The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire mic...The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope＇s resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation（BP）neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope＇s zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75（°）/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.展开更多
A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reach...A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.展开更多
基金The National High Technology Research and Development Program of China (863 Program)(No.2002AA812038)the NationalNatural Science Foundation of China (No.60974116)
文摘The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope＇s resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation（BP）neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope＇s zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75（°）/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.
基金The National High Technology Research and Development Program of China (863Program)(No.2002AA812038)the National Defense Pre-Research Support Program (No.41308050109)
文摘A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.
