This unique optical design,integrated in the inline scanner ISM.blue+,is the only known solution that enables correct and real defect size evaluation for yield enhancement.In addition,even the slightest de? ecting irr...This unique optical design,integrated in the inline scanner ISM.blue+,is the only known solution that enables correct and real defect size evaluation for yield enhancement.In addition,even the slightest de? ecting irregularities on the complete disc can be detected,which otherwise could lead to focus and tracking errors.This is achieved by using two individual optical setups:a special near dark-fi eld channel and a separate 0° contrast channel.展开更多
文摘This unique optical design,integrated in the inline scanner ISM.blue+,is the only known solution that enables correct and real defect size evaluation for yield enhancement.In addition,even the slightest de? ecting irregularities on the complete disc can be detected,which otherwise could lead to focus and tracking errors.This is achieved by using two individual optical setups:a special near dark-fi eld channel and a separate 0° contrast channel.
