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移动阴极式掩膜电解加工微沟槽阵列均匀性研究 被引量:3
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作者 杜立群 温义奎 +3 位作者 关发龙 翟科 叶作彦 王超 《电化学》 CAS CSCD 北大核心 2021年第6期658-670,共13页
掩膜电解加工是一种高效率、大规模加工微结构的特种加工方法。然而,由于电流分布的边缘效应,在微结构的掩膜电解加工过程中往往存在着严重的加工尺寸不一致问题。针对这一问题,本文提出了一种移动阴极式掩膜电解加工方法。首先,利用COM... 掩膜电解加工是一种高效率、大规模加工微结构的特种加工方法。然而,由于电流分布的边缘效应,在微结构的掩膜电解加工过程中往往存在着严重的加工尺寸不一致问题。针对这一问题,本文提出了一种移动阴极式掩膜电解加工方法。首先,利用COMSOL有限元分析软件对微沟槽阵列掩膜电解加工过程中的电流分布和阳极轮廓形状进行了数值仿真。仿真结果表明,相对于常规阴极结构的掩膜电解加工,采用移动阴极结构的掩膜电解加工方法能够获得尺寸更加均匀的微沟槽阵列结构。其次,在数值仿真的基础上,开展了掩膜电解加工实验研究。实验结果表明,移动阴极式掩膜电解加工方法能够有效地改善微沟槽阵列加工的尺寸均匀性。相对于常规阴极结构的掩膜电解加工过程,移动阴极式掩膜电解加工微沟槽阵列的均匀性提高了68.3%,并且随着阴阳极间距的增大,微沟槽深度不均匀度呈现出先减小后增大的趋势。随着阴极宽度的增大,微沟槽深度不均匀度逐渐增大;随着阴极移动速度的增大,微沟槽深度不均匀度逐渐减小,仿真与实验结果趋势一致。 展开更多
关键词 移动阴极 微沟槽结构 掩膜电解加工 刻蚀均匀性
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Effects of Prior Corrosion with and Without Stress on the Mechanical Properties of 7475-T761 Aluminum Alloy 被引量:4
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作者 zuo-yan ye Dao-Xin Liu +3 位作者 Meng Yuan Xiao-Ming Zhang Zhi Yang Ming-Xia Lei 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第5期608-613,共6页
The effect of prior corrosion on the mechanical properties of 7475-T761 aluminum alloy was investigated by immersion test, stress corrosion test, cathode charge method and electrochemical polarization test. Results sh... The effect of prior corrosion on the mechanical properties of 7475-T761 aluminum alloy was investigated by immersion test, stress corrosion test, cathode charge method and electrochemical polarization test. Results show that prior corrosion in the solution with 3 wt% NaC1 and 0.5 wt% H202 leads to mechanical properties deterioration of 7475-T761 aluminum alloy. Moreover, the elongation decreases significantly. This is mainly attributed to electrochemical corrosion and hydrogen embrittlement, in which corrosion plays a major role. Tensile stress promotes the degradation of the mechanical properties by accelerating the pitting corrosion and hydrogen embrittlement. 展开更多
关键词 Prior corrosion Corrosion with stress 7475 aluminum alloy Mechanical properties Hydrogen embrittlement
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Corrosion Fatigue Behavior of 7A85 Aluminum Alloy Thick Plate in NaCl Solution 被引量:2
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作者 zuo-yan ye Dao-Xin Liu +3 位作者 Xiao-Hua Zhang Xiao-Ming Zhang Ming-Xia Lei Zhi Yang 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第8期1047-1054,共8页
The S–N curves of 7A85-T7452 aluminum alloy in laboratory air and in neutral 3.5 wt% NaCl solution were obtained by axial fatigue tests. Results show that the detrimental effect of the aggressive solution was not not... The S–N curves of 7A85-T7452 aluminum alloy in laboratory air and in neutral 3.5 wt% NaCl solution were obtained by axial fatigue tests. Results show that the detrimental effect of the aggressive solution was not noticeable at high-cyclic-stress regions, but the effect was significant at low-stress region. Corrosion fatigue mechanism was discussed by corrosion morphology analysis, fracture surface analysis and microstructure characterization. It was found that the corrosion fatigue crack commonly initialed at the localized intergranular corrosion site. TEM analysis showed that the microstructures of 7A85-T7452 aluminum alloy were characterized by fine and homogeneously distributed matrix precipitates, as well as continually distributed anodic grain boundary precipitates. The types of microstructures are the reason for its intergranular corrosion susceptibility. The corrosion fatigue process of 7A85 aluminum alloy in 3.5 wt% NaCl solution can be divided into four stages: the crack initiation stage, the stable growth stage with low and high growth rate and the final rupture stage. The sodium chloride solution mainly affected the crack initiation stage and the stable growth stage with low growth rate, and when the crack growth rate reached a threshold, the effect was reduced. 展开更多
关键词 Corrosion fatigue Intergranular corrosion Microstructure 7A85 aluminum alloy
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