A two-dimensional （2D） multi-channel silicon-based microelectrode array is developed for recording neural signals. Three photolithographic masks are utilized in the fabrication process. SEM images show that the micr...A two-dimensional （2D） multi-channel silicon-based microelectrode array is developed for recording neural signals. Three photolithographic masks are utilized in the fabrication process. SEM images show that the microprobe is 1.2mm long, 100μm wide,and 30μm thick,with recording sites spaced 200μm apart for good signal isolation. For the individual recording sites, the characteristics of impedance versus frequency are shown by in vitro testing. The impedance declines from 14MΩ to 1.9kΩ as the frequency changes from 0 to 10MHz. A compatible PCB （print circuit board） aids in the less troublesome implantation and stabilization of the microprobe.展开更多
文摘A two-dimensional （2D） multi-channel silicon-based microelectrode array is developed for recording neural signals. Three photolithographic masks are utilized in the fabrication process. SEM images show that the microprobe is 1.2mm long, 100μm wide,and 30μm thick,with recording sites spaced 200μm apart for good signal isolation. For the individual recording sites, the characteristics of impedance versus frequency are shown by in vitro testing. The impedance declines from 14MΩ to 1.9kΩ as the frequency changes from 0 to 10MHz. A compatible PCB （print circuit board） aids in the less troublesome implantation and stabilization of the microprobe.
