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CVD单晶金刚石的制备及红外性能研究 被引量:2
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作者 卢灿华 刘乾坤 +4 位作者 王志涛 张国凯 陈明 曹通 朱培 《金刚石与磨料磨具工程》 CAS 北大核心 2020年第6期20-24,共5页
利用微波等离子化学气相沉积法,以H2/CH4/N2为混合气源,在CVD金刚石单晶基底上同质外延生长金刚石。在一定的甲烷浓度下,分析衬底温度对金刚石结晶质量及光学性能的影响。利用光学显微镜、扫描电子显微镜(SEM)表征金刚石单晶,得到金刚... 利用微波等离子化学气相沉积法,以H2/CH4/N2为混合气源,在CVD金刚石单晶基底上同质外延生长金刚石。在一定的甲烷浓度下,分析衬底温度对金刚石结晶质量及光学性能的影响。利用光学显微镜、扫描电子显微镜(SEM)表征金刚石单晶,得到金刚石单晶的样品颜色、内部缺陷、表面形貌等信息。对金刚石样品进行抛光处理后,使用红外傅里叶变换光谱仪对金刚石进行检测,得到红外波段的光学透过率。结果表明:在生长温度为930℃左右时金刚石的结晶质量最好,红外透过率最高,可达70%以上;略高或略低的温度均会降低其红外透过率,相对来说略高的温度下生长的金刚石结晶质量和红外性能优于低温下生长的金刚石的。N2的掺杂会导致单晶带有棕褐色,生长速率显著变快,严重降低红外波段的光学性能。 展开更多
关键词 微波等离子体 衬底温度 红外透过率 掺杂
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Grey relationship analysis and grey forecasting modeling on thermal stability of synthetic single diamond
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作者 王适 张弘弢 董海 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2006年第1期73-78,共6页
Through analyzing 7 Ib-type samples of synthetic single diamonds by their DTA and TG in air, we ascertained the extrapolated onset temperature on the curves of DTA as the characteristic temperature of their thermal st... Through analyzing 7 Ib-type samples of synthetic single diamonds by their DTA and TG in air, we ascertained the extrapolated onset temperature on the curves of DTA as the characteristic temperature of their thermal stabilities. Based on the grey system theory, we analyzed 4 factors influential in the thermal stability by the grey relationship analysis, a quantitative method, and derived the grey relationship sequence, that is, the rank of the influence extent of 4 factors on the thermal stability. Furthermore, we established the grey forecasting model, namely GM(1,5), for predicting the thermal stability of single diamonds with their intrinsic properties, which was then examined by a deviation-probability examination. The results illustrate that it is reasonable to take the Extrapolated Onset Temperature in DTA as the characteristic temperature for thermal stability (TS) of Ib-type synthetic single diamonds. The nitrogen content and grain shape regularity of diamonds are dominating factors. Likewise, grain size and compressive strength are minor factors. In addition, GM(1,5) can be used to predict the thermal stability of Ib-type synthetic single diamonds available. The precision rank of GM(1,5) is ‘GOOD’. 展开更多
关键词 synthetic single diamond thermal stability grey relationship analysis grey forecasting model
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