通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆...通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。展开更多
We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footpr...We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footprint of 1.1 × 2.1 mm^2 and integrates 7 independent channels each having on-chip polarization control and heterodyne mixing functions. 7 channels of4-Gb/s QPSK baseband signals are delivered via a 2-km multi-core fiber(MCF) and coupled into the chip with a local oscillator(LO) light. The polarization state of each signal light is automatically adjusted and aligned with that of the LO light, and then 7 channels of 28-GHz MMW carrying 4-Gb/s QPSK signals are generated by optical heterodyne beating. Automated polarizationcontrol function of each channel is also demonstrated with ～7-ms tuning time and ～27-dB extinction ratio.展开更多
文摘通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。
基金supported by the National Key R&D Pro-gram of China under Grant 2016YFB0402501in part by the Natural Science Foundation of China under grant 61605112Open Fund of IPOC under grant BUPT
文摘We propose and experimentally demonstrate an integrated silicon photonic scheme to generate multi-channel millimeter-wave(MMW) signals for 5 G multi-user applications. The fabricated silicon photonic chip has a footprint of 1.1 × 2.1 mm^2 and integrates 7 independent channels each having on-chip polarization control and heterodyne mixing functions. 7 channels of4-Gb/s QPSK baseband signals are delivered via a 2-km multi-core fiber(MCF) and coupled into the chip with a local oscillator(LO) light. The polarization state of each signal light is automatically adjusted and aligned with that of the LO light, and then 7 channels of 28-GHz MMW carrying 4-Gb/s QPSK signals are generated by optical heterodyne beating. Automated polarizationcontrol function of each channel is also demonstrated with ～7-ms tuning time and ～27-dB extinction ratio.
