Numerical simulations of stress wave propagation and attenuation at arc-shaped interface inlayered SiC/Al composite 被引量:1
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作者 孙明燕 张朝晖 +2 位作者 杨瑞 王富耻 李树奎 《Journal of Beijing Institute of Technology》 EI CAS 2013年第4期557-562,共6页
The effects of interface shape on stress wave distribution and attenuation were investiga- ted using finite element method ( FEM ). The simulation results indicate that when the stress wave propagates from SiC ceram... The effects of interface shape on stress wave distribution and attenuation were investiga- ted using finite element method ( FEM ). The simulation results indicate that when the stress wave propagates from SiC ceramic to A1 alloy, the tensile stress decreases and the attenuation coefficient of the stress wave increases with increasing central angle of the concave interface between SiC and A1. But for the convex interface, the tensile stress increases and attenuation coefficient decreases with increasing central angle. As the stress wave propagates from A1 alloy to SiC ceramic, the atten- uation coefficient of stress wave decreases with increasing the central angle of the concave interface. For the convex interface, the attenuation coefficient increases with increasing central angle. 展开更多
关键词 sic/A1 composite arc-shaped interface stress wave attenuation numerical simula-tion
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Passivation of carbon dimer defects in amorphous SiO_2/4H–SiC(0001) interface:A first-principles study 被引量:3
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作者 Yi-Jie Zhang Zhi-Peng Yin +1 位作者 Yan Su De-Jun Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第4期376-383,共8页
An amorphous SiO2/4 H–Si C(0001) interface model with carbon dimer defects is established based on density functional theory of the first-principle plane wave pseudopotential method.The structures of carbon dimer d... An amorphous SiO2/4 H–Si C(0001) interface model with carbon dimer defects is established based on density functional theory of the first-principle plane wave pseudopotential method.The structures of carbon dimer defects after passivation by H2 and NO molecules are established,and the interface states before and after passivation are calculated by the Heyd–Scuseria–Ernzerhof(HSE06) hybrid functional scheme.Calculation results indicate that H2 can be adsorbed on the O2–C = C–O2 defect and the carbon–carbon double bond is converted into a single bond.However,H2 cannot be adsorbed on the O2–(C = C)′ –O2 defect.The NO molecules can be bonded by N and C atoms to transform the carbon–carbon double bonds,thereby passivating the two defects.This study shows that the mechanism for the passivation of Si O2/4 H–SiC(0001) interface carbon dimer defects is to convert the carbon–carbon double bonds into carbon dimers.Moreover,some intermediate structures that can be introduced into the interface state in the band gap should be avoided. 展开更多
关键词 4H-sic interface defect density of states firstprinciple
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Effect of PyC Interface Thickness on the Heat-stability of Cansas-ⅡSiC_(f)/SiC Composites 被引量:1
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作者 韩笑 于国强 +4 位作者 张盛 SHI Jian GAO Xiguang SONG Yingdong WANG Fang 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS CSCD 2023年第4期725-734,共10页
The effect of the pyrolytic carbon(PyC)interface thickness on the heat-stability of CansasⅡSiC_(f)/SiC composites under Ar up to 1500℃was studied in detail.After the heat treatment at 1500℃for 50 h,the interface bo... The effect of the pyrolytic carbon(PyC)interface thickness on the heat-stability of CansasⅡSiC_(f)/SiC composites under Ar up to 1500℃was studied in detail.After the heat treatment at 1500℃for 50 h,the interface bonding strength of the thin interface(about 200 nm)decreases from 74.4 to 20.1 MPa(73.0%),while that of the thick interface(about 2μm)declines from 7.3 to 3.2 MPa(52.7%).At the same time,the decline fraction of strength of the composites with the thin interface is 12.1%,less than that with the thick interface(42.0%).The fiber strength also decreases after heat treatment,which may be due to the significant growth ofβ-SiC grains and critical defects.The different heat-stability of the interface with the thin and thick thickness might be related to the inconsistency of the degree of the graphitization of PyC.Compared with the composites with the thick interface,the composites with the thin interface remained higher tensile strength after heat treatment due to the better interface bonding strength.The interface with strong bonding strength could protect the fiber by postponing the decomposition of amorphous phases SiC_(x)O_(y) and hindering the generation of fiber defects. 展开更多
关键词 sic_(f)/sic mini-composites heat-stability interface thickness mechanical properties microstructure
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Two-dimensional analysis of the interface state effect on current gain for a 4H-SiC bipolar junction transistor 被引量:2
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作者 张有润 张波 +1 位作者 李肇基 邓小川 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第6期453-458,共6页
This paper studies two-dimensional analysis of the surface state effect on current gain for a 4H-SiC bipolar junction transistor (BJT). Simulation results indicate the mechanism of current gain degradation, which is... This paper studies two-dimensional analysis of the surface state effect on current gain for a 4H-SiC bipolar junction transistor (BJT). Simulation results indicate the mechanism of current gain degradation, which is surface Fermi level pinning leading to a strong downward bending of the energy bands to form the channel of surface electron recombination current. The experimental results are well-matched with the simulation, which is modeled by exponential distributions of the interface state density replacing the single interface state trap. Furthermore, the simulation reveals that the oxide quality of the base emitter junction interface is very important for 4H-SiC BJT performance. 展开更多
关键词 4H-sic bipolar junction transistor current gain interface state trap
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Investigation of Interfaces in Remelted A356-SiC Particulate Duralcan Metal Matrix Composite 被引量:1
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作者 邵贝羚 李永洪 +3 位作者 刘安生 石力开 曹利 王传英 《Rare Metals》 SCIE EI CAS CSCD 1992年第1期64-65,共2页
For the manufacture of Al-based metalmatrix composites, the foundry productionroute can provide less expensive products witha greater flexibility in meeting designer’s needsamong a vaviety of fablication routes. Rece... For the manufacture of Al-based metalmatrix composites, the foundry productionroute can provide less expensive products witha greater flexibility in meeting designer’s needsamong a vaviety of fablication routes. Recent-ly, a commercially produced foundry ingot,the Duralcan composite of A356 Al alloy +20 展开更多
关键词 Investigation of interfaces in Remelted A356-sic Particulate Duralcan Metal Matrix Composite sic
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Modulating doping and interface magnetism of epitaxial graphene on SiC(0001)
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作者 周攀 何大伟 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第1期770-776,共7页
On the basis of first principles calculations, we report that the type and density of charge carriers of epitaxial graphene on SiC(O001) can be deliberately controlled by decorating the buffer layer with specific at... On the basis of first principles calculations, we report that the type and density of charge carriers of epitaxial graphene on SiC(O001) can be deliberately controlled by decorating the buffer layer with specific atoms (i.e., F, C1, O, or N). More importantly, a fine tuning of the doping behavior from intrinsic n-type to charge neutrality to p-type and interface magnetism is achieved via increasing the doping concentration of F atoms on the buffer layer. Our results suggest an interesting avenue to the application of epitaxial graphene in nanoscale electronic and spintronic devices. 展开更多
关键词 GRAPHENE interface magnetism DOPING sic
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SiC Formation Through Interface Reaction between C_(60) and Si in Plasma Environment
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作者 丁芳 孟亮 朱晓东 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第1期67-70,共4页
The formation of SiC through the interface reaction between C60 and Si in a plasmaassisted chemical vapour deposition system (PACVD) is investigated with a C60 film previously deposited on Si wafers. The composition... The formation of SiC through the interface reaction between C60 and Si in a plasmaassisted chemical vapour deposition system (PACVD) is investigated with a C60 film previously deposited on Si wafers. The composition and structure of the deposited samples were characterized by micro-Raman spectroscopy and X-ray diffraction (XRD). The results showed that SiC film was formed successfully in hydrogen plasma at a substrate temperature of 800℃ . The hydrogen atoms in plasma were found to enhance the production of SiC. Furthermore, the effects of the added CH4 on the formation of film were studied. Introduction of CH4 simultaneously with H2 at the beginning would suppress the formation of the initial layer of SiC due to a carbon-rich environment on the substrate, which would be disadvantageous to the further growth of the SiC film. 展开更多
关键词 sic interface reaction C60 plasma
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SiC-Mg INTERFACE OF SiC_p/AZ80 COMPOSITE
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作者 Cai Ye Su Huaqin(Department of Mechanical Engineering,Southeast University,Nanjing 210096) 《中国有色金属学会会刊:英文版》 EI CSCD 1996年第4期114-116,共3页
SiC-MgINTERFACEOFSiC_p/AZ80COMPOSITE¥CaiYe;SuHuaqin(DepartmentofMechanicalEngineering,SoutheastUniversity,Na... SiC-MgINTERFACEOFSiC_p/AZ80COMPOSITE¥CaiYe;SuHuaqin(DepartmentofMechanicalEngineering,SoutheastUniversity,Nanjing210096)Abstr?.. 展开更多
关键词 MAGNEsiUM alloy COMPOsiTE interface sic PARTICLES
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Improved electrical properties of NO-nitrided SiC/SiO2 interface after electron irradiation
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作者 Ji-Long Hao Yun Bai +6 位作者 Xin-Yu Liu Cheng-Zhan Li Yi-Dan Tang Hong Chen Xiao-Li Tian Jiang Lu Sheng-Kai Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第9期470-475,共6页
Effective improvement in electrical properties of NO passivated SiC/SiO2 interface after being irradiated by electrons is demonstrated.The density of interface traps after being irradiated by 100-kGy electrons decreas... Effective improvement in electrical properties of NO passivated SiC/SiO2 interface after being irradiated by electrons is demonstrated.The density of interface traps after being irradiated by 100-kGy electrons decreases by about one order of magnitude,specifically,from 3×1012 cm-2·eV-1 to 4×1011 cm-2·eV-1 at 0.2 eV below the conduction band of 4H-SiC without any degradation of electric breakdown field.Particularly,the results of x-ray photoelectron spectroscopy measurement show that the C-N bonds are generated near the interface after electron irradiation,indicating that the carbon-related defects are further reduced. 展开更多
关键词 sic electron irradiation interface traps MOS
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Near-interface oxide traps in 4H–SiC MOS structures fabricated with and without annealing in NO
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作者 孙秋杰 张玉明 +5 位作者 宋庆文 汤晓燕 张艺蒙 李诚瞻 赵艳黎 张义门 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第12期560-565,共6页
Near-interface oxide traps (NIOTs) in 4H-SiC metal-oxide-semiconductor (MOS) structures fabricated with and without annealing in NO are systematically investigated in this paper. The properties of NIOTs in SiC MOS... Near-interface oxide traps (NIOTs) in 4H-SiC metal-oxide-semiconductor (MOS) structures fabricated with and without annealing in NO are systematically investigated in this paper. The properties of NIOTs in SiC MOS structures prepared with and without annealing in NO are studied and compared in detail. Two main categories of the NIOTs, the “slow” and “fast” NIOTs, are revealed and extracted. The densities of the “fast” NIOTs are determined to be 0.761011 cm-2 and 0.471011 cm-2 for the N2 post oxidation annealing (POA) sample and NO POA sample, respectively. The densities of “slow” NIOTs are 0.791011 cm-2 and 9.441011 cm-2 for the NO POA sample and N2 POA sample, respectively. It is found that the NO POA process only can significantly reduce “slow” NIOTs. However, it has a little effect on “fast” NIOTs. The negative and positive constant voltage stresses (CVS) reveal that electrons captured by those “slow” NIOTs and bulk oxide traps (BOTs) are hardly emitted by the constant voltage stress. 展开更多
关键词 4H-sic MOS Near-interface Oxide TRAPS
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