Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 61 steel.Plasma nitrocarburizing was conducted for 12 h at 540℃in the nitrogen, hydrogen and ...Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 61 steel.Plasma nitrocarburizing was conducted for 12 h at 540℃in the nitrogen, hydrogen and methane atmosphere to produce theε-Fe-（2-3）（N,C） phase.The compound layer produced by plasma nitrocarburising was predominantly composed ofε-phase,with a small proportion ofγ′-Fe-4 （N,C） phase. The thickness of the compound layer and the diffusion layer are about 10μm and about 200μm,respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at constant temperature of 500℃for 1 h.The very thin magnetite （Fe-3O-4） layer of 1-2μm in thickness on top of the compound layer was obtained.Anodic polarization test revealed that plasma nitrocarburizing process contributed a significant improvement of corrosion resistance of SKD 61 steel.However,the corrosion characteristics of the nitrocarburized compound layer was deteriorated by oxidation treatment.展开更多
The effects of dry O_(2)post oxidation annealing(POA)at different temperatures on SiC/SiO_(2)stacks are comparatively studied in this paper.The results show interface trap density(Dit)of SiC/SiO_(2)stacks,leakage curr...The effects of dry O_(2)post oxidation annealing(POA)at different temperatures on SiC/SiO_(2)stacks are comparatively studied in this paper.The results show interface trap density(Dit)of SiC/SiO_(2)stacks,leakage current density(Jg),and time-dependent dielectric breakdown(TDDB)characteristics of the oxide,are affected by POA temperature and are closely correlated.Specifically,Dit,Jg,and inverse median lifetime of TDDB have the same trend against POA temperature,which is instructive for SiC/SiO_(2)interface quality improvement.Moreover,area dependence of TDDB characteristics for gate oxide on SiC shows different electrode areas lead to same slope of TDDB Weibull curves.展开更多
Aluminum-oxide films deposited as gate dielectrics on germanium （Ge） by atomic layer deposition were post oxidized in an ozone atmosphere. No additional interfacial layer was electron microscopy and X-ray photoelect...Aluminum-oxide films deposited as gate dielectrics on germanium （Ge） by atomic layer deposition were post oxidized in an ozone atmosphere. No additional interfacial layer was electron microscopy and X-ray photoelectron spectroscopy detected by the high-resolution cross-sectional transmission measurements made after the ozone post oxidation （OPO） treatment. Decreases in the equivalent oxide thickness of the OPO-treated Al2O3/Ge MOS capacitors were confirmed. Furthermore, a continuous decrease in the gate leakage current was achieved with increasing OPO treatment time. The results can be attributed to the film quality having been improved by the OPO treatment.展开更多
Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of AISI 4140 steel. Plasma nitrocarburizing was conducted for 3 h at 570 ℃ in the nitrogen, hydrogen...Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of AISI 4140 steel. Plasma nitrocarburizing was conducted for 3 h at 570 ℃ in the nitrogen, hydrogen and methane atmosphere to produce the ε-Fe2-3(N,C) phase. It was found that the compound layer produced by plasma nitrocarburising was predominantly composed of ε-phase, with a small proportion of γ′-Fe4(N,C) phase. The thickness of the compound layer was about 10 μm and the diffusion layer was about 300 μm in thickness, respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at a constant temperature of 500 ℃ for 1 h. The very thin magnetite (Fe3O4) layer 1-2 μm in thickness on top of the compound layer was obtained by plasma post oxidation. It was confirmed that the corrosion characteristics of the nitrocarburized compound layer can be further improved by the application of the superficial magnetite layer.展开更多
文摘Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 61 steel.Plasma nitrocarburizing was conducted for 12 h at 540℃in the nitrogen, hydrogen and methane atmosphere to produce theε-Fe-（2-3）（N,C） phase.The compound layer produced by plasma nitrocarburising was predominantly composed ofε-phase,with a small proportion ofγ′-Fe-4 （N,C） phase. The thickness of the compound layer and the diffusion layer are about 10μm and about 200μm,respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at constant temperature of 500℃for 1 h.The very thin magnetite （Fe-3O-4） layer of 1-2μm in thickness on top of the compound layer was obtained.Anodic polarization test revealed that plasma nitrocarburizing process contributed a significant improvement of corrosion resistance of SKD 61 steel.However,the corrosion characteristics of the nitrocarburized compound layer was deteriorated by oxidation treatment.
基金the General Program of the National Natural Science Foundation of China(Grant No.61974159)the Youth Innovation Promotion Association of the Chinese Academy of Sciences and Scientific Instrument Developing Project of the Chinese Academy of Sciences(Grant No.YJKYYQ20200039)。
文摘The effects of dry O_(2)post oxidation annealing(POA)at different temperatures on SiC/SiO_(2)stacks are comparatively studied in this paper.The results show interface trap density(Dit)of SiC/SiO_(2)stacks,leakage current density(Jg),and time-dependent dielectric breakdown(TDDB)characteristics of the oxide,are affected by POA temperature and are closely correlated.Specifically,Dit,Jg,and inverse median lifetime of TDDB have the same trend against POA temperature,which is instructive for SiC/SiO_(2)interface quality improvement.Moreover,area dependence of TDDB characteristics for gate oxide on SiC shows different electrode areas lead to same slope of TDDB Weibull curves.
基金supported by the National Program for Key Basic Research Projects (973 Program) of China (Grant No. 2011CBA00607)the National Natural Science Foundation of China (Grant Nos. 61106089 and 51102048)+2 种基金the National Science and Technology Major Projects (Grant No. 2009ZX02035)the State Key Laboratory of ASIC and System Project (Grant No. 11MS017)the Open Funds of State Key Laboratory of ASIC and System at Fudan University (Grant No. 10KF001)
文摘Aluminum-oxide films deposited as gate dielectrics on germanium （Ge） by atomic layer deposition were post oxidized in an ozone atmosphere. No additional interfacial layer was electron microscopy and X-ray photoelectron spectroscopy detected by the high-resolution cross-sectional transmission measurements made after the ozone post oxidation （OPO） treatment. Decreases in the equivalent oxide thickness of the OPO-treated Al2O3/Ge MOS capacitors were confirmed. Furthermore, a continuous decrease in the gate leakage current was achieved with increasing OPO treatment time. The results can be attributed to the film quality having been improved by the OPO treatment.
文摘Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of AISI 4140 steel. Plasma nitrocarburizing was conducted for 3 h at 570 ℃ in the nitrogen, hydrogen and methane atmosphere to produce the ε-Fe2-3(N,C) phase. It was found that the compound layer produced by plasma nitrocarburising was predominantly composed of ε-phase, with a small proportion of γ′-Fe4(N,C) phase. The thickness of the compound layer was about 10 μm and the diffusion layer was about 300 μm in thickness, respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at a constant temperature of 500 ℃ for 1 h. The very thin magnetite (Fe3O4) layer 1-2 μm in thickness on top of the compound layer was obtained by plasma post oxidation. It was confirmed that the corrosion characteristics of the nitrocarburized compound layer can be further improved by the application of the superficial magnetite layer.
