ZnO thin-film transistors(TFTs)with channel layers fabricated by spin-coating are demonstrated.A nano ZnO colloidal aqueous solution with zinc nitrate dissolved in it was first deposited on the ATO/ITO/glass substrate...ZnO thin-film transistors(TFTs)with channel layers fabricated by spin-coating are demonstrated.A nano ZnO colloidal aqueous solution with zinc nitrate dissolved in it was first deposited on the ATO/ITO/glass substrate by spin-coating process.The thin-film transistor with well-controlled and densely packed ZnO crystalline layer was obtained by thermal annealing the system of colloidal solution film coated ATO/ITO/glass substrate.By optimizing the fabrication conditions,the fabricated thin-film transistors exhibited superior field-effect properties,which were stable,highly transparent,n-channel and enhancement-mode with a channel mobility as large as 3.02 cm^(2)·V^(-1).s^(-1).Our method of fabricating ZnO thin-film transistors was simple,high efficiency,and feasible for the batch production with low cost.展开更多
文摘ZnO thin-film transistors(TFTs)with channel layers fabricated by spin-coating are demonstrated.A nano ZnO colloidal aqueous solution with zinc nitrate dissolved in it was first deposited on the ATO/ITO/glass substrate by spin-coating process.The thin-film transistor with well-controlled and densely packed ZnO crystalline layer was obtained by thermal annealing the system of colloidal solution film coated ATO/ITO/glass substrate.By optimizing the fabrication conditions,the fabricated thin-film transistors exhibited superior field-effect properties,which were stable,highly transparent,n-channel and enhancement-mode with a channel mobility as large as 3.02 cm^(2)·V^(-1).s^(-1).Our method of fabricating ZnO thin-film transistors was simple,high efficiency,and feasible for the batch production with low cost.
