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Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications 被引量:1
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作者 Kunye Li Yuhao Liang +1 位作者 Yuxin Liu Yu-Sheng Lin microsystems & nanoengineering 2025年第1期89-101,共13页
In conventional nondispersive infrared(NDIR)gas sensors,a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases.Therefore,the multiplexed NDIR g... In conventional nondispersive infrared(NDIR)gas sensors,a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases.Therefore,the multiplexed NDIR gas sensor requires multiple pairs of narrowband filters,which is not conducive to miniaturization and integration.Although plasmonic metamaterials or multilayer thin-film structures are widely applied in spectral absorption filters,realizing high-performance,large-area,multiband,and compact filters is rather challenging.In this study,we propose and demonstrate a narrowband meta-absorber based on a planar metal–insulator–metal(MIM)cavity with a metallic ultrathin film atop.Nearly perfect absorption of different wavelengths can be obtained by controlling the thickness of the dielectric spacer.More significantly,the proposed meta-absorber exhibits angle-dependent characteristics.The absorption spectra of different gases can be matched by changing the incident angle of the light source.We also preliminarily investigate the CO_(2) gas sensing capability of the meta-absorber.Afterward,we propose a tunable meta-absorber integrated with a microelectromechanical system(MEMS)-based electrothermal actuator(ETA).By applying a direct current(DC)bias voltage,the inclination angle of the meta-absorber can be controlled,and the relationship between the inclination angle and the applied voltage can be deduced theoretically.The concept of a tunable MEMS-based meta-absorber offers a new way toward highly integrated,miniaturized and energy-efficient NDIR multigas sensing systems. 展开更多
关键词 narrowband filter tunable meta absorber plasmonic metamaterials spectral absorption filtersrealizing meta absorber miniaturization integrationalthough narrowband filterswhich MEMS based
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A novel wearable device integrating ECG and PCG for cardiac health monitoring 被引量:1
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作者 Junbin Zang Qi An +3 位作者 Bo Li Zhidong Zhang Libo Gao Chenyang Xue microsystems & nanoengineering 2025年第1期173-185,共13页
The alarming prevalence and mortality rates associated with cardiovascular diseases have emphasized the urgency for innovative detection solutions.Traditional methods,often costly,bulky,and prone to subjectivity,fall ... The alarming prevalence and mortality rates associated with cardiovascular diseases have emphasized the urgency for innovative detection solutions.Traditional methods,often costly,bulky,and prone to subjectivity,fall short of meeting the need for daily monitoring.Digital and portable wearable monitoring devices have emerged as a promising research frontier.This study introduces a wearable system that integrates electrocardiogram(ECG)and phonocardiogram(PCG)detection.By ingeniously pairing a contact-type PZT heart sound sensing structure with ECG electrodes,the system achieves the acquisition of high-quality ECG and PCG signals.Notably,the signal-to-noise ratios(SNR)for ECG and PCG signals were measured at 44.13 dB and 30.04 dB,respectively,demonstrating the system’s remarkable stability across varying conditions.These collected signals were subsequently utilized to derive crucial feature values,including electromechanical delay(EMD),left ventricular ejection time(LVET),and pre-ejection period(PEP).Furthermore,we collected a dataset comprising 40 cases of ECG and PCG signals,enabling a comparative analysis of these three feature parameters between healthy individuals and coronary heart disease patients.This research endeavor presents a significant step forward in the realm of early,non-invasive,and intelligent monitoring of cardiovascular diseases,offering hope for earlier detection and more effective management of these life-threatening conditions. 展开更多
关键词 wearable device portable wearable monitoring devices PHONOCARDIOGRAM wearable system electromechanical delay cardiovascular diseases ELECTROCARDIOGRAM cardiac health monitoring
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Digital light processing 3D printing of flexible devices:actuators,sensors and energy devices 被引量:1
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作者 Jiuhong Yi Shuqi Yang +1 位作者 Liang Yue Iek Man Lei microsystems & nanoengineering 2025年第2期17-34,共18页
Flexible devices are increasingly crucial in various aspects of our lives,including healthcare devices and humanmachine interface systems,revolutionizing human life.As technology evolves rapidly,there is a high demand... Flexible devices are increasingly crucial in various aspects of our lives,including healthcare devices and humanmachine interface systems,revolutionizing human life.As technology evolves rapidly,there is a high demand for innovative manufacturing methods that enable rapid prototyping of custom and multifunctional flexible devices with high quality.Recently,digital light processing(DLP)3D printing has emerged as a promising manufacturing approach due to its capabilities of creating intricate customized structures,high fabrication speed,low-cost technology and widespread adoption.This review provides a state-of-the-art overview of the recent advances in the creation of flexible devices using DLP printing,with a focus on soft actuators,flexible sensors and flexible energy devices.We emphasize how DLP printing and the development of DLP printable materials enhance the structural design,sensitivity,mechanical performance,and overall functionality of these devices.Finally,we discuss the challenges and perspectives associated with DLP-printed flexible devices.We anticipate that the continued advancements in DLP printing will foster the development of smarter flexible devices,shortening the design-to-manufacturing cycles. 展开更多
关键词 humanmachine interface systemsrevolutionizing flexible devices creating intricate customized structu Digital Light Processing manufacturing approach D Printing manufacturing methods Flexible Devices
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A tip-tilt-piston electrothermal micromirror array with integrated position sensors 被引量:1
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作者 Anrun Ren Yingtao Ding +4 位作者 Hengzhang Yang Qiangqiang Liu Teng Pan Ziyue Zhang Huikai Xie microsystems & nanoengineering 2025年第2期229-241,共13页
A tip-tilt-piston 3×3 electrothermal micromirror array(MMA)integrated with temperature field-based position sensors is designed and fabricated in this work.The size of the individual octagonal mirror plates is as... A tip-tilt-piston 3×3 electrothermal micromirror array(MMA)integrated with temperature field-based position sensors is designed and fabricated in this work.The size of the individual octagonal mirror plates is as large as 1.6 mm×1.6 mm.Thermal isolation structures are embedded to reduce the thermal coupling among the micromirror units.Results show that each micromirror unit has a piston scan range of 218μm and a tip-tilt optical scan angle of 21°at only 5 Vdc.The micromirrors also exhibit good dynamic performance with a rise time of 51.2 ms and a fall time of 53.6 ms.Moreover,the on-chip position sensors are proven to be capable for covering the full-range movement of the mirror plate,with the measured sensitivities of 1.5 mV/μm and 8.8 mV/°in piston sensing and tip-tilt sensing,respectively.Furthermore,the thermal crosstalk in an operating MMA has been experimentally studied.The measured results are promising thanks to the embedded thermal isolation structures. 展开更多
关键词 isolation structures octagonal mirror plates micromirror unit thermal crosstalk thermal isolation position sensors dynamic performance electrothermal micromirror array
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Artificial intelligence-enabled microfluidic cytometer using gravity-driven slug flow for rapid CD4^(+)T cell quantification in whole blood
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作者 Desh Deepak Dixit Tyler P.Graf +1 位作者 Kevin J.McHugh Peter B.Lillehoj microsystems & nanoengineering 2025年第1期441-452,共12页
The quantification of immune cell subpopulations in blood is important for the diagnosis,prognosis and management of various diseases and medical conditions.Flow cytometry is currently the gold standard technique for ... The quantification of immune cell subpopulations in blood is important for the diagnosis,prognosis and management of various diseases and medical conditions.Flow cytometry is currently the gold standard technique for cell quantification;however,it is laborious,time-consuming and relies on bulky/expensive instrumentation,limiting its use to laboratories in high-resource settings.Microfluidic cytometers offering enhanced portability have been developed that are capable of rapid cell quantification;however,these platforms involve tedious sample preparation and processing protocols and/or require the use of specialized/expensive instrumentation for flow control and cell detection.Here,we report an artificial intelligence-enabled microfluidic cytometer for rapid CD4^(+)T cell quantification in whole blood requiring minimal sample preparation and instrumentation.CD4^(+)T cells in blood are labeled with anti-CD4 antibody-coated microbeads,which are driven through a microfluidic chip via gravity-driven slug flow,enabling pump-free operation.A video of the sample flowing in the chip is recorded using a microscope camera,which is analyzed using a convolutional neural network-based model that is trained to detect bead-labeled cells in the blood flow.The functionality of this platform was evaluated by analyzing fingerprick blood samples obtained from healthy donors,which revealed its ability to quantify CD4^(+)T cells with similar accuracy as flow cytometry(<10%deviation between both methods)while being at least 4×faster,less expensive,and simpler to operate.We envision that this platform can be readily modified to quantify other cell subpopulations in blood by using beads coated with different antibodies,making it a promising tool for performing cell count measurements outside of laboratories and in low-resource settings. 展开更多
关键词 microfluidic cytometer gravity driven slug flow cell quantificationhoweverit flow cytometry portable instrumentation whole blood artificial intelligence quantification immune cell subpopulations
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Global alignment reference strategy for laser interference lithography pattern arrays
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作者 Xiang Gao Jingwen Li +1 位作者 Zijian Zhong Xinghui Li microsystems & nanoengineering 2025年第2期277-287,共11页
Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task... Large-area gratings play a crucial role in various engineering fields.However,traditional interference lithography is limited by the size of optical component apertures,making large-area fabrication a challenging task.Here,a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.This approach enables alignment of each area of the laser interference lithography pattern arrays,including phase,period,and tilt angle.Two reference gratings are utilized:one is detached from the substrate,while the other remains fixed to it.To achieve global alignment,the exposure area is adjusted by alternating between moving the beam and the substrate.In our experiment,a 3×3 regions grating array was fabricated,and the−1st-order diffraction wavefront measured by the Fizeau interferometer exhibited good continuity.This technique enables effective and efficient alignment with high accuracy across any region in an interference lithography pattern array on large substrates.It can also serve as a common technique for fabricating various types of periodic structures by rotating the substrate. 展开更多
关键词 reference gratings interference lithography global alignment reference strategy laser interference lithography pattern fabricating laser interference lithography pattern arrays reference grating optical component aperturesmaking laser interference lithography
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A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration
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作者 Jiashuai Xu Zijun Ren +2 位作者 Fangsheng Qian Junyan Zheng Yansong Yang microsystems & nanoengineering 2025年第3期399-408,共10页
This study presents a wafer-level sealed silicon cavity(SSC)microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator(C-SOI)wafers for the 5G/6G wireless communication system.The... This study presents a wafer-level sealed silicon cavity(SSC)microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator(C-SOI)wafers for the 5G/6G wireless communication system.The proposed SSC platform features an extremely smooth suspended membrane with adjustable thickness,flexible cavity shapes with high density,self-formed acoustic wave confinement steps,stable temperature coefficient of frequency(TCF),and highly integrated compatibility with complementary metal-oxide semiconductor(CMOS).A surface smoothing method based on wet oxidation for SSC wafers is presented,which achieves a root mean square(RMS)roughness on the cavity surface of 1.5 nm for the first time.Based on the presented SSC platform,an Al_(0.75)Sc_(0.25)N sealed cavity bulk acoustic wave resonator(S-BAR)is designed,fabricated,and characterized.The experimental results show that the asymmetric second-order(A2)Lamb mode of S-BAR is enhanced for higher frequency with a maximum piezoelectric coupling coefficient(k_(t)^(2))of 9.53%,a maximum quality factor(Q)of 439,and a TCF of−11.44 ppm/K.Different designs’piezoelectric coupling coefficient distribution is consistent with the theoretical prediction.The proposed smoothing process increases the S-BARs’quality factor by~400%.The frequency shift caused by the temperature(absolute value of TCF)is reduced by 62%compared with the traditional Al_(0.75)Sc_(0.25)N thin film bulk acoustic wave resonator(without temperature compensation).The enhanced performances demonstrated the potential of SSC in the next-generation highly integrated RF communication systems. 展开更多
关键词 silicon cavity radio frequency integration acoustic wave confinement surface smoothing wet oxidation integration platform ssc platform microacoustic platform
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Superior terahertz radiation detection through novel micro circular log-periodic antenna engineered with an advanced evolutionary neural network algorithm
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作者 Rui Zhou Jiaqi Wang +3 位作者 Zhemiao Xie Yonghai Sun Guanxuan Lu John T.W.Yeow microsystems & nanoengineering 2025年第4期453-465,共13页
In this work,we introduce a novel Micro Circular Log-Periodic Antenna(MCLPA)optimized with an advanced Evolutionary Neural Network(ENN)algorithm,specifically designed to enhance terahertz(THz)radiation detection.By le... In this work,we introduce a novel Micro Circular Log-Periodic Antenna(MCLPA)optimized with an advanced Evolutionary Neural Network(ENN)algorithm,specifically designed to enhance terahertz(THz)radiation detection.By leveraging the adaptive capabilities of the ENN framework,the antenna design efficiency is significantly improved,enabling rapid prototyping and yielding highly optimized structures tailored for practical THz applications.Extensive characterization confirms that the proposed MCLPA achieves outstanding performance,including an ultra-broad operational bandwidth of 372 GHz(0.135-0.507 THz),a peak gain of 5.51 dBi,an optimal S-parameter(S11)of−13.68 dB,and a maximum radiation efficiency of 82.39%.In addition,the MCLPA exhibits superior sensitivity,low noise susceptibility,and fast response,which are key attributes for reliable and precise THz detection.When configured in array form,the design further enhances gain and directional responsiveness,demonstrating the scalability and deployment potential of the MCLPA.This ENN-driven MCLPA represents a significant breakthrough in THz antenna engineering,introducing a transformative design paradigm that synergistically integrates algorithmic intelligence with structural innovation.By substantially reducing design time and cost while achieving exceptional performance,the proposed ENN framework sets a new benchmark for the development of next-generation THz detection and communication systems,offering broad implications for future high-frequency technologies. 展开更多
关键词 adaptive capabilities superior terahertz radiation detection antenna design efficiency rapid prototyping novel micro circular log periodic antenna terahertz applications advanced evolutionary neural network enn algorithmspecifically optimized structures
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Intelligent planetary gear fault diagnosis system based on MEMS acoustic emission sensor
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作者 Hanjie Dou Tao Liu +5 位作者 Zhihao Li Jixuan Zhang Jiaqian Yang Yuchen Mao Wanyu Xu Xiaojing Mu microsystems & nanoengineering 2025年第3期567-576,共10页
Early equipment fault diagnosis can identify potential risks,significantly reduce maintenance costs,and minimize property damage.However,vibration,strain,and force sensors operating at low frequencies with narrow band... Early equipment fault diagnosis can identify potential risks,significantly reduce maintenance costs,and minimize property damage.However,vibration,strain,and force sensors operating at low frequencies with narrow bandwidths are insufficiently sensitive to fault information,making early fault prediction challenging.Here,we introduce a high-performance,cost-effective,and tiny-sized micro-electromechanical system(MEMS)acoustic emission sensor.This sensor utilizes a 10×11 hexagonal array of piezoelectric micromachined ultrasonic transducers with a chip size of 4 mm×4 mm×0.4 mm.The sensor is encapsulated using an epoxy/Al_(2)O_(3) composite for acoustic impedance matching,and its overall size isΦ16 mm×H 5.5 mm,with a weight of approximately 3 g.This acoustic emission sensor achieves a peak sensitivity of 88.4 dB(ref.V/(m/s))at 335 kHz,and its sensitivity remains above 60 dB across the frequency range from 15 kHz to 620 kHz.In addition,combined with the residual neural networks,an intelligent fault diagnosis of the planetary gear is realized.This MEMS acoustic emission sensor can provide a promising approach for in-situ fault monitoring of highly integrated and miniaturized industrial equipment. 展开更多
关键词 mems acoustic emission sensor hexagonal array equipment fault diagnosis piezoelectric micromac identify potential riskssignificantly planetary gear early fault diagnosis fault prediction
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Centrifugation-assisted lateral flow assay platform: enhancing bioassay sensitivity with active flow control
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作者 Hang Yuan Ruiqi Yong +5 位作者 Wenwen Yuan Quan Zhang Eng Gee Lim Yongjie Wang Fuzhou Niu Pengfei Song microsystems & nanoengineering 2025年第3期457-468,共12页
Lateral flow assays(LFAs)are widely used in point-of-care testing(POCT)due to their simplicity and rapid operation.However,their reliance on passive capillary flow limits sensitivity,making it challenging to detect lo... Lateral flow assays(LFAs)are widely used in point-of-care testing(POCT)due to their simplicity and rapid operation.However,their reliance on passive capillary flow limits sensitivity,making it challenging to detect low-abundance biomarkers accurately.Approaches such as computer signal processing,chemical modification,and physical regulation have been explored to improve LFA sensitivity,but they remain limited by passive capillary-driven flow and uncontrollable flow rate.An alternative approach is to actively regulate fluid dynamics to optimize analyte binding and signal generation.The key challenge is to enhance LFA sensitivity while preserving compatibility with existing lateral flow strips(LFSs).Here,this study introduces a centrifugation-assisted LFA(CLFA)platform with smartphone-based result processing.This platform applies centrifugal force opposite to capillary flow,actively regulating fluid movement to optimize incubation time at the reaction zone and enhance detection performance.This approach increases signal intensity while maintaining a rapid detection process(5 min)and ensuring integration with traditional LFSs.As a proof-of-concept,the CLFA platform successfully detected human chorionic gonadotropin(hCG)and hemoglobin(Hb)in artificial urine without requiring custom-designed centrifugal discs or modified chromatography membranes.Its adaptability to diverse biomarkers and smartphone-based quantification make it a promising POCT tool,particularly in resource-limited settings. 展开更多
关键词 lateral flow assay computer signal processingchemical modificationand passive capillary flow active flow control lateral flow assays lfas centrifugation assisted bioassay sensitivity point care testing
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Flexible tactile sensors based on gold nanoparticles-precipitated carbon nanotubes with low contact resistance and high sensitivity
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作者 Sangjun Sim Euichul Chung +2 位作者 Yunsung Kang Kyubin Bae Jongbaeg Kim microsystems & nanoengineering 2025年第5期425-436,共12页
Flexible tactile sensors are receiving considerable interest due to their potential in diverse fields,including physiological monitoring and wearable electronics.Despite numerous studies to broaden their practical use... Flexible tactile sensors are receiving considerable interest due to their potential in diverse fields,including physiological monitoring and wearable electronics.Despite numerous studies to broaden their practical use,it remains difficult to simultaneously attain high sensitivity and a wide-range pressure detection.In this study,we have fabricated a tactile sensor with highly porous three-dimensional conductive architecture based on carbon nanotubes(CNTs)functionalized with gold nanoparticles(AuNPs).The zero-dimensional AuNPs,directly precipitated onto the CNT surface,exerted minimal effect on the sensor’s initial resistance.Upon applying pressure to the tactile sensor,the contact resistance among the AuNPs-precipitated CNTs changes significantly,resulting in a high sensitivity of 23.23 kPa^(-1) in the low-pressure range(0.05-500 kPa)and 11.06 kPa^(-1) in the high-pressure range(500-1125 kPa).The sensor also exhibits outstanding sensing characteristics,including low hysteresis and excellent repeatability.Leveraging these advantages,the sensor has successfully detected pulse wave signals,neck/jaw muscle movements,and walking motions,confirming its practical applicability in wearable healthcare technologies. 展开更多
关键词 carbon nanotubes gold nanoparticles tactile sensor gold nanoparticles aunps carbon nanotubes cnts functionalized flexible tactile sensors wearable electronicsdespite physiological monitoring
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Nanoplasmonic SERS on fidget spinner for digital bacterial identification
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作者 Mamata Karmacharya Issac Michael +4 位作者 Jiyun Han Elizabeth Maria Clarissa Oleksandra Gulenko Sumit Kumar Yoon-Kyoung Cho microsystems & nanoengineering 2025年第2期213-227,共15页
Raman spectroscopy offers non-destructive and highly sensitive molecular insights into bacterial species,making it a valuable tool for detection,identification,and antibiotic susceptibility testing.However,achieving c... Raman spectroscopy offers non-destructive and highly sensitive molecular insights into bacterial species,making it a valuable tool for detection,identification,and antibiotic susceptibility testing.However,achieving clinically relevant accuracy,quantitative data,and reproducibility remains challenging due to the dominance of bulk signals and the uncontrollable heterogeneity of analytes.In this study,we introduce an innovative diagnostic tool:a plasmonic fidget spinner(P-FS)incorporating a nitrocellulose membrane integrated with a metallic feature,referred to as a nanoplasmonic-enhanced matrix,designed for simultaneous bacterial filtration and detection.We developed a method to fabricate a plasmonic array patterned nitrocellulose membrane using photolithography,which is then integrated with a customized fidget spinner.Testing the P-FS device with various bacterial species(E.coli 25922,S.aureus 25923,E.coli MG1655,Lactobacillus brevis,and S.mutans 3065)demonstrated successful identification based on their unique Raman fingerprints.The bacterial interface with regions within the plasmonic array,where the electromagnetic field is most intensely concentrated—called nanoplasmonic hotspots—on the P-FS significantly enhances sensitivity,enabling more precise detection.SERS intensity mappings from the Raman spectrometer are transformed into digital signals using a threshold-based approach to identify and quantify bacterial distribution.Given the P-FS’s ability to enhance vibrational signatures and its scalable fabrication under routine conditions,we anticipate that nanoplasmonic-enhanced Raman spectroscopy—utilizing nanostructures made from metals(specifically gold and silver)deposited onto a nitrocellulose membrane to amplify Raman scattering signals—will become the preferred technology for reliable and ultrasensitive detection of various analytes,including those crucial to human health,with strong potential for transitioning from laboratory research to clinical applications. 展开更多
关键词 raman spectroscopy Raman spectroscopy nanoplasmonic fidget spinner bacterial identification nitrocellulose membr plasmonic fidget spinner p fs incorporating SERS
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Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators
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作者 Han Li Zhao Zhang +3 位作者 PeiYuan Zhu GuoHua Zhang Yongcun Hao Honglong Chang microsystems & nanoengineering 2025年第3期195-207,共13页
The demand for highly sensitive and accurate sensors has grown significantly,particularly in the field of Micro-Electro-Mechanical Systems technology.Mode-localized sensors based on weakly coupled resonators have garn... The demand for highly sensitive and accurate sensors has grown significantly,particularly in the field of Micro-Electro-Mechanical Systems technology.Mode-localized sensors based on weakly coupled resonators have garnered attention for their high sensitivity through amplitude ratio outputs.However,when measuring multiple signals by weakly coupled resonators,different signals can interfere with each other,causing high cross-sensitivity.This cross-sensitivity greatly complicates signal separation and makes accurate measurement extremely difficult,impacting system performance.To address this issue,the study proposes an innovative constant-drive technique of weakly coupled resonators.This technique significantly reduces crosstalk between signals while maintaining high sensitivity of amplitude ratio output.The method is theoretically validated by analyzing amplitude ratios under signal perturbations in non-damped conditions,demonstrating perfect elimination of cross-interference.Finite element analysis under damping conditions further validated the constant-drive technique,showing a cross-sensitivity of 0.054%,nearly three orders of magnitude lower than that of mode-localized sensors.Experimental validation confirmed the effectiveness of the proposed technique,with the cross-sensitivity of the mode-localized method measured at 26.3%and 28.7%,respectively,while the constant-frequency drive achieved significantly lower values of 3.1%and 1.1%.This demonstrates a successful reduction in cross-sensitivity by an order of magnitude,meeting the performance requirements for typical MEMS biaxial sensor applications.This method is highly significant for mode-localized sensors,offering potential for developing multi-signal measurement devices like multi-axis accelerometers,force sensor,electric field sensor and mass sensor. 展开更多
关键词 synchronous detection cross sensitivity signal separation mode localized sensors weakly coupled resonators weakly coupled resonatorsdifferent dual signals constant drive technique
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Controllable tip exposure of ultramicroelectrodes coated by diamond-like carbon via direct microplasma jet for enhanced stability and fidelity in single-cell recording
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作者 Zhiyuan Du Qingda Xu +9 位作者 Ye Xi Mengfei Xu Jiawei Cao Longchun Wang Xiuyan Li Xiaolin Wang Qingkun Liu Zude Lin Bin Yang Jingquan Liu microsystems & nanoengineering 2025年第1期225-235,共11页
Precise and long-term electroanalysis at the single-cell level is crucial for the accurate diagnosis and monitoring of brain diseases.The reliable protection in areas outside the signal acquisition points at sharp ult... Precise and long-term electroanalysis at the single-cell level is crucial for the accurate diagnosis and monitoring of brain diseases.The reliable protection in areas outside the signal acquisition points at sharp ultramicroelectrode(UME)tips has a significant impact on the sensitivity,fidelity,and stability of intracellular neural signal recording.However,it is difficult for existing UMEs to achieve controllable exposure of the tip functional structure,which affects their ability to resist environmental interference and shield noise,resulting in unsatisfactory signal-to-noise ratio and signal fidelity of intracellular recordings.To address this issue,we chose a dense and electrochemically stable diamond-like carbon(DLC)film as the UME protection coating and developed a method to precisely control the exposed degree of the functional structure by directly fixed-point processing of the UME tip by the strong site-selectivity and good controllability of the atmospheric microplasma jet.By analyzing the interaction between the microplasma jet and the UME tip,as well as the changes in the removal length and microstructure of UME tips with processing time,the exposed tip length was precisely controlled down to the submicron scale.Biocompatibility experiments,electrochemical aging tests and real-time intracellular pH recording experiments have demonstrated that the DLC-UME with effective tip protection processed by microplasma jet has the potential to enable long-term detection of intracellular high-fidelity signals. 展开更多
关键词 ULTRAMICROELECTRODE single cell recording signal fidelity diagnosis monitoring brain diseasesthe diamond carbon tip exposure intracellular neural signal microplasma jet
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pH-Inhibited Fenton etching of gold nanobipyramids: a multicolor approach for enhanced urea detection
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作者 Ahmed Y.Elbalaawy Min-Jae Kim +3 位作者 Samy M.Shaban Eslam Hafez Mohamed R.Elmasry Dong-Hwan Kim microsystems & nanoengineering 2025年第3期655-665,共11页
This study presents an innovative urea detection method utilizing pH-controlled Fenton etching of gold nanobipyramids(AuNBPs),offering a multicolor visual response.By leveraging the urease-catalyzed hydrolysis of urea... This study presents an innovative urea detection method utilizing pH-controlled Fenton etching of gold nanobipyramids(AuNBPs),offering a multicolor visual response.By leveraging the urease-catalyzed hydrolysis of urea,which releases ammonia and raises pH,the Fenton reaction is inhibited,reducing the etching of AuNBPs.This approach enables a highly sensitive and distinct multichromatic response across a wide range of urea concentrations,particularly at low target levels.The solution-based sensor achieved an exceptionally low detection limit of 0.098μM,surpassing existing colorimetric urea biosensors.Furthermore,embedding the sensor in an agarose hydrogel matrix to create a solid-state format resulted in a detection limit of 0.2μM.Real-world validation demonstrated high recovery rates in urine samples,further affirming the sensor’s reliability.This multicolor biosensing platform offers a robust tool for point-of-care diagnostics,facilitating accurate and user-friendly urea detection. 展开更多
关键词 multicolor visual responseby Fenton etching Gold nanobipyramids ph inhibited fenton reaction Multicolor detection gold nanobipyramids aunbps offering multichromatic response
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Patterning silver nanowire network via the Gibbs–Thomson effect
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作者 Hongteng Wang Haichuan Li +8 位作者 Yijia Xin Weizhen Chen Haogeng Liu Ying Chen Yaofei Chen Lei Chen Yunhan Luo Zhe Chen Gui-Shi Liu microsystems & nanoengineering 2025年第3期521-530,共10页
As transparent electrodes,patterned silver nanowire(AgNW)networks suffer from noticeable pattern visibility,which is an unsettled issue for practical applications such as display.Here,we introduce a Gibbs-Thomson effe... As transparent electrodes,patterned silver nanowire(AgNW)networks suffer from noticeable pattern visibility,which is an unsettled issue for practical applications such as display.Here,we introduce a Gibbs-Thomson effect(GTE)-based patterning method to effectively reduce pattern visibility.Unlike conventional top-down and bottom-up strategies that rely on selective etching,removal,or deposition of AgNWs,our approach focuses on fragmenting nanowires primarily at the junctions through the GTE.This is realized by modifying AgNWs with a compound of diphenyliodonium nitrate and silver nitrate,which aggregates into nanoparticles at the junctions of AgNWs.These nanoparticles can boost the fragmentation of nanowires at the junctions under an ultralow temperature(75℃),allow pattern transfer through a photolithographic masking operation,and enhance plasmonic welding during UV exposure.The resultant patterned electrodes have trivial differences in transmittance(ΔT=1.4%)and haze(ΔH=0.3%)between conductive and insulative regions,with high-resolution patterning size down to 10μm.To demonstrate the practicality of this novel method,we constructed a highly transparent,optoelectrical interactive tactile e-skin using the patterned AgNW electrodes. 展开更多
关键词 Gibbs Thomson effect Transparent electrodes Patterned silver nanowire networks fragmenting nanowires Plasmonic welding Photolithographic masking transparent electrodespatterned silver nanowire agnw networks reduce pattern visibilityunlike
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A Compact Hydraulic Head Auto-Regulating Module (CHARM) for long-term constant gravity-driven flow microfluidics
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作者 Fan Xue Ulri N.Lee Joel Voldman microsystems & nanoengineering 2025年第3期219-230,共12页
Fluid flow is a ubiquitous aspect of microfluidic systems.Gravity-driven flow is one microfluidic flow initiation and maintenance mechanism that is appealing because it is simple,requires no external power source,and ... Fluid flow is a ubiquitous aspect of microfluidic systems.Gravity-driven flow is one microfluidic flow initiation and maintenance mechanism that is appealing because it is simple,requires no external power source,and is easy to use.However,the driving forces created by hydraulic head differences gradually decrease during operation,resulting in decreasing flow rates that are undesirable in many microfluidic applications such as perfusion culture,droplet microfluidics,etc.Existing methods to maintain a constant gravity-driven flow either require additional control equipment,involve complex fabrication or operation,are incompatible with miniaturization,or introduce interfaces that lack robustness.Here we tackled those problems by introducing a 3D-printed compact hydraulic head auto-regulating module that automatically maintains a constant fluid level at the microfluidic inlet port without human intervention.Our module successfully maintained a constant hydraulic head for more than 24 h,with the operation time solely limited by the reservoir capacity.A comparison with the conventional gravity-driven flow demonstrated our device’s capability to produce a more stable flow over the perfusion period.Overall,our module creates a simple,robust solution to produce a stable flow rate in gravity-driven flow systems.The compactness of the design allows easy parallelization and compatibility with high-throughput applications,and the biocompatibility of the materials enables the device’s use with life science applications. 展开更多
关键词 hydraulic head MICROFLUIDICS fluid flow constant fluid level perfusion culturedroplet compact hydraulic head auto regulating module gravity driven flow decreasing flow rates
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Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization
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作者 Ningning Hu Yucheng Deng +3 位作者 Lujia Ding Lijun Men Wenjun Zhang Ruixue Yin microsystems & nanoengineering 2025年第4期259-273,共15页
The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible,high-performance sensors across fields ranging from medical devices to robotics.Despite advances in fabrication techniques,t... The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible,high-performance sensors across fields ranging from medical devices to robotics.Despite advances in fabrication techniques,the development of micro-and nano-scale flexible force sensors with superior sensitivity,stability,and biocompatibility remains a formidable challenge.In this study,we developed a novel conductive photosensitive resin specifically designed for two-photon polymerization,systematically optimized its printing parameters,and improved its structural design,thereby enabling the fabrication of high-precision micro-spring force sensors(MSFS).The proposed photosensitive resin,doped with MXene nanomaterials,combines exceptional mechanical strength and conductivity,overcoming limitations of traditional materials.Using a support vector machine model in machine learning techniques,we optimized the polymerizability of the resin under varied laser parameters,achieving a predictive accuracy of 92.66%.This model significantly reduced trial-and-error in the TPP process,accelerating the discovery of ideal fabrication conditions.Finite element analysis was employed to design and simulate the performance of the MSFS,guiding structural optimization to achieve high sensitivity and mechanical stability.The fabricated MSFS demonstrated outstanding electromechanical performance,with a sensitivity coefficient of 5.65 and a fabrication accuracy within±50 nm,setting a new standard for MSFS precision.This work not only pushes the boundaries of sensor miniaturization but also introduces a scalable,efficient pathway for the rapid design and fabrication of highperformance flexible sensors. 展开更多
关键词 two photon polymerization medical devices micro spring force sensors conductive photosensitive resin fabrication techniquesthe force sensors electronic devices flexible sensors
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Smart resonant micro-sensor and micro-actuator:high-performance,wide range bi-axial magnetic sensitive/insensitive micro-device for multifunctional sensing applications
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作者 Hanin Amara Nadeem Tariq Beigh Nouha Alcheikh microsystems & nanoengineering 2025年第5期199-211,共13页
With the rapid development of intelligent and autonomous systems,such as wearable health monitoring and advanced manufacturing robots,there is a growing demand for the development of advanced,miniaturized smart sensor... With the rapid development of intelligent and autonomous systems,such as wearable health monitoring and advanced manufacturing robots,there is a growing demand for the development of advanced,miniaturized smart sensors and actuator systems.In this context,a single microdevice with hybrid functionality as both a sensor and actuator demonstrates excellent performance across diverse applications,holds significant promise.Herein,we present a proof-of-concept for a high-performance bi-directional Lorentz force magnetometer and actuator,implemented within a single microelectromechanical system(MEMS)device.Moreover,the device demonstrates insensitivity to magnetic fields,making it highly suitable for applications that require anti-crossing behavior in magnetic environments.The design is based on a clamped-guided curved microresonator connected to straight and V-shaped beams of micro-actuators.The operation of the proposed device relies on the flexibility to control the applied electrothermal excitation in different ways,offering smart thermal actuation and dynamic sensing mechanisms.Furthermore,the proposed technique allows tuning of the first symmetric mode,achieving either a high or low frequency shift based on input power levels.Hence,this study provides valuable insights for improving tunability in sensitivity and power for various actuation mechanisms.At atmospheric pressure and an input power of 19.5 mW,the device functions as a high-performance biaxial magnetic sensor with a sensitivity(S)of~36.58%T^(-1),an excellent linearity in the medium-to-high magnetic field range of±400 mT,and a minimum detectable field,Bmin of 0.83μT Hz^(-1).In contrast,it can be tuned as a magnetic-field-insensitive actuator(S=3.28%T^(-1))with a transversal displacement of~4μm,utilizing a negligible power of 43 mW.The diverse operation highlights its hybrid functionality as an actuator or high-performance sensor.These features,combined with the simplicity of fabrication and low cost,make the proposed microdevice highly promising for developing a three-axis magnetic sensor and actuator network system,as well as for various industrial applications. 展开更多
关键词 anti crossing behavior thermal actuation bi axial magnetic sensing advanced manufacturing robotsthere MEMS wearable health monitoring intelligent autonomous systemssuch micro actuator
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Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip:idream-qPCR
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作者 Kiran Shrestha Seongryeong Kim +3 位作者 Jiyeon Han Meng Zhang Sajjan Parajuli Gyoujin Cho microsystems & nanoengineering 2025年第4期179-189,共11页
Photothermal conversion-based quantitative polymerase chain reaction(qPCR)is a fast,sensitive,and accurate method to diagnose infectious diseases.However,they have bottlenecks in test throughput scalability,cumbersome... Photothermal conversion-based quantitative polymerase chain reaction(qPCR)is a fast,sensitive,and accurate method to diagnose infectious diseases.However,they have bottlenecks in test throughput scalability,cumbersome oil cover,and a lack of multi-target capability.Here,the authors present an infectious disease diagnostic device with rapid photothermal conversion-based efficient reverse transcription(RT)-qPCR assays on a multi-target chip(idreamqPCR).The authors innovate an off-axis mirror-based three-channel fluorescence intensity measurement method,enabling concurrent non-contact temperature control of 16 mini-well reaction chambers for qPCRs without the necessity of actuating parts.A transparent adhesive film on a graphite mixed polydimethylsiloxane(PDMS)-based PCR chip with mini-wells avoids contamination and bubbles to achieve 16 RT-qPCRs(40 photothermal cycles)within 17 min.Finally,idream-qPCR is validated by amplifying severe acute respiratory syndrome coronavirus 2(SARS-CoV-2)N172 bp,RdRP 100 bp,and E 113 bp genes using Fluorescein amidites(FAM),Carboxytetramethylrhodamine(TAMRA),and Cyanine5(CY5)fluorescent dyes,respectively,with 102.5%efficiency and a limit-of-detection(LoD)equivalent to 0.85 copies/μL.idream-qPCR can be efficiently used to prevent the spread of infectious diseases. 展开更多
关键词 diagnose infectious diseaseshoweverthey multi target chip off axis mirror based fluorescence intensity measurement non contact temperature control infectious disease diagnostic device rapid photothermal conversion quantitative polymerase chain reaction qpcr efficient RT qPCR
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