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Simulation of capacitively coupled Ar/O_(2)discharges based on global/equivalent circuit model and an extended reaction set
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作者 Yi Wang Wan Dong +2 位作者 Yi-Fan Zhang Liu-Qin Song Yuan-Hong Song 《Chinese Physics B》 2025年第8期623-635,共13页
Radio frequency capacitively coupled plasmas(RF CCPs)operated in Ar/O_(2)gas mixtures which are widely adopted in microelectronics,display,and photovoltaic industry,are investigated based on an equivalent circuit mode... Radio frequency capacitively coupled plasmas(RF CCPs)operated in Ar/O_(2)gas mixtures which are widely adopted in microelectronics,display,and photovoltaic industry,are investigated based on an equivalent circuit model coupled with a global model.This study focuses on the effects of singlet metastable molecule O_(2)(b^(1)∑_(8)^(+)),highly excited Herzberg states O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-)),and the negative ion O_(2)^(-),which are usually neglected in simulation studies.Specifically,their impact on particle densities,electronegativity,electron temperature,voltage drop across the sheath,and absorbed power in the discharge is analyzed.The results indicate that O_(2)(b^(1)∑_(8)^(+))and O_(2)^(-)exhibit relatively high densities in argon-oxygen discharges.While O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-))play a critical role in O_(2)b1S+g production,especially at higher pressure.The inclusion of these particles reduces the electronegativity,electron temperature,and key species densities,especially the O^(-)and O^(*)densities.Moreover,the sheath voltage drop,as well as the inductance and resistance of the plasma bulk are enhanced,while the sheath dissipation power and total absorbed power decrease slightly.With the increasing pressure,the influence of these particles on the discharge properties becomes more significant.The study also explores the generation and loss of main neutral species and charged particles within the pressure range of 20 mTorr-100 mTorr(1 Torr=1.33322×10^(2)Pa),offering insights into essential and non-essential reactions for future low-pressure O_(2)and Ar/O_(2)CCP discharge modeling. 展开更多
关键词 Ar/O_(2)CCP discharges reaction set equivalent circuit model global model
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Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges
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作者 Ying WANG Nie CHEN +4 位作者 Jingfeng YAO Evgeniy BOGDANOV Anatoly KUDRYAVTSEV Chengxun YUAN Zhongxiang ZHOU 《Plasma Science and Technology》 2025年第5期122-128,共7页
This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distr... This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy.The inverse EEDF plays a central role in the problem of negative conductivity.Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma,a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional(2D)kinetic modeling on a large array of different glow discharges.It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density.The theoretical conclusions are validated by numerical modeling of lowpressure two-chamber inductively-coupled plasma(ICP)discharges in the COMSOL Multiphysics environment.As a result,areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies. 展开更多
关键词 electron kinetics nonlocal electron distribution function gas discharge Boltzmann kinetic equation inverse electron distribution function inductively coupled plasma
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Review of relaxation oscillations in plasma processing discharges 被引量:1
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作者 周筑文 M. A. Lieberman Sungjin Kimb 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第3期758-765,共8页
Relaxation oscillations due to plasma instabilities at frequencies ranging from a few Hz to tens of kHz have been observed in various types of plasma processing discharges. Relaxation oscillations have been observed i... Relaxation oscillations due to plasma instabilities at frequencies ranging from a few Hz to tens of kHz have been observed in various types of plasma processing discharges. Relaxation oscillations have been observed in electropositive capacitive discharges between a powered anode and a metallic chamber whose periphery is grounded through a slot with dielectric spacers. The oscillations of time-varying optical emission from the main discharge chamber show, for example, a high-frequency (- 40 kHz) relaxation oscillation at 13.33Pa, with an absorbed power being nearly the peripheral breakdown power, and a low-frequency (- 3 Hz) oscillation, with an even higher absorbed power. The high-frequency oscillation is found to ignite plasma in the slot, but usually not in the peripheral chamber. The kilohertz oscillations are modelled using an electromagnetic model of the slot impedance, coupled to a circuit analysis of the system including the matching network. The model results are in general agreement with the experimental observations, and indicate a variety of behaviours dependent on the matching conditions. In low-pressure inductive discharges, oscillations appear in the transition between low-density capacitively driven and high-density inductively driven discharges when attaching gases such as SF6 and Ar/SF6 mixtures are used. Oscillations of charged particles, plasma potential, and light, at frequencies ranging from a few Hz to tens of kHz, are seen for gas pressures between 0.133 Pa and 13.33 Pa and discharge powers in a range of 75 1200 W. The region of instability increases as the plasma becomes more electronegative, and the frequency of plasma oscillation increases as the power, pressure, and gas flow rate increase. A volume-averaged (global) model of the kilohertz instability has been developed; the results obtained from the model agree well with the experimental observations. 展开更多
关键词 relaxation oscillation capacitive discharges inductive discharges plasma instability
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A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges 被引量:1
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作者 葛蕾 张远涛 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第10期924-929,共6页
In atmospheric radio-frequency (rf) discharges, the plasma parameters, such as electron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, s... In atmospheric radio-frequency (rf) discharges, the plasma parameters, such as electron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, such as impedance, resistance and reactance, are relatively convenient to be measured. In this paper we presented a simple theoretical model derived from the fluid description of generated plasmas without considering the circuit model, to investigate the relationship between the plasma impedance and plasma parameters. By introducing a relaxation frequency, the plasma impedance could be predicted by formulas presented in this study, and the mean electron density and sheath thickness can also be calculated from the measured or simulated impedance and reactance, respectively. 展开更多
关键词 radio frequency discharges atmospheric discharges electron density plasma simulation
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Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap
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作者 匙阳阳 张远涛 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第6期582-587,共6页
In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based ... In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature decreases, and the underpinning physics is also discussed based on the simulation results. This study indicates that at a constant power by choosing an appropriate electrode spacing, the rf discharge can be effectively optimized at atmospheric pressure. 展开更多
关键词 atmospheric radio frequency discharges plasma simulation very high fre-quency discharges electron density
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Simulation of nanoparticle coagulation in radio-frequency C_2H_2/Ar microdischarges
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作者 刘相梅 李奇楠 李瑞 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第6期305-311,共7页
The nanoparticle coagulation is investigated by using a couple of fluid models and aerosol dynamics model in argon with a 5% molecular acetylene admixture rf microdischarges,with the total input gas flow rate of 400 s... The nanoparticle coagulation is investigated by using a couple of fluid models and aerosol dynamics model in argon with a 5% molecular acetylene admixture rf microdischarges,with the total input gas flow rate of 400 sccm.It co-exists with a homogeneous,secondary electron-dominated low temperature γ-mode glow discharges.The heat transfer equation and flow equation for neutral gas are taken into account.We mainly focused on investigations of the nanoparticle properties in atmospheric pressure microdischarges,and discussed the influences of pressure,electrode spacing,and applied voltage on the plasma density and nanoparticle density profiles.The results show that the characteristics of microdischarges are quite different from those of low pressure radio-frequency discharges.First,the nanoparticle density in the bulk plasma in microdischarges is much larger than that of low pressure discharges.Second,the nanoparticle density of 10 nm experiences an exponential increase as soon as the applied voltage increases,especially in the presheath.Finally,as the electrode spacing increases,the nanoparticle density decreased instead of increasing. 展开更多
关键词 nanoparticle coagulation C2H2/Ar discharges MICROdischarges
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Removal of adhesive dusts from flue gas using corona discharges with spraying water 被引量:11
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作者 XU De\|xuan, ZHAO Jian\|wei, DING Yun\|zheng, GE Wei\|li (Department of Environmental Science and Engineering, Northeast Normal University, Changchun 130024, China. 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2003年第4期554-561,共8页
Effective removal of adhesive and fine dusts from flue gas is very difficult. A new method of electrostatic precipitation of the corona discharges with spraying water(CDSW) was introduced. A new electrode configuratio... Effective removal of adhesive and fine dusts from flue gas is very difficult. A new method of electrostatic precipitation of the corona discharges with spraying water(CDSW) was introduced. A new electrode configuration and the circulation spraying of water were employed in the method. The efficient electrostatic precipitation for adhesive and fine dusts can be accomplished without any drain water during a long operating period. The fundamental structure, discharge characteristics, mechanism of spraying and precipitation principle of the electrostatic precipitation using CDSW were described and analyzed. The V I characteristics, spraying state, supplying water quantity, influence of temperature and clean of the electrodes were researched in series experiments. The treating effects of circulating spraying using the corona plasma at the same time of electrostatic precipitation were investigated. The fundamental theories and experimental data were proposed, in order to effectively remove the adhesive dusts from flue gas using CDSW in practice. 展开更多
关键词 aerosol with adhesive dusts corona discharges with spraying water electrostatic precipitation
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Destruction of PCDD/Fs by gliding arc discharges 被引量:9
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作者 YAN Jian-hua PENG Zheng +5 位作者 LU Sheng-yong DU Chang-ming LI Xiao-dong CHEN Tong NI Ming-jiang CEN Ke-fa 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2007年第11期1404-1408,共5页
PCDD/Fs have been become a serious issue because of their toxicological effects and associated adverse health implications. In this study, the gliding arc plasma was tested for treatment of polychlorinated dibenzo-p-d... PCDD/Fs have been become a serious issue because of their toxicological effects and associated adverse health implications. In this study, the gliding arc plasma was tested for treatment of polychlorinated dibenzo-p-dioxins (PCDDs) and polychlorinated dibenzofurans (PCDFs), which was synthesized from pentachlorophenol in atmospheric condition at 350℃ with or without the catalysis of CuCl2. From the experiment, we found that the destruction efficiency of PCDD/F homologues after gliding was discharge ranged from 25% to 79%. This result demonstrates that gliding arc plasma is an effective technology to decompose PCDDs/Fs in flue gas. A plausible degradation mechanism for PCDD/Fs by gliding arc was discussed. Finally, a multistage reactor structure of gliding arc was proposed to upgrade removal efficiency for PCDD/Fs. 展开更多
关键词 PCDD/FS DESTRUCTION gliding arc discharges multistage reactor
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Spatiotemporal dynamics of high-K^+-induced epileptiform discharges in hippocampal slice and the effects of valproate 被引量:5
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作者 Jian-Sheng Liu Jing-Bo Li +4 位作者 Xin-Wei Gong Hai-Qing Gong Pu-Ming Zhang Pei-Ji Liang Qin-Chi Lu 《Neuroscience Bulletin》 SCIE CAS CSCD 2013年第1期28-36,共9页
The epileptic seizure is a dynamic process involving a rapid transition from normal activity to a state of hypersynchronous neuronal discharges. Here we investigated the network properties of epileptiform discharges i... The epileptic seizure is a dynamic process involving a rapid transition from normal activity to a state of hypersynchronous neuronal discharges. Here we investigated the network properties of epileptiform discharges in hippocampal slices in the presence of high K + concentration (8.5 mmol/L) in the bath, and the effects of the anti-epileptic drug valproate (VPA) on epileptiform discharges, using a microelectrode array. We demonstrated that epileptiform discharges were predominantly initiated from the stratum pyramidale layer of CA3a-b and propagated bi-directionally to CA1 and CA3c. Disconnection of CA3 from CA1 abolished the discharges in CA1 without disrupting the initiation of discharges in CA3. Further pharmacological experiments showed that VPA at a clinically relevant concentration (100 μmol/L) suppressed the propagation speed but not the rate or duration of high-K+-induced discharges. Our findings suggest that pacemakers exist in the CA3a-b region for the generation of epileptiform discharges in the hippocampus. VPA reduces the conduction of such discharges in the network by reducing the propagation speed. 展开更多
关键词 epileptiform discharges hippocampal slices microelectrode array valproate
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Catalyst assisted destruction of trichloro ethylene and toluene in corona discharges 被引量:3
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作者 Muhammad Arif Malik, JIANG Xuan\|zhen (Department of Chemistry, University of Zhejiang, Hangzhou 310027, China) Foundation item: National Natural Science Foundation of China (No. 29576261) 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2000年第1期9-13,共5页
Destruction of trichloro ethylene (C 2HCl 3) by pulsed corona discharge reactor packed with alumina pellets and in absence of packing was investigated. Higher conversion of C 2HCl 3 was observed in presence of alu... Destruction of trichloro ethylene (C 2HCl 3) by pulsed corona discharge reactor packed with alumina pellets and in absence of packing was investigated. Higher conversion of C 2HCl 3 was observed in presence of alumina than in absence of packing. Furthermore CO/CO 2 ratio in the by products was found to shift in favor of CO 2 by alumina compared with absence of packing. Influence of catalyst porosity on C 2HCl 3 destruction and on by product ozone generation during the processing was also studied. Both alumina Ⅰ and alumina Ⅱ show similar improvement in C 2HCl 3 destruction. However, more important observation was that alumina Ⅰ produces higher by product ozone, while, alumina Ⅱ produces lower by product ozone, than in the case of no packing. The catalyst porosity effect was also investigated for destruction of toluene and was found to be similar. Intermediates of C 2HCl 3 destruction, as identified by GC MS, were COCl 2, CH 2Cl 2CHCl 3, CCl 4 and C 2HCl 5. In presence of alumina the amount of these intermediates was much reduced, indicating the catalytic function of alumina. 展开更多
关键词 corona discharges plasma trichloro ethylene TOLUENE alumina CLC number: X701 Document code: A
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The Nonlinear Behaviors in Atmospheric Dielectric Barrier Multi Pulse Discharges 被引量:3
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作者 张定宗 王艳辉 王德真 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第8期826-831,共6页
An in-depth and comprehensive understanding of the complex nonlinear behaviors in atmospheric dielectric barrier discharge is significant for the stable operation and effective control of the plasma. In this paper, we... An in-depth and comprehensive understanding of the complex nonlinear behaviors in atmospheric dielectric barrier discharge is significant for the stable operation and effective control of the plasma. In this paper, we study the nonlinear behaviors in argon atmospheric dielectric barrier multi pulse discharges by a one-dimensional fluid model. Under certain conditions, the multi pulse discharge becomes very sensitive with the increase of frequency, and the multi pulse period-doubling bifurcation, inverse period-doubling bifurcation and chaos appear frequently. The discharge can reach a relatively steady state only when the discharges are symmetrical between positive and negative half cycle. In addition, the effects of the voltage on these nonlinear discharges are also studied. It is found that the amplitude of voltage has no effects on the number of discharge pulses in multi-pulse period-doubling bifurcation sequences; however, to a relatively stable periodic discharge, the discharge pulses are proportional to the amplitude of the applied voltage within a certain range. 展开更多
关键词 nonlinear behaviors multi pulse discharges atmospheric dielectric barrierdischarge
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A New Approach to Plasma CVD of TiO_2 Photocatalyst on γ-Al_2O_3 Pellet Filled in Dielectric Barrier Discharges at Atmospheric Pressure 被引量:3
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作者 朱爱民 聂龙辉 +3 位作者 张秀玲 石川 宋志民 徐勇 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第6期2546-2548,共3页
A supported TiO2/γ-Al2O3 photocatalyst has been prepared by γ-Al2O3 pellet-filled dielectric barrier discharges induced plasma CVD at atmospheric pressure and room temperature. The TiO2/γ-Al2O3 photocatalyst exhibi... A supported TiO2/γ-Al2O3 photocatalyst has been prepared by γ-Al2O3 pellet-filled dielectric barrier discharges induced plasma CVD at atmospheric pressure and room temperature. The TiO2/γ-Al2O3 photocatalyst exhibits higher photocatalytic activity than Degussa P25, and much higher photocatalytic activity than that prepared by thermal CVD. 展开更多
关键词 plasma CVD dielectric barrier discharges PHOTOCATALYST
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Effect of Cooling Methods on Methane Conversion via Dielectric-Barrier Discharges 被引量:2
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作者 王保伟 杨宽辉 许根慧 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第5期575-580,共6页
Effects of cooling methods on stability and methane conversion rate using dielectric-barrier discharges (DBD) were systematically investigated in this article. The results showed that the methane conversion rate was... Effects of cooling methods on stability and methane conversion rate using dielectric-barrier discharges (DBD) were systematically investigated in this article. The results showed that the methane conversion rate was as high as 44.43% in a pure methane system at a flow rate of 100 mL·min^-1 and an input power of 234.2 W with air cooling. A dark greenish and soft film-like carbon was deposited on the outer surface of quartz tube when the outer electrode was watercooled, which decreased the methane conversion. With air cooling of inner electrode the selectivity of C2 hydrocarbons was higher than that with other cooling methods, while the C3 hydrocarbons had higher selectivity with flowing water cooling. Cooling the inner electrode could restrain the carbon deposition, but would decrease the methane conversion rate. The stability of both reaction and plasma operation can be improved through cooling the reactor. From thermodynamic analysis, it was found that the effective collisions frequency among the reactant molecules and free electrons (e^-) increased with temperature, which in turn led to a higher methane conversion rate and a change in the distribution of products. 展开更多
关键词 dielectric-barrier discharges C2 hydrocarbons cooling methods METHANE
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A Kinetic Study of Ozone and Nitric Oxides in Dielectric Barrier Discharges for O_2/NO_x Mixtures 被引量:5
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作者 孙继忠 Stirner T 王德真 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第2期1227-1238,共12页
A simple model is described to simulate kinetic processes in dielectric barrier dis-charges for O2/NOx mixtures. A threshold of ozone production found experimentally is confirmedby the calculations of this modeling, a... A simple model is described to simulate kinetic processes in dielectric barrier dis-charges for O2/NOx mixtures. A threshold of ozone production found experimentally is confirmedby the calculations of this modeling, and the underiying chemical reaction mechanisms are dis-cussed. It is also found that the effects of diffusion processes in the period of the lifetime of Oatoms are not important to microdischarge channels with a large radius, i.e. larger than l50 μm. 展开更多
关键词 A Kinetic Study of Ozone and Nitric Oxides in Dielectric Barrier discharges for O2/NOx Mixtures NO
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Naphthalene oxidation by different nonthermal electrical discharges at atmospheric pressure 被引量:1
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作者 M REDOLFI N BLIN-SIMIAND +2 位作者 X DUTEN S PASQUIERS K HASSOUNI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第5期151-161,共11页
Gaseous naphthalene has been removed by air plasma generated by pulsed corona discharges at 100°C(LSPM)and dielectric barrier discharges(DBD)up to 250℃(LPGP)in different reactors geometries.Naphthalene has been ... Gaseous naphthalene has been removed by air plasma generated by pulsed corona discharges at 100°C(LSPM)and dielectric barrier discharges(DBD)up to 250℃(LPGP)in different reactors geometries.Naphthalene has been chosen as one of unbumed hydrocarbon present in exhaust gas engine during the cold start of vehicles.The comparison between the different discharge geometries has been possible using the specific input energy(SIE)as relevant parameter for pollutant removal process control considering the differences in the electrical characteristics and the differences of gas flow.The best naphthalene degradation is obtained in the wire-to cylinder(WTC)corona discharge and the stem-to-cylinder DBD with an energy costβrespectively of 10 and 20 J L^-1.The main by-products issues of the naphthalene oxidation are CO2 and CO reaching 45%in Multi-Pin-to-Plan corona discharge.We detected polyaromatic hydrocarbons in the gas phase(few ppm)and in the solid phase deposited in the reactors.The introduction of water in the discharges promotes the naphthalene degradation by OH-atom,which has better oxidising power than O-atom in dry air. 展开更多
关键词 CORONA discharges DBD naphtalene engine EMISSIONS
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Multiple current peaks and spatial characteristics of atmospheric helium dielectric barrier discharges with repetitive unipolar narrow pulse excitation 被引量:1
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作者 Xiangyu ZHOU Qiao WANG +1 位作者 Dong DAI Zeen HUANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第6期21-29,共9页
Atmospheric dielectric barrier discharges driven by repetitive unipolar narrow pulse excitation are investigated numerically by using one-dimensional fluid models.The one-dimensional simulation focuses on the effects ... Atmospheric dielectric barrier discharges driven by repetitive unipolar narrow pulse excitation are investigated numerically by using one-dimensional fluid models.The one-dimensional simulation focuses on the effects of applied voltage amplitude,pulse repetition frequency,gap width andγcoefficient on the multiple-current-pulse(MCP)discharge.The results indicate that the MCP behavior will lead to the stratification of electron density distribution in axial direction.Traditional MCP manipulating methods,such as reducing the applied voltage amplitude,increasing the applied voltage frequency,adjusting the gap width,cannot regulate MCPs exhibiting in this work.Further analyses reveal that the increasing electric field of the cathode fall region is the basis for the emergence of MCP behavior. 展开更多
关键词 dielectric barrier discharges narrow pulse excitation multiple-current-pulse discharge electric field cathode fall region
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Pulsed Corona Discharges and Their Applications in Toxic VOCs Abatement 被引量:1
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作者 Muhammad Arif Malik Salman Akbar Malik 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 1999年第4期351-362,共12页
Plasma processes are among the emerging technologies for volatile organic compounds (VOCs) abatement[1]. Both thermal plasmas and non-equilibrium plasmas (cold plasmas) are being developed for VOCs cleanup[2,3]. Parti... Plasma processes are among the emerging technologies for volatile organic compounds (VOCs) abatement[1]. Both thermal plasmas and non-equilibrium plasmas (cold plasmas) are being developed for VOCs cleanup[2,3]. Particularly, pulsed corona discharges offer several advantages over conventional VOCs abatement techniques[4-7]. To optimize the existing technology and to develop it further, there is need to understand the mechanisms involved in plasma chemical reactions. Furthermore, it is strongly desirable to be able to predict the behavior of new VOCs in non-equilibrium plasma environment from the data known for a few representative compounds. Pulsed corona discharge technique is introduced here with citation of relevant literature. Fundamental principles, useful for predicting the VOCs' decomposition behavior, have been worked out from the published literature. Latest developments in the area, targeted to minimize the energy losses, improve the VOCs destruction efficiency and reduce the generation of unwanted organic and inorganic by-products, are presented. 展开更多
关键词 corona discharges volatile organic compounds air purification water purification nonequilibrium plasma
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Analysis of the Gas Puffing Performance for Improving the Repeatability of Ohmic Discharges in the SUNIST Spherical Tokamak 被引量:1
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作者 谢会乔 谭熠 +2 位作者 柯锐 王文浩 高喆 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第8期732-737,共6页
The gas puffing performance plays a key role in repeatable discharges in the Sino- UNited Spherical Tokamak (SUNIST) experiments. In this paper, temporal evolution of the gas pressure in the vacuum vessel and the de... The gas puffing performance plays a key role in repeatable discharges in the Sino- UNited Spherical Tokamak (SUNIST) experiments. In this paper, temporal evolution of the gas pressure in the vacuum vessel and the dependence of the repeatability of plasma discharges on different timing arrangements between the gas puffing pulse and the Ohmic field have been experimentally investigated. The results show that, after a fast rising phase, the gas pressure becomes quasi-stationary. In the regime of the discharges being started up when the gas pressure has already reached the quasi-stationary state for about 37 ms, an improved repeatability of the plasma discharges is achieved. 展开更多
关键词 gas puffing performance repeatability of plasma discharges SUNIST
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Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure 被引量:1
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作者 Tagra Samir 刘悦 +1 位作者 赵璐璐 周艳文 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期329-337,共9页
A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on e... A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared. 展开更多
关键词 capacitively coupled plasmas electron heating radio frequency(RF) glow discharges driving frequency
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Square grid pattern with direction-selective surface discharges in dielectric barrier discharge
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作者 张建华 潘宇扬 +3 位作者 冯建宇 贺玉楠 褚佳惠 董丽芳 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第2期146-154,共9页
A new phenomenon that a filament discharged only once instead of twice in a cycle of the applied voltage is observed in a square grid pattern in a dielectric barrier discharge(DBD)with a larger gas gap,which is named ... A new phenomenon that a filament discharged only once instead of twice in a cycle of the applied voltage is observed in a square grid pattern in a dielectric barrier discharge(DBD)with a larger gas gap,which is named intermittent discharge.Its spatiotemporal dynamics and the formation mechanism are studied by the multiple photomultiplier tubes and an intensified charge-coupled device.Corresponding to the positions of spots in the picture with an exposure time of 40 ms,there are some bright spots(discharge spots)and black spots(non-discharged spots)in the instantaneous image with an exposure time of 10μs(a half cycle of the applied voltage).There are at least two bright spots around one black spot and vice versa.The surface discharges(SDS)can be observed between any two adjacent spots.The intensity of the SDSbetween the bright spot and the black spot is 2.5 times greater than that between two adjacent bright spots,which indicates that the SDSare directional-selective.The intermittent discharge with positive(negative)current polarity changes to that with negative(positive)current polarity,after it sustains up to 14 voltage cycles at the longest.The spatial distribution of the electric field component is calculated through COMSOL software to solve the Poisson equation numerically.It is found that the inhomogeneous distribution of surface electric field is caused by the inhomogeneous distribution of wall charges,which leads to direction-selective SDS.The intermittent discharge is formed by the competition between the direction-selective SDSand volume discharges(VDS)in DBD.This is the reason why the intermittent discharge is generated. 展开更多
关键词 dielectric barrier discharge PATTERN direction-selective surface discharges intermittent discharge
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