针对当前对MEMS矢量水听器高可靠性迫切要求,设计了2×2单片集成四元阵列式MEMS矢量水听器,以保证其中一个敏感微结构失效损坏或工作不正常时,水听器仍能正常工作。结合ANSYS软件对阵列敏感微结构进行了仿真分析;设计了该微结构的...针对当前对MEMS矢量水听器高可靠性迫切要求,设计了2×2单片集成四元阵列式MEMS矢量水听器,以保证其中一个敏感微结构失效损坏或工作不正常时,水听器仍能正常工作。结合ANSYS软件对阵列敏感微结构进行了仿真分析;设计了该微结构的加工工艺流程;最后,对阵列式MEMS矢量水听器进行水声校准测试。测试结果表明:阵列式水听器可靠性明显提高,灵敏度达到-179 d B(0 d B=1V/μPa),具有良好的"8"字指向性。展开更多
The influence of array element’s consistency on the hydrophone array’s signal-to-noise ratio (SNR) is studied. The consistency of array elements means the outputs of all the array’s elements are the same, that is t...The influence of array element’s consistency on the hydrophone array’s signal-to-noise ratio (SNR) is studied. The consistency of array elements means the outputs of all the array’s elements are the same, that is to say, the outputs have the same phase and amplitude when their inputs are the same. The relationship between the SNR and the correlation coefficient of signal and the relationship between the SNR and the correlation coefficient of noise are given. Hydrophone array’s gain with the output of elements’ inconsistent phase and amplitude is analyzed theoretically. When the signal is single-frequency, the gain expression of two-elements array is deduced. Then the gain is calculated when the phase difference is 10° and the amplitude difference is 3 dB. The theoretical analysis is verified through simulation. The simulation results show the variation rule of array’s SNR when the consistency changes: the array SNR gain is greatly affected by the consistency of the elements’ output and the gain decreases as the consistency decreases and the gain may be negative when the amplitude response becomes worse.展开更多
文摘针对当前对MEMS矢量水听器高可靠性迫切要求,设计了2×2单片集成四元阵列式MEMS矢量水听器,以保证其中一个敏感微结构失效损坏或工作不正常时,水听器仍能正常工作。结合ANSYS软件对阵列敏感微结构进行了仿真分析;设计了该微结构的加工工艺流程;最后,对阵列式MEMS矢量水听器进行水声校准测试。测试结果表明:阵列式水听器可靠性明显提高,灵敏度达到-179 d B(0 d B=1V/μPa),具有良好的"8"字指向性。
基金Major State Basic Research Development Program of China(No.2016YFC0101900)Applied Basic Research Project of Shanxi Province(Nos.201601D011035,201701D121067)
文摘The influence of array element’s consistency on the hydrophone array’s signal-to-noise ratio (SNR) is studied. The consistency of array elements means the outputs of all the array’s elements are the same, that is to say, the outputs have the same phase and amplitude when their inputs are the same. The relationship between the SNR and the correlation coefficient of signal and the relationship between the SNR and the correlation coefficient of noise are given. Hydrophone array’s gain with the output of elements’ inconsistent phase and amplitude is analyzed theoretically. When the signal is single-frequency, the gain expression of two-elements array is deduced. Then the gain is calculated when the phase difference is 10° and the amplitude difference is 3 dB. The theoretical analysis is verified through simulation. The simulation results show the variation rule of array’s SNR when the consistency changes: the array SNR gain is greatly affected by the consistency of the elements’ output and the gain decreases as the consistency decreases and the gain may be negative when the amplitude response becomes worse.
