Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are...Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ＂moth-eye＂ antireflection surface on silicon, and the numerical result agrees well with the experimental one.展开更多
Several 2-D displacement sensing methods are reviewed. As to the crossdiffraction grating, there is no absolute zero-reference. In regards to the optical fiber method,the output signal is affected greatly by the quali...Several 2-D displacement sensing methods are reviewed. As to the crossdiffraction grating, there is no absolute zero-reference. In regards to the optical fiber method,the output signal is affected greatly by the quality of the reflecting surface and it is hard to gethigh resolution. Considering the concentric-circle gratings, the displacement can only be gainedwith complicated calculating of the experiment data. Compared with the advantages and limitations ofthe methods above, a novel 2-D zero-reference mark is especially proposed and demonstrated. Thiskind of mark has an absolute zero-reference when used in pair, and the experimental result is simpleto dispose. By superimposing a pair of specially coded 2-D marks, the correct alignment position ofthe two marks can be detected by the maximum output of the sharp intensity peak. And each slope ofthe peak is of good linearity which can be used to achieve high resolution in positioning andalignment in two dimensions. Design and fabrication of such 2-D zero-reference marks are introducedin detail. The experiment results are agreed with the theoretical ones.展开更多
Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot befo...Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot before and after deformed. A hardware testing system for linear CCD array, data gathering and processing was therefore developed for this purpose. Experimental results showed that the system has a good accuracy and can be used to measure stress and strain of metal surface in a real-time and quantitative manner.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No. 60636030)
文摘Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ＂moth-eye＂ antireflection surface on silicon, and the numerical result agrees well with the experimental one.
基金This project is supported by National Natural Science Foundation of China(No.50335050, No.50275140)Specialized Research Foundation for Doctoral Program of Higher Education (SRFDP) of China(No. 20030358020).
文摘Several 2-D displacement sensing methods are reviewed. As to the crossdiffraction grating, there is no absolute zero-reference. In regards to the optical fiber method,the output signal is affected greatly by the quality of the reflecting surface and it is hard to gethigh resolution. Considering the concentric-circle gratings, the displacement can only be gainedwith complicated calculating of the experiment data. Compared with the advantages and limitations ofthe methods above, a novel 2-D zero-reference mark is especially proposed and demonstrated. Thiskind of mark has an absolute zero-reference when used in pair, and the experimental result is simpleto dispose. By superimposing a pair of specially coded 2-D marks, the correct alignment position ofthe two marks can be detected by the maximum output of the sharp intensity peak. And each slope ofthe peak is of good linearity which can be used to achieve high resolution in positioning andalignment in two dimensions. Design and fabrication of such 2-D zero-reference marks are introducedin detail. The experiment results are agreed with the theoretical ones.
文摘Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot before and after deformed. A hardware testing system for linear CCD array, data gathering and processing was therefore developed for this purpose. Experimental results showed that the system has a good accuracy and can be used to measure stress and strain of metal surface in a real-time and quantitative manner.
