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Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma 被引量:1
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作者 You HE Yeong-Min LIM +3 位作者 Jun-Ho LEE Ju-Ho KIM Moo-Young LEE Chin-Wook CHUNG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第4期69-78,共10页
In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit ... In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit is applied to improve the power transfer efficiency at high RF power,and the effect of the parallel resonance on the electron energy distribution function(EEDF)is investigated in a 60 MHz CCP.The CCP consists of a power feed line,the electrodes,and plasma.The reactance of the CCP is positive at 60 MHz and acts like an inductive load.A vacuum variable capacitor(VVC)is connected in parallel with the inductive load,and then the parallel resonance between the VVC and the inductive load can be achieved.As the capacitance of the VVC approaches the parallel resonance condition,the equivalent resistance of the parallel circuit is considerably larger than that without the VVC,and the current flowing through the matching network is greatly reduced.Therefore,the power transfer efficiency of the discharge is improved from 76%,70%,and 68%to 81%,77%,and 76%at RF powers of 100 W,150 W,and 200 W,respectively.At parallel resonance conditions,the electron heating in bulk plasma is enhanced,which cannot be achieved without the VVC even at the higher RF powers.This enhancement of electron heating results in the evolution of the shape of the EEDF from a biMaxwellian distribution to a distribution with the smaller temperature difference between high-energy electrons and low-energy electrons.Due to the parallel resonance effect,the electron density increases by approximately 4%,18%,and 21%at RF powers of 100 W,150 W,and 200 W,respectively. 展开更多
关键词 capacitively coupled plasma parallel resonance electron energy distribution function
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Analysis of electron energy distribution function in a magnetically filtered complex plasma
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作者 M K Deka H Bailung N C Adhikary 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第4期324-329,共6页
The electron energy distribution function (EEDF) for a magnetically filtered dusty plasma is studied in a dusty double plasma device where the electron energy can be varied from 0.15 eV to ~ 2.8 eV and plasma densi... The electron energy distribution function (EEDF) for a magnetically filtered dusty plasma is studied in a dusty double plasma device where the electron energy can be varied from 0.15 eV to ~ 2.8 eV and plasma density from 10 6 cm-3 to 10 9cm-3 . The characteristics of EEDF for these ranges of plasma parameters are investigated in a pristine plasma as well as in a dusty plasma. The results show that in the presence of dust, there is a drastic modification in EEDF patterns in a plasma with higher electron temperature and density than those in a low temperature and low density plasma produced by the magnetic filter. 展开更多
关键词 dusty plasma magnetic filter electron energy distribution function
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Reconstruction of Ionization Density Distribution in Hall Thruster Channel from Ion Energy Spectrum of Plasma Jet
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作者 李玉全 于达仁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第6期666-669,共4页
Propellant ionization in the Hall thruster discharge channel is a significant process and has strong influence on the thruster's efficiency. In this work, the functional relation has been established between the ioni... Propellant ionization in the Hall thruster discharge channel is a significant process and has strong influence on the thruster's efficiency. In this work, the functional relation has been established between the ionization density distribution and the function of the ion energy distribution through the basic equations governing the ion flow in the Hall thruster channel and the method achieved for reconstructing the ionization density distribution inside the channel by ordinary plasma diagnosis of the potential distribution and ion energy spectrum of the plasma jet. The ionization density distributions of single and double charged ions in an ATON-thruster channel have been reconstructed according to the experimental data of the potential distribution along the axis of the channel and the ion energy spectrum of the plasma jet. The agreement between the calculation and experimental results of the percentage of double charged ions proves the validity of our method achieved in this work. 展开更多
关键词 ionization density distribution ion energy spectrum ion energy distribution function atom densitv acceleration voltage
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A New Insight into Energy Distribution of Electrons in Fuel-Rod Gap in VVER-1000 Nuclear Reactor
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作者 Fereshteh GOLIAN Ali PAZIRANDEH Saeed MOHAMMADI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第6期441-447,共7页
In order to calculate the electron energy distribution in the fuel rod gap of a VVER- 1000 nuclear reactor, the Fokker-Planck equation (FPE) governing the non-equilibrium behavior of electrons passing through the fu... In order to calculate the electron energy distribution in the fuel rod gap of a VVER- 1000 nuclear reactor, the Fokker-Planck equation (FPE) governing the non-equilibrium behavior of electrons passing through the fuel-rod gap as an absorber has been solved in this paper. Besides, the Monte Carlo Geant4 code was employed to simulate the electron migration in the fuel-rod gap and the energy distribution of electrons was found. As for the results, the accuracy of the FPE was compared to the Geant4 code outcomes and a satisfactory agreement was found. Also, different percentage of the volatile and noble gas fission fragments produced in fission reactions in fuel rod, i.e. Krypton, Xenon, Iodine, Bromine, Rubidium and Cesium were employed so as to investigate their effects on the electrons' energy distribution. The present results show that most of the electrons in the fuel rod's gap were within the thermal energy limitation and the tail of the electron energy distribution was far from a Maxwellian distribution. The interesting outcome was that the electron energy distribution is slightly increased due to the accumulation of fission fragments in the gap. It should be noted that solving the FPE for the energy straggling electrons that are penetrating into the fuel-rod gap in the VVER-1000 nuclear reactor has been carried out for the first time using an analytical approach. 展开更多
关键词 plasma electron energy distribution function Langevin approach based onFokker-Planck equation Geant4 Monte Carlo code
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Diagnosing the Fine Structure of Electron Energy Within the ECRIT Ion Source 被引量:3
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作者 金逸舟 杨涓 +2 位作者 汤明杰 罗立涛 冯冰冰 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第7期744-750,共7页
The ion source of the electron cyclotron resonance ion thruster (ECRIT) extracts ions from its ECR plasma to generate thrust, and has the property of low gas consumption (2 seem, standard-state cubic centimeter per... The ion source of the electron cyclotron resonance ion thruster (ECRIT) extracts ions from its ECR plasma to generate thrust, and has the property of low gas consumption (2 seem, standard-state cubic centimeter per minute) and high durability. Due to the indispensable effects of the primary electron in gas discharge, it is important to experimentally clarify the electron energy structure within the ion source of the ECRIT through analyzing the electron energy distribution function (EEDF) of the plasma inside the thruster. In this article the Langmuir probe diagnosing method was used to diagnose the EEDF, from which the effective electron temperature, plasma density and the electron energy probability function (EEPF) were deduced. The experimental results show that the magnetic field influences the curves of EEDF and EEPF and make the effective plasma parameter nonuniform. The diagnosed electron temperature and density from sample points increased from 4 eV/2 ×10^16 m-3 to 10 eV/4×10^16 m-3 with increasing distances from both the axis and the screen grid of the ion source. Electron temperature and density peaking near the wall coincided with the discharge process. However, a double Maxwellian electron distribution was unexpectedly observed at the position near the axis of the ion source and about 30 mm from the screen grid. Besides, the double Maxwellian electron distribution was more likely to emerge at high power and a low gas flow rate. These phenomena were believed to relate to the arrangements of the gas inlets and the magnetic field where the double Maxwellian electron distribution exits. The results of this research may enhance the understanding of the plasma generation process in the ion source of this type and help to improve its performance. 展开更多
关键词 ion source plasma diagnostic electron energy distribution function
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Improved Calculation of Vibrational Energy Levels in F2 Molecule using the RKR Method
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作者 王建坤 吴振森 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2010年第2期155-159,I0001,共6页
The potential energy curves of the ground state X2∑+g of the fluorine molecule have been accurately reconstructed employing the Ryderg-Klein-Rees (RKR) method extrapolated by a Hulburt and Hirschfeler potential fu... The potential energy curves of the ground state X2∑+g of the fluorine molecule have been accurately reconstructed employing the Ryderg-Klein-Rees (RKR) method extrapolated by a Hulburt and Hirschfeler potential function for longer internuclear distances. Solving the corresponding radial one-dimensional Schr?dinger equation of nuclear motion yields 22 bound vibrational levels above v=0. The comparison of these theoretical levels with the experimental data yields a mean absolute deviation of about 7.6 cm^-1 over the 23 levels. The highest vibrational level energy obtained using this method is 13308.16 cm?1 and the relative deviation compared with the experimental datum of 13408.49 cm^-1 is only 0.74%. The value from our method is much closer and more accurate than the value obtained by the quantum mechanical ab initio method by Bytautas. The reported agreement of the vibrational levels and dissociation energy with experiment is contingent upon the potential energy curve of the F2 ground state. 展开更多
关键词 Potential energy function Fluorine Vibrational levels distribution RKR method
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Wave Energy Estimation by Using A Statistical Analysis and Wave Buoy Data near the Southern Caspian Sea 被引量:2
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作者 A.R.Zamani M.A.Badri 《China Ocean Engineering》 SCIE EI CSCD 2015年第2期275-286,共12页
Statistical analysis was done on simultaneous wave and wind using data recorded by discus-shape wave buoy. The area is located in the southern Caspian Sea near the Anzali Port. Recorded wave data were obtained through... Statistical analysis was done on simultaneous wave and wind using data recorded by discus-shape wave buoy. The area is located in the southern Caspian Sea near the Anzali Port. Recorded wave data were obtained through directional spectrum wave analysis. Recorded wind direction and wind speed were obtained through the related time series as well. For 12-month measurements(May 25 2007-2008), statistical calculations were done to specify the value of nonlinear auto-correlation of wave and wind using the probability distribution function of wave characteristics and statistical analysis in various time periods. The paper also presents and analyzes the amount of wave energy for the area mentioned on the basis of available database. Analyses showed a suitable comparison between the amounts of wave energy in different seasons. As a result, the best period for the largest amount of wave energy was known. Results showed that in the research period, the mean wave and wind auto correlation were about three hours. Among the probability distribution functions, i.e Weibull, Normal, Lognormal and Rayleigh, "Weibull" had the best consistency with experimental distribution function shown in different diagrams for each season. Results also showed that the mean wave energy in the research period was about 49.88 k W/m and the maximum density of wave energy was found in February and March, 2010. 展开更多
关键词 probability distribution function nonlinear auto-correlation wave energy statistical analysis Anzali Port
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Electron-Vibrational Energy Exchange in Nitrogen-Containing Plasma:a Comparison Between an Analytical Approach and a Kinetic Model 被引量:1
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作者 杨薇 董志伟 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第1期12-16,共5页
This paper investigates the electron-vibrational(e-V)energy exchange in nitrogencontaining plasma,which is very efficient in the case of gas discharge and high speed flow.Based on Harmonic oscillator approximation a... This paper investigates the electron-vibrational(e-V)energy exchange in nitrogencontaining plasma,which is very efficient in the case of gas discharge and high speed flow.Based on Harmonic oscillator approximation and the assumption of the e-V relaxation through a continuous series of Boltzmann distributions over the vibrational states,an analytic approach is derived from the proposed scaling relation of e-V transition rates.A full kinetic model is then investigated by numerically solving the state-to-state master equation for all vibrational levels.The analytical approach leads to a Landau-Teller(LT)-type equation for relaxation of vibrational energy,and predicts the relaxation time on the right order of magnitude.By comparison with the kinetic model,the LT-type equation is valid in typical electron temperatures in gas discharge.However,the analytical approach is not capable of describing the vibrational distribution function during the e-V process in which a full kinetic model is required. 展开更多
关键词 electron-vibrational process vibrational energy relaxation time vibrational distribution function
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Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide(ITO)
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作者 李茂洋 莫超超 +7 位作者 陈佳丽 季佩宇 谭海云 张潇漫 崔美丽 诸葛兰剑 吴雪梅 黄天源 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第7期116-122,共7页
This study delves into ion behavior at the substrate position within RF magnetron discharges utilizing an indium tin oxide(ITO)target.The positive ion energies exhibit an upward trajectory with increasing RF power,att... This study delves into ion behavior at the substrate position within RF magnetron discharges utilizing an indium tin oxide(ITO)target.The positive ion energies exhibit an upward trajectory with increasing RF power,attributed to heightened plasma potential and initial emergent energy.Simultaneously,the positive ion flux escalates owing to amplified sputtering rates and electron density.Conversely,negative ions exhibit broad ion energy distribution functions(IEDFs)characterized by multiple peaks.These patterns are clarified by a combination of radiofrequency oscillation of cathode voltage and plasma potential,alongside ion transport time.This elucidation finds validation in a one-dimensional model encompassing the initial ion energy.At higher RF power,negative ions surpassing 100 e V escalate in both flux and energy,posing a potential risk of sputtering damages to ITO layers. 展开更多
关键词 RF magnetron sputtering ITO film ion energy distribution functions plasma diagnosis
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Experimental studies of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region
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作者 Shi-Bo Li Si-Yu Xing +1 位作者 Fei Gao You-Nian Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第10期321-330,共10页
The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition ... The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition and pressure on electron density,the effective electron temperature and the electron energy probability functions(EEPFs)at different spatial positions are present.In driver region,with the introduction of a small amount of Ar at 0.3 Pa,there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature.Additionally,the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision.However,this phenomenon resulting from the changes in gas composition vanishes at 5 Pa due to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge.The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa,as do the patterns of electron density variation between these two regions for differing Ar fractions.At 5 Pa,as the discharge transitions from H_(2)to Ar,the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region.This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge.In order to validate the experimental results,we use the COMSOL simulation software to calculate electrical parameters under the same conditions.The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results. 展开更多
关键词 inductively coupled plasma transmission and distribution energy distribution functions
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Validity of the two-term Boltzmann approximation employed in the fluid model for high-power microwave breakdown in gas 被引量:2
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作者 赵朋程 廖成 +1 位作者 杨丹 钟选明 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第5期380-384,共5页
The electron energy distribution function (EEDF), predicted by the Boltzmann equation solver BOLSIG+ based on the two-term approximation, is introduced into the fluid model for simulating the high-power microwave ... The electron energy distribution function (EEDF), predicted by the Boltzmann equation solver BOLSIG+ based on the two-term approximation, is introduced into the fluid model for simulating the high-power microwave (HPM) breakdown in argon, nitrogen, and air, and its validity is examined by comparing with the results of particle-in-cell Monte Carlo collision (PIC/MCC) simulations as well as the experimental data. Numerical results show that, the breakdown time of the fluid model with the Maxwellian EEDF matches that of the PIC/MCC simulations in nitrogen; however, in argon under high pressures, the results from the Maxwellian EEDF were poor. This is due to an overestimation of the energy tail of the Maxwellian EEDF in argon breakdown. The prediction of the fluid model with the BOLSIG+ EEDF, however, agrees very well with the PIC/MCC prediction in nitrogen and argon over a wide range of pressures. The accuracy of the fluid model with the BOLSIG+ EEDF is also verified by the experimental results of the air breakdown. 展开更多
关键词 fluid model electron energy distribution function gas breakdown particle-in-cell Monte Carlocollision (PIC/MCC) simulation
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Molecular Dynamic Simulation of Melting Points of Trans-1,4,5,8- tetranitro-1,4,5,8-tetraazadacalin (TNAD) with Some Propellants
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作者 李小红 居学海 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2014年第4期412-418,J0001,共8页
Molecular dynamic simulation was employed to predict the melting points Tm of TNAD/HMX, TNAD/RDX, TNAD/DINA, and TNAD/DNP systems (tans-1,4,5,8- tetranitro-1,4,5,8-tetraazadacalin (TNAD), dinitropiperazine (DNP),... Molecular dynamic simulation was employed to predict the melting points Tm of TNAD/HMX, TNAD/RDX, TNAD/DINA, and TNAD/DNP systems (tans-1,4,5,8- tetranitro-1,4,5,8-tetraazadacalin (TNAD), dinitropiperazine (DNP), cyclotetramethylenetetranitroamine (HMX), cyclotrimethylenetrinitramine (RDX), and N-nitrodihydroxyethylaminedinitrate (DINA)). Tm was determined from the inflexion point on the curve of mean specific volume vs. temperature. The result shows that the Tm values of TNAD/HMX, TNAD/RDX, and TNAD/DINA systems are 500, 536, and 488 K, respectively. The TNAD/DNP system has no obvious Tm value, which shows the system is insoluble. Using Tm, the solubility of the four systems was analyzed. The radial distribution functions of the four systems were analyzed and the main intermolecular forces between TNAD and other energetic components are short-range interactions. The better the solubility is, the stronger the intermoleenlar interaction is. In addition, the force field energy at different temperature was also analyzed to predict Tm of the four systems. 展开更多
关键词 Melting point Molecular dynamic simulation Radial distribution function Force field energy Trans-1 4 5 8-tetranitro-1 4 5 8-tetraazadaealin (TNAD)
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Short-pulse high-power microwave breakdown at high pressures
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作者 赵朋程 廖成 冯菊 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第2期282-286,共5页
The fluid model is proposed to investigate the gas breakdown driven by a short-pulse(such as a Gaussian pulse) highpower microwave at high pressures.However,the fluid model requires specification of the electron ene... The fluid model is proposed to investigate the gas breakdown driven by a short-pulse(such as a Gaussian pulse) highpower microwave at high pressures.However,the fluid model requires specification of the electron energy distribution function(EEDF);the common assumption of a Maxwellian EEDF can result in the inaccurate breakdown prediction when the electrons are not in equilibrium.We confirm that the influence of the incident pulse shape on the EEDF is tiny at high pressures by using the particle-in-cell Monte Carlo collision(PIC-MCC) model.As a result,the EEDF for a rectangular microwave pulse directly derived from the Boltzmann equation solver Bolsig+ is introduced into the fluid model for predicting the breakdown threshold of the non-rectangular pulse over a wide range of pressures,and the obtained results are very well matched with those of the PIC-MCC simulations.The time evolution of a non-rectangular pulse breakdown in gas,obtained by the fluid model with the EEDF from Bolsig+,is presented and analyzed at different pressures.In addition,the effect of the incident pulse shape on the gas breakdown is discussed. 展开更多
关键词 fluid model electron energy distribution function gas breakdown short-pulse high-power microwave
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Optimization of Langmuir Probe System Parameters in a Stationary Laboratory Plasma
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作者 朱颖 曹金祥 +3 位作者 牛田野 王亮 王艳 王舸 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第6期639-643,共5页
In order to obtain creditable data an applicable method to optimize parameters of the Langmuir probes and circuits in a stationary laboratory device is investigated and an experimental criterion of the probe dimension... In order to obtain creditable data an applicable method to optimize parameters of the Langmuir probes and circuits in a stationary laboratory device is investigated and an experimental criterion of the probe dimension is developed. To obtain the electron temperature and density the Electron Energy Distribution Function (EEDF) approach with less computing time and more accurate results is applied, instead of the conventional slope approach. Moreover the influence of the vessel wall materials on the plasma density is discussed briefly, indicating that the dielectric wall is helpful to enhancing the electron density. 展开更多
关键词 Langmuir probe electron density electron temperature electron energy distribution function
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