In this work,a 4H-SiC-based soft X-ray single photon detector with photon energy resolution capability is demonstrated.The 4H-SiC p-i-n detector with an 80-μm-thick epi-layer and low intrinsic doping exhibits a low l...In this work,a 4H-SiC-based soft X-ray single photon detector with photon energy resolution capability is demonstrated.The 4H-SiC p-i-n detector with an 80-μm-thick epi-layer and low intrinsic doping exhibits a low leakage current of∼1.8 pA at−180 V,guaranteeing superior dark current performance for single photon detection with low electronic noise.An amplification strategy employing an active switch in the charge-sensitive amplifier has also been developed,where feedback-resistance-related thermal noise has been well eliminated,contributing to lower electronic noise in the amplification stage.By tuning the shaping time in the analog-to-digital circuit for precise signal processing,an optimal photon energy resolution has been achieved with a duration time within 6.4µs,achieving an energy analysis standard deviation below 5.7%.Ultimately,superior linearity has been obtained between the output pulse amplitude and the characteristic photon energy by utilizing a series of different metal targets,opening a new opportunity for advanced soft X-ray detection technology based on wide bandgap semiconductors.展开更多
基金supported by the Innovation Program for Quantum Science and Technology(No.2021ZD0303400)the National Natural Science Foundation of China(Nos.62374084,61921005,62104102,U2141241,and U21A20496)+1 种基金the Jiangsu Provincial Key Research and Development Program(No.BE2023018)the Fundamental Research Funds for the Central Universities.
文摘In this work,a 4H-SiC-based soft X-ray single photon detector with photon energy resolution capability is demonstrated.The 4H-SiC p-i-n detector with an 80-μm-thick epi-layer and low intrinsic doping exhibits a low leakage current of∼1.8 pA at−180 V,guaranteeing superior dark current performance for single photon detection with low electronic noise.An amplification strategy employing an active switch in the charge-sensitive amplifier has also been developed,where feedback-resistance-related thermal noise has been well eliminated,contributing to lower electronic noise in the amplification stage.By tuning the shaping time in the analog-to-digital circuit for precise signal processing,an optimal photon energy resolution has been achieved with a duration time within 6.4µs,achieving an energy analysis standard deviation below 5.7%.Ultimately,superior linearity has been obtained between the output pulse amplitude and the characteristic photon energy by utilizing a series of different metal targets,opening a new opportunity for advanced soft X-ray detection technology based on wide bandgap semiconductors.
