为解决大口径红外元件类金刚石(Diamond-Like Carbon,DLC)膜层的镀膜工艺难题,满足长焦距、大视场光学系统的技术需求,采用射频等离子增强化学气相沉积(Radio Frequency Plasma Enhanced Chemical Vapor Deposition,RF-PECVD)制备工艺方...为解决大口径红外元件类金刚石(Diamond-Like Carbon,DLC)膜层的镀膜工艺难题,满足长焦距、大视场光学系统的技术需求,采用射频等离子增强化学气相沉积(Radio Frequency Plasma Enhanced Chemical Vapor Deposition,RF-PECVD)制备工艺方法,基于容性耦合等离子体驻波效应及趋肤效应机理,在大口径红外元件基底制备了红外类金刚石膜。通过优化改进等离子体电场均匀性,有效降低了膜层应力并提升了其可靠性及膜层厚度均匀性。依据光学薄膜元件环境试验要求进行了高温、低温及湿热等试验,试验后膜层未出现膜层起皮、褶皱及脱落现象。结果表明,大口径红外类金刚石膜具备良好抗温度冲击及腐蚀等特性,满足光学元件镀膜的正常需求,进一步拓展了大口径DLC薄膜的制备工艺能力。展开更多
硫化锌是一种典型脆性红外光学材料,在航空航天领域具有重要应用。硫化锌元件被广泛用于先进光学系统,其加工精度直接决定了元件的光学性能和先进光学系统的使役性能。设计了四因素四水平正交试验方案,开展了微激光辅助切削试验,对试验...硫化锌是一种典型脆性红外光学材料,在航空航天领域具有重要应用。硫化锌元件被广泛用于先进光学系统,其加工精度直接决定了元件的光学性能和先进光学系统的使役性能。设计了四因素四水平正交试验方案,开展了微激光辅助切削试验,对试验后表面粗糙度进行测量。通过方差分析(Analysis of Variance,ANOVA)研究了微激光辅助加工参数对硫化锌表面质量的定量影响,为硫化锌激光辅助加工工艺优化提供了基础支持。进一步基于时域有限差分法建立了粗糙度对硫化锌表面光散射特性的有限元仿真模型,通过分析不同表面形貌下硫化锌表面光场中散射光分量的能量分布,揭示了表面粗糙度与硫化锌表面散射系数的映射关系,为光学元件表面质量的光学表征提供了理论依据。开展了系统化的试验设计、仿真建模与模型分析,最终建立了“工艺参数-表面粗糙度-散射系数”的全链条预测模型,实现了微激光辅助加工参数到硫化锌表面光学散射特性的端到端预测。为航空航天红外光学系统研制提供了硫化锌元件“工艺-性能”一体化调控新方法。展开更多
In this paper,we propose an RLC equivalent circuit model theory which can accurately predict the spectral response and resonance characteristics of metamaterial absorption structures,extend its design,and characterize...In this paper,we propose an RLC equivalent circuit model theory which can accurately predict the spectral response and resonance characteristics of metamaterial absorption structures,extend its design,and characterize the parameters of the model in detail.By employing this model,we conducted computations to characterize the response wavelength and bandwidth of variously sized metamaterial absorbers.A comparative analysis with Finite Difference Time Domain(FDTD)simulations demonstrated a remarkable level of consistency in the results.The designed absorbers were fabricated using micro-nano fabrication processes,and were experimentally tested to demonstrate absorption rates exceeding 90%at a wavelength of 9.28μm.The predicted results are then compared with test results.The comparison reveals good consistency in two aspects of the resonance responses,thereby confirming the rationality and accuracy of this model.展开更多
采用磁控溅射法制备不同含量Er掺杂Sb_(2)Te_(3)硫系相变存储薄膜,并利用原子力显微镜、X射线衍射仪、X射线光电子能谱仪、分光光度计、红外椭圆偏振仪等对其形貌、结构、电学性能、光学性能等进行表征分析.结果表明:Er掺杂可以有效抑制...采用磁控溅射法制备不同含量Er掺杂Sb_(2)Te_(3)硫系相变存储薄膜,并利用原子力显微镜、X射线衍射仪、X射线光电子能谱仪、分光光度计、红外椭圆偏振仪等对其形貌、结构、电学性能、光学性能等进行表征分析.结果表明:Er掺杂可以有效抑制Sb_(2)Te_(3)结晶生长、减小晶粒尺寸,从而显著增加结晶温度、降低电阻漂移系数(从0.01590降至0.00241),提升该相变存储薄膜整体的非晶态热稳定性.此外,随着Er掺杂含量的增加,Sb_(2)Te_(3)薄膜的短波截止吸收边出现蓝移,其光学带隙从1.40 e V分别提升至1.76 e V和1.94 e V,同时其红外波段的折射率明显降低.X射线衍射数据证实:Er掺杂会细化晶粒,引起Sb_(2)Te_(3)结晶相发生晶格畸变;X射线光电子能谱分析发现:相变性能提升的内在原因是高含量Er掺杂引起高结合能的Er-Te成键,表明Er掺杂有助于提高Sb_(2)Te_(3)相变材料在光电存储器件中的数据存储可靠性.这可为相变存储器用于大规模神经形态计算的下一代存算一体技术提供材料支撑.展开更多
文摘为解决大口径红外元件类金刚石(Diamond-Like Carbon,DLC)膜层的镀膜工艺难题,满足长焦距、大视场光学系统的技术需求,采用射频等离子增强化学气相沉积(Radio Frequency Plasma Enhanced Chemical Vapor Deposition,RF-PECVD)制备工艺方法,基于容性耦合等离子体驻波效应及趋肤效应机理,在大口径红外元件基底制备了红外类金刚石膜。通过优化改进等离子体电场均匀性,有效降低了膜层应力并提升了其可靠性及膜层厚度均匀性。依据光学薄膜元件环境试验要求进行了高温、低温及湿热等试验,试验后膜层未出现膜层起皮、褶皱及脱落现象。结果表明,大口径红外类金刚石膜具备良好抗温度冲击及腐蚀等特性,满足光学元件镀膜的正常需求,进一步拓展了大口径DLC薄膜的制备工艺能力。
文摘硫化锌是一种典型脆性红外光学材料,在航空航天领域具有重要应用。硫化锌元件被广泛用于先进光学系统,其加工精度直接决定了元件的光学性能和先进光学系统的使役性能。设计了四因素四水平正交试验方案,开展了微激光辅助切削试验,对试验后表面粗糙度进行测量。通过方差分析(Analysis of Variance,ANOVA)研究了微激光辅助加工参数对硫化锌表面质量的定量影响,为硫化锌激光辅助加工工艺优化提供了基础支持。进一步基于时域有限差分法建立了粗糙度对硫化锌表面光散射特性的有限元仿真模型,通过分析不同表面形貌下硫化锌表面光场中散射光分量的能量分布,揭示了表面粗糙度与硫化锌表面散射系数的映射关系,为光学元件表面质量的光学表征提供了理论依据。开展了系统化的试验设计、仿真建模与模型分析,最终建立了“工艺参数-表面粗糙度-散射系数”的全链条预测模型,实现了微激光辅助加工参数到硫化锌表面光学散射特性的端到端预测。为航空航天红外光学系统研制提供了硫化锌元件“工艺-性能”一体化调控新方法。
基金Supported by the National Natural Science Foundation of China(62174092)the Open Fund of State Key Laboratory of Infrared Physics(SITP-NLIST-ZD-2023-04)the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0580000)。
文摘In this paper,we propose an RLC equivalent circuit model theory which can accurately predict the spectral response and resonance characteristics of metamaterial absorption structures,extend its design,and characterize the parameters of the model in detail.By employing this model,we conducted computations to characterize the response wavelength and bandwidth of variously sized metamaterial absorbers.A comparative analysis with Finite Difference Time Domain(FDTD)simulations demonstrated a remarkable level of consistency in the results.The designed absorbers were fabricated using micro-nano fabrication processes,and were experimentally tested to demonstrate absorption rates exceeding 90%at a wavelength of 9.28μm.The predicted results are then compared with test results.The comparison reveals good consistency in two aspects of the resonance responses,thereby confirming the rationality and accuracy of this model.
文摘采用磁控溅射法制备不同含量Er掺杂Sb_(2)Te_(3)硫系相变存储薄膜,并利用原子力显微镜、X射线衍射仪、X射线光电子能谱仪、分光光度计、红外椭圆偏振仪等对其形貌、结构、电学性能、光学性能等进行表征分析.结果表明:Er掺杂可以有效抑制Sb_(2)Te_(3)结晶生长、减小晶粒尺寸,从而显著增加结晶温度、降低电阻漂移系数(从0.01590降至0.00241),提升该相变存储薄膜整体的非晶态热稳定性.此外,随着Er掺杂含量的增加,Sb_(2)Te_(3)薄膜的短波截止吸收边出现蓝移,其光学带隙从1.40 e V分别提升至1.76 e V和1.94 e V,同时其红外波段的折射率明显降低.X射线衍射数据证实:Er掺杂会细化晶粒,引起Sb_(2)Te_(3)结晶相发生晶格畸变;X射线光电子能谱分析发现:相变性能提升的内在原因是高含量Er掺杂引起高结合能的Er-Te成键,表明Er掺杂有助于提高Sb_(2)Te_(3)相变材料在光电存储器件中的数据存储可靠性.这可为相变存储器用于大规模神经形态计算的下一代存算一体技术提供材料支撑.
